Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
10/1996
10/31/1996WO1996034255A1 Micromachined acceleration and coriolis sensor
10/30/1996EP0740300A1 Head actuator in a disk drive system
10/30/1996CN1134772A Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
10/24/1996WO1996033437A1 Monomorph thin film actuated mirror array
10/24/1996WO1996033434A1 Thin film actuated mirror array for providing double tilt angle
10/24/1996CA2218240A1 Monomorph thin film actuated mirror array
10/24/1996CA2218210A1 Thin film actuated mirror array for providing double tilt angle
10/23/1996EP0738910A2 Improvements relating to a digital micromirror device
10/23/1996EP0738306A1 Method of producing microchannel/microcavity structures
10/23/1996EP0637386B1 Method for fabricating microstructures
10/23/1996CN1134208A Thin film actuated mirror array and method for its manufacture
10/17/1996WO1996032650A1 Methods for planarization and encapsulation of micromechanical devices in semiconductor processes
10/15/1996US5565084 Forming hole for tube, etchant solution, electrode, current source in silicon substrate
10/08/1996US5563343 Microelectromechanical lateral accelerometer
10/03/1996WO1996030768A1 Surface jet angular rate sensor
10/02/1996EP0584233A4 Methods of fabricating integrated, aligned tunneling tip pairs
10/02/1996EP0478666B1 Microfabricated microscope assembly
09/1996
09/19/1996WO1996028841A1 A method for the manufacturing of micromachined structures and a micromachined structure manufactured using such method
09/19/1996WO1996028706A1 Magnetic modulation of force sensor for ac detection in an atomic force microscope
09/18/1996EP0732594A1 Micromechanical semiconductor device
09/18/1996EP0732557A2 Process for drying micro-mechanical devices
09/17/1996US5557132 Semiconductor relay unit
09/17/1996US5555765 Gimballed vibrating wheel gyroscope
09/12/1996WO1996027810A1 Deformable grating apparatus including stiction prevention means
09/12/1996DE19609114A1 Piezoelectric angular speed sensor
09/10/1996US5554875 Semiconductor device with force and/or acceleration sensor
09/10/1996US5554851 Parallel plane holding mechanism and apparatus using such a mechanism
09/10/1996US5554434 Micro light valve and method for manufacturing the same
09/10/1996US5553497 Gas flow type angular velocity sensor
09/03/1996US5551293 Micro-machined accelerometer array with shield plane
08/1996
08/28/1996EP0729009A2 Angular velocity sensor
08/21/1996EP0727814A1 Scanning probe for investigating electronic, magnetic and topographic structures of the order of sub-micron resolution and method of fabricating the same
08/08/1996WO1996023667A1 Masking process for fabricating ultra-high aspect ratio, wafer-free micro-opto-electromechanical structures
08/06/1996US5543956 Torsional vibrators and light deflectors using the torsional vibrator
08/06/1996US5543013 Method of forming a microstructure with bare silicon ground plane
08/06/1996US5542295 Apparatus to minimize stiction in micromachined structures
07/1996
07/30/1996US5541437 Acceleration sensor using MIS-like transistors
07/30/1996US5540095 Monolithic accelerometer
07/24/1996EP0722565A1 A catalytic gas sensor
07/23/1996US5537863 Scanning probe microscope having a cantilever used therein
07/18/1996WO1996016435A3 Semiconductor device provided with a microcomponent having a fixed and a movable electrode
07/17/1996EP0721587A1 Micromechanical device and process for producing the same
07/16/1996US5536988 Compound stage MEM actuator suspended for multidimensional motion
07/16/1996US5535902 Gimballed vibrating wheel gyroscope
07/10/1996EP0720748A1 Integrated micromechanical sensor device and process for producing it
07/09/1996US5535047 Active yoke hidden hinge digital micromirror device
07/09/1996US5534111 Partially thinning layer of silicon nitride on tabs which support bridged detector prior to anisotropically etching to form pit beneath detector, then plasma dry etching to remove exposed silicon nitride
07/02/1996US5531018 Method of micromachining electromagnetically actuated current switches with polyimide reinforcement seals, and switches produced thereby
07/02/1996US5531002 Utilizing changes in an electrostatic capacitance
07/02/1996CA2054668C Micromachined differential pressure transducers and method of producing the same
06/1996
06/25/1996US5530342 Micromachined rate sensor comb drive device and method
06/25/1996US5529279 Thermal isolation structures for microactuators
06/18/1996US5526688 Digital flexure beam accelerometer and method
06/11/1996US5525549 Method for producing an acceleration sensor
06/06/1996WO1996017254A1 Method of forming a microstructure with bare silicon ground plane
06/06/1996WO1996017253A1 Micromachined structure with minimized stiction
06/05/1996DE4435635A1 Microfabrication of cantilever stylus for atomic force microscopy
06/05/1996CN1123916A Thin film actuated mirror array
06/04/1996US5523878 Dipping in precursor solution
05/1996
05/30/1996WO1996016435A2 Semiconductor device provided with a microcomponent having a fixed and a movable electrode
05/23/1996WO1996015630A1 Array of thin film actuated mirrors and method for the manufacture thereof
05/23/1996WO1996015550A1 Silicon-germanium-carbon compositions and processes thereof
05/23/1996CA2205168A1 Array of thin film actuated mirrors and method for the manufacture thereof
05/22/1996EP0713117A1 Improvements in or relating to micromechanical devices
05/22/1996EP0712498A1 Method for fabricating microstructures using temporary bridges
05/15/1996EP0712021A1 Array of thin film actuated mirrors and method for the manufacture thereof
05/15/1996EP0711406A1 Acoustic microscope
05/14/1996US5517280 Photolithography system
05/14/1996US5515719 Controlled force microscope for operation in liquids
05/08/1996EP0711029A2 Microstructure and method of forming the same
05/08/1996EP0710370A1 Intelligent sensor for near field optical device
05/07/1996US5513518 For generating a signal corresponding to a scanned sample
05/02/1996DE19540174A1 Semiconductor sensor for physical parameter measurement
05/02/1996DE19530843A1 Mikrobearbeitete Ventilöffnung und Ventilsitz mit verbesserter thermischer Isolierung The micromachined valve opening and valve seat with improved thermal insulation
05/01/1996EP0709835A2 Probe apparatus having reduced misalignment of conductive needles
04/1996
04/30/1996US5512374 PFPE coatings for micro-mechanical devices
04/30/1996US5511419 Rotational vibration gyroscope
04/25/1996DE19539178A1 Halbleiterbeschleunigungssensor und Prüfverfahren für diesen Semiconductor acceleration sensor and test methods for these
04/24/1996CN1120990A Monolayer coating using molecular recognition for micromechanical devices
04/23/1996US5510276 Process for producing a pressure transducer using silicon-on-insulator technology
04/23/1996US5510156 Reduce contact area
04/11/1996DE19537314A1 Surface-type acceleration sensor for motor vehicle system
04/11/1996DE19530944A1 Formation of micro-mechanical structures in silicon for e.g. ink jet print head
04/09/1996US5506829 Cantilever probe and apparatus using the same
04/09/1996US5506175 Method of forming compound stage MEM actuator suspended for multidimensional motion
04/03/1996EP0704674A2 Micromachined rate sensor comb drive device and method
04/02/1996US5504026 Methods for planarization and encapsulation of micromechanical devices in semiconductor processes
03/1996
03/28/1996DE19531058A1 Semiconductor acceleration sensor for e.g. pressure sensor with integrated computer chip
03/27/1996EP0703429A2 Probe with torsion lever structure, and scanning probe microscope and record/reproducing apparatus utilizing the same
03/27/1996EP0702796A1 Microelectromechanical lateral accelerometer
03/19/1996US5500549 Semiconductor yaw rate sensor
03/14/1996WO1996008036A1 Process for producing micromechanical structures by means of reactive ion etching
03/14/1996DE19506404C1 Separating and drying micro-mechanical elements without sticking
03/13/1996EP0700524A1 Process for producing surface micromechanical structures
03/07/1996DE4431478A1 Micromechanical suspension device for acceleration sensor
03/05/1996US5497262 Support posts for micro-mechanical devices
03/05/1996US5495761 Integrated accelerometer with a sensitive axis parallel to the substrate
02/1996
02/28/1996EP0518997B1 Differential capacitive transducer
02/21/1996CN1117148A Method of providing sacrificial spacer for micro-mechanical devices
02/14/1996CN1116716A Array of thin film actuated mirrors having an improved optical efficiency and method for the manufacture thereof
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