| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 02/03/1999 | EP0895276A1 Process for manufacturing integrated microstructures of single-crystal semiconductor material |
| 02/03/1999 | EP0895090A1 Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced |
| 02/02/1999 | US5867302 Bistable microelectromechanical actuator |
| 02/02/1999 | US5866805 Cantilevers for a magnetically driven atomic force microscope |
| 02/02/1999 | US5866021 Method of manufacturing micro-tip and female mold substrate therefor, and method of manufacturing probe with micro-tip and the probe |
| 02/02/1999 | US5865417 Integrated electrically operable normally closed valve |
| 01/28/1999 | WO1999004422A1 Fusion-bond electrical feed-through |
| 01/27/1999 | EP0893834A2 Semiconductor device comprising an aggregate of semiconductor micro-needles |
| 01/20/1999 | EP0892446A2 Method of manufacturing an aggregate of semiconductor micro-needles and method of manufacturing a semiconductor device comprising an aggregate of semiconductor micro-needles |
| 01/20/1999 | EP0892445A2 Semiconductor device comprising an aggregate of semiconductor micro-needles |
| 01/20/1999 | EP0892444A2 Semiconductor device comprising an aggregate of semiconductor micro-needles |
| 01/20/1999 | EP0817971A4 Surface jet angular rate sensor |
| 01/19/1999 | US5862003 Micromotion amplifier |
| 01/19/1999 | CA2069702C Micro-displacement element, and scanning tunneling microscope and information processing apparatus using same |
| 01/14/1999 | WO1999001688A1 Thermal microvalves |
| 01/13/1999 | EP0890978A1 Process for manufacturing high-sensitivity capacitive and resonant integrated sensors, particularly accelerometers and gyroscopes, and relative sensors |
| 01/12/1999 | US5858193 Electrokinetic pumping |
| 01/05/1999 | US5856620 Acceleration sensor |
| 12/30/1998 | EP0887867A2 Semiconductor device comprising an aggregate of semiconductor micro-needles |
| 12/30/1998 | EP0887866A2 Semiconductor device comprising an aggregate of semiconductor micro-needles |
| 12/30/1998 | EP0886781A1 Micromachined device with enhanced dimensional control |
| 12/29/1998 | US5854122 Epitaxial layer for dissolved wafer micromachining process |
| 12/23/1998 | EP0869850A4 Method of producing micro-electrical conduits |
| 12/22/1998 | US5852233 For the examination of a specimen |
| 12/17/1998 | WO1998057529A1 Microfabricated high aspect ratio device with electrical isolation and interconnections |
| 12/16/1998 | EP0883442A1 Electrokinetic pumping |
| 12/10/1998 | WO1998056035A1 Method of anodizing silicon substrate and method of producing acceleration sensor of surface type |
| 12/10/1998 | WO1998055876A1 Nonstick layer for a micromechanical component |
| 12/10/1998 | DE19817310A1 Micro-mechanical component |
| 12/08/1998 | US5847454 Electrically isolated released microstructures |
| 12/08/1998 | US5847280 Monolithic micromechanical apparatus with suspended microstructure |
| 12/08/1998 | US5846849 Microstructure and single mask, single-crystal process for fabrication thereof |
| 12/02/1998 | EP0881651A1 Threshold microswitch and a manufacturing method thereof |
| 12/02/1998 | EP0881477A2 Vibration wave detecting method and vibration wave detector |
| 12/02/1998 | EP0710370B1 Intelligent sensor for near field optical device |
| 11/26/1998 | WO1998053483A1 Method for making a machined silicon micro-sensor |
| 11/26/1998 | WO1998053236A1 Low-power thermopneumatic microvalve |
| 11/26/1998 | DE19736674C1 Micromechanical electrostatic relay |
| 11/24/1998 | US5842106 Method of producing micro-electrical conduits |
| 11/24/1998 | US5840597 Method of making a semiconductor device force and/or acceleration sensor |
| 11/24/1998 | US5840593 Membrane dielectric isolation IC fabrication |
| 11/19/1998 | WO1998052006A1 Opto-mechanical device |
| 11/18/1998 | EP0720748B1 Integrated micromechanical sensor device and process for producing it |
| 11/12/1998 | DE19719601A1 Acceleration sensor with spring-mounted seismic mass |
| 11/10/1998 | US5835975 Paper property sensing system |
| 11/10/1998 | US5835293 Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof |
| 11/10/1998 | US5834864 Magnetic micro-mover |
| 11/10/1998 | US5834334 Method of forming a multi-chip module from a membrane circuit |
| 11/10/1998 | US5834332 Micromechanical semiconductor components and manufacturing method therefor |
| 11/05/1998 | WO1998048608A2 Microbellows actuator |
| 11/04/1998 | EP0875780A2 Micro-electromechanical (MEM) optical resonator and method |
| 11/04/1998 | EP0875010A2 Method and apparatus for using an array of grating light valves to produce multicolor optical images |
| 11/04/1998 | EP0875003A1 Electromagnetic and nuclear radiation detector using micromechanical sensors |
| 11/03/1998 | US5831166 Method of non-contact micromanipulation using ultrasound |
| 11/03/1998 | US5830372 Thermal sensor/actuator in semiconductor material |
| 10/28/1998 | EP0874251A2 Process for fabricating a device having a hole at an extremity |
| 10/28/1998 | CN1197200A Measuring element and mass air flow meter therewith |
| 10/20/1998 | US5824608 Semiconductor physical-quantity sensor and method for manufacturing same |
| 10/20/1998 | US5824233 Micromechanical component with a dielectric movable structure, microsystem, and production process |
| 10/14/1998 | EP0870319A1 A method for the manufacturing of micromachined structures and a micromachined structure manufactured using such method |
| 10/14/1998 | EP0870170A2 Micro-electro-mechanics systems (mems) |
| 10/14/1998 | EP0869850A1 Method of producing micro-electrical conduits |
| 10/13/1998 | CA2111770C Information recording and reproducing apparatus for recording and reproducing information by using a probe electrode |
| 10/08/1998 | WO1998044571A1 Adjusting operating characteristics of micromachined torsional oscillators |
| 10/07/1998 | EP0869556A1 Microstructure and methods for fabricating such structure |
| 10/07/1998 | EP0869329A2 Torsion type probe and scanning probe microscope using the same |
| 10/07/1998 | CN1195190A Microstructure and methods for fabricating such structure |
| 10/06/1998 | US5817539 Production method for a micromechanical component with a movable structure |
| 09/30/1998 | EP0867702A2 Method of fabrication of an infrared radiation detector and more particularly an infrared sensitive bolometer |
| 09/30/1998 | EP0867701A1 Method of fabrication of an infrared radiation detector and more particularly an infrared sensitive bolometer |
| 09/30/1998 | EP0866919A1 Microvalve |
| 09/29/1998 | US5814554 Semiconductor device provided with a microcomponent having a fixed and a movable electrode |
| 09/23/1998 | EP0769196B1 Micromechanical component and process for producing the same |
| 09/23/1998 | CN1193927A Electrokinetic pumping |
| 09/22/1998 | US5811693 Force detector and acceleration detector and method of manufacturing the same |
| 09/17/1998 | WO1998040909A2 Method of forming etched structures comprising implantation steps |
| 09/16/1998 | EP0864094A1 Structure comprising an insulated part in a solid substrate and method for producing same |
| 09/16/1998 | EP0864074A1 Rate sensors |
| 09/15/1998 | US5808797 Method and apparatus for modulating a light beam |
| 09/15/1998 | US5807758 Chemical and biological sensor using an ultra-sensitive force transducer |
| 09/11/1998 | WO1998038931A1 Microminiaturized minimally invasive intravascular micro-mechanical systems powered and controlled via fiber-optic cable |
| 09/11/1998 | CA2283149A1 A micro-mechanical system |
| 09/09/1998 | EP0832438A4 Method and apparatus for probing, testing, burn-in, repairing and programming of integrated circuits in a closed environment using a single apparatus |
| 09/08/1998 | US5804083 Method of forming a microstructure |
| 08/25/1998 | US5798557 Packaged integrated circuit |
| 08/25/1998 | US5798283 Method for integrating microelectromechanical devices with electronic circuitry |
| 08/20/1998 | DE19648730A1 Piezoelectrically actuated micro-valve e.g. for control of gas- and liquid-flows in motor vehicle engineering fluid technology |
| 08/19/1998 | CN1191019A Method and apparatus for probing, testing, burn-in, repairing and programming of integrated circuits in a closed environment using a single apparatus |
| 08/19/1998 | CN1190788A Method of fabricating integrated microstructures of semiconductor material |
| 08/11/1998 | US5792675 Method for manufacturing an accelerometer sensor of crystalline material |
| 08/04/1998 | US5789666 Resonant sensor for determining multiple physical values |
| 08/04/1998 | US5789264 Method for manufacturing a thin film actuated mirror having a flat light reflecting surface |
| 07/30/1998 | WO1998032616A1 Mems valve |
| 07/30/1998 | WO1998032595A1 Flexible skin incorporating mems technology |
| 07/29/1998 | EP0854968A1 Microminiature stirling cycle cryocoolers and engines |
| 07/29/1998 | EP0749590A4 Thin film actuated mirror array |
| 07/23/1998 | WO1998024594A3 Prehensile device in shape memory material and construction process |
| 07/23/1998 | DE19801484A1 Measuring element for air mass meter used, e.g. in electronic fuel injection system in IC engine |
| 07/22/1998 | EP0854358A1 High sensitivity miniature pressure transducer |
| 07/21/1998 | US5784212 Method of making a support post for a micromechanical device |