| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 10/11/2001 | US20010028756 Optical switch array using rolling shutter optical switch elements |
| 10/11/2001 | US20010028377 Ink jet printhead incorporating a backflow prevention mechanism |
| 10/11/2001 | DE10017422A1 Mikromechanisches Bauelement und entsprechendes Herstellungverfahren Micro-mechanical device and manufacturing method thereof |
| 10/10/2001 | EP1141554A1 Electrostatic/pneumatic actuators for active surfaces |
| 10/10/2001 | EP1141546A1 Piezoelectric micropump |
| 10/10/2001 | CN1317083A Method for measuring tunnelling current between elongate conductors |
| 10/09/2001 | US6300665 Structure for an optical switch on a silicon on insulator substrate |
| 10/09/2001 | US6300619 Micro-electro-mechanical optical device |
| 10/09/2001 | US6300378 Tropodegradable bromine-containing halocarbon additives to decrease flammability of refrigerants foam blowing agents solvents aerosol propellants and sterilants |
| 10/09/2001 | US6299462 Self positioning, passive MEMS mirror structures |
| 10/04/2001 | WO2001073934A2 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods |
| 10/04/2001 | WO2001073805A1 Microactuator arrangement |
| 10/04/2001 | WO2001072631A1 Fabrication and controlled release of structures using etch-stop trenches |
| 10/04/2001 | US20010026302 Actuating mechanism which includes a thermal bend actuator |
| 10/04/2001 | US20010025530 Semiconductor physical quantity sensor |
| 10/04/2001 | EP1139141A2 Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements |
| 10/04/2001 | EP1138942A2 Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams |
| 10/04/2001 | DE10029501C1 Vertical field effect transistor made from a semiconductor wafer comprises a residual transistor consisting of a source region, a channel region, a drain region, and a moving gate structure made from the semiconductor material |
| 10/04/2001 | DE10013261A1 Micromechanically manufacturable optical beam splitter has reflective aluminum coated silicon nitride membrane with dot pattern of openings |
| 09/28/2001 | CA2334794A1 Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams |
| 09/27/2001 | WO2001071409A2 Apparatus and method for two-dimensional steered-beam nxm optical switch using single-axis mirror arrays and relay optics |
| 09/27/2001 | WO2001071226A2 Thermally actuated microvalve assembly |
| 09/27/2001 | WO2001070625A2 Micromechanical component and balancing method |
| 09/27/2001 | WO2001036319A8 Method for reducing variations in arrays of micro-machined cantilever structures using ion implantation |
| 09/27/2001 | US20010024865 Method for manufacturing a thin-layer component, in particular a thin-layer high-pressure sensor |
| 09/27/2001 | US20010024711 Micromechanical component with sealed membrane openings and method of fabricating a micromechanical component |
| 09/27/2001 | DE10013904A1 Micromechanical pressure sensor has compensation resistors connected to measurement resistor for hysteresis compensation |
| 09/27/2001 | CA2332219A1 Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements |
| 09/26/2001 | EP1136790A2 Angular velocity sensor |
| 09/26/2001 | EP1136440A1 Method of improving mechanical strenghtin micro electro mechanical systems and devices produced thereof |
| 09/26/2001 | EP1135665A1 Measurements using tunnelling current between elongate conductors |
| 09/25/2001 | US6295130 Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer |
| 09/25/2001 | US6294909 Electro-magnetic lithographic alignment method |
| 09/20/2001 | WO2001069267A1 Micromechanical component |
| 09/20/2001 | WO2001068512A1 Micro-actuator and method of manufacturing the actuator |
| 09/20/2001 | US20010022541 Micro-machine switch |
| 09/20/2001 | DE10111212A1 Semiconductor sensor for physical quantity e.g. acceleration, has projections which prevent movable electrodes adhering to fixed electrodes |
| 09/20/2001 | DE10012960A1 Micromechanical component for acceleration sensor, e.g. for motor vehicle, has adjustable sensitivity since spring constant can be adjusted in steps |
| 09/19/2001 | EP1133684A1 Micromachined structure with deformable membrane and method for making same |
| 09/19/2001 | CN1313641A Multi-layer piezoelectric device and manufacture thereof |
| 09/18/2001 | US6292600 Angular-precision enhancement in free-space micromachined optical switches |
| 09/18/2001 | US6291875 Microfabricated structures with electrical isolation and interconnections |
| 09/18/2001 | US6291345 Controlled-stress stable metallization for electronic and electromechanical devices |
| 09/18/2001 | US6290859 Tungsten coating for improved wear resistance and reliability of microelectromechanical devices |
| 09/18/2001 | US6290858 Manufacturing method for a micromechanical device |
| 09/18/2001 | US6290510 Spring structure with self-aligned release material |
| 09/18/2001 | US6289717 Micromechanical antibody sensor |
| 09/13/2001 | WO2001067162A1 Rolling shutter optical switch device with latch electrode and slits in shutter |
| 09/13/2001 | WO2001067161A1 Rolling shutter optical switch device with mirror on shutter and open aperture optical port |
| 09/13/2001 | WO2001066460A1 Nanotweezers and nanomanipulator |
| 09/13/2001 | WO2000042231A8 Polycrystalline silicon germanium films for forming micro-electromechanical systems |
| 09/13/2001 | US20010021538 Micromechanical component and process for its fabrication |
| 09/13/2001 | US20010021290 Omnidirectional flex-type shape memory alloy film actuator individual, process for producing the same, and optical fiber |
| 09/13/2001 | US20010021166 Memory medium |
| 09/13/2001 | US20010021159 Method of and apparatus for recording/reproducing an information signal, recording/reproducing head device, memory medium, and head element |
| 09/13/2001 | US20010020726 Single crystal silicon sensor with high aspect ratio and curvilinear structures and associated method |
| 09/13/2001 | DE10010975A1 Micromechanical component has damping device using elastic liquid or gas medium for damping unwanted oscillation mode |
| 09/12/2001 | EP1132743A2 Micromechanical device |
| 09/11/2001 | US6288561 Method and apparatus for probing, testing, burn-in, repairing and programming of integrated circuits in a closed environment using a single apparatus |
| 09/11/2001 | US6288472 Electrostatic/pneumatic actuators for active surfaces |
| 09/11/2001 | US6287885 Method for manufacturing semiconductor dynamic quantity sensor |
| 09/07/2001 | WO2001065303A1 Rolling shutter optical switch device with dimples on shutter, annular rim at optical port and shortened shutter attachment edge |
| 09/07/2001 | WO2001065302A1 Optical switch array using rolling shutter optical switch elements |
| 09/07/2001 | WO2001065301A1 Semiconductor optoelectronic device with electrically adjustable transfer function |
| 09/06/2001 | US20010019532 Method of and apparatus for recording/reproducing an information signal, recording/reproducing head device, memory medium, and head element |
| 09/06/2001 | US20010019445 Galvano-micromirror and its manufacture process |
| 09/06/2001 | US20010019034 Parylene micro check valve and fabrication method thereof |
| 09/06/2001 | DE10005562A1 Leveling sensor for e.g. aligning laser device has acceleration measurement unit enclosed along with acceleration sensor via common frame |
| 09/05/2001 | EP1130446A2 Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods |
| 09/04/2001 | US6284567 Microsensor, and packaging method therefor |
| 09/04/2001 | US6282960 Micromachined device with enhanced dimensional control |
| 08/30/2001 | US20010017726 Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit |
| 08/30/2001 | US20010017358 Microelectromechanical valves including single crystalline material components |
| 08/30/2001 | US20010017287 Kneading sic powder, compacting, calcining, purifying, impregnating with silicon in sealed vessel provided in heating furnace body |
| 08/30/2001 | US20010017058 Micromechanical component and method for producing the micromechanical component |
| 08/30/2001 | DE10108663A1 Microswitch used in electronic devices comprises flat substrate, spring having a fixed and a free section, and a device for pressing the spring onto the substrate |
| 08/30/2001 | DE10008988A1 Production of a sensor arrangement comprises forming recesses in the upper side of a substrate and filling with different materials, applying a membrane layer on the upper side |
| 08/29/2001 | CN1310854A Micromechanical electrostatic relay and method for the production thereof |
| 08/28/2001 | US6281491 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 08/23/2001 | WO2001061848A1 A micromechanical tunable capacitor and an integrated tunable resonator |
| 08/23/2001 | US20010015106 Micromechanical sensor and method for its production |
| 08/23/2001 | US20010015018 Stylus for nanotechnology and method for manufacturing the same |
| 08/22/2001 | CN1309782A Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
| 08/22/2001 | CN1308849A Corner irrigation system |
| 08/21/2001 | US6277666 Precisely defined microelectromechanical structures and associated fabrication methods |
| 08/21/2001 | US6277438 Protective fullerene (C60) packaging system for microelectromechanical systems applications |
| 08/21/2001 | US6276207 Semiconductor physical quantity sensor having movable portion and fixed portion confronted each other and method of manufacturing the same |
| 08/16/2001 | WO2001058804A2 Micromechanical component and corresponding production method |
| 08/16/2001 | WO2001058803A2 Method for producing a micromechanical component, and a component produced according to said method |
| 08/16/2001 | WO2000041193A9 Apparatus and method for operating a micromechanical switch |
| 08/16/2001 | US20010014438 Micromachined parylene membrane valve and pump |
| 08/16/2001 | US20010014286 Piezoelectric micropump |
| 08/16/2001 | US20010013630 Isolation in micromachined single crystal silicon using deep trench insulation |
| 08/16/2001 | DE10006035A1 Micro-mechanical component production, used as sensor element or actuator element, comprises providing functional element and/or functional layer with protective layer |
| 08/16/2001 | DE10005555A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 08/14/2001 | US6275320 MEMS variable optical attenuator |
| 08/14/2001 | US6274462 Method of fabrication of an infrared radiation detector and infrared detector device |
| 08/14/2001 | US6272926 Micromechanical component |
| 08/09/2001 | WO2001057920A1 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor |
| 08/09/2001 | WO2001057901A1 Microrelay |