| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 01/11/2001 | WO2001002287A1 Thermal bend actuator for a micro electro-mechanical device |
| 01/09/2001 | US6171886 Method of making integrated hybrid silicon-based micro-actuator devices |
| 01/09/2001 | US6171881 Acceleration sensor and process for the production thereof |
| 01/09/2001 | US6170332 Micromechanical accelerometer for automotive applications |
| 01/04/2001 | WO2001001545A1 Assembly for the wireless supply of electric energy to a number of sensors and/or actuators, the sensors and/or actuators therefor and a system for a machine which has a number of sensors and/or actuators |
| 01/04/2001 | WO2001001434A1 High voltage micromachined electrostatic switch |
| 01/04/2001 | WO2001001025A2 Microfabricated elastomeric valve and pump systems |
| 01/04/2001 | WO2001000523A1 Micro-electromechanical devices and methods of manufacture |
| 01/04/2001 | DE19930779A1 Micromechanical component has stop spring mounted on substrate via second flexural spring device with higher flexural stiffness that first flexural spring device for seismic mass |
| 01/04/2001 | DE10006912A1 Process for fixing a microsensor to a wafer comprises etching a holder of a base wafer, applying a sacrificial layer, forming a recess in a separate assembly wafer |
| 01/04/2001 | CA2767084A1 Microfabricated elastomeric valve and pump systems |
| 01/04/2001 | CA2377189A1 Micro-electromechanical devices and methods of manufacture |
| 01/03/2001 | EP1065378A2 Microfabricated elastomeric valve and pump systems |
| 01/02/2001 | US6168906 Micromachined membrane with locally compliant and stiff regions and method of making same |
| 01/02/2001 | US6168395 Bistable microactuator with coupled membranes |
| 12/28/2000 | WO2000079288A1 Acceleration sensor |
| 12/28/2000 | WO2000078667A1 Precisely defined microelectromechanical structures and associated fabrication methods |
| 12/28/2000 | DE19929343A1 Arrangement for wireless supply of electrical energy to number of sensors and/or actuators mounted on machine comprises micro-fuel cell with attached fuel tank integrated into sensors and/or actuators |
| 12/28/2000 | DE19928297A1 Production of a sensor with a membrane comprises depositing a silicon nitride layer by a LPCVD or PECVD process on a surface of a silicon substrate, and etching a recess from the underside of the substrate |
| 12/27/2000 | EP1062685A1 Integrated large area microstructures and micromechanical devices |
| 12/27/2000 | EP1062684A2 Trench isolation for micromechanical devices |
| 12/27/2000 | EP1062180A1 Method for processing silicon using etching processes |
| 12/27/2000 | CN1278326A Microelectromechanical positioning apparatus |
| 12/26/2000 | US6166478 Method for assembly of microelectromechanical systems using magnetic actuation |
| 12/21/2000 | WO2000077839A1 Controlled-stress stable metallization for electronic and electromechanical devices |
| 12/21/2000 | WO2000077804A1 Electrostatically tunable micromechanical capacitor with greater capacitance variation |
| 12/20/2000 | CN1277731A Thermal arched beam microelectromechanical devices and associated fabrication method |
| 12/19/2000 | US6163061 Infrared solid-state image sensor and manufacturing method thereof |
| 12/19/2000 | US6162657 Method for manufacturing a micromechanical relay |
| 12/14/2000 | WO2000075999A1 Variable capacitance, low pass filter and micro-electromechanical switching arrangement |
| 12/14/2000 | WO2000075762A1 Electrical device |
| 12/14/2000 | WO2000075626A1 Platform for chemical or biological analysis with microbalances, analysis device and method using same |
| 12/14/2000 | WO2000075068A2 Method and apparatus for stress pulsed release and actuation of micromechanical structures |
| 12/14/2000 | WO2000074932A1 Deposited thin film void-column network materials |
| 12/14/2000 | DE19922965A1 Arrangement of micromechanical ultrasound converters comprises a damping layer of polymer material whose state for given working temperatures and frequencies lies within the glass transition range |
| 12/14/2000 | DE10006933A1 Micro-gyroscope with inner and outer frames with means enabling the gyroscope to be set in stable resonance and which can be produced sufficiently cheaply so that it can be used in widespread applications such as household electronics |
| 12/14/2000 | CA2375138A1 Deposited thin film void-column network materials |
| 12/12/2000 | US6160243 Apparatus and method for controlling fluid in a micromachined boiler |
| 12/12/2000 | US6159762 Process for producing micromechanical sensors |
| 12/12/2000 | US6159385 Providing a first and second substrates, bonding both substrates with an adhesive polymer layer, etching a portion of first substrate, selectively etching a portion of adhesive to release microelectromechanical component |
| 12/12/2000 | US6158291 Force detector and acceleration detector |
| 12/12/2000 | US6158283 Semiconductor acceleration sensor |
| 12/07/2000 | WO2000073839A1 Micromachined electrostatic actuator with air gap |
| 12/07/2000 | DE19922967A1 Micromechanical capacitive ultrasonic transducer |
| 12/07/2000 | DE19922612A1 Micropump with peristaltic action for liquids having volumes within microliter ranges comprises a membrane separating pumping and pumped media within a groove with an endless configuration |
| 12/06/2000 | EP1058143A2 A micro-mirror device and a method for producing a micro-mirror device |
| 12/06/2000 | EP1057068A1 Deflectable micro-mirror |
| 12/05/2000 | US6156586 Method for producing a microelectronic sensor |
| 12/05/2000 | US6156215 Method of forming a projection having a micro-aperture, projection formed thereby, probe having such a projection and information processor comprising such a probe |
| 11/30/2000 | WO2000042231A3 Polycrystalline silicon germanium films for forming micro-electromechanical systems |
| 11/29/2000 | EP1056076A2 Micro-mirror device and optical pick-up system |
| 11/23/2000 | WO2000070630A2 High performance mems thin-film teflon® electret microphone |
| 11/23/2000 | WO2000070224A1 Micromechanic pump |
| 11/23/2000 | DE10006931A1 Microgyroscope for oscillation displacement of a three-part oscillating weight applies combs to stimulate horizontal movement and Coriolis oscillations in a floating weight induced vertically and detected by a test probe |
| 11/21/2000 | US6149190 Micromechanical accelerometer for automotive applications |
| 11/21/2000 | US6149123 Integrated electrically operable micro-valve |
| 11/14/2000 | US6146917 Fabrication method for encapsulated micromachined structures |
| 11/14/2000 | US6146716 Conservatively printed displays and methods relating to same |
| 11/14/2000 | US6146543 Microbellows actuator |
| 11/09/2000 | WO2000067537A2 Conservatively printed displays and methods relating to same |
| 11/09/2000 | WO2000067063A1 Moveable microelectromechanical mirror structures |
| 11/09/2000 | WO2000066266A1 Sensor for microfluid handling system |
| 11/09/2000 | DE19929776A1 Production of a device for manufacturing semiconductors comprises forming a protective layer on a substrate, joining to a further substrate and alternately forming a film with high molecular weight and etching |
| 11/09/2000 | CA2371182A1 Moveable microelectromechanical mirror structures |
| 11/08/2000 | EP1049921A1 Micromachined gas-filled chambers and method of microfabrication |
| 11/07/2000 | US6144028 Scanning probe microscope assembly and method for making confocal, spectrophotometric, Near-Field, and Scanning probe measurements and associated images |
| 11/07/2000 | US6143583 Dissolved wafer fabrication process and associated microelectromechanical device having a support substrate with spacing mesas |
| 11/07/2000 | US6143190 Method of producing a through-hole, silicon substrate having a through-hole, device using such a substrate, method of producing an ink-jet print head, and ink-jet print head |
| 11/07/2000 | US6142444 Piezoelectrically actuated microvalve |
| 11/02/2000 | WO2000065626A1 Micromachine switch and method of manufacture thereof |
| 11/02/2000 | WO2000064805A1 Actuator element |
| 11/02/2000 | WO2000064804A1 Thermal actuator shaped for more uniform temperature profile |
| 11/02/2000 | WO2000064678A1 Actuator control in a micro electro-mechanical liquid ejection device |
| 11/02/2000 | EP0866919B1 Microvalve |
| 10/31/2000 | US6140200 Methods of forming void regions dielectric regions and capacitor constructions |
| 10/31/2000 | US6140143 Method of producing a buried boss diaphragm structure in silicon |
| 10/26/2000 | WO2000063654A1 Integrated optoelectronic thin-film sensor and method of producing same |
| 10/26/2000 | WO2000063532A1 Electrothermally actuated vibromotor |
| 10/26/2000 | DE19917950A1 Integrated optoelectronic thin film sensor, useful for scale scanning in a length, angle or two-dimensional measuring system, has a semiconductor layer of thickness corresponding to that of the detecting region of photodetectors |
| 10/25/2000 | EP1046917A2 Method of manufacturing an external force detection sensor |
| 10/25/2000 | CN1271407A Micro pump comprising an inlet control member for its self-priming |
| 10/24/2000 | US6137172 Method and device for positioning and retaining micro-building-blocks |
| 10/24/2000 | US6137150 Semiconductor physical-quantity sensor having a locos oxide film, for sensing a physical quantity such as acceleration, yaw rate, or the like |
| 10/24/2000 | US6137120 Semiconductor device and method of fabricating the same |
| 10/24/2000 | US6136631 Forming improved microelectronic integrated sensor with upper layers and hollow chamber in which cantilever is disposed having nitride pillar extending through hollow chamber for supporting upper layers |
| 10/24/2000 | US6136630 Method of making a micromechanical device from a single crystal semiconductor substrate and monolithic sensor formed thereby |
| 10/24/2000 | US6136208 Manufacturing method for planar microprobe including electrostatic actuator using sacrificial layer technology |
| 10/24/2000 | US6134955 Magnetic modulation of force sensor for AC detection in an atomic force microscope |
| 10/17/2000 | US6134042 Reflective mems actuator with a laser |
| 10/17/2000 | US6133670 Compact electrostatic comb actuator |
| 10/17/2000 | US6133146 Explosives detonators |
| 10/17/2000 | US6133059 Integrated micromechanical sensor device and process for producing it |
| 10/17/2000 | US6131879 Piezoelectrically actuated microvalve |
| 10/17/2000 | US6131466 Integrated piezoresistive pressure sensor |
| 10/17/2000 | US6131457 Acceleration sensor |
| 10/12/2000 | WO2000060652A1 Method for fabricating thin-film substrate and thin-film substrate fabricated by the method |
| 10/12/2000 | WO2000060627A1 Micromachine switch |
| 10/11/2000 | EP1042774A1 Micro electro-mechanical systems relay |
| 10/10/2000 | US6130464 Latching microaccelerometer |
| 10/10/2000 | US6130109 Microbridge structure and method for forming a microstructure suspended by a micro support |