Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
01/2000
01/25/2000US6016686 Micromechanical potentiometric sensors
01/20/2000DE19857946C1 Micro vibrating mirror for displays, scanners and optical monitoring systems
01/18/2000US6015988 Microstructure and methods for fabricating such structure
01/12/2000EP0870170A4 Micro-electro-mechanics systems (mems)
01/12/2000EP0700524B1 Process for producing surface micromechanical structures
01/11/2000US6013933 Semiconductor structure having a monocrystalline member overlying a cavity in a semiconductor substrate and process therefor
01/11/2000US6013573 Method of manufacturing an air bridge type structure for supporting a micro-structure
01/11/2000US6012336 Capacitance pressure sensor
01/11/2000US6012334 Vibration wave detecting method and vibration wave detector
01/05/2000EP0968526A2 Method of forming etched structures comprising implantation steps
01/05/2000EP0752159B1 Semiconductor device provided with a microcomponent having a fixed and a movable electrode
01/05/2000DE19829609A1 Micro-system, integrated on an IC chip, production
01/04/2000US6009753 Monolithic micromechanical apparatus with suspended microstructure
12/1999
12/30/1999DE19929734A1 Micro-fluid apparatus
12/29/1999CN1047904C Array of thin film actuated mirrors for use in an optics projection system and method for mfg. same
12/29/1999CN1047903C Thin film actuated mirror array for use in an optical projection system and method for manufacture thereof
12/28/1999US6008138 Process for making micromechanical structures
12/28/1999US6006606 Semiconductor acceleration sensor
12/22/1999EP0964649A1 Micro-mechanical system
12/22/1999CN1047663C Optical force tranducer based on fabry-perot resonator, with sveeping fabry-perot resonator as an element of transducing part
12/21/1999US6005275 Semiconductor acceleration sensor with cantilever
12/21/1999US6003374 Acceleration sensor and a method for its manufacture
12/14/1999US6000947 Method of fabricating transistor or other electronic device using scanning probe microscope
12/14/1999US6000676 Microvalve
12/09/1999WO1999063559A1 Micro-mechanical elements
12/08/1999CN1238029A Integrated electrically operable micro-valve
12/08/1999CN1047107C Elastmeric micro electromechanical system
12/07/1999US5998816 Sensor element with removal resistance region
12/07/1999CA2218876C Elastomeric micro electro mechanical systems
12/02/1999DE19913612C1 Producing adjustment structures in semiconducting substrates
12/01/1999EP0917652A4 Tunneling sensor with linear force rebalance
12/01/1999CN1047056C Thin film actuated mirror array and method for its manufacture
11/1999
11/30/1999US5994816 Thermal arched beam microelectromechanical devices and associated fabrication methods
11/30/1999US5994750 Microstructure and method of forming the same
11/30/1999US5994160 Forming oxide film on walls of mold; vapor deposition of diamond particles; removal substrate
11/30/1999US5994159 Self-assemblying micro-mechanical device
11/30/1999US5991990 Method for fabricating a tunneling sensor with linear force rebalance
11/25/1999WO1999045631A3 Actuators and apparatus
11/25/1999DE19821638A1 Micro-valve with valve chamber
11/23/1999US5991066 Membrane-actuated charge controlled mirror
11/23/1999US5987989 Semiconductor physical quantity sensor
11/23/1999US5987921 Method for making a semiconductor acceleration sensor
11/18/1999WO1999058860A1 Microvalve
11/18/1999WO1999058859A1 Microvalve battery
11/18/1999WO1999058841A1 Microvalve
11/17/1999EP0957509A2 Process for the fabrication of a device containing a microstructured layer
11/17/1999EP0956449A1 Microejection pump
11/17/1999CN1235658A Micro-machined device for fluids and manufacture thereof
11/16/1999US5985412 Method of manufacturing microstructures and also microstructure
11/16/1999US5984481 Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof
11/16/1999US5983721 Micromechanical component having closely spaced apart anchoring areas for a surface structure disposed thereon
11/16/1999US5983712 Microscope for compliance measurement
11/11/1999DE19921241A1 Semiconductor sensor for a dynamic parameter, e.g. an accelerometer manufacture method
11/10/1999EP0955668A2 Process for manufacture of micro electromechanical devices having high electrical isolation
11/10/1999EP0955473A1 Valve array
11/10/1999EP0954450A1 Mems valve
11/10/1999CN1234884A Miniature connector array
11/09/1999US5981308 Method for manufacturing minute silicon mechanical device
11/09/1999US5980762 Method of micromachining a semiconductor
11/04/1999DE19839123C1 Micromechanical structure for sensors or microphones
11/04/1999DE19819458A1 Micromechanical component manufacturing method for e.g. capacitive acceleration sensor
11/04/1999DE19819456A1 Micromechanical component manufacturing method, e.g. for micromechanical acceleration sensor manufacture
11/03/1999EP0799495A4 Silicon-germanium-carbon compositions and processes thereof
11/03/1999CN1234173A Method and device for positioning and retaining micro-building-blocks
10/1999
10/27/1999EP0951617A1 Micropump with a built-in intermediate part
10/27/1999EP0883442A4 Electrokinetic pumping
10/26/1999US5971355 Microdevice valve structures to fluid control
10/21/1999DE19817357A1 Micromechanical structural element, especially acceleration sensor
10/21/1999DE19817311A1 Manufacture of micromechanical component, such as rotation rate sensor
10/20/1999EP0950190A1 Micromechanical semiconductor array and method for the production thereof
10/19/1999US5970315 Particularly useful for data storage applications, isotropically etching sacrificial layer under at least a beam portion of said microelectromechanical device
10/19/1999US5969465 Adjusting operating characteristics of micromachined torsional oscillators
10/19/1999US5966787 Piezoelectric actuator,
10/12/1999US5966066 Micromechanical memory sensor
10/07/1999WO1999024783A9 Microelectromechanical positioning apparatus
10/06/1999EP0947835A2 Micromechanical component having a moving dielectric element and a method of manufacture
10/06/1999EP0946334A2 Prehensile device in shape memory material and construction process
10/05/1999US5963788 Method for integrating microelectromechanical devices with electronic circuitry
10/05/1999US5962949 Microelectromechanical positioning apparatus
10/05/1999US5962909 Microstructure suspended by a microsupport
10/05/1999US5961877 3.5-15.8 mole percent of hf; 0.2-9.7 mole percent of hno3; 34.8-82.6 mole percent of acetic acid; 12.3-46.5 mole percent of h2o; and wherein the molecular ratio of hno.sub.3 to hf is less than about 0.78.
09/1999
09/30/1999WO1999049506A1 Method and apparatus for manufacturing a micromechanical device
09/28/1999US5959516 Tunable-trimmable micro electro mechanical system (MEMS) capacitor
09/28/1999US5959338 Micro electro-mechanical systems relay
09/23/1999WO1999047908A1 Micromechanical potentiometric sensors
09/23/1999DE19812583A1 Component with micromechanical surface structures, e.g. sensor elements or micro-motor actuators, is produced
09/23/1999CA2322518A1 Micromechanical potentiometric sensors
09/21/1999US5955817 Thermal arched beam microelectromechanical switching array
09/16/1999DE19906067A1 Semiconductor sensor detecting and measuring e.g. acceleration, yaw rate or vibration
09/15/1999EP0941460A1 Process for producing micromechanical sensors
09/10/1999WO1999045631A2 Actuators and apparatus
09/08/1999EP0939973A1 Process for manufacturing micromechanical functional elements
09/08/1999EP0939862A1 Miniature valve for filling the reservoir of an apparatus for the transdermal administration of medicine
09/07/1999US5949119 Device equipped with floating rigid microstructure elements
09/07/1999US5948981 Vibrating beam accelerometer
09/01/1999EP0938738A1 Method for manufacturing a micromechanical relay
08/1999
08/31/1999US5946559 Method of forming a field effect transistor
08/24/1999US5943555 Micro mechanical component and production process thereof
08/24/1999US5942837 Highly dynamic piezo-electric drive mechanism
08/24/1999US5941079 Microminiature stirling cycle cryocoolers and engines
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