| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 10/10/2000 | US6129331 Low-power thermopneumatic microvalve |
| 10/10/2000 | US6128961 Micro-electro-mechanics systems (MEMS) |
| 10/10/2000 | US6128953 Dynamical quantity sensor |
| 10/05/2000 | WO2000058729A2 Micromechanical antibody sensor |
| 10/05/2000 | WO2000058688A1 Detection of chemicals using photo-induced and thermal bending in mems sensors |
| 10/04/2000 | EP1041707A2 Optical cross-connect switch using electrostatic surface actuators |
| 10/04/2000 | EP1041036A1 Micromachine and method of manufacturing the same |
| 10/03/2000 | US6127908 Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same |
| 10/03/2000 | US6127765 Micro-electromechanical device |
| 10/03/2000 | US6126765 Method of producing microchannel/microcavity structures |
| 09/28/2000 | WO2000057194A1 Dynamically balanced microelectromechanical devices |
| 09/28/2000 | CA2365986A1 Cantilevered microstructure methods and apparatus |
| 09/27/2000 | EP1039529A1 Method for manufacturing a microintegrated structure with buried connections, in particular an integrated microactuator for a hard-disk drive unit |
| 09/26/2000 | US6124650 Non-volatile MEMS micro-relays using magnetic actuators |
| 09/26/2000 | US6124632 Monolithic silicon mass flow control structure |
| 09/26/2000 | US6124148 Method of manufacturing semiconductor acceleration sensor |
| 09/26/2000 | US6124145 Microfabrication of gas-filled chambers made from silicon and/or glass wafers using anodic and/or fusion bonding |
| 09/26/2000 | US6122961 Micromachined gyros |
| 09/26/2000 | CA2097668C Movement actuator/sensor systems |
| 09/21/2000 | WO2000055918A1 Flash memory cell having a flexible element |
| 09/21/2000 | WO2000055666A1 Very large angle integrated optical scanner made with an array of piezoelectric monomorphs |
| 09/21/2000 | WO2000055089A1 A method of manufacturing a thermal bend actuator |
| 09/21/2000 | CA2328201A1 Very large angle integrated optical scanner made with an array of piezoelectric monomorphs |
| 09/20/2000 | EP1036433A1 Electrostatic microactuators, active three-dimensional microcatheters using same and method for making same |
| 09/19/2000 | US6121552 Microfabricated high aspect ratio device with an electrical isolation trench |
| 09/19/2000 | US6119520 Method for manufacturing a vibrating beam accelerometer |
| 09/14/2000 | WO2000054312A1 Ic-compatible parylene mems technology and its application in integrated sensors |
| 09/14/2000 | WO2000023266A9 Method of forming plastically deformable microstructures |
| 09/12/2000 | US6118124 Electromagnetic and nuclear radiation detector using micromechanical sensors |
| 09/12/2000 | US6116756 Monolithic scanning light emitting devices |
| 09/06/2000 | CN1265451A Semiconductor device, microdrive, microvalve and microrelay using the same and manufacture thereof |
| 09/05/2000 | US6114794 Thermal arched beam microelectromechanical valve |
| 09/05/2000 | US6114044 Constructing low surface energy film on micromachine in liquid based process, rinsing with high surface energy liquid which is displaced when machine is removed, drying it |
| 08/31/2000 | WO2000050337A1 Temperature compensated microelectromechanical structures and methods of compensating the effects of ambient temperature variations |
| 08/31/2000 | WO2000013210A9 Micromachined members coupled for relative rotation by torsional flexure hinges |
| 08/31/2000 | CA2327820A1 Temperature compensated microelectromechanical structures and related methods |
| 08/29/2000 | US6109106 Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced |
| 08/24/2000 | WO2000048938A1 Thermal bend actuator and paddle structure for ink jet nozzle |
| 08/23/2000 | EP1029218A1 Microelectromechanical positioning apparatus |
| 08/22/2000 | US6106734 Micromachine manufacture using gas beam crystallization |
| 08/17/2000 | WO2000048238A1 Multilayer structure with controlled internal stresses and method for making same |
| 08/16/2000 | EP1028466A1 Method for manufacturing integrated devices including electromechanical microstructures, without residual stress |
| 08/15/2000 | US6104073 Semiconductor integrated capacitive acceleration sensor and relative fabrication method |
| 08/15/2000 | US6103399 Method for the manufacturing of micromachined structures and a micromachined structure manufactured using such method |
| 08/10/2000 | WO2000046852A1 Micro-relay |
| 08/10/2000 | WO2000029770A3 Parylene micro check valve and fabrication method thereof |
| 08/10/2000 | CA2361756A1 Micro-relay |
| 08/09/2000 | EP0875003A4 Electromagnetic and nuclear radiation detector using micromechanical sensors |
| 08/08/2000 | US6100524 Torsion type probe and scanning probe microscope using the same |
| 08/08/2000 | US6100109 Method for producing a memory device |
| 08/08/2000 | US6100107 Microchannel-element assembly and preparation method thereof |
| 08/03/2000 | DE19844676C1 Mikromechanischer Sensor auf Basis des Feldeffekts und dessen Verwendung Micromechanical sensor based on the field effect and its use |
| 08/03/2000 | DE10003066A1 Semiconductor sensor, e.g. an acceleration, yaw rate or vibration sensor, has electrical insulators between a frame portion and a mobile or stationary electrode |
| 08/01/2000 | US6096149 Method for fabricating adhesion-resistant micromachined devices |
| 07/26/2000 | EP1021815A1 Micromechanical electrostatic relay and method for the production thereof |
| 07/26/2000 | EP0813675B1 Magnetic modulation of force sensor for ac detection in an atomic force microscope |
| 07/25/2000 | US6094289 Method and apparatus for optical code reading using a MEM optical resonator having an integral photodetector |
| 07/25/2000 | US6094102 Frequency synthesizer using micro electro mechanical systems (MEMS) technology and method |
| 07/25/2000 | US6093330 Microfabrication process for enclosed microstructures |
| 07/25/2000 | US6092423 Tunnel pick-off vibrating rate sensor |
| 07/20/2000 | WO2000042231A2 Polycrystalline silicon germanium films for forming micro-electromechanical systems |
| 07/20/2000 | WO2000020899A3 Flexible, modular, compact fiber optic switch |
| 07/20/2000 | DE10001361A1 Inertial microsensor, e.g. an acceleration sensor or gyroscope, is produced by thinning a thick silicon layer bonded to a glass substrate, forming the sensor structure and etching the glass to form a vacuum space below the structure |
| 07/19/2000 | EP1020984A2 A 3-dimensional comb structure |
| 07/19/2000 | EP0824381B1 Elastomeric micro electromechanical systems |
| 07/18/2000 | US6091537 Electro-actuated microlens assemblies |
| 07/18/2000 | US6091125 Micromechanical electronic device |
| 07/18/2000 | US6090638 Process for manufacturing high-sensitivity capacitive and resonant integrated sensors, particularly accelerometers and gyroscopes, and sensors made therefrom |
| 07/13/2000 | WO2000041193A1 Apparatus and method for operating a micromechanical switch |
| 07/12/2000 | EP1018145A2 Microbellows actuator |
| 07/11/2000 | US6087747 Microelectromechanical beam for allowing a plate to rotate in relation to a frame in a microelectromechanical device |
| 07/11/2000 | US6087197 Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same |
| 07/06/2000 | WO2000039914A1 Polymer microactuator array with macroscopic force and displacement |
| 07/06/2000 | WO2000039467A1 Electrostatic/pneumatic actuators for active surfaces |
| 07/06/2000 | WO2000039463A1 Piezoelectric micropump |
| 07/06/2000 | WO2000014415A3 Proportional micromechanical device |
| 07/06/2000 | DE19962650A1 Oberflächenkleinstgerät Surface micro device |
| 07/05/2000 | EP1016135A1 Fusion-bond electrical feed-through |
| 07/05/2000 | CN1258826A Moving slender pipe and method for producing the same pipe |
| 06/29/2000 | WO2000038209A1 Micromachine switch and its production method |
| 06/29/2000 | WO2000038208A1 Micromachine switch and its production method |
| 06/28/2000 | EP1012890A4 Adjusting operating characteristics of micromachined torsional oscillators |
| 06/28/2000 | EP1012890A1 Adjusting operating characteristics of micromachined torsional oscillators |
| 06/27/2000 | US6080944 Acceleration actuated microswitch |
| 06/22/2000 | WO2000036452A1 Deflectable micro-mirror |
| 06/22/2000 | WO2000036383A1 Method of producing calibration structures in semiconductor substrates |
| 06/22/2000 | WO2000012987A3 Micromechanical component protected against environmental influences |
| 06/21/2000 | EP1011130A1 Method of anodizing silicon substrate and method of producing acceleration sensor of surface type |
| 06/21/2000 | EP1010440A2 Active slender tubes and method of making the same |
| 06/21/2000 | EP1010361A1 Microfabricated high aspect ratio device with electrical isolation and interconnections |
| 06/21/2000 | EP1009971A2 Micromachined gyros |
| 06/20/2000 | US6078016 Semiconductor accelerometer switch |
| 06/20/2000 | US6076408 Fluid pressure measuring apparatus for measuring pressure by using element for providing pressure |
| 06/15/2000 | WO2000013210A3 Micromachined members coupled for relative rotation by torsional flexure hinges |
| 06/15/2000 | DE19959369A1 Angular speed sensor e.g. for motor vehicle has several symmetrical movable parts displaceable about defined point, with detectors sensing displacement |
| 06/14/2000 | EP1008161A1 Thermal arched beam microelectromechanical devices and associated fabrication methods |
| 06/14/2000 | EP1007873A1 Thermal microvalves |
| 06/14/2000 | EP0938738B1 Method for manufacturing a micromechanical relay |
| 06/13/2000 | US6075585 Vibrating probe for a scanning probe microscope |
| 06/13/2000 | US6074890 Method of fabricating suspended single crystal silicon micro electro mechanical system (MEMS) devices |