| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
|---|
| 02/12/1998 | WO1998006118A1 Encapsulated micro-relay modules and methods of fabricating same |
| 02/12/1998 | WO1998005973A1 Tunneling sensor with linear force rebalance |
| 02/12/1998 | DE19734530A1 Semiconductor acceleration sensor for motor vehicle |
| 02/12/1998 | CA2261683A1 Encapsulated micro-relay modules and methods of fabricating same |
| 02/12/1998 | CA2211678A1 Resonating structure and method for forming the resonating structure |
| 02/11/1998 | EP0823039A1 Micromachined acceleration and coriolis sensor |
| 02/10/1998 | US5717631 Microelectromechanical structure and process of making same |
| 02/04/1998 | EP0822579A1 Method of fabricating integrated microstructures of semiconductor material |
| 02/04/1998 | EP0822415A1 Semiconductor integrated capacitive acceleration sensor and relative fabrication method |
| 02/04/1998 | EP0822398A1 Integrated piezoresistive pressure sensor and relative fabrication method |
| 02/04/1998 | EP0821806A1 Monomorph thin film actuated mirror array |
| 02/04/1998 | EP0821803A1 Thin film actuated mirror array for providing double tilt angle |
| 02/04/1998 | EP0821781A1 Device for measuring the volume of a flowing medium |
| 02/04/1998 | CN1172250A Semiconductor acceleration sensor |
| 02/03/1998 | US5714697 Sheet materials mass measuring system |
| 01/28/1998 | EP0820599A1 Methods for planarization and encapsulation of micromechanical devices in semiconductor processes |
| 01/28/1998 | CN1171554A 半导体加速度传感器 Semiconductor acceleration sensor |
| 01/27/1998 | US5712609 Micromechanical memory sensor |
| 01/20/1998 | US5710657 Monomorph thin film actuated mirror array |
| 01/20/1998 | US5709802 Method of making a micro-actuator device |
| 01/15/1998 | WO1998001761A2 Acceleration detection device |
| 01/14/1998 | EP0817971A1 Surface jet angular rate sensor |
| 01/07/1998 | EP0816856A1 Electrosatatic capacitive sensor and method for manufacturing the same |
| 12/30/1997 | US5703728 Support post architecture for micromechanical devices |
| 12/30/1997 | US5702569 Method for manufacturing a thin film actuated mirror having a stable elastic member |
| 12/29/1997 | EP0814325A2 Mass measuring system |
| 12/29/1997 | EP0814316A1 Paper property sensing system |
| 12/29/1997 | EP0813675A1 Magnetic modulation of force sensor for ac detection in an atomic force microscope |
| 12/24/1997 | CN1168738A Micromechanical memory sensor |
| 12/24/1997 | CN1168472A 半导体加速度传感器 Semiconductor acceleration sensor |
| 12/23/1997 | US5700379 Method for drying micromechanical components |
| 12/18/1997 | DE19646120A1 Micromechanical sensor for atomic force or scanning tunnelling microscope |
| 12/16/1997 | US5699181 Deformable mirror device and manufacturing method thereof |
| 12/10/1997 | EP0641485A4 Membrane dielectric isolation ic fabrication. |
| 12/03/1997 | EP0810441A2 Composite sensor |
| 12/03/1997 | EP0810440A2 Optical semiconductor component and method of fabrication |
| 12/02/1997 | US5693882 Force sensing device having breakout tabs |
| 11/27/1997 | WO1997044675A1 Electrostatic drive for accelerometer |
| 11/19/1997 | EP0807841A2 Improved optical modulator/switch |
| 11/18/1997 | US5689380 Thin film actuated mirror array for providing double tilt angle |
| 11/18/1997 | US5689063 Atomic force microscope using cantilever attached to optical microscope |
| 11/13/1997 | WO1997042462A1 Semiconductor bridge device and method of making the same |
| 11/12/1997 | CN1164892A Device for measuring volume of flowing medium |
| 11/04/1997 | US5684631 Optical modulator/switch including reflective zone plate and related method of use |
| 11/04/1997 | US5683591 Process for producing surface micromechanical structures |
| 10/29/1997 | CN1163689A Array of thin film actuated mirrors and method for manufacture thereof |
| 10/28/1997 | US5682053 Silicon wafer having substrate and monocrystalline silicon layer separated by buried silicon dioxide layer |
| 10/22/1997 | EP0802417A2 Semiconductor acceleration sensor |
| 10/22/1997 | EP0802416A2 Manufacturing method of semiconductor acceleration sensor |
| 10/21/1997 | US5679436 Micromechanical structure with textured surface and method for making same |
| 10/14/1997 | US5677783 Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate |
| 10/14/1997 | US5677090 Method of making X-ray mask having reduced stress |
| 10/14/1997 | CA2069708C Probe-driving mechanism, production thereof, and apparatus and piezoelectric actuator employing the same |
| 10/09/1997 | WO1997026569A3 Method and apparatus for using an array of grating light valves to produce multicolor optical images |
| 10/08/1997 | EP0800220A1 Fast responce piezoelectric actuator |
| 10/08/1997 | EP0799495A1 Silicon-germanium-carbon compositions and processes thereof |
| 10/07/1997 | US5675075 Acoustic microscope |
| 10/07/1997 | US5674406 Stopper manufacturing method of a silicon micromachining structure |
| 10/02/1997 | DE19644125A1 Capacitive sensor interface circuit for use in capacitance detector circuit for vehicle movement detection |
| 10/01/1997 | EP0738306B1 Method of producing microchannel/microcavity structures |
| 10/01/1997 | CN1160861A Deformable mirror device and manufacturing method thereof |
| 09/30/1997 | CA2048968C Cantilever type probe, scanning tunneling microscopy and information processing device equipped with said probe |
| 09/25/1997 | DE19610782A1 Micro-mechanical structure production |
| 09/24/1997 | CN1160218A Active yoke hidden hinge digital micromirror device |
| 09/24/1997 | CN1160206A 半导体加速度传感器 Semiconductor acceleration sensor |
| 09/18/1997 | WO1997034153A1 Micromachined device with enhanced dimensional control |
| 09/16/1997 | US5668318 Angular velocity sensor |
| 09/09/1997 | US5666190 Method of performing lithography using cantilever array |
| 09/09/1997 | US5665250 Method of manufacturing surface type acceleration sensor method of manufacturing |
| 09/02/1997 | US5662771 Surface micromachining process |
| 08/27/1997 | EP0791813A2 Semiconductor acceleration or pressure sensor |
| 08/27/1997 | EP0764343A4 Force detecting sensor and method of making |
| 08/26/1997 | US5661611 Thin film actuated mirror array and method for the manufacture thereof |
| 08/26/1997 | US5661591 Optical switch having an analog beam for steering light |
| 08/19/1997 | US5659138 Surface type acceleration sensor |
| 08/19/1997 | US5658698 Microstructure, process for manufacturing thereof and devices incorporating the same |
| 08/19/1997 | US5658636 Method to prevent adhesion of micromechanical structures |
| 08/19/1997 | CA2057619C Cantilever probe and apparatus using the same |
| 08/14/1997 | WO1997029538A1 Bistable microactuator with coupled membranes |
| 08/14/1997 | DE19703271A1 Materials testing apparatus for measuring tensile strength of very thin layers |
| 08/13/1997 | EP0632880B1 Micromechanical sensor |
| 08/12/1997 | US5656778 For measuring linear and angular motion |
| 08/12/1997 | US5656512 Method of manufacturing a semiconductor accelerometer |
| 08/07/1997 | DE19603829A1 Silicon@ based micromechanical structure manufacturing method |
| 08/05/1997 | US5654220 Method of making a stacked 3D integrated circuit structure |
| 07/30/1997 | EP0478716B1 Semiconductor microactuator |
| 07/29/1997 | US5652559 Method of micromachining electromagnetically actuated current switches with polyimide reinforcement seals, and switches produced thereby |
| 07/29/1997 | US5652167 Method of liquid treatment of micro-structures comprising structural members liable to be bent |
| 07/24/1997 | WO1997026569A2 Method and apparatus for using an array of grating light valves to produce multicolor optical images |
| 07/24/1997 | WO1997026556A1 Electromagnetic and nuclear radiation detector using micromechanical sensors |
| 07/24/1997 | WO1997026527A1 Vane-type micromachined silicon micro-flow meter |
| 07/23/1997 | EP0785413A2 Angular velocity sensor |
| 07/22/1997 | US5650881 Support post architecture for micromechanical devices |
| 07/22/1997 | US5650568 Gimballed vibrating wheel gyroscope having strain relief features |
| 07/17/1997 | WO1997024915A2 Micro-electro-mechanics systems (mems) |
| 07/15/1997 | US5648300 Method of manufacturing cantilever drive mechanism and probe drive mechanism |
| 07/09/1997 | EP0783107A1 Manufacturing process for a micromechanical element with movable structure |
| 07/08/1997 | US5646928 Free-space integrated micro-pickup head for optical data storage and a micro-optical bench |
| 07/08/1997 | US5646768 Support posts for micro-mechanical devices |
| 07/08/1997 | US5646464 Planar micro-motor with bifilar micro-coils |