Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
02/1996
02/08/1996WO1996003641A1 Scanning probe microscope assembly
02/06/1996US5489812 Micro actuator
02/06/1996US5488863 Angular velocity sensor making use of tuning fork vibration
01/1996
01/31/1996EP0694801A2 Improvements in and relating to micro-mechanical devices
01/30/1996US5487305 Three axes accelerometer
01/18/1996WO1996001483A1 Micromechanical component and process for producing the same
01/16/1996US5485304 Support posts for micro-mechanical devices
01/11/1996DE4423396A1 Verfahren zum Herstellen einer mikromechanischen Oberflächenstruktur A method for manufacturing a micromechanical structure surface
01/09/1996US5482564 Low surface tension liquid and immersion
01/03/1996EP0690330A1 improvements in or relating to micro-mechanical devices
01/02/1996US5481396 Thin film actuated mirror array
01/02/1996US5481184 Movement actuator/sensor systems
12/1995
12/31/1995CA2149952A1 Monolayer coating using molecular recognition for micro-mechanical devices
12/27/1995EP0689077A2 Improvements in and relating to micro-mechanical devices
12/27/1995EP0689076A1 Improvements in or relating to micro-mechanical devices
12/27/1995EP0411088B1 Formation of microstructures with removal of liquid by freezing and sublimation
12/22/1995CA2149934A1 Method of unsticking components of micro-mechanical devices
12/22/1995CA2149932A1 Method of providing sacrificial spacer for micro-mechanical devices
12/21/1995WO1995034912A1 Force detecting sensor and method of making
12/21/1995WO1995034904A1 Micromechanical memory sensor
12/21/1995DE4421337A1 Multi-stage etching procedure for micromechanical semiconductor element
12/21/1995CA2192440A1 Micromechanical memory sensor
12/06/1995EP0685864A1 Planar solenoid relay and production method thereof
11/1995
11/29/1995EP0684462A2 Thermal sensor/actuator realised in semiconductor material
11/29/1995EP0683921A1 Microstructures and single mask, single-crystal process for fabrication thereof
11/28/1995US5470797 Method for producing a silicon-on-insulator capacitive surface micromachined absolute pressure sensor
11/23/1995WO1995031693A1 Resonant measurement value sensor
11/23/1995DE4417132A1 Resonanter Meßwertaufnehmer Resonant transducer
11/14/1995US5465611 Sensor head for use in atomic force microscopy and method for its production
11/14/1995US5465604 Method for adjusting sensitivity of a sensor
11/02/1995WO1995029383A1 Micro-mechanical oscillator of an oscillation gyrometer
11/02/1995EP0680064A2 Micromecanical element with a contactor part as mobile structure, microsystem and method for manufacturing
11/02/1995EP0679897A1 Micromechanical component having a moving dielectric element
11/02/1995EP0679878A2 Microsystem with integrated circuit and micromechanical component and fabrication procedure
10/1995
10/31/1995US5463277 Micro vacuum device
10/26/1995DE4414237A1 Mikromechanischer Schwinger eines Schwingungsgyrometers The micromechanical oscillator of a Schwingungsgyrometers
10/19/1995DE4412383A1 Scanning atomic force microscope
10/17/1995US5459610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate
10/04/1995EP0543901B1 Monolithic accelerometer
10/03/1995US5455203 Method of adjusting the pressure detection value of semiconductor pressure switches
10/03/1995US5454906 Method of providing sacrificial spacer for micro-mechanical devices
10/03/1995US5454146 Method of manufacturing a microactuator
09/1995
09/27/1995EP0674181A2 Micro mechanical component and production process thereof
09/25/1995CA2145331A1 Micro mechanical component and production process thereof
09/21/1995DE19509338A1 Acceleration sensor for airbag, ABS, navigation system, yaw rate, pressure measurement
09/19/1995US5450751 Microstructure for vibratory gyroscope
09/12/1995US5449903 Methods of fabricating integrated, aligned tunneling tip pairs
09/05/1995US5447600 Reducing sticking by forming protective coatings
08/1995
08/31/1995WO1995023352A1 Thin film actuated mirror array
08/31/1995CA2183990A1 Thin film actuated mirror array
08/30/1995EP0669536A1 Gas flow type angular velocity sensor
08/29/1995US5445008 Microbar sensor
08/15/1995US5441597 Microstructure gas valve control forming method
08/15/1995US5441300 Three-dimensional acceleration sensor and airbag using the same
08/08/1995US5439552 Process of fabricating an enlongated microstructure element on a substrate
08/02/1995EP0665590A2 Microstructure, process for manufacturing thereof and devices incorporating the same
07/1995
07/27/1995WO1995020105A1 Micro-diaphragm pump
07/27/1995DE4402119A1 Mikromembranpumpe Micro-diaphragm pump
07/19/1995EP0663692A2 Process for fabricating a layer having reduced strain
07/04/1995US5429993 Semiconductor accelerometer and method of its manufacture
06/1995
06/29/1995WO1995017760A1 Planar solenoid relay and production method thereof
06/28/1995EP0659910A2 Semiconductor device and method of fabricating the same
06/27/1995CA1336057C Formation of microstructures with removal of liquid by freezing and sublimation
06/22/1995DE4418207C1 Thermal sensor or actuator in semiconductor material
06/20/1995US5426631 Information recording and reproducing apparatus for recording and reproducing information by using a probe electrode
06/14/1995DE4444149A1 Semiconductor sensor for measurement of yaw
06/13/1995US5424241 Forming insulating and support layers on substrate; forming recess in insulating layer and aperture in support layer; depositing single crystal silicon cone and fully enclosing it within recess
06/08/1995DE4414969C1 Micromechanical component for acceleration or inclination sensor
06/08/1995DE4341271A1 Crystalline material acceleration sensor
06/06/1995US5421213 Multi-dimensional force detector
05/1995
05/26/1995WO1995014351A1 Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof
05/26/1995CA2176347A1 Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof
05/23/1995US5418418 Micro-actuator
05/23/1995US5417111 Monolithic chip containing integrated circuitry and suspended microstructure
05/18/1995WO1995013683A1 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
05/18/1995CA2176111A1 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
05/17/1995EP0653657A1 Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof
05/16/1995US5415043 Acceleration sensor and process for its production
05/10/1995EP0652600A1 Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same
05/10/1995EP0652455A1 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
05/04/1995WO1995012287A1 Thin film actuated mirror array and methods for its manufacture
05/04/1995CA2175198A1 Thin film actuated mirror array and methods for its manufacture
05/03/1995EP0651274A1 Thin film actuated mirror array and method for the manufacture thereof
05/02/1995US5412265 Planar micro-motor and method of fabrication
05/02/1995US5412186 Elimination of sticking of micro-mechanical devices
05/02/1995US5411769 Forming a low surface energy, wear resistant thin film on the surface of a device
04/1995
04/20/1995WO1995010770A1 A catalytic gas sensor
04/20/1995CA2173612A1 A catalytic gas sensor
04/18/1995US5406848 Multi-dimensional and acceleration detector
04/11/1995US5405490 Flat display device and method for manufacturing the same
04/06/1995WO1995009366A1 Micromechanical device and process for producing the same
04/05/1995EP0646800A1 Probe for testing semi-conductor chips
04/05/1995EP0646246A1 Method for fabricating monolithic chip containing integrated circuitry and self-supporting microstructure.
04/04/1995US5403665 Method of applying a monolayer lubricant to micromachines
04/04/1995US5402684 Multicomponent force and moment measuring arrangement
03/1995
03/30/1995WO1995008775A1 Integrated micromechanical sensor device and process for producing it
03/22/1995EP0644427A1 Differential capacitive transducer and method of making
03/22/1995EP0394336B1 Method of making silicon-based sensors.
03/21/1995US5399415 Isolated tungsten microelectromechanical structures
03/15/1995EP0643378A1 Light-microshutter array
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