| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 08/09/2001 | WO2001057900A1 Microelectromechanical micro-relay with liquid metal contacts |
| 08/09/2001 | WO2001057899A1 Electronically switching latching micro-magnetic relay and method of operating same |
| 08/09/2001 | WO2001057578A1 Switching arrangement for a radiation guide |
| 08/09/2001 | WO2001057295A1 Patterning of nanocrystalline diamond films for diamond microstructures useful in mems and other devices |
| 08/09/2001 | WO2001056920A2 Micro-electromechanical system device |
| 08/09/2001 | WO2001056919A2 Micro-electro-mechanical-system (mems) mirror device and methods for fabricating the same |
| 08/09/2001 | WO2001056634A1 Variable infusion rate catheter |
| 08/09/2001 | WO2001056633A2 Single-use therapeutic substance delivery device with infusion rate control |
| 08/09/2001 | US20010012739 Composite microelectronic spring structure and method for making same |
| 08/09/2001 | DE10004964A1 Micromechanical cap structure comprises substrate in the form of wafer with a cavern having a base surface and parallel side wall sections lying opposite each other with stabilizing wall sections connected to the side wall sections |
| 08/08/2001 | EP1121619A1 Membrane-actuated charge controlled mirror |
| 08/08/2001 | EP1121618A1 Field emission charge controlled mirror (fea-ccm) |
| 08/08/2001 | EP1121616A2 Flexible, modular, compact fiber optic switch |
| 08/07/2001 | US6272083 Method of and apparatus for recording/reproducing information signal, recording/reproducing head device. Memory medium, and head element and manufacture thereof |
| 08/07/2001 | US6271052 Process for integrating dielectric optical coatings into micro-electromechanical devices |
| 08/07/2001 | CA2220773C Gimballed vibrating wheel gyroscope having strain relief features |
| 08/04/2001 | CA2332216A1 Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods |
| 08/02/2001 | WO2001056069A1 A METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE OF SiC |
| 08/02/2001 | WO2001056066A1 A method for forming a micromechanical device |
| 08/02/2001 | WO2001055952A2 Method and system for collecting and transmitting chemical information |
| 08/02/2001 | WO2001055769A1 A deflectable spatial light modulator having superimposed hinge and deflectable element |
| 08/02/2001 | WO2001055704A1 System for transferring fluid samples through a sensor array |
| 08/02/2001 | WO2001055703A1 Method of preparing a sensor array |
| 08/02/2001 | WO2001055702A1 Portable sensor array system |
| 08/02/2001 | WO2001055701A1 System and method for the analysis of bodily fluids |
| 08/02/2001 | WO2001055675A1 Angular rate sensor |
| 08/02/2001 | US20010010676 Memory medium |
| 08/02/2001 | DE10002363A1 Production of a micromechanical structure comprises applying a sacrificial layer to a base body, forming a covering layer, forming a reinforcing layer, partially removing the sacrificial layer, and removing the reinforcing layer |
| 08/02/2001 | CA2401782A1 Portable sensor array system |
| 08/02/2001 | CA2398134A1 Angular rate sensor |
| 08/01/2001 | EP1119792A2 Micromachined members coupled for relative rotation by torsional flexure hinges |
| 07/31/2001 | US6269067 Method of and apparatus for recording/reproducing information signal recording/reproducing head device memory and head element and manufacture thereof |
| 07/31/2001 | US6268232 Method for fabricating a micromechanical component |
| 07/31/2001 | US6267605 Self positioning, passive MEMS mirror structures |
| 07/26/2001 | WO2001053194A1 Microdevice and its production method |
| 07/26/2001 | DE19940581C2 Verfahren zur Herstellung integrierter Sensoren A process for manufacturing integrated sensors |
| 07/25/2001 | EP1119032A2 A method and an apparatus for producing a semiconductor device |
| 07/25/2001 | EP1117937A2 Proportional micromechanical device |
| 07/24/2001 | US6265758 Semiconductor active electrostatic device |
| 07/24/2001 | US6265239 Micro-electro-mechanical optical device |
| 07/24/2001 | US6265238 Electrostatic capacitive sensor and method for manufacturing the same |
| 07/19/2001 | WO2001052399A1 Micro actuator with optimised deformable structure for disc storage and method for making same |
| 07/19/2001 | WO2001052308A1 Dendritic material sacrificial layer micro-scale gap formation method |
| 07/19/2001 | WO2001051973A1 Mems optical switch and method of manufacture |
| 07/19/2001 | WO2001001025A3 Microfabricated elastomeric valve and pump systems |
| 07/19/2001 | US20010008457 Microelectromechanical optical switch and method of manufacture thereof |
| 07/19/2001 | US20010008357 Methods of fabricating in-plane MEMS thermal actuators |
| 07/19/2001 | CA2397238A1 Mems optical switch and method of manufacture |
| 07/18/2001 | EP1116063A1 A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
| 07/18/2001 | EP1116003A1 Apparatus and method for controlling fluid in a micromachined boiler |
| 07/18/2001 | EP1115649A1 Micromechanical component with sealed membrane openings |
| 07/18/2001 | CN1304379A Temp. compensated microelectromechanical structures and methods of compensatiing effects of ambient temp. variations |
| 07/17/2001 | US6262962 Method of and apparatus for recording/reproducing information signal, recording/reproducing head device, memory medium, and head element and manufacture thereof |
| 07/17/2001 | US6262827 Galvano-mirror |
| 07/17/2001 | US6262464 Encapsulated MEMS brand-pass filter for integrated circuits |
| 07/17/2001 | US6262463 Micromachined acceleration activated mechanical switch and electromagnetic sensor |
| 07/17/2001 | US6261964 Material removal method for forming a structure |
| 07/17/2001 | US6261943 Method for fabricating free-standing thin metal films |
| 07/17/2001 | US6261494 Substrates and plastic deformation |
| 07/12/2001 | WO2001050585A1 Tiltable electrostatic microactuator and method for using same |
| 07/12/2001 | WO2001050137A2 Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same |
| 07/12/2001 | WO2001050106A1 Grain growth of electrical interconnection for microelectromechanical systems (mems) |
| 07/12/2001 | WO2000075068A3 Method and apparatus for stress pulsed release and actuation of micromechanical structures |
| 07/12/2001 | DE19963382A1 Mikrospiegel Micromirror |
| 07/12/2001 | DE19962231A1 Verfahren zur Herstellung mikromechanischer Strukturen A process for producing micromechanical structures |
| 07/12/2001 | DE10000368A1 Mikromechanische Struktur, insbesondere für einen Beschleunigungssensor oder Drehratensensor, und entsprechendes Herstellungsverfahren Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor, and manufacturing method thereof |
| 07/11/2001 | EP1113981A1 Micromechanical component and its production method |
| 07/10/2001 | US6259548 Micro-mirror device |
| 07/10/2001 | US6257739 Scanning vertical cavity surface emitting laser array capable of page-width image scan |
| 07/05/2001 | WO2001048527A2 Micromirror |
| 07/05/2001 | WO2000054312A8 Ic-compatible parylene mems technology and its application in integrated sensors |
| 07/05/2001 | US20010006248 Micromachined device having electrically isolated components and a method for making the same |
| 07/05/2001 | DE19960094A1 Verfahren zur mikromechanischen Herstellung eines Halbleiterelements, insbesondere Beschleunigungssensors Process for the micromechanical fabrication of a semiconductor element, in particular acceleration sensor |
| 07/03/2001 | US6256134 Microelectromechanical devices including rotating plates and related methods |
| 07/03/2001 | US6255758 Polymer microactuator array with macroscopic force and displacement |
| 07/03/2001 | US6255757 Microactuators including a metal layer on distal portions of an arched beam |
| 06/28/2001 | WO2001046674A1 Apparatus for evaluating electrical characteristics |
| 06/28/2001 | WO2001046664A2 Method for producing micromechanical structures |
| 06/28/2001 | WO2001046489A1 Ion beam modification of residual stress gradients in thin film polycrystalline silicon membranes |
| 06/28/2001 | WO2001046458A1 Deposited thin films and their use in detection, attachment, and bio-medical applications |
| 06/28/2001 | WO2001046066A2 Sensor with at least one micromechanical structure and method for the production thereof |
| 06/28/2001 | DE19961578A1 Sensor comprises a micromechanical structure based on silicon integrated in the sensor chamber of a base wafer and a cover made of a transparent deposition layer and a sealing layer |
| 06/28/2001 | CA2394942A1 Deposited thin films and their use in detection, attachment, and bio-medical applications |
| 06/27/2001 | EP1111331A1 Stylus for nanotechnology and its manufacture |
| 06/27/2001 | EP1110739A2 Amorphous silicon sensor with micro-spring interconnects for achieving high uniformity in integrated light-emitting sources |
| 06/27/2001 | EP1084392A4 Micromechanical potentiometric sensors |
| 06/27/2001 | CN1067771C Array of thin film actuated mirrors having an improved optical efficiency and method for the manufacture thereof |
| 06/26/2001 | US6253011 Micro-aligner for precisely aligning an optical fiber and an associated fabrication method |
| 06/26/2001 | US6251743 Method of liquid treatment of microstructures comprising bendable structural members |
| 06/26/2001 | US6251699 Method for fabricating micromechanical components |
| 06/26/2001 | US6251698 Method for making a machined silicon micro-sensor |
| 06/26/2001 | US6250165 Semiconductor physical quantity sensor |
| 06/21/2001 | WO2001045127A1 Electrostatically controlled variable capacitor |
| 06/21/2001 | WO2001045120A2 Variable capacitor and associated fabrication method |
| 06/21/2001 | WO2001044848A1 Microlamp |
| 06/21/2001 | WO2001044823A1 Micromechanical spring structure, especially for a rotational speed sensor |
| 06/21/2001 | WO2001044822A1 Different sacrificial layer thickness under fixed and movable electrodes (capacitive acceleration sensor) |
| 06/21/2001 | WO2001044105A1 Method of making high aspect ratio features during surface micromachining |
| 06/21/2001 | WO2001011411B1 Microelectromechanical optical switch and method of manufacture thereof |
| 06/21/2001 | US20010004548 Electronic devices including micromechanical switches |