| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 04/04/2001 | EP1089109A2 Mems variable optical attenuator |
| 04/04/2001 | EP1088785A1 Fabrication process for a three- dimensional suspended microstructure, an integrated microstructure obtained by this process and an adjustable integrated micro-optical element |
| 04/04/2001 | EP1088250A1 Very large angle integrated optical scanner made with an array of piezoelectric monomorphs |
| 04/04/2001 | CN1064135C Thin film actuated mirror array |
| 04/03/2001 | US6212056 Micromachined variable capacitor |
| 04/03/2001 | US6211598 In-plane MEMS thermal actuator and associated fabrication methods |
| 04/03/2001 | US6211532 Microprobe chip for detecting evanescent waves probe provided with the microprobe chip and evanescent wave detector, nearfield scanning optical microscope, and information regenerator provided with the microprobe chip |
| 04/03/2001 | US6210988 Polycrystalline silicon germanium films for forming micro-electromechanical systems |
| 04/03/2001 | US6210046 Fiber optic connector with micro-alignable lens having autofocus feature and associated fabrication method |
| 04/03/2001 | US6209402 Measuring element, mass air flow meter therewith and compensating method for accurately measuring air flow |
| 03/29/2001 | WO2001022468A1 High bandwidth recoiless microactuator |
| 03/29/2001 | DE10046958A1 Capacitive device for detecting physical value, has C/V converter that produces output voltage in accordance with change in capacitive element which is defined between movable electrode with integral spring and fixed electrode |
| 03/28/2001 | EP1087445A1 Inertia force sensor and method for producing inertia force sensor |
| 03/28/2001 | EP0914564B1 Piezo-electrically actuated microvalve |
| 03/22/2001 | WO2001020948A2 Mems digital-to-acoustic transducer with error cancellation |
| 03/22/2001 | WO2001020616A1 Magnetic sensing of motion in microfabricated devices |
| 03/22/2001 | WO2001020166A1 Dual diaphragm pump |
| 03/22/2001 | WO2001019723A1 Three-dimensional suspended integrated microstructure and method for making same |
| 03/22/2001 | DE19941701A1 Manufacturing method for cantilevered structure used for sensor application involves plasma etching of substrate in window region over portion of substrate thickness in front of support or functional layer |
| 03/22/2001 | CA2384993A1 Dual diaphragm pump |
| 03/21/2001 | EP1085219A2 In-plane MEMS thermal actuator and associated fabrication methods |
| 03/21/2001 | EP1084392A1 Micromechanical potentiometric sensors |
| 03/20/2001 | US6204544 Laterally movable gate field effect transistors for microsensors and microactuators |
| 03/20/2001 | US6204085 Reduced deformation of micromechanical devices through thermal stabilization |
| 03/20/2001 | US6203715 Method for the manufacture of a thin film actuated mirror array |
| 03/15/2001 | WO2001018866A1 Strongly textured atomic ridges and dots |
| 03/15/2001 | DE19941042A1 Verfahren zur Herstellung oberflächenmikromechanischer Strukturen durch Ätzung mit einem dampfförmigen, flußsäurehaltigen Ätzmedium A process for producing surface micromechanical structures by etching with a vapor, hydrofluoric acid etching medium |
| 03/15/2001 | DE19938055A1 Aktorbauglied für einen Mikrozerstäuber und Verfahren zu seiner Herstellung Actuator component for a microatomizer and process for its preparation |
| 03/14/2001 | EP1083430A1 Semiconductor integrated inertial sensor with calibration microactuator |
| 03/14/2001 | EP1083144A1 Micro-electromechanical structure insensitive to mechanical stresses. |
| 03/14/2001 | EP1082740A1 Micro-mechanical elements |
| 03/13/2001 | US6199874 Microelectromechanical accelerometer for automotive applications |
| 03/13/2001 | CA2317246A1 In-plane mems thermal actuator and associated fabrication methods |
| 03/08/2001 | DE19935819A1 Relais und Verfahren zu dessen Herstellung Relay and process for its preparation |
| 03/08/2001 | DE10036106A1 Semiconductor acceleration sensor, has independent electrical connection wiring sections arranged at opposite edge of support substrate, which supports counter electrodes, respectively |
| 03/08/2001 | DE10010020A1 Fluid flow sensor has heat connection film between a heat emitting unit and thermosensitive elements |
| 03/07/2001 | EP1081722A2 Electromagnetic actuator, its manufacturing method, and optical scanner using the same electromagnetic actuator |
| 03/07/2001 | EP1081391A2 Microelectromechanical valve having single crystalline components and associated fabrication method |
| 03/07/2001 | EP1081093A2 Process for the fabricaiton of micromechanical shallow structures by etching with a vapour phase medium containing hydrofluoric acid |
| 03/06/2001 | US6198180 Micromechanisms with floating pivot |
| 03/06/2001 | US6198098 Microstructure for infrared detector and method of making same |
| 03/06/2001 | US6197655 Method for manufacturing integrated structures including removing a sacrificial region |
| 03/06/2001 | US6197610 Method of making small gaps for small electrical/mechanical devices |
| 03/01/2001 | WO2001014842A1 Semiconductor pressure sensor and pressure sensing device |
| 03/01/2001 | WO2001014823A1 Apparatus and method for visually identifying micro-forces with a palette of cantilever array blocks |
| 03/01/2001 | WO2001014248A2 Assembly process for delicate silicon structures |
| 03/01/2001 | DE19934174C1 Verfahren zur Herstellung einer Torsionsfeder A process for producing a torsion spring |
| 03/01/2001 | CA2376325A1 Apparatus and method for visually identifying micro-forces with a palette of cantilever array blocks |
| 03/01/2001 | CA2317069A1 Microelectromechanical valve having single crystalline components and associated fabrication method |
| 02/28/2001 | EP1079435A1 Process for manufacturing integrated sensors |
| 02/28/2001 | EP1078167A1 Microvalve |
| 02/27/2001 | US6194722 Method of fabrication of an infrared radiation detector and infrared detector device |
| 02/27/2001 | US6192757 Monolithic micromechanical apparatus with suspended microstructure |
| 02/22/2001 | WO2001012340A1 Actuator component for a microspray and its production process |
| 02/22/2001 | DE19939318A1 Procedure for production of micro-mechanical structures such as rotation sensors has extra protective layer deposition and etching steps to protect the structure during processing of the reverse side of the substrate |
| 02/21/2001 | EP1076767A1 Microvalve |
| 02/20/2001 | US6191671 Apparatus and method for a micromechanical electrostatic relay |
| 02/20/2001 | US6191518 Microactuator and method of manufacturing the same |
| 02/15/2001 | WO2001011411A1 Microelectromechanical optical switch and method of manufacture thereof |
| 02/15/2001 | WO2000067537A3 Conservatively printed displays and methods relating to same |
| 02/15/2001 | DE19938206A1 Micro-mechanical rotational acceleration sensor has an oscillating mass fixed at its center with an array of differential measurement capacitors for determination of acceleration directly rather than using time differentiation |
| 02/14/2001 | EP1075602A1 Microvalve battery |
| 02/14/2001 | EP1075452A1 Temperature compensated microelectromechanical structures and methods of compensating the effects of ambient temperature variations |
| 02/14/2001 | EP0685864B1 Planar solenoid relay and production method thereof |
| 02/13/2001 | US6188301 Switching structure and method of fabrication |
| 02/13/2001 | US6187607 Manufacturing method for micromechanical component |
| 02/08/2001 | WO2001009911A1 Microelectromechanic relay and method for the production thereof |
| 02/08/2001 | WO2001009653A1 Opto-mechanical valve and valve array for fiber-optic communication |
| 02/08/2001 | WO2001009579A1 Thermal isolation using vertical structures |
| 02/08/2001 | CA2387251A1 Microelectromechanic relay and method for the production thereof |
| 02/08/2001 | CA2379936A1 Opto-mechanical valve and valve array for fiber-optic communication |
| 02/06/2001 | US6184608 Polymer microactuator array with macroscopic force and displacement |
| 02/06/2001 | US6184052 Process for manufacturing high-sensitivity capacitive and resonant integrated sensors, particularly accelerometers and gyroscopes, and sensors made therefrom |
| 02/06/2001 | US6184051 Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced |
| 02/01/2001 | WO2001007945A1 Flexible, modular, compact fiber optic switch improvements |
| 02/01/2001 | WO2001007869A1 Method for producing a torsion spring |
| 02/01/2001 | DE19933418A1 Micromechanical components fabrication method, involves forming structuring layer on substrate and subsequent etching of sacrificial layer |
| 02/01/2001 | DE10031569A1 Highly miniaturized relay in integrated circuit form, providing reliable operation and high isolation at high frequencies, includes see-saw mounted plate alternately closing contacts on substrate when rocked |
| 02/01/2001 | CA2379822A1 Flexible, modular, compact fiber optic switch improvements |
| 01/30/2001 | US6180428 Monolithic scanning light emitting devices using micromachining |
| 01/30/2001 | US6179586 Dual diaphragm, single chamber mesopump |
| 01/30/2001 | US6179584 Microejector pump |
| 01/25/2001 | WO2001006543A2 Microelectromechanical device with moving element |
| 01/25/2001 | WO2001005701A1 Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
| 01/25/2001 | DE10035605A1 Semiconductor sensor for physical parameter e.g. acceleration sensor or angular velocity sensor, has base region coupled to oscillator via support bridge region with 2 parallel support bridges and transverse bridge |
| 01/25/2001 | CA2379537A1 Microelectromechanical device with moving element |
| 01/24/2001 | CN1061203C Array of thin film actuated mirror and method for manufacture thereof |
| 01/23/2001 | US6178033 Micromechanical membrane tilt-mirror switch |
| 01/23/2001 | US6177706 Field-effect thin-film transistor device |
| 01/23/2001 | US6177291 Method of making aggregate of semiconductor micro-needles |
| 01/18/2001 | WO2001004680A1 Micro-machined mirror device |
| 01/18/2001 | WO2001004638A1 Merged-mask micro-machining process |
| 01/18/2001 | DE19932541A1 Production of a membrane used in sensors comprises applying an n-doped epitaxial layer on the front side of a p-doped silicon substrate, and etching a recess in the rear side of the substrate |
| 01/18/2001 | DE19932308A1 Sensor for measuring radiation and currents has a membrane layer spaced from a silicon body using contact columns |
| 01/18/2001 | CA2714788A1 Merged-mask micro-machining process |
| 01/17/2001 | EP1069552A1 Process for assembling a microactuator and a transducer in a hard disk R/W unit |
| 01/16/2001 | US6175170 Compliant displacement-multiplying apparatus for microelectromechanical systems |
| 01/16/2001 | US6174820 Use of silicon oxynitride as a sacrificial material for microelectromechanical devices |
| 01/16/2001 | US6174744 Method of producing micro contact structure and contact probe using same |
| 01/11/2001 | WO2001003152A1 Arc resistant high voltage micromachined electrostatic switch |