| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 03/14/1995 | US5398229 Method of manufacturing cantilever drive mechanism, method of manufacturing probe drive mechanism, cantilever drive mechanism, probe drive mechanism and electronic device which uses the same |
| 03/14/1995 | US5398011 Microrelay and a method for producing the same |
| 03/08/1995 | EP0641485A1 Membrane dielectric isolation ic fabrication |
| 03/07/1995 | US5395802 Process for making semiconductor acceleration sensor having anti-etching layer |
| 02/28/1995 | US5393710 Each of the pixels for display can be controlled by use of electrostatic force to pass or shut a light beam, thereby displaying stationary or moving images |
| 02/28/1995 | US5392650 Micromachined accelerometer gyroscope |
| 02/16/1995 | WO1995004933A1 Method for fabricating microstructures using temporary bridges |
| 02/14/1995 | US5389198 Structure and method of manufacturing the same |
| 02/14/1995 | US5388460 Capacitive sensor for detecting a physical value such as acceleration |
| 02/08/1995 | EP0637386A1 Method for fabricating microstructures. |
| 02/02/1995 | WO1995003561A1 Intelligent sensor for near field optical device |
| 02/02/1995 | WO1995003531A1 Acoustic microscope |
| 02/02/1995 | DE4426590A1 Kapazitiver Halbleiter-Beschleunigungssensor Capacitive semiconductor acceleration sensor |
| 01/11/1995 | EP0632880A1 Micromechanical sensor. |
| 01/05/1995 | WO1995000258A1 Method of applying a monolayer lubricant to micromachines |
| 01/03/1995 | US5377544 Rotational vibration gyroscope |
| 01/03/1995 | US5377527 Thermal conductivity measuring device |
| 12/28/1994 | EP0631122A1 High sensitivity miniature pressure transducer |
| 12/22/1994 | WO1994029400A1 Method of producing microchannel/microcavity structures |
| 12/14/1994 | EP0539393B1 Micro-mechanical rotational-speed sensor |
| 12/08/1994 | WO1994028427A1 Microelectromechanical lateral accelerometer |
| 12/08/1994 | WO1994028426A1 Process for producing surface micromechanical structures |
| 11/29/1994 | US5369544 Silicon-on-insulator capacitive surface micromachined absolute pressure sensor |
| 11/22/1994 | US5367429 Electrostatic type micro transducer and control system using the same |
| 11/15/1994 | US5364497 Method for fabricating microstructures using temporary bridges |
| 11/09/1994 | EP0623807A1 Microstructure for vibratory gyroscope |
| 11/08/1994 | US5362213 Micro-pump and method for production thereof |
| 11/01/1994 | US5359893 Multi-axes gyroscope |
| 10/25/1994 | US5357807 Micromachined differential pressure transducers |
| 10/19/1994 | EP0620415A1 Angular velocity sensor |
| 10/18/1994 | US5357108 Cantilever type displacement element, and scanning tunneling microscope or information processing apparatus using same |
| 10/12/1994 | EP0619642A2 Micro-motor and method of fabrication |
| 10/11/1994 | US5354695 Membrane dielectric isolation IC fabrication |
| 10/05/1994 | EP0618425A1 Sensor head and method for its manufacture |
| 10/04/1994 | US5351412 Micro positioning device |
| 09/15/1994 | DE4309206C1 Semiconductor device having a force and/or acceleration sensor |
| 09/14/1994 | EP0615147A1 Low reset voltage process for DMD |
| 09/13/1994 | US5345824 Monolithic accelerometer |
| 09/06/1994 | US5344117 Micro-actuator |
| 08/31/1994 | EP0613009A2 System for detecting and measuring acceleration |
| 08/18/1994 | WO1994018697A1 Microstructures and single mask, single-crystal process for fabrication thereof |
| 08/18/1994 | WO1992022820A3 Semiconductor accelerometer and method of its manufacture |
| 08/11/1994 | DE4402085A1 Kapazitiver, an seiner Oberfläche mikrobearbeiteter Differenzdrucksensor und Verfahren zu dessen Herstellung Capacitive, micro-machined on its surface differential pressure sensor and method for its production |
| 08/09/1994 | US5335498 Contraction-extension mechanism type actuator |
| 08/02/1994 | US5334835 Probe drive mechanism and electronic device which uses the same |
| 08/02/1994 | US5334342 Etching substrate to form cavities, nucleating and growing polycrystalline diamond film on surface to fill cavities, then bonding optical material to film and removing it from substrate to expose patterns |
| 07/26/1994 | US5332469 Capacitive surface micromachined differential pressure sensor |
| 07/20/1994 | EP0606220A1 Semiconductor accelerometer and method of its manufacture. |
| 07/19/1994 | US5331454 Low reset voltage process for DMD |
| 07/06/1994 | EP0605303A1 Integrated accelerometer having the sensing axis parallel with the substrate |
| 07/06/1994 | EP0605302A2 Procedure for fabricating a pressure transducer using the silicon on isolation technique and transducer thus obtained |
| 07/06/1994 | EP0605300A1 Method for manufacturing accelerometers using the silicon on insulator technology and accelerometer thereby obtained |
| 07/05/1994 | US5327038 Walking expansion actuator |
| 07/05/1994 | US5326726 Forming chips and transistors with oxide layers, passivation, etching polysilicon for multilayer element |
| 06/29/1994 | EP0603770A2 Information recording and reproducing apparatus for recording and reproducing information by using a probe electrode |
| 06/28/1994 | US5323999 Microstructure gas valve control |
| 06/15/1994 | EP0601533A1 Micro vacuum device |
| 06/09/1994 | DE4338433A1 Piezo-operating element for scanning tunnelling microscope - has piezoelectric material applied to surface of surface adjacent control electrode. |
| 05/31/1994 | US5316979 RIE process for fabricating submicron, silicon electromechanical structures |
| 05/25/1994 | EP0597879A1 Acceleration sensor and process for its production |
| 05/24/1994 | US5314572 Integrated circuits, bridge supported by four corner posts |
| 05/11/1994 | EP0596455A1 Fabrication method for micromechanical element |
| 05/10/1994 | US5311360 Method and apparatus for modulating a light beam |
| 04/27/1994 | EP0594534A1 Multicomponent force and moment measurement |
| 04/26/1994 | US5305640 Digital flexure beam accelerometer |
| 04/14/1994 | DE4234237A1 Piezoelectric micro-actuator with silicon thrust beam - has temp. compensation for differential expansion of beam and piezoelectric thruster |
| 04/13/1994 | EP0591554A1 Acceleration sensor and its manufacture |
| 03/16/1994 | EP0540510B1 Micromechanic manipulator |
| 03/02/1994 | EP0584233A1 Methods of fabricating integrated, aligned tunneling tip pairs |
| 12/28/1993 | CA1325530C Control and detection circuitry for mass airflow sensors |
| 12/23/1993 | WO1993025915A1 Method for fabricating monolithic chip containing integrated circuitry and self-supporting microstructure |
| 12/22/1993 | EP0574697A1 Double pinned sensor utilizing a tensile film |
| 12/22/1993 | CN1079822A Optical force transducer based on a fabry-perot resonator, with a sveeping fabry-perot resonator as an element of the transducing part |
| 12/15/1993 | EP0574022A2 Movement actuator/sensor systems |
| 12/08/1993 | EP0573267A1 A microrelay and a method for producing the same |
| 12/07/1993 | US5268571 Micro-displacement element, and scanning tunneling microscope and information processing apparatus using same |
| 11/24/1993 | EP0571107A1 Optical force transducer based on a Fabry-Perot resonator, with a sweeping Fabry-Perot resonator as an element of the transducing part |
| 11/11/1993 | WO1993022694A1 Modulating a light beam |
| 11/11/1993 | WO1993022690A1 Acceleration sensor and its manufacture |
| 11/09/1993 | US5259737 Silicon semiconductor sandwiched between glass layers; medical equipment |
| 11/09/1993 | US5259247 Sensor |
| 11/02/1993 | US5258097 Dry-release method for sacrificial layer microstructure fabrication |
| 10/28/1993 | WO1993021748A1 Membrane dielectric isolation ic fabrication |
| 10/28/1993 | WO1993021536A1 Method for fabricating microstructures |
| 10/27/1993 | EP0567075A2 A method for producing semiconductor device |
| 09/30/1993 | WO1993019343A1 Micromechanical sensor |
| 09/14/1993 | US5243861 Capacitive type semiconductor accelerometer |
| 09/07/1993 | US5242711 Microstructure |
| 09/07/1993 | US5241864 Double pinned sensor utilizing a tensile film |
| 08/25/1993 | EP0556622A1 Micro-pump and method for production thereof |
| 08/18/1993 | EP0556009A2 Method of producing a buried boss diaphragm structure in silicon and product made thereby |
| 08/10/1993 | US5235187 Methods of fabricating integrated, aligned tunneling tip pairs |
| 08/10/1993 | US5233871 Hybrid accelerometer assembly |
| 08/04/1993 | EP0554128A1 Contraction-extension mechanism type actuator |
| 07/28/1993 | EP0478666A4 Microfabricated microscope assembly |
| 07/20/1993 | CA1320358C Silicon-based sensors and method of making same |
| 07/06/1993 | US5225959 Capacitive tactile sensor array and method for sensing pressure with the array |
| 06/23/1993 | EP0547742A1 Triaxial accelerometer |
| 06/23/1993 | EP0547580A1 Walking expansion actuator |
| 06/17/1993 | CA2070711A1 Walking expansion actuator |