| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 06/02/1993 | EP0543901A1 Monolithic accelerometer. |
| 06/01/1993 | US5216490 Bridge electrodes for microelectromechanical devices |
| 05/12/1993 | EP0540510A1 Micromechanic manipulator. |
| 05/11/1993 | US5210817 Actuator |
| 05/05/1993 | EP0540071A1 Accelerometer assembly with evaluation circuit |
| 05/05/1993 | EP0539393A1 Micro-mechanical rotational-speed sensor. |
| 04/27/1993 | US5205171 Miniature silicon accelerometer and method |
| 04/22/1993 | DE4234969A1 Electrostatic micro-transducer designed to avoid sticking of mobile electrode - including poly:silicon@ mobile electrode plate, electrode substrate, connection which elastically supports plate and stationary electrode |
| 04/07/1993 | EP0535934A1 Method of manufacturing cantilever drive mechanism, method of manufacturing probe drive mechanism, cantilever drive mechanism, probe drive mechanism and electronic device which uses the same |
| 04/06/1993 | US5199298 Wall shear stress sensor |
| 03/31/1993 | EP0534406A1 Parallel plane holding mechanism and apparatus using such a mechanism |
| 03/30/1993 | US5198390 RIE process for fabricating submicron, silicon electromechanical structures |
| 03/30/1993 | CA1315379C Radiation deflector assembly |
| 03/09/1993 | US5192395 Method of making a digital flexure beam accelerometer |
| 03/02/1993 | US5189777 Method of producing micromachined differential pressure transducers |
| 02/23/1993 | US5188983 Polysilicon resonating beam transducers and method of producing the same |
| 02/23/1993 | US5188706 Method of manufacturing an x-ray exposure mask and device for controlling the internal stress of thin films |
| 02/18/1993 | WO1993003385A1 Acceleration sensor and process for its production |
| 02/18/1993 | DE4126107A1 Beschleunigungssensor und verfahren zur herstellung Acceleration sensor and methods for preparing |
| 02/16/1993 | US5187367 Cantilever type probe, scanning tunneling microscope and information processing device equipped with said probe |
| 01/27/1993 | EP0524381A1 Microtechnical fabricated sensing device |
| 01/05/1993 | US5176358 Microstructure gas valve control |
| 12/23/1992 | WO1992022820A2 Semiconductor accelerometer and method of its manufacture |
| 12/23/1992 | EP0518997A1 Differential capacitive transducer and method of making. |
| 12/22/1992 | US5172950 Micromanipulator for gripping objects |
| 12/16/1992 | EP0518618A2 Scanning tunneling microscope with cantilever type displacement element |
| 12/15/1992 | US5172262 Spatial light modulator and method |
| 12/02/1992 | EP0516418A1 Probe-driving mechanism, production thereof, and apparatus and piezoelectric actuator employing the same |
| 12/02/1992 | EP0516380A2 Micro-displacement element for a scanning tunneling microscope |
| 12/02/1992 | EP0411003B1 Gripping device |
| 11/26/1992 | WO1992020842A1 Methods of fabricating integrated, aligned tunneling tip pairs |
| 11/24/1992 | US5166612 Micromechanical sensor employing a squid to detect movement |
| 09/29/1992 | US5151153 Multilayer element with patterns on a conveyor and etching |
| 07/14/1992 | US5129983 Diffusion a mass of silicon with a dopant and etching in a multistage process |
| 07/08/1992 | EP0478716A4 Semiconductor microactuator |
| 07/01/1992 | EP0492915A1 Cantilever probe and apparatus using the same |
| 07/01/1992 | EP0491973A1 Integrated pneumatically and electrostatically controlled scanning tunneling microscope and method of making the same |
| 06/17/1992 | EP0490486A2 Micromachined differential pressure transducers and method of producing the same |
| 04/15/1992 | EP0480471A2 Force detector and acceleration detector and method of manufacturing the same |
| 04/15/1992 | EP0480274A1 Acceleration sensing and measurement |
| 04/15/1992 | EP0395721B1 Control and detection circuitry for mass airflow sensors |
| 04/09/1992 | DE4132105A1 Prodn. of curved structure for e.g. semiconductor accelerometer - comprises two=stage anisotropic etching of wafer using different masks |
| 04/08/1992 | EP0478716A1 Semiconductor microactuator. |
| 04/08/1992 | EP0478666A1 Microfabricated microscope assembly. |
| 03/17/1992 | US5096279 Spatial light modulator and method |
| 03/11/1992 | EP0411088A4 Formation of microstructures with removal of liquid by freezing and sublimation |
| 03/05/1992 | WO1992003740A1 Monolithic accelerometer |
| 02/25/1992 | US5090254 Polysilicon resonating beam transducers |
| 02/19/1992 | EP0471511A2 Cantilever type probe and information processing device equipped with said probe |
| 02/06/1992 | WO1992001941A1 Micro-mechanical rotational-speed sensor |
| 02/05/1992 | EP0469293A1 Multi-level deformable mirror device |
| 01/28/1992 | US5083857 Multi-level deformable mirror device |
| 01/23/1992 | DE4022495A1 Mikromechanischer drehratensensor Micromechanical rotation rate sensor |
| 01/08/1992 | EP0465229A1 Micropump and process for manufacturing a micropump |
| 12/24/1991 | US5075548 Tunnel current probe moving mechanism having parallel cantilevers |
| 12/03/1991 | US5069419 Semiconductor microactuator |
| 10/29/1991 | US5061049 Spatial light modulator and method |
| 10/22/1991 | US5059556 Overcoating with silicide |
| 10/16/1991 | EP0451992A2 Detection of vibrations of a microbeam through a shell |
| 09/19/1991 | WO1991014185A1 Differential capacitive transducer and method of making |
| 06/26/1991 | EP0298107A4 Method of making and filling bags |
| 06/18/1991 | US5025346 Laterally driven resonant microstructures |
| 06/18/1991 | US5024500 Cantilever beam radiation deflector assembly |
| 05/22/1991 | EP0427930A2 Monolithic silicon membrane device and fabrication process therefor |
| 05/14/1991 | US5015850 Microfabricated microscope assembly |
| 05/07/1991 | US5013693 Semiconductors |
| 04/09/1991 | US5006749 Method and apparatus for using ultrasonic energy for moving microminiature elements |
| 04/09/1991 | CA1282867C Thin film orthogonal microsensor for air flow and method |
| 03/20/1991 | EP0417523A2 Spatial light modulator and method |
| 03/12/1991 | US4999735 Differential capacitive transducer and method of making |
| 02/26/1991 | US4996627 High sensitivity miniature pressure transducer |
| 02/06/1991 | EP0411088A1 Formation of microstructures with removal of liquid by freezing and sublimation. |
| 02/06/1991 | EP0411003A1 Gripping device. |
| 01/10/1991 | WO1991000464A1 Semiconductor microactuator |
| 12/27/1990 | WO1990015986A1 Microfabricated microscope assembly |
| 12/18/1990 | US4978421 Masking one side of a wafer, removal of undoped silicon to expose doped silicon membrane on the opposite side |
| 11/07/1990 | EP0395721A1 Control and detection circuitry for mass airflow sensors. |
| 09/26/1990 | EP0389198A2 Method of manufacturing an X-ray exposure mask and device for controlling the internal stress of thin films |
| 09/26/1990 | EP0389071A2 Method for fabricating semiconductor diaphragms |
| 09/25/1990 | US4959515 Micromechanical electric shunt and encoding devices made therefrom |
| 09/11/1990 | US4956619 Spatial light modulator |
| 08/23/1990 | WO1990009677A1 Formation of microstructures with removal of liquid by freezing and sublimation |
| 06/14/1990 | WO1990006587A1 Micromechanic manipulator |
| 06/13/1990 | DE3841557A1 Mikromechanischer manipulator Micromechanical manipulator |
| 04/25/1990 | EP0270625B1 Silicon-integrated pick-up for measuring mechanical magnitudes, and method of fabrication |
| 04/03/1990 | US4914742 Thin film orthogonal microsensor for air flow and method |
| 01/16/1990 | US4893509 Method and product for fabricating a resonant-bridge microaccelerometer |
| 12/05/1989 | US4884443 Control and detection circuitry for mass airflow sensors |
| 11/02/1989 | WO1989010243A1 Gripping device |
| 10/17/1989 | US4873868 Force measurement sensor integrated on silicon, and a method of manufacture |
| 10/05/1989 | WO1989009477A1 Micromechanical device |
| 10/05/1989 | DE3809597A1 Mikromechanisches stellelement Micromechanical adjusting element |
| 10/03/1989 | US4870745 Methods of making silicon-based sensors |
| 06/29/1989 | WO1989005968A1 Silicon-based sensors and method of making same |
| 06/29/1989 | WO1989005967A1 Control and detection circuitry for mass airflow sensors |
| 06/14/1989 | EP0319871A1 Thin film orthogonal microsensor for air flow and method for its fabrication |
| 06/13/1989 | US4838088 Pressure transducer and method for fabricating same |
| 04/18/1989 | CA1252918A1 Scanning tunneling microscope |
| 03/21/1989 | CA1251338A1 Directional accelerometer and its microlithographic fabrication process |
| 01/11/1989 | EP0298107A1 Method of making and filling bags |