| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 06/08/2000 | WO2000033045A1 Micromachined structure with deformable membrane and method for making same |
| 06/07/2000 | EP1006365A2 A comb structure using a magnetic force |
| 06/06/2000 | US6072190 Micro contact pin structure with a piezoelectric element and probe card using the same |
| 06/06/2000 | US6071819 Flexible skin incorporating mems technology |
| 06/06/2000 | US6070851 Thermally buckling linear micro structure |
| 06/02/2000 | WO2000030543A1 Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components |
| 05/31/2000 | EP1004882A2 Inertia sensor and method of fabricating the same |
| 05/31/2000 | EP1003973A1 Micro pump comprising an inlet control member for its self-priming |
| 05/31/2000 | DE19854803A1 Locally thickened metallic microstructure, for a thermally controlled micro-mirror, is produced using an organic mask layer during metal layer structuring |
| 05/30/2000 | US6069392 Microbellows actuator |
| 05/30/2000 | US6068751 Microfluidic valve and integrated microfluidic system |
| 05/25/2000 | WO2000029770A2 Parylene micro check valve and fabrication method thereof |
| 05/25/2000 | CA2350595A1 Parylene micro check valve and fabrication method thereof |
| 05/24/2000 | EP1002216A1 Microscope for compliance measurement |
| 05/18/2000 | DE19954022A1 Semiconductor sensor, e.g. a capacitive-type acceleration sensor, is designed to avoid mobile and fixed section adhesion caused by electrostatic force, liquid surface tension and/or excessive external force |
| 05/18/2000 | DE19852878A1 Micromechanical component, such as micromechanical actuator based on semiconductor |
| 05/17/2000 | EP1001440A2 Switching structure and method of fabrication |
| 05/17/2000 | EP0964649A4 Micro-mechanical system |
| 05/17/2000 | CN1253370A Mini type mechanical acceleration switch |
| 05/16/2000 | US6064081 Silicon-germanium-carbon compositions and processes thereof |
| 05/10/2000 | EP0941460B1 Process for producing micromechanical sensors |
| 05/09/2000 | US6060336 Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore |
| 05/09/2000 | US6058778 Integrated sensor having plurality of released beams for sensing acceleration |
| 05/04/2000 | DE19850066A1 Micromechanical level sensor with rotated body derives inclination angle of sensor axis with respect to vertical from deflection of accelerometer subjected to centrifugal, gravitational and spring forces |
| 05/03/2000 | EP0997920A1 Micromechanical acceleration switch |
| 05/02/2000 | US6058027 Micromachined circuit elements driven by micromachined DC-to-DC converter on a common substrate |
| 05/02/2000 | US6057520 Arc resistant high voltage micromachined electrostatic switch |
| 04/27/2000 | WO2000023376A1 Method for processing silicon using etching processes |
| 04/27/2000 | WO2000023266A1 Method of forming plastically deformable microstructures |
| 04/27/2000 | DE19847455A1 Silicon multi-layer etching, especially for micromechanical sensor production, comprises etching trenches down to buried separation layer, etching exposed separation layer and etching underlying silicon layer |
| 04/27/2000 | DE19839606C1 Mikromechanisches Bauelement und Verfahren zu dessen Herstellung Micromechanical component and method for its production |
| 04/25/2000 | US6054745 Nonvolatile memory cell using microelectromechanical device |
| 04/25/2000 | US6054335 Fabrication of scanning III-V compound light emitters integrated with Si-based actuators |
| 04/25/2000 | US6053057 Force detector |
| 04/20/2000 | WO2000022473A1 Membrane-actuated charge controlled mirror |
| 04/20/2000 | WO2000022472A1 Field emission charge controlled mirror (fea-ccm) |
| 04/20/2000 | WO2000021877A1 Micromachine and method of manufacturing the same |
| 04/20/2000 | DE19847305A1 Micromechanical device, especially an oscillating mirror, is produced by electrodepositing a device element onto a quasi-insular attachment region and an adjacent region of a bond layer |
| 04/20/2000 | CA2347726A1 Field emission charge controlled mirror (fea-ccm) |
| 04/19/2000 | EP0994330A1 Method for manufacturing an angular rate sensor |
| 04/19/2000 | EP0854968A4 Microminiature stirling cycle cryocoolers and engines |
| 04/19/2000 | CN1250871A Method for making angular rate sensor |
| 04/18/2000 | US6051866 Microstructures and single mask, single-crystal process for fabrication thereof |
| 04/18/2000 | US6051855 Electrostatic capacitive sensor |
| 04/13/2000 | WO2000020899A2 Flexible, modular, compact fiber optic switch |
| 04/11/2000 | US6048734 Thermal microvalves in a fluid flow method |
| 04/06/2000 | WO2000019161A1 Apparatus and method for controlling fluid in a micromachined boiler |
| 04/05/2000 | EP0990911A1 Micromechanical sensor based on the field effect and the use thereof |
| 04/04/2000 | US6046067 Micromechanical device and method for its production |
| 04/04/2000 | US6046066 Method of forming cantilever structure in microelectromanical system |
| 03/30/2000 | WO2000017695A1 A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
| 03/29/2000 | CN1248897A Microminiaturized minimally invasive intrascular micro-mechanical systems powered and controlled via fiber-optical cable |
| 03/22/2000 | EP0987740A1 Epitaxial layer for dissolved wafer micromachining process |
| 03/21/2000 | US6040935 Flexureless multi-stable micromirrors for optical switching |
| 03/21/2000 | US6040611 Microelectromechanical device |
| 03/16/2000 | WO2000014476A1 Measurements using tunnelling current between elongate conductors |
| 03/16/2000 | WO2000014415A2 Proportional micromechanical device |
| 03/15/2000 | EP0986082A2 Microelectromechanical device |
| 03/09/2000 | WO2000013210A2 Micromachined members coupled for relative rotation by torsional flexure hinges |
| 03/09/2000 | WO2000012987A2 Micromechanical component protected against environmental influences |
| 03/09/2000 | WO2000012428A1 Micromechanical component with sealed membrane openings |
| 03/09/2000 | WO2000012427A1 Micromechanical component and its production method |
| 03/09/2000 | DE19839122A1 Vor Umwelteinflüssen geschützter mikromechanischer Sensor Protected from environmental influences micromechanical sensor |
| 03/09/2000 | CA2340192A1 Micromachined members coupled for relative rotation by torsional flexure hinges |
| 03/08/2000 | EP0983610A1 Method and apparatus for manufacturing a micromechanical device |
| 03/08/2000 | EP0983609A1 Method for making a machined silicon micro-sensor |
| 03/08/2000 | EP0824702A4 Gimballed vibrating wheel gyroscope having strain relief features |
| 03/07/2000 | US6034810 Field emission charge controlled mirror (FEA-CCM) |
| 03/07/2000 | US6033928 Etching a silicon substrate using said dotted mask so as to form a first number of semiconductor micro-needles |
| 03/07/2000 | US6032549 Actuator, method of driving actuator, computer-readable medium for storing program processed by computer for executing driving method, and compact machine tool utilizing actuator |
| 03/01/2000 | EP0982575A2 Micromechanical structure |
| 03/01/2000 | EP0981725A1 High temperature resonant integrated microstructure sensor |
| 03/01/2000 | EP0981724A1 Opto-mechanical device |
| 03/01/2000 | EP0981710A1 Low-power thermopneumatic microvalve |
| 02/29/2000 | US6031944 High temperature resonant integrated microstructure sensor |
| 02/29/2000 | US6030850 Method for manufacturing a sensor |
| 02/29/2000 | US6030515 Producing an insulating layer only on each of the side walls of a plurality of trenches in a polymer layer; filling using an electroplating process and then removing the polymer layer without removing the insulating layer; short circuiting |
| 02/29/2000 | US6030083 Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof |
| 02/24/2000 | WO2000009440A1 Micromechanical sensor and corresponding production method |
| 02/23/2000 | EP0981052A2 Semiconductor accelerometer switch and a method of producing the same |
| 02/23/2000 | EP0980600A2 Actuators and apparatus |
| 02/23/2000 | CN1245559A Method for making micro-mechanic sensor |
| 02/23/2000 | CN1245547A Micropump with built-in intermediate part |
| 02/22/2000 | US6028343 Integrated released beam sensor for sensing acceleration and associated methods |
| 02/22/2000 | US6028009 Process for fabricating a device with a cavity formed at one end thereof |
| 02/16/2000 | EP0979992A1 Micromechanical sensor |
| 02/15/2000 | US6025767 Encapsulated micro-relay modules and methods of fabricating same |
| 02/15/2000 | US6025252 Semiconductor device and method of fabricating the same |
| 02/15/2000 | US6025209 Deep groove structure for semiconductors |
| 02/15/2000 | US6025208 Method of making electrical elements on the sidewalls of micromechanical structures |
| 02/15/2000 | US6024801 Exposing device surface in an enclosure to supercritical fluid cleaning medium, purging of libeated substances, depositing lubrication passivant, removing device |
| 02/10/2000 | WO1999036941A3 Trench isolation for micromechanical devices |
| 02/10/2000 | DE19835050A1 Micromechanical component, e.g. an acceleration or revolution speed sensor, is produced by local sacrificial oxide etching while leaving a reserve region which is removed during subsequent partial substrate removal |
| 02/09/2000 | EP0978832A2 System and method for forming electrostatically actuated data storage mechanisms |
| 02/08/2000 | US6023121 Thermal arched beam microelectromechanical structure |
| 02/08/2000 | US6021675 Resonating structure and method for forming the resonating structure |
| 02/02/2000 | EP0976005A1 Method for producing a micromechanical device |
| 02/02/2000 | CN1243576A Micromechanical semiconductor device and method for production thereof |
| 02/01/2000 | US6020272 Method for forming suspended micromechanical structures |
| 02/01/2000 | US6020215 Process for manufacturing microstructure |