Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
07/1998
07/21/1998US5783340 Method for photolithographic definition of recessed features on a semiconductor wafer utilizing auto-focusing alignment
07/16/1998DE19700290A1 Mikromechanische Halbleiteranordnung und Verfahren zur Herstellung einer mikromechanischen Halbleiteranordnung A micromechanical semiconductor arrangement and method of manufacturing a micromechanical semiconductor arrangement
07/15/1998EP0853251A2 Microprobe chip for detecting evanescent waves and method for making the same, probe provided with the microprobe chip and method for making the same, and evanescent wave detector, nearfield scanning optical microscope, and information regenerator provided with the microprobe chip
07/14/1998US5780885 Accelerometers using silicon on insulator technology
07/14/1998US5780738 Surface jet angular rate sensor
07/09/1998WO1998029748A1 Micromechanical semiconductor array and method for the production thereof
07/09/1998WO1998029661A1 Micropump with a built-in intermediate part
07/09/1998WO1998013605A3 Integrated electrically operable micro-valve
07/09/1998CA2276401A1 Micropump with a built-in intermediate part
07/02/1998DE19752218A1 Non-adherent semiconductor surface production
07/01/1998CN1186458A Elastmeric micro electromechanical systems
06/1998
06/30/1998US5774252 Membrane device with recessed electrodes and method of making
06/30/1998US5772902 Method to prevent adhesion of micromechanical structures
06/24/1998EP0848823A2 Acceleration detection device
06/23/1998US5770856 Near field sensor with cantilever and tip containing optical path for an evanescent wave
06/23/1998US5770465 Trench-filling etch-masking microfabrication technique
06/23/1998US5769389 Apparatus for controlling a flow of a fluid
06/18/1998WO1998026179A1 Microejection pump
06/18/1998DE19754462A1 Semiconductor system with substrate which defines diaphragm with section of substrate e.g. for pressure sensor
06/18/1998DE19651384A1 Packaging seal verification method with acceleration or rotation sensor
06/16/1998US5766369 Striking device to cause particulates attached to working surface to fall free
06/16/1998US5766367 Method for preventing micromechanical structures from adhering to another object
06/11/1998WO1998024594A2 Prehensile device in shape memory material and construction process
06/09/1998US5764441 Rotary moving coil actuator
06/09/1998US5763782 Micromechanical sensor
06/04/1998WO1998024119A1 Process for manufacturing micromechanical functional elements
06/04/1998WO1998023935A1 Process for producing micromechanical sensors
06/04/1998WO1998023869A1 Piezo-electrically actuated microvalve
06/04/1998WO1998023868A1 Piezo-electric operated microvalve
06/03/1998EP0845603A1 Microdevice valve structures for fluid control
06/03/1998EP0813675A4 Magnetic modulation of force sensor for ac detection in an atomic force microscope
06/02/1998US5760947 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
06/02/1998US5760455 Micromechanical semiconductor component and manufacturing method therefor
06/02/1998US5760290 Semiconductor acceleration sensor and testing method thereof
06/02/1998US5759870 Coating cavity walls with oxidation resistant material
05/1998
05/28/1998WO1998022719A1 Miniature valve for filling the reservoir of an apparatus for the transdermal administration of medicine
05/28/1998DE19648759A1 Method of manufacturing microstructures
05/26/1998US5756901 Sensor and method for manufacturing a sensor
05/22/1998WO1998021734A1 Method for manufacturing a micromechanical relay
05/19/1998US5753911 Electrostatic actuator, probe using the actuator, scanning probe microscope, processing apparatus, and recording/reproducing apparatus
05/19/1998US5753814 Magnetically-oscillated probe microscope for operation in liquids
05/19/1998US5753134 Method for producing a layer with reduced mechanical stresses
05/19/1998US5752410 Tunneling sensor with linear force rebalance and method for fabricating the same
05/14/1998DE19646667A1 Micromechanical electrostatic relay production
05/13/1998EP0841703A2 Ultrafine particle structure and production method thereof
05/12/1998US5751154 capacitive sensor interface circuit
05/12/1998US5750420 Method for manufacturing a structure with a useful layer held at a distance from a substrate by abutments, and for detaching such a layer
05/12/1998US5749698 Substrate transport apparatus and substrate transport path adjustment method
05/12/1998US5749226 Microminiature stirling cycle cryocoolers and engines
05/06/1998EP0840128A1 Vibrating beam accelerometer and method for manufacturing the same
05/06/1998CN1180934A Semiconductor integrated capacitive acceleration sensor and relative fabrication method
05/05/1998US5748567 Acceleration sensor
05/05/1998US5748159 Display
05/05/1998US5747993 Movement actuator/sensor systems
05/05/1998US5747692 Sensor system for determining acceleration
05/05/1998US5747691 Angular velocity sensor apparatus
04/1998
04/30/1998WO1998018304A1 Method and device for positioning and retaining micro-building-blocks
04/30/1998DE19641618A1 Accident prevention device for hand-controlled machine tools
04/30/1998CA2269523A1 Method and device for positioning and retaining micro-building-blocks
04/28/1998US5744947 Movement actuator/sensor systems
04/28/1998US5744732 Sheet materials transport system
04/28/1998US5744719 Integrated micromechanical sensor device
04/21/1998US5742377 Cantilever for scanning probe microscope including piezoelectric element and method of using the same
04/15/1998EP0836266A2 An actuator, its driving and its usage
04/15/1998EP0741839B1 Micro-diaphragm pump
04/14/1998US5738731 Solar cells
04/09/1998WO1998014787A1 Structure comprising an insulated part in a solid substrate and method for producing same
04/09/1998WO1998014707A1 Micro-machined device for fluids and method of manufacture
04/09/1998WO1998001761A3 Acceleration detection device
04/09/1998EP0848823A3 Acceleration detection device
04/09/1998CA2267086A1 Micro-machined device for fluids and method of manufacture
04/08/1998EP0834759A2 Microelectromechanical devices including rotating plates and related methods
04/07/1998US5736430 Transducer having a silicon diaphragm and method for forming same
04/02/1998WO1998013605A2 Integrated electrically operable micro-valve
04/02/1998WO1998013537A1 Method of producing a hollow structure
04/02/1998DE19639946A1 Micromechanical component with single-piece surface structure for acceleration sensor
04/01/1998EP0833163A1 Accelerometer
04/01/1998EP0832438A1 Method and apparatus for probing, testing, burn-in, repairing and programming of integrated circuits in a closed environment using a single apparatus
03/1998
03/31/1998US5734105 Dynamic quantity sensor
03/24/1998US5731229 Method of producing device having minute structure
03/19/1998WO1998011611A1 Microbridge structure, and method for forming a microbridge suspended by a micro support
03/18/1998EP0829012A1 Single crystal silicon sensor with high aspect ratio and curvilinear structures and associated method
03/17/1998US5729074 Micro mechanical component and production process thereof
03/12/1998DE19636063A1 Determining elastic properties of active structures in MEMS
03/11/1998EP0828346A2 Lid wafer bond packaging and micromachining
03/11/1998EP0828160A1 Acceleration sensor and a method for its manufacture
03/10/1998US5726073 Compound stage MEM actuator suspended for multidimensional motion
03/10/1998US5725785 Method for manufacturing accelerometer sensor
03/10/1998US5725729 Semiconductors
03/10/1998US5725363 Micromembrane pump
03/03/1998US5723894 Structure for providing an electrical connection between circuit members
03/03/1998US5723793 Methods and apparatus for measuring stress and strain characteristics of microscopic specimens
03/03/1998US5723347 Semi-conductor chip test probe and process for manufacturing the probe
03/03/1998US5722989 Microminiaturized minimally invasive intravascular micro-mechanical systems powered and controlled via fiber-optic cable
02/1998
02/25/1998EP0825427A2 Resonating structure and method for forming the resonating structure
02/25/1998EP0824702A1 Gimballed vibrating wheel gyroscope having strain relief features
02/25/1998EP0824381A1 Elastomeric micro electromechanical systems
02/25/1998EP0711406B1 Acoustic microscope
02/17/1998US5719324 Microcantilever sensor
02/17/1998US5719073 Microstructures and single mask, single-crystal process for fabrication thereof
1 ... 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128