| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 07/08/1997 | US5646347 Suspension for micromechanical structure and micromechanical acceleration sensor |
| 07/03/1997 | WO1997023767A1 Device for measuring the volume of a flowing medium |
| 06/26/1997 | DE19547915A1 Vorrichtung zur Messung der Masse eines strömenden Mediums Device for measuring the mass of a flowing medium, |
| 06/24/1997 | US5642015 Elastomeric micro electro mechanical systems |
| 06/19/1997 | WO1997021930A1 Microvalve |
| 06/17/1997 | US5639973 Force detector |
| 06/12/1997 | DE19546181A1 Mikroventil Microvalve |
| 06/10/1997 | US5637907 Three dimensional semiconductor circuit structure with optical interconnection |
| 06/10/1997 | US5637904 On a semiconductor substrate |
| 06/05/1997 | WO1997020189A1 Rate sensors |
| 06/05/1997 | DE19648475A1 Micro-contact pin structure for IC test card |
| 06/04/1997 | EP0776476A1 Gravity-compensating accelerometer and method for making same |
| 06/03/1997 | US5636070 Thin film actuated mirror array |
| 05/27/1997 | US5633209 Method of forming a circuit membrane with a polysilicon film |
| 05/21/1997 | EP0774681A1 Electromagnetic actuator |
| 05/20/1997 | US5631782 Support post architecture for micromechanical devices |
| 05/20/1997 | US5631463 Cantilever detector having piezoelectric film of zinc oxide or aluminum nitride and platinum or palladium electrodes with controlled crystal orientation, for scanning tunneling microscopes |
| 05/14/1997 | EP0773444A1 Acceleration sensor |
| 05/14/1997 | CN1149744A Head actuator in disk driving system |
| 05/13/1997 | US5629244 Fabrication method of semiconductor accelerometer |
| 05/13/1997 | US5629243 Preloaded linear beam vibration sensor and its manufacturing method |
| 05/13/1997 | US5628917 Single lithography step and repeated sequence of thermal oxidation and reactive ion etching |
| 05/07/1997 | CN1149190A Method of unsticking components of micro-mechanical devices |
| 04/29/1997 | US5625298 Semi-conductor chip test probe |
| 04/23/1997 | EP0769196A1 Micromechanical component and process for producing the same |
| 04/17/1997 | WO1997013956A1 Microminiature stirling cycle cryocoolers and engines |
| 04/17/1997 | DE19639717A1 Ink=jet print head with piezo-electric actuator |
| 04/17/1997 | DE19537814A1 Sensor, esp. acceleration sensor |
| 04/17/1997 | CA2234271A1 Microminiature stirling cycle cryocoolers and engines |
| 04/15/1997 | US5620931 Methods for fabricating monolithic device containing circuitry and suspended microstructure |
| 04/09/1997 | EP0767363A2 A method of manufacturing a physical quantity detector utilizing changes in electrostatic capacitance |
| 04/08/1997 | US5618760 Method of etching a pattern on a substrate using a scanning probe microscope |
| 04/02/1997 | EP0766090A2 Microelectronic integrated sensor and method of manufacturing the same |
| 04/02/1997 | EP0766089A2 Microelectronic integrated sensor and method for manufacturing the same |
| 04/02/1997 | EP0766060A1 Micromechanical part having at least one tip consisting of diamond, and manufacturing method for such parts. |
| 03/26/1997 | EP0764343A1 Force detecting sensor and method of making |
| 03/26/1997 | EP0764336A1 Micromechanical memory sensor |
| 03/26/1997 | EP0646246B1 Method for fabricating monolithic chip containing integrated circuitry and self-supporting microstructure |
| 03/26/1997 | EP0606220B1 Method of manufacturing a semiconductor accelerometer |
| 03/19/1997 | EP0763881A2 Magnetic micro-mover |
| 03/19/1997 | EP0763844A1 Method of manufacturing micro-tip and female mold substrate therefor, and method of manufacturing probe with micro-tip |
| 03/19/1997 | CN1145487A Probe apparatus having reduced misalignment of conductive needles |
| 03/18/1997 | US5612491 Formation of a magnetic film on an atomic force microscope cantilever |
| 03/18/1997 | US5611940 Microsystem with integrated circuit and micromechanical component, and production process |
| 03/13/1997 | WO1997009774A1 Electrostatic drive |
| 03/11/1997 | US5610335 Microelectromechanical lateral accelerometer |
| 02/25/1997 | US5606452 Array of thin film actuated mirrors and method for the manufacture thereof |
| 02/18/1997 | US5604623 Array of thin film actuated mirrors having an improved optical efficiency and method for the manufacture thereof |
| 02/18/1997 | US5604313 Varying apparent mass accelerometer |
| 02/12/1997 | EP0758088A2 Micromechanical switch |
| 02/12/1997 | EP0758080A1 Micromechanical device with stress-free perforated diaphragm |
| 02/11/1997 | US5602671 Oriented monolayer formed on surface of micromechanical device decreases van der waals forces to reduce attraction between surfaces |
| 02/11/1997 | US5602411 Micromechanical component with a dielectric movable structure, and microsystem |
| 02/06/1997 | WO1997004451A1 Microelectromechanical structure and process of making same |
| 02/04/1997 | US5600383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer |
| 02/04/1997 | US5600137 Probe apparatus having reduced misalignment of conductive needles |
| 01/30/1997 | DE19533173C1 Elektrostatischer Antrieb An electrostatic drive |
| 01/22/1997 | EP0754953A1 Method of manufacturing a structure with an usable layer, which is kept at a distance from a substrate by limit stops, and method for disjoining such a layer |
| 01/22/1997 | EP0702796A4 Microelectromechanical lateral accelerometer |
| 01/21/1997 | US5596219 Thermal sensor/actuator in semiconductor material |
| 01/15/1997 | EP0753671A1 Method of manufacturing elements of floating, rigid microstructures and apparatus equipped with such elements |
| 01/14/1997 | US5594330 Movement actuator/sensor systems |
| 01/08/1997 | EP0752587A2 Electrical connection structure |
| 01/08/1997 | EP0752159A1 Semiconductor device provided with a microcomponent having a fixed and a movable electrode |
| 01/07/1997 | US5592037 Analog display device with micro-motor drive means |
| 01/07/1997 | US5592018 Membrane dielectric isolation IC fabrication |
| 01/07/1997 | US5592007 Membrane dielectric isolation transistor fabrication |
| 01/03/1997 | WO1997000451A1 Gravity-compensating accelerometer and method for making same |
| 01/02/1997 | EP0683921A4 Microstructures and single mask, single-crystal process for fabrication thereof. |
| 01/02/1997 | DE19625605A1 Semiconductor sensor for physical parameter |
| 01/02/1997 | DE19522004A1 Method for producing partly movable micro structure(s) |
| 12/31/1996 | US5589084 Thin film actuated mirror array |
| 12/27/1996 | EP0749590A1 Thin film actuated mirror array |
| 12/19/1996 | WO1996041204A1 Method and apparatus for probing, testing, burn-in, repairing and programming of integrated circuits in a closed environment using a single apparatus |
| 12/12/1996 | WO1996039643A1 Electromagnetic actuator |
| 12/12/1996 | WO1996039260A1 Method of producing micro-electrical conduits |
| 12/12/1996 | WO1996039252A1 Electrokinetic pumping |
| 12/12/1996 | DE19623072A1 Semiconductive sensor mfg. method |
| 12/12/1996 | CA2223166A1 Method of producing micro-electrical conduits |
| 12/12/1996 | CA2223099A1 Electrokinetic pumping |
| 12/11/1996 | EP0747686A1 Forming a silicon diaphragm in a cavity by anodizing, oxidizing, and etching or by directly etching the porous silicon |
| 12/08/1996 | CA2176051A1 Transducer having a silicon diaphragm for forming same |
| 12/05/1996 | WO1996038732A1 Acceleration sensor |
| 12/04/1996 | EP0746013A2 Method of cleaning and treating a micromechanical device |
| 12/03/1996 | US5580687 Contact stepper printed lithography method |
| 11/28/1996 | WO1996037784A1 Single crystal silicon sensor with high aspect ratio and curvilinear structures and associated method |
| 11/26/1996 | US5579149 Miniature network of light obturators |
| 11/26/1996 | US5578843 Semiconductor sensor with a fusion bonded flexible structure |
| 11/26/1996 | US5578755 Accelerometer sensor of crystalline material and method for manufacturing the same |
| 11/26/1996 | US5578528 Method of fabrication glass diaphragm on silicon macrostructure |
| 11/26/1996 | CA2070946C Cantilever type displacement element, and scanning tunneling microscope or information processing apparatus using same |
| 11/19/1996 | US5576251 Process for making a semiconductor sensor with a fusion bonded flexible structure |
| 11/19/1996 | US5576250 Process for the production of accelerometers using silicon on insulator technology |
| 11/14/1996 | WO1996035957A1 Gimballed vibrating wheel gyroscope having strain relief features |
| 11/13/1996 | EP0741839A1 Micro-diaphragm pump |
| 11/13/1996 | EP0591554B1 Acceleration sensor and its manufacture |
| 11/12/1996 | US5574279 Probe with torsion lever structure, and scanning probe microscope and record/reproducing apparatus utilizing the same |
| 11/07/1996 | WO1996034701A1 Elastomeric micro electromechanical systems |
| 11/06/1996 | CN1135276A Array of thin film actuated mirrors for use in an optics projection system and method for mfg. same |
| 11/05/1996 | US5571741 Membrane dielectric isolation IC fabrication |