| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 08/10/1999 | US5936294 Optical semiconductor component and method of fabrication |
| 08/05/1999 | WO1999012002A3 Micromachined gyros |
| 08/05/1999 | DE19903380A1 Semiconductor sensor for determining physical value, e.g. acceleration, pressure, vibration or angular speed, e.g. for motor vehicles |
| 08/05/1999 | DE19803857A1 Micromechanical electromagnetically-operated mirror device for microscanner |
| 08/04/1999 | EP0933012A1 Method and device for positioning and retaining micro-building-blocks |
| 08/03/1999 | US5933002 Controlled bending actuator system |
| 07/29/1999 | WO1999037995A1 Micromachined gas-filled chambers and method of microfabrication |
| 07/28/1999 | EP0897523A4 Semiconductor bridge device and method of making the same |
| 07/27/1999 | US5930595 Isolation process for surface micromachined sensors and actuators |
| 07/27/1999 | US5930594 Method of manufacturing rigid floating microstructure elements and a device equipped with such elements |
| 07/27/1999 | US5929498 Semiconductor device |
| 07/27/1999 | US5928968 Patterns in metal layer, tungsten plugs in oxide layer for contactors and immersion in basic solution |
| 07/22/1999 | WO1999036948A1 Integrated large area microstructures and micromechanical devices |
| 07/22/1999 | WO1999036941A2 Trench isolation for micromechanical devices |
| 07/21/1999 | EP0929746A1 Micro-machined device for fluids and method of manufacture |
| 07/21/1999 | EP0821806A4 Monomorph thin film actuated mirror array |
| 07/21/1999 | EP0821803A4 Thin film actuated mirror array for providing double tilt angle |
| 07/20/1999 | US5926716 Method for forming a structure |
| 07/20/1999 | US5925820 Device for measuring the volume of a flowing medium |
| 07/15/1999 | WO1999026333A3 Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same |
| 07/14/1999 | EP0928446A1 Miniature connector array |
| 07/14/1999 | EP0928371A2 Integrated electrically operable micro-valve |
| 07/13/1999 | US5923952 Method of making a semiconductor device |
| 07/13/1999 | US5922955 Gravity-compensation type accelerometer and process for producing such an accelerometer |
| 07/13/1999 | US5922212 Semiconductor sensor having suspended thin-film structure and method for fabricating thin-film structure body |
| 07/08/1999 | WO1999034383A1 Micro electro-mechanical systems relay |
| 07/08/1999 | WO1999034186A1 High temperature resonant integrated microstructure sensor |
| 07/06/1999 | US5920106 Semiconductor device and method for producing the same |
| 07/01/1999 | WO1999032919A1 Method for producing a micromechanical device |
| 07/01/1999 | WO1999032890A1 Micromechanical device and corresponding production method |
| 06/24/1999 | DE19821841C1 Micro-device manufacture involving transfer of micro-structured layer from production substrate to another substrate |
| 06/24/1999 | DE19757197A1 Manufacturing method for micromechanical device, esp. for resonant oscillating mirror device |
| 06/23/1999 | EP0924763A2 Self-assembling micro-mechanical device |
| 06/22/1999 | US5915168 Method for packaging individual die at the wafer level |
| 06/22/1999 | US5914882 Device for and method of preventing accidents in hand-operated machine tools due to tool jamming |
| 06/22/1999 | US5914801 Microelectromechanical devices including rotating plates and related methods |
| 06/22/1999 | US5914553 Multistable tunable micromechanical resonators |
| 06/22/1999 | US5914521 Semiconductor device |
| 06/22/1999 | US5914520 Micromechanical sensor device |
| 06/17/1999 | WO1999030410A1 Electrostatic microactuators, active three-dimensional microcatheters using same and method for making same |
| 06/17/1999 | WO1998040909A3 Method of forming etched structures comprising implantation steps |
| 06/16/1999 | EP0922944A2 Method for manufacturing integrated structures including removing a sacrificial region |
| 06/15/1999 | US5913125 Method of controlling stress in a film |
| 06/15/1999 | US5912499 Pressure transducer comprising a sealed transducer with a rigid diaphragm |
| 06/01/1999 | US5909078 Thermal arched beam microelectromechanical actuators |
| 05/27/1999 | WO1999026333A2 Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same |
| 05/26/1999 | EP0917652A1 Tunneling sensor with linear force rebalance |
| 05/25/1999 | US5906708 Vapor depositing an etching-stop dielectric layer |
| 05/20/1999 | WO1999024783A1 Microelectromechanical positioning apparatus |
| 05/20/1999 | WO1999024744A1 Micromachined parylene membrane valve and pump |
| 05/20/1999 | CA2304723A1 Microelectromechanical positioning apparatus |
| 05/19/1999 | EP0916145A1 Encapsulated micro-relay modules and methods of fabricating same |
| 05/19/1999 | EP0722565B1 A catalytic gas sensor |
| 05/18/1999 | US5905241 Threshold microswitch and a manufacturing method thereof |
| 05/12/1999 | EP0914564A1 Piezo-electrically actuated microvalve |
| 05/12/1999 | EP0914563A1 Piezo-electric operated microvalve |
| 05/12/1999 | EP0823039A4 Micromachined acceleration and coriolis sensor |
| 05/11/1999 | US5903380 Micro-electromechanical (MEM) optical resonator and method |
| 05/11/1999 | US5902556 Catalytic gas sensor |
| 05/06/1999 | WO1998014787A8 Structure comprising an insulated part in a solid substrate and method for producing same |
| 05/06/1999 | EP0912883A1 Vane-type micromachined silicon micro-flow meter |
| 05/04/1999 | US5900998 Thin film actuated mirror array and method for the manufacture thereof |
| 04/20/1999 | US5895866 Micromachined silicon micro-flow meter |
| 04/20/1999 | US5895852 Angular velocity sensor |
| 04/20/1999 | US5895850 Micromechanical resonator of a vibration gyrometer |
| 04/14/1999 | CN1213778A Semiconductor device and method for making the same |
| 04/13/1999 | US5894091 Composite sensor |
| 04/08/1999 | WO1999017375A1 Method of anodizing silicon substrate and method of producing acceleration sensor |
| 04/07/1999 | EP0907076A2 Methods of fabricating integrated, aligned tunneling tip pairs |
| 04/07/1999 | EP0764336A4 Micromechanical memory sensor |
| 04/01/1999 | WO1999016096A1 Thermal arched beam microelectromechanical devices and associated fabrication methods |
| 04/01/1999 | WO1998048608A3 Microbellows actuator |
| 03/30/1999 | US5890099 Apparatus for measuring a turning rate, particularly of a motor vehicle |
| 03/30/1999 | US5889541 Two-dimensional print cell array apparatus and method for delivery of toner for printing images |
| 03/30/1999 | US5889311 Semiconductor acceleration sensor |
| 03/30/1999 | US5888633 Micro-structures having structural members capable of withstanding permanent bend |
| 03/23/1999 | US5886261 Microelectronic integrated sensor and method for producing the sensor |
| 03/23/1999 | US5885468 Micromechanical component and production method |
| 03/17/1999 | EP0584233B1 Submicron tip structure with opposed tips |
| 03/16/1999 | US5883705 Atomic force microscope for high speed imaging including integral actuator and sensor |
| 03/16/1999 | US5882532 Fabrication of single-crystal silicon structures using sacrificial-layer wafer bonding |
| 03/11/1999 | WO1999012002A2 Micromachined gyros |
| 03/10/1999 | EP0900385A1 Electrostatic drive for accelerometer |
| 03/09/1999 | US5880369 Micromachined device with enhanced dimensional control |
| 03/04/1999 | WO1999010907A1 Micromechanical electrostatic relay and method for the production thereof |
| 03/04/1999 | CA2300956A1 Micromechanical electrostatic relay, and a method for its production |
| 03/02/1999 | US5876187 Micropumps with fixed valves |
| 02/25/1999 | WO1999009321A1 Micro pump comprising an inlet control member for its self-priming |
| 02/25/1999 | CA2301878A1 Micro pump comprising an inlet control member for its self-priming |
| 02/24/1999 | EP0897523A1 Semiconductor bridge device and method of making the same |
| 02/24/1999 | CN1208676A Actuator, method of driving same, computer-readable recording medium with program making computer executing driving method, and compact machine tool using actuator |
| 02/16/1999 | US5872496 Planar type electromagnetic relay and method of manufacturing thereof |
| 02/16/1999 | US5872309 Method for checking the sealing of a package and apparatus for measuring viscosity |
| 02/11/1999 | WO1999006793A1 Microscope for compliance measurement |
| 02/09/1999 | US5869768 Material testing device, material testing apparatus and material testing method |
| 02/09/1999 | US5869354 Forming a etch stop layer in the substrate parallel to the principal surface, forming semiconductor on the principal surface, depositing a low stress dielectric membranes over semiconductor, etching etch barrier and a substrate portion |
| 02/04/1999 | WO1999005589A1 Miniature connector array |
| 02/04/1999 | DE19830476A1 Semiconductor device for accelerometer |
| 02/04/1999 | CA2266406A1 Miniature connector array |
| 02/03/1999 | EP0895293A2 Semiconductor device comprising an aggregate of semiconductor micro-needles |