| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 11/29/2001 | CA2408353A1 Valve for use in microfluidic structures |
| 11/28/2001 | EP1157396A1 Variable capacitor and associated fabrication method |
| 11/27/2001 | US6323483 High bandwidth recoiless microactuator |
| 11/22/2001 | WO2001088594A2 A mems mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabrication |
| 11/22/2001 | WO2001088525A1 Structurally programmable microfluidic systems |
| 11/22/2001 | WO2001088371A2 Micro pump |
| 11/22/2001 | WO2001087767A2 Micro-electrocmechamical sensor (mems) resonator |
| 11/22/2001 | WO2001087766A2 Apparatus and method for controlled cantilever motion through torsional beams and a counterweight |
| 11/22/2001 | WO2001087765A2 Micromechanical component and method for producing the same |
| 11/22/2001 | WO2001087458A1 Magnetic bead-based arrays |
| 11/22/2001 | US20010044225 Method for forming microelectronic spring structures on a substrate |
| 11/22/2001 | US20010044194 Bonded substrate structures and method for fabricating bonded substrate structures |
| 11/22/2001 | US20010043545 Method of recording/reproducing an information signal |
| 11/22/2001 | US20010043386 Optical beam steering switching system |
| 11/22/2001 | DE10024698A1 Micromechanical component, has seismic weight with deflection stop, flexural spring device laterally attached to seismic weight, second stop for restricting bending of flexural spring device |
| 11/22/2001 | DE10024697A1 Manufacturing micromechanical component, involves providing sensor structure with trenches of width not greater than determined maximum width closable by closure layer bulges |
| 11/22/2001 | DE10024266A1 Micromechanical component used as a pressure sensor comprises a semiconductor functional layer on a substrate, a hollow chamber arranged between the substrate and the functional layer, and distance spacers arranged on the substrate |
| 11/21/2001 | EP1156499A1 Microelectronic part of the type of a variable capacitor or a microswitch |
| 11/21/2001 | EP1155442A1 Multilayer structure with controlled internal stresses and method for making same |
| 11/20/2001 | US6321010 Optical microstructure and method of manufacture |
| 11/20/2001 | US6319729 Method for manufacturing an angular rate sensor |
| 11/20/2001 | US6318177 Micromechanical component and method for producing the micromechanical component |
| 11/15/2001 | US20010041257 Ultrafine particle structure and production method thereof |
| 11/15/2001 | US20010040675 Method for forming a micromechanical device |
| 11/15/2001 | US20010040250 Electronic microcomponent of the variable capacitor or microswitch type, and process for fabricating such a component |
| 11/15/2001 | CA2348107A1 Variable capacity electronic microcomponent or microswitch or process for fabricating such a component |
| 11/14/2001 | EP1153405A1 Electronic devices including micromechanical switches |
| 11/14/2001 | CN1322282A Proportional micromechanical device |
| 11/13/2001 | US6316796 Single crystal silicon sensor with high aspect ratio and curvilinear structures |
| 11/13/2001 | US6315423 Micro machined mirror |
| 11/13/2001 | US6314823 Force detector and acceleration detector and method of manufacturing the same |
| 11/08/2001 | WO2001083363A1 Improved thermal bend actuator |
| 11/08/2001 | US20010038598 Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever |
| 11/08/2001 | US20010038403 Nozzle arrangement that includes a thermal actuator for an ink jet printhead |
| 11/07/2001 | EP1152245A2 Micromachined mechanical structure and device using the same |
| 11/06/2001 | US6314057 Micro-machined ultrasonic transducer array |
| 11/06/2001 | US6312959 Method using photo-induced and thermal bending of MEMS sensors |
| 11/01/2001 | WO2001082479A2 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus |
| 11/01/2001 | WO2001082478A2 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices |
| 11/01/2001 | WO2001082477A2 Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator |
| 11/01/2001 | WO2001082476A2 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus |
| 11/01/2001 | WO2001082475A2 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device |
| 11/01/2001 | WO2001082467A2 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices |
| 11/01/2001 | US20010034938 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
| 11/01/2001 | CA2406543A1 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices |
| 11/01/2001 | CA2406518A1 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices |
| 11/01/2001 | CA2406223A1 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus |
| 11/01/2001 | CA2406176A1 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus |
| 10/31/2001 | EP1150318A1 Micromachine switch and its production method |
| 10/31/2001 | EP1149393A1 Apparatus and method for operating a micromechanical switch |
| 10/31/2001 | DE10019408A1 Field-effect transistor (FET), esp. for application as sensor or acceleration sensor, has at least one drain zone and one source zone separated from one another via at least one channel zone |
| 10/31/2001 | CN1319943A Executive mechanism containing alternate active and reverse section spiral structure and relative method thereof |
| 10/31/2001 | CN1319558A Microelectronic mechanical system on heater moved with hot started beam, and the beam |
| 10/31/2001 | CN1319557A Electromechanic apparatus with brake assembly for controlling optical shutter and moveable element moving |
| 10/30/2001 | US6310419 Resistor array devices including switch contacts operated by microelectromechanical actuators and methods for fabricating the same |
| 10/30/2001 | US6310339 Optically controlled MEM switches |
| 10/30/2001 | US6309975 Methods of making implanted structures |
| 10/30/2001 | US6309189 Micropump with a built-in intermediate part |
| 10/30/2001 | US6308631 Mems vertical to horizontal motion translation device |
| 10/30/2001 | US6308573 3-Dimensional comb structure and actuator and inertia detection sensor both using the comb structure |
| 10/30/2001 | US6308567 Angular velocity sensor |
| 10/28/2001 | CA2344728A1 Micro-machined mechanical structure and device incorporating the structure |
| 10/25/2001 | WO2001080286A2 Deposited thin films and their use in separation and sarcrificial layer applications |
| 10/25/2001 | WO2001080266A1 Method and arrangement for controlling micromechanical element |
| 10/25/2001 | WO2001079903A1 Optical switch with mobile components and method for making same |
| 10/25/2001 | WO2000042231A9 Polycrystalline silicon germanium films for forming micro-electromechanical systems |
| 10/25/2001 | US20010034076 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor |
| 10/25/2001 | US20010033796 Microfabricated elastomeric valve and pump sysems |
| 10/25/2001 | US20010033708 Rolling shutter optical switch device with dimples on shutter, annular rim at optical port and shortened shutter attachment edge |
| 10/25/2001 | US20010032509 Acceleration sensor and process for the production thereof |
| 10/25/2001 | CA2406214A1 Deposited thin films and their use in separation and sarcrificial layer applications |
| 10/25/2001 | CA2406186A1 Method and arrangement for controlling micromechanical element |
| 10/24/2001 | EP1148561A2 Piezoelectric/electrostrictive film type elements and process for producing the same |
| 10/23/2001 | US6307452 Folded spring based micro electromechanical (MEM) RF switch |
| 10/23/2001 | US6307298 Actuator and method of manufacture |
| 10/23/2001 | US6307169 Micro-electromechanical switch |
| 10/23/2001 | US6306773 Method of producing a semiconductor device of SiC |
| 10/18/2001 | WO2001078448A1 Method of manufacturing a membrane sensor |
| 10/18/2001 | WO2001078096A2 Magnetically actuated microelectromechanical systems actuator |
| 10/18/2001 | WO2001077640A2 Methods and devices for storing and dispensing liquids |
| 10/18/2001 | WO2001077009A1 Micromechanical component and method for producing the same |
| 10/18/2001 | WO2001077008A1 Micromechanical component and corresponding production method |
| 10/18/2001 | WO2001077007A1 Mechanical landing pad formed on the underside of a mems device |
| 10/18/2001 | WO2001077001A2 Microelectromechanical apparatus for elevating and tilting a platform |
| 10/18/2001 | WO2000058729B1 Micromechanical antibody sensor |
| 10/18/2001 | US20010029983 Microfabricated elastomeric valve and pump systems |
| 10/18/2001 | DE10017976A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 10/18/2001 | DE10015598A1 Mikroaktoranordnung Micro actuator |
| 10/18/2001 | DE10014984A1 Herstellungsverfahren für ein Dünnschicht-Bauelement, insbesondere einen Dünnschicht-Hochdrucksensor Manufacturing method for a thin-film component, in particular a thin-film high-pressure sensor |
| 10/17/2001 | EP1146533A1 Micromachine switch and its production method |
| 10/17/2001 | EP1146532A2 Method and arrangement for controlling micromechanical element |
| 10/17/2001 | EP1145417A1 Polymer microactuator array with macroscopic force and displacement |
| 10/17/2001 | EP1144973A1 Method of producing calibration structures in semiconductor substrates |
| 10/17/2001 | EP1144890A2 Parylene micro check valve and fabrication method thereof |
| 10/16/2001 | US6301963 Microgyroscope having inner and outer mass parts |
| 10/12/2001 | CA2305069A1 Micromachined element and method of fabrication thereof |
| 10/11/2001 | WO2001074707A2 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods |
| 10/11/2001 | WO2001074706A1 Resistor array devices including switch contacts operated by microelectromechanical actuators and methods for fabricating the same |
| 10/11/2001 | WO2001014248A3 Assembly process for delicate silicon structures |
| 10/11/2001 | US20010029060 Method for manufacturing semiconductor dynamic quantity sensor |