Patents for B24B 37 - Lapping machines or devices; Accessories (20,836)
01/2008
01/23/2008EP1879720A1 Multi-layer polishing pad material for cmp
01/23/2008EP1755826A4 Polishing pad
01/23/2008CN101108470A LCD glass grinder
01/23/2008CN100363152C False making process and grinding pad regulating method for chemomechanical grinding process
01/22/2008US7320635 Device for sharpening chain saw teeth
01/17/2008WO2008008593A1 Polishing pad with window for planarization
01/17/2008US20080014841 Low friction planarizing/polishing pads and use thereof
01/17/2008US20080014839 Method For The Simultaneous Double-Side Grinding Of A Plurality Of Semiconductor Wafers, And Semiconductor Wafer Having Outstanding Flatness
01/17/2008US20080014838 Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition
01/17/2008US20080014756 Method of producing group 3 nitride substrate wafers and group 3 nitride substrate wafers
01/17/2008US20080014751 Method of manufacturing semiconductor device
01/17/2008US20080012556 Element for detecting the amount of lapping having a resistive film electrically connected to the substrate
01/17/2008US20080012157 System and method for delivering chemicals
01/16/2008EP1879222A2 Method of producing group 3 nitride substrate wafers and group 3 nitride substrate wafers
01/16/2008CN201006583Y Fixed grinding aids high efficiency grinding equipment for high precision ceramic
01/16/2008CN101107697A CMP polishing method, CMP polishing apparatus, and process for producing semiconductor device
01/16/2008CN101107098A Chemical-mechanical planarization tool force calibration method and system
01/16/2008CN101107097A Substrate polishing method and apparatus
01/16/2008CN101107095A Multi-layer polishing pad for low-pressure polishing
01/16/2008CN101107090A Electroprocessing profile control
01/16/2008CN101106905A Polishing pad and method of making same
01/16/2008CN101106085A Method of manufacturing semiconductor device
01/16/2008CN101106082A Method for the simultaneous double-side grinding of a plurality of semiconductor wafers, and semiconductor wafer having outstanding flatness
01/16/2008CN101104791A Cerium based polishing material and raw materials therefor
01/16/2008CN101104250A Method for effectively controlling CMP milling residual-film thickness
01/16/2008CN100362630C Polishing body, polishing device, semiconductor device, and method of manufacturing semiconductor device
01/16/2008CN100361784C Method and apparatus for heating polishing pad
01/10/2008WO2008004601A1 System and method for polishing surface of tape-like metal base material
01/10/2008WO2008004579A1 Polishing liquid for cmp and polishing method
01/10/2008WO2008004534A1 Polishing liquid for cmp
01/10/2008US20080009228 Polishing pad, method for manufacturing the polishing pad, and method for polishing an object
01/10/2008US20080007872 Storage device with slider with sacrificial lapping extension
01/09/2008EP1876639A1 Shower plate and method for manufacturing the same
01/09/2008EP1875987A2 Method and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate
01/09/2008CN201002204Y Steel ball grinding machine
01/09/2008CN201002203Y Steel ball flashing machine
01/09/2008CN101100595A Lapping liquid composition for glass substrate
01/09/2008CN100361277C Polishing composition and method for forming wiring structure using the same
01/09/2008CN100360447C Glass-ceramics
01/08/2008US7316976 Polishing method to reduce dishing of tungsten on a dielectric
01/08/2008US7316790 Securing a document by applying a metal sulfide phosphor powder containing particles that are spherical and have an average particle size of 0.3 to not greater than 10 mu m.; up-converter particles; emits at least two different wavelengths
01/08/2008US7316786 Method of polishing film to be polished
01/08/2008US7316725 Copper powders methods for producing powders and devices fabricated from same
01/03/2008US20080004193 Semiconductor process residue removal composition and process
01/03/2008US20080003936 Polishing pad for eddy current monitoring
01/03/2008US20080003925 Cmp Polishing Slurry and Method of Polishing Substrate
01/03/2008US20080003924 Polishing slurry and polishing method
01/03/2008US20080003828 Method for planarizing thin layer of semiconductor device
01/03/2008US20080000878 Method of texturing
01/02/2008EP1873820A1 Wafer transfer apparatus, polishing apparatus and wafer receiving method
01/02/2008CN101098944A Abrasive composition
01/02/2008CN101097834A Method for planarizing film of semiconductor device
01/02/2008CN101096077A Substrate holding device and polishing device
01/01/2008US7314402 Method and apparatus for controlling slurry distribution
01/01/2008US7314401 Methods and systems for conditioning planarizing pads used in planarizing substrates
12/2007
12/27/2007WO2007149113A2 Friction reducing aid for cmp
12/27/2007US20070298694 Wafer polishing head
12/27/2007US20070298693 CMP-apparatus retainer ring and manufacturing method thereof, and CMP apparatus
12/27/2007US20070298688 Magnetic Disk Substrate and Production Method of Magnetic Disk
12/27/2007US20070298606 Chemical-mechanical polishing method and apparatus
12/27/2007US20070295934 Polishing slurry and polishing method
12/27/2007US20070295265 Method for Producing Silicon Wafer and Silicon Wafer
12/26/2007EP1870928A1 Polishing composition
12/26/2007EP1868953A2 Composition and method for polishing a sapphire surface
12/26/2007EP1868769A2 Slurry composition and method for polishing organic polymer-based ophthalmic substrates
12/26/2007EP1483349B1 Anionic abrasive particles treated with positively-charged polyelectrolytes for cmp
12/26/2007CN101094748A Methods and apparatuses for electrochemical-mechanical polishing
12/25/2007US7311862 Phase separation to form interpenetrating polymer network comprising a continuous polymer-rich phase interspersed with a continuous polymer-depleted phase; binodal or spinodal decomposition; solidifying polymer-rich phase; evaporating or solvent stripping polymer-depleted phase
12/25/2007US7311855 Cerium oxide, acetylene compound, and water; flattening dielectrics; semiconductors
12/25/2007US7311592 Conductive polishing article for electrochemical mechanical polishing
12/25/2007US7311586 Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure
12/20/2007US20070293129 Substrate Holding Device And Polishing Apparatus
12/20/2007US20070293049 Slurry for CMP of Cu film, polishing method and method for manufacturing semiconductor device
12/20/2007US20070293047 Polishing method and method for fabricating semiconductor device
12/20/2007US20070289946 Method for polishing a substrate surface
12/20/2007DE102007027443A1 Polishing device for polishing semiconductor wafer, has main polishing arrangement, which has multiple polishing tables, multiple polishing heads and multiple loading and unloading stations, which are coupled with main frame arrangement
12/19/2007CN101091238A Silicon wafer polishing method and silicon wafer producing method, apparatus for polishing disc-like work and silicon wafer
12/19/2007CN100356523C Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material
12/19/2007CN100356516C Single-layer polishing pad and method of producing the same
12/19/2007CN100356515C Polishing pad and semiconductor substrate manufacturing method using the polishing pad
12/19/2007CN100355858C Slurry for chemical-mechanical polishing copper damascene structures
12/19/2007CN100355798C Manufacturing method of potishing pad use polyurethane foam and polyurethane foam
12/18/2007US7309618 Method and apparatus for real time metal film thickness measurement
12/18/2007US7309406 Method and apparatus for plating and polishing semiconductor substrate
12/13/2007WO2007142235A1 Polishing cloth for precision processing
12/13/2007US20070287362 Polishing composition and method of polishing with the same
12/13/2007US20070284338 Chemical mechanical polishing method
12/12/2007EP1865546A1 Abrasive for semiconductor integrated circuit device, method of polishing therewith and process for producing semiconductor integrated circuit device
12/12/2007EP1809439A4 Electronic die positioning device and method
12/12/2007EP1222056B1 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization
12/11/2007US7307023 Polishing method of Cu film and method for manufacturing semiconductor device
12/11/2007US7306747 Use of fluorinated additives in the etching or polishing of integrated circuits
12/11/2007US7306637 Chemical-mechanical polishing systems; particles are electrostatically associated with the polyelectrolyte, have a negative zeta potential, and are obtained by treating particles having a positive zeta potential with a charge-reversing agent.
12/11/2007US7306510 Method of adhering polishing pads and jig for adhering the same
12/11/2007US7306509 Processing device, processing method and method of manufacturing semiconductor device
12/11/2007US7306506 In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging
12/06/2007WO2007138975A1 Polishing composition and polishing method
12/06/2007WO2005123333A3 Single component pad backer for polishing head of an orbital chemical mechanical polishing machine and method therefor
12/06/2007US20070281587 Method of making and apparatus having polishing pad with window
12/06/2007US20070281485 Method of and apparatus for semiconductor device
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