| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 06/21/2001 | DE19960604A1 Mikromechanische Federstruktur, insbesondere für einen Drehratensensor Micromechanical spring structure, especially for a yaw rate sensor |
| 06/21/2001 | CA2361511A1 Variable capacitor and associated fabrication method |
| 06/20/2001 | EP1108203A2 Micromechanical component protected against environmental influences |
| 06/19/2001 | US6249503 Method of and apparatus for recording/reproducing an information signal, recording/reproducing head device, memory medium, and head element |
| 06/19/2001 | US6248668 Dendritic material sacrificial layer micro-scale gap formation method |
| 06/19/2001 | US6247485 Miniature valve for filling the reservoir of an apparatus for the transdermal administration of medicine |
| 06/14/2001 | WO2001043450A2 Switching device and method of fabricating the same |
| 06/14/2001 | WO2001043153A1 Electronic devices including micromechanical switches |
| 06/14/2001 | WO2001042797A1 Micromechanical structure, in particular for an acceleration sensor |
| 06/14/2001 | CA2394179A1 Switching device and method of fabricating the same |
| 06/13/2001 | EP1105344A1 Micromechanical sensor and corresponding production method |
| 06/13/2001 | DE19959707A1 Mikromechanische Struktur, insbesondere für einen Beschleunigungssensor Micromechanical structure, in particular for an acceleration sensor |
| 06/12/2001 | US6246305 Apparatus and method for operating a micromechanical switch |
| 06/12/2001 | US6244112 Acceleration sensor and process for the production thereof |
| 06/12/2001 | US6244111 Micromechanical gradient sensor |
| 06/06/2001 | EP1104746A1 Micro-electro-mechanical optical device |
| 06/05/2001 | US6243082 Apparatus and method for visual display of images |
| 06/05/2001 | US6242734 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 06/05/2001 | US6242276 Method for fabricating micro inertia sensor |
| 06/05/2001 | US6240962 Parylene micro check valve and fabrication method thereof |
| 06/05/2001 | US6240782 Semiconductor physical quantity sensor and production method thereof |
| 05/31/2001 | DE19964218A1 Elektromechanisches Bauelement und Verfahren zur Herstellung desselben An electromechanical component and method of manufacturing the same |
| 05/30/2001 | EP1103835A1 Micro-electro-mechanical optical device |
| 05/30/2001 | EP1010361A4 Microfabricated high aspect ratio device with electrical isolation and interconnections |
| 05/29/2001 | US6239473 Trench isolation for micromechanical devices |
| 05/29/2001 | US6238805 Low-stress interface between materials having different coefficients of expansion and method for fabricating same |
| 05/29/2001 | US6238580 Method of HF vapor release of microstructures |
| 05/29/2001 | US6237619 Micro-machined device for fluids and method of manufacture |
| 05/25/2001 | WO2001036321A1 Apparatus and method for forming a membrane with nanometer scale pores |
| 05/25/2001 | WO2001036319A1 Method for reducing variations in arrays of micro-machined cantilever structures using ion implantation |
| 05/25/2001 | WO2001006543A3 Microelectromechanical device with moving element |
| 05/23/2001 | EP1101730A2 Encapsulation process for microelectromechanical structures |
| 05/23/2001 | EP0914563B1 Piezo-electric operated microvalve |
| 05/23/2001 | CN1296297A Enclosing technology for miniature eletric mechanical structure |
| 05/22/2001 | US6236491 Micromachined electrostatic actuator with air gap |
| 05/22/2001 | US6236139 Temperature compensated microelectromechanical structures and related methods |
| 05/22/2001 | US6236096 Structure of a three-electrode capacitive pressure sensor |
| 05/22/2001 | US6236005 Micromechanical acceleration switch |
| 05/22/2001 | US6235550 Integrated sensor having plurality of released beams for sensing acceleration and associated methods |
| 05/17/2001 | WO2001035484A1 Minute electromechanical actuation and fluid control devices and integrated systems based on low temperature co-fired ceramic (ltcc) tape technology |
| 05/17/2001 | WO2001035433A2 Cmos-compatible mem switches and method of making |
| 05/17/2001 | WO2000058729A3 Micromechanical antibody sensor |
| 05/17/2001 | DE19954091A1 Microthermal column device has substrate, floating membrane on substrate, etching window dividing membrane, micro structures connecting membrane, recess between substrate/membrane |
| 05/17/2001 | DE19954089A1 Thin layer device, used as thermocolumn, bolometer, pressure sensor, flow meter or gas sensor, comprises recess penetrating substrate, lower layer, structural layer and etching window |
| 05/16/2001 | EP1099971A2 Microelectromechanical optical isolators |
| 05/15/2001 | US6232861 Electromagnetic actuator |
| 05/15/2001 | US6232597 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 05/15/2001 | US6232140 Semiconductor integrated capacitive acceleration sensor and relative fabrication method |
| 05/15/2001 | US6232139 Method of making suspended thin-film semiconductor piezoelectric devices |
| 05/15/2001 | CA2325097A1 Encapsulation process for microelectromechanical structures |
| 05/10/2001 | WO2001033711A1 Time base comprising an integrated micromechanical ring resonator |
| 05/10/2001 | WO2001033648A1 Piezoelectric macro-fiber composite actuator and manufacturing method |
| 05/10/2001 | WO2001033226A1 Cantilever sensors and transducers |
| 05/10/2001 | DE10043854A1 Capacitive acceleration sensor with increased support for stationary element of capacitor structure |
| 05/10/2001 | CA2831366A1 Piezoelectric macro-fiber composite actuator and manufacturing method |
| 05/10/2001 | CA2389980A1 Time base comprising an integrated micromechanical ring resonator |
| 05/10/2001 | CA2389146A1 Piezoelectric macro-fiber composite actuator and manufacturing method |
| 05/09/2001 | EP1097901A2 Method of fabricating micro electro mechanical system structure which can be vacuum-packaged at wafer level |
| 05/09/2001 | CN1294303A Miniature mechanical appts. |
| 05/08/2001 | US6229684 Variable capacitor and associated fabrication method |
| 05/08/2001 | US6229683 High voltage micromachined electrostatic switch |
| 05/08/2001 | US6229640 Microelectromechanical optical switch and method of manufacture thereof |
| 05/08/2001 | US6229138 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 05/08/2001 | US6227809 Method for making micropumps |
| 05/08/2001 | US6227054 Vibration wave detecting method and vibration wave detector |
| 05/08/2001 | US6227049 Acceleration sensor and process for the production thereof |
| 05/03/2001 | WO2001031664A1 Optically controlled mem switches |
| 05/02/2001 | EP1096289A2 Micro-mirror device |
| 05/02/2001 | EP1096260A1 Micromechanical device |
| 05/02/2001 | EP1096259A1 High-vacuum packaged microgyroscope and method for manufacturing the same |
| 05/01/2001 | US6225668 Semiconductor device having a single crystal gate electrode and insulation |
| 05/01/2001 | US6225145 Method of fabricating vacuum micro-structure |
| 04/26/2001 | WO2001029565A1 Acceleration sensor with limited movability in the vertical direction |
| 04/26/2001 | WO2001028915A1 Gas sensor and fabrication method thereof |
| 04/19/2001 | WO2001027026A1 Electromechanical component and method for producing said component |
| 04/19/2001 | WO2001027025A1 Electro-mechanical component and method for producing the same |
| 04/19/2001 | WO1998005973A8 Tunneling sensor with linear force rebalance |
| 04/19/2001 | DE19949605A1 Acceleration sensor for car air bag control has micromachined stop bars prevents misfunction due to perpendicular acceleration |
| 04/19/2001 | DE19940581A1 Verfahren zur Herstellung integrierter Sensoren A process for manufacturing integrated sensors |
| 04/18/2001 | EP1093143A1 Flip-chip bonded micro-relay on integrated circuit chip |
| 04/18/2001 | EP1093142A2 Dual motion electrostatic actuator design for mems micro-relay |
| 04/18/2001 | EP1093141A2 Non-volatile mems micro-relays using magnetic actuators |
| 04/18/2001 | EP1093005A2 Micro-electro-mechanical optical device |
| 04/18/2001 | EP1093003A2 Micro-electro-mechanical optical device |
| 04/17/2001 | US6219015 Method and apparatus for using an array of grating light valves to produce multicolor optical images |
| 04/17/2001 | US6218911 Planar airbridge RF terminal MEMS switch |
| 04/17/2001 | US6218209 Integrated released beam sensor for sensing acceleration and associated methods |
| 04/15/2001 | CA2323189A1 Dual motion electrostatic actuator design for mems micro-relay |
| 04/11/2001 | EP0950190B1 Method for the production of a micromechanical semiconductor array |
| 04/11/2001 | CN1290968A Semiconductor structure and its producing method |
| 04/10/2001 | US6215645 Differential capacitor structure |
| 04/10/2001 | US6215222 Optical cross-connect switch using electrostatic surface actuators |
| 04/10/2001 | US6215221 Electrostatic/pneumatic actuators for active surfaces |
| 04/10/2001 | US6212939 Uncoated microcantilevers as chemical sensors |
| 04/05/2001 | WO2001024307A1 Small-sized phase shifter and method of manufacture thereof |
| 04/05/2001 | WO2001024228A2 Temporary bridge for micro machined structures |
| 04/05/2001 | WO2001023300A1 Dissolved wafer fabrication process and associated microelectromechanical device having a support substrate with spacing mesas |
| 04/05/2001 | DE10045340A1 Semiconductor structure used in sensors comprises a deformable crosspiece arrangement on a substrate |
| 04/04/2001 | EP1089356A2 Piezoelectric/electrostrictive device and method of manufacturing same |
| 04/04/2001 | EP1089261A1 A method of producing suspended elements for electrical connection between two portions of a micro-mechanism which can move relative to one another |