Patents for B24B 37 - Lapping machines or devices; Accessories (20,836)
07/2008
07/02/2008CN100398261C Conductive polishing article for electrochemical mechanical polishing
07/01/2008US7393262 Apparatus including pin adapter for air bearing surface (ABS) lapping
06/2008
06/26/2008US20080153397 Methods for machining inorganic, non-metallic workpieces
06/26/2008DE102007058292A1 Substrat und Herstellungsverfahren desselben Of the same substrate and manufacturing processes
06/25/2008EP1936673A1 Polishing solution for cmp and method of polishing
06/25/2008EP1935954A1 Compositions for chemical mechanical planarization of copper
06/25/2008EP1935566A2 Substrate holding apparatus
06/25/2008EP1934017A1 Polishing platen and polishing apparatus
06/25/2008EP1934015A1 Cmp of copper/ruthenium substrates
06/25/2008CN101208781A Polishing compound and method for producing semiconductor integrated circuit device
06/25/2008CN101208180A Transparent microporous materials for CMP
06/25/2008CN101208178A Use of CMP for aluminum mirror and solar cell fabrication
06/25/2008CN100397584C Wafer grinding device and method
06/25/2008CN100397582C Grinding pad and its production method
06/25/2008CN100396750C Cerium-based abrasive material and method for preparation thereof
06/25/2008CN100396749C Chemical machine flating method, use of alumina slurry, and abradant for customing and machining
06/24/2008US7391594 Apparatus for providing an additional ground pad and electrical connection for grounding a magnetic recording head
06/24/2008US7391086 Conductive contacts and methods for fabricating conductive contacts for elctrochemical planarization of a work piece
06/19/2008WO2008072543A1 Method for separating bonded substrates, apparatus for separating bonded substrates and computer readable recording medium having program recorded thereon
06/19/2008US20080146131 Polishing Pad
06/19/2008US20080146128 Fabrication process of semiconductor device and polishing method
06/19/2008US20080146123 Semiconductor device manufacturing apparatus and method
06/19/2008DE112006001927T5 Polierkissen enthaltend ein Zwischenräume durchdringendes Netzwerk aus verflüssigtem Vinylmomomer mit darin befindlicher Polyurethanmatrix Polishing pad containing a spaces interpenetrating network of liquefied Vinylmomomer located therein with polyurethane matrix
06/19/2008DE10022649B4 Polierflüssigkeit und Verfahren zur Strukturierung von Metalloxiden Polishing liquid and method for patterning metal oxides
06/18/2008EP1931597A1 Cerium oxide powder for one-component cmp slurry, preparation method thereof, one-component cmp slurry composition comprising the same, and method of shallow trench isolation using the slurry
06/18/2008EP1467839A4 Method and apparatus for applying downward force on wafer during cmp
06/18/2008CN101203355A Polishing pad comprising magnetical sensitive particles and method for the use thereof
06/18/2008CN101200628A Polishing composition and polishing process
06/17/2008US7387970 Method of using an aqueous solution and composition thereof
06/17/2008US7386935 Methods and apparatus for controlling the lapping of a slider based on an amplitude of a readback signal produced from an externally applied magnetic field
06/12/2008WO2008069136A1 Method for purifying chemical added with chelating agent
06/12/2008US20080139094 Polishing pad, method for processing polishing pad and method for producing substrate using it
06/12/2008US20080139089 Method of polishing hard crystal substrate and polishing oil slurry therefor
06/12/2008US20080139087 Substrate Polishing Apparatus And Substrate Polishing Method
06/12/2008US20080138990 Polishing Composition and Polishing Method
06/12/2008US20080138721 correcting flatness, a step of correcting surface unevenness wherein the substrate surface is polished by means of a polishing pad ( unwoven fabric impregnated with a resin ) with preferred hardness , then finishing surface roughness to provide a substrate having a high-accuracy surface profile
06/11/2008EP1930938A1 Polishing agent, method for polishing surface to be polished, and method for manufacturing semiconductor integrated circuit device
06/11/2008CN101195293A Pre-honed blade with a curved profile lamella and method for producing said blade
06/11/2008CN101195206A Orthopaedic component manufacturing method and equipment
06/11/2008CN100394555C Polishing method using polishing pad and polishing liquid, and polishing liquid
06/11/2008CN100393832C Composition for polishing metal, polishing method for metal layer, and production method for wafer
06/10/2008US7384534 Amines, amides, carboxylate, dicarboxylate or tri-carboxylate groups containing chelating agents, a substituted or unsubstituted benzotriazole or a polymeric corrosion resistance agent, sodium hydroxide or ammonium hydroxide as pH adjuster, a solvent
06/10/2008US7384447 Coated nickel-containing powders, methods and apparatus for producing such powders and devices fabricated from same
06/05/2008WO2008066213A1 Surface treatment method for coated cutting insert
06/05/2008US20080133163 Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing
06/05/2008US20080132156 Polishing composition and polishing method
06/05/2008US20080132152 Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet
06/05/2008US20080127573 Deionized water, abrasive particles, pH adjusting agent, water soluble thickener, ethoxylated acetylene surfactant and heterocyclic amine; reducing haze and number of localized light scattering defects; microsmoothness
06/05/2008DE102006056623A1 System for chemical mechanical polishing, has controllable movable foreman head, which is formed to mount substrate and to hold in position, and foreman cushion, is mounted on plate, which is coupled with drive arrangement
06/04/2008EP1927605A1 Polymer material, foam obtained from same, and polishing pad using those
06/04/2008EP1927434A1 CMP conditioner
06/04/2008EP1927433A1 Device for separating two disc-shaped elements positioned one above the other when removing one
06/04/2008CN101191036A Slurry composition for chemical mechanical polishing and precursor composition thereof
06/04/2008CN101190502A Main pressure transmission mechanism of steel ball grinding machine
06/04/2008CN101190501A Pressure-limiting device of steel ball finishing machine
06/04/2008CN100392820C Method for polishing wafer
06/04/2008CN100392818C Method for processing chip capable of improving semiconductor chip geometric parameter
06/04/2008CN100392035C 抛光组合物 The polishing composition
06/04/2008CN100391693C Grinder and method for grinding workpiece
06/03/2008US7381647 Methods and systems for planarizing microelectronic devices with Ge-Se-Ag layers
06/03/2008US7381121 Base pad polishing pad and multi-layer pad comprising the same
06/03/2008US7381116 Polishing media stabilizer
05/2008
05/29/2008WO2008064268A2 Friction sensor for polishing system
05/29/2008WO2008064158A2 Lapping carrier and method
05/29/2008WO2008062846A1 Dressing stone, glass composition for holding abrasive grains, and glass-ceramic composition for holding abrasive grains
05/29/2008WO2001074959A8 Method for polishing a memory or rigid disk with an amino acid-containing composition
05/29/2008US20080125017 Polishing composition and polishing method
05/29/2008US20080125016 Method for Producing Polishing Agent, Polishing Agent Produced Thereby and Method for Producing Silicon Wafer
05/29/2008US20080124913 Slurry compositions and CMP methods using the same
05/29/2008US20080121840 mixing oxidizers, oxidized-metal etchants, protective film-forming agents and diluents, used for polishing semiconductors
05/29/2008US20080121839 Slurry Composition for Chemical Mechanical Polishing and Precursor Composition Thereof
05/29/2008US20080120918 Polishing composition and polishing process
05/28/2008EP1925649A2 Polishing composition and polishing process
05/28/2008EP1925648A2 Polishing composition and polishing process
05/28/2008EP1925647A2 Polishing composition and polishing method
05/28/2008EP1925400A1 Carrier ring for carrier head
05/28/2008EP1925399A2 Flexible membrane for carrier head
05/28/2008EP1925398A1 Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly
05/28/2008EP1796874B1 Polishing tool comprising a drive plate and a removable pad for finishing an ophthalmic lens
05/28/2008EP1683195B1 Semiconductor surface protecting method
05/28/2008EP1211023B1 Polishing body, polisher, polishing method, and method for producing semiconductor device
05/28/2008EP1159107B1 Method and apparatus for controlling abrasive flow machining
05/28/2008CN101189706A 半导体用研磨剂 Semiconductor abrasive
05/28/2008CN101186784A 抛光组合物 The polishing composition
05/28/2008CN101186711A Polishing composition and polishing method
05/28/2008CN101186020A Polishing apparatus, polishing brush and manufacturing method of disk-shaped substrate
05/28/2008CN100390942C Carrier head for chemical-mechanical polishing apparatus
05/28/2008CN100390245C 抛光组合物 The polishing composition
05/27/2008US7378454 Solid beads dispersed in aqueous solution; water swellable; wear resistance
05/27/2008US7378004 Pad designs and structures for a versatile materials processing apparatus
05/27/2008US7377170 System and method for the identification of chemical mechanical planarization defects
05/27/2008US7377018 Method of replacing a subpad of a polishing apparatus
05/22/2008US20080119122 Flexible Membrane for Carrier Head
05/21/2008EP1129821B1 Method and device for polishing semiconductor wafer
05/21/2008CN101184582A Multi-layer polishing pad material for cmp
05/21/2008CN100389161C 抛光组合物 The polishing composition
05/20/2008US7375830 Method and instrument for measuring semiconductor wafers
05/20/2008US7375023 Method and apparatus for chemical mechanical polishing of semiconductor substrates
05/20/2008US7374644 Conductive polishing article for electrochemical mechanical polishing
05/20/2008US7374477 Polishing pads useful for endpoint detection in chemical mechanical polishing
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