Patents for B24B 37 - Lapping machines or devices; Accessories (20,836)
07/2009
07/30/2009US20090191795 Composition for forming polishing layer of chemical mechanical polishing pad, chemical mechanical polishing pad and chemical mechanical polishing method
07/30/2009US20090191791 Polishing method and polishing apparatus
07/30/2009US20090191790 Substrate polishing apparatus
07/30/2009US20090188170 artificial diamond particles having primary particle diameters of 20 nm or less and impurities attached around these diamond particles; density of non-diamond carbon contained in the impurities is 95-99 % , density of chlorine contained in other than non-diamond carbon in the impurities is 0.5 to 3.5%
07/30/2009US20090188146 Rest for cleaning a rifle and for sighting a scope, a stock, and a bore of the rifle
07/29/2009EP2083027A2 Composition for forming polishing layer of chemical mechanical polishing pad, chemical mechanical polishing pad and chemical mechanical polishing method
07/29/2009EP2082834A1 Method of operating substrate processing apparatus and substrate processing apparatus
07/29/2009EP1680271A4 Working surface and system for production thereof
07/29/2009EP1639630A4 Polishing apparatus and polishing method
07/29/2009CN101496118A Method for polishing tape substrate for oxide superconductor, oxide superconductor, and base material for oxide superconductor
07/29/2009CN101495271A Compositions, methods and systems for polishing aluminum oxide and aluminum oxynitride substrates
07/29/2009CN101494164A Method of operating substrate processing apparatus and substrate processing apparatus
07/29/2009CN101491889A Flow control system
07/29/2009CN101491885A Grinding method of wafer control slice
07/29/2009CN100521108C Method of manufacturing semiconductor device
07/29/2009CN100521095C Method of forming inkjet print head
07/29/2009CN100519079C In situ activation device and method of a three-dimensional fixed abrasive article
07/29/2009CN100519078C Polishing apparatus and polishing method
07/23/2009WO2009090897A1 Electropolishing pad manufacturing method
07/23/2009WO2009090551A1 'head for the treatment of stone and ceramic material
07/23/2009US20090186560 Wafer de-chucking
07/23/2009US20090186557 Method of operating substrate processing apparatus and substrate processing apparatus
07/22/2009EP2006890A9 Aqueous dispersion for chemical mechanical polishing, chemical mechanical polishing method, kit for chemical mechanical polishing, and kit for preparing aqueous dispersion for chemical mechanical polishing
07/22/2009EP1628298B1 Stamper substrate and process for producing the same
07/22/2009CN101490815A System and method for delivering chemicals
07/22/2009CN101490814A Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing method for semiconductor device
07/22/2009CN101489724A System and method for processing high purity materials
07/22/2009CN101489722A Carrier for double-sided polishing device, double-sided polishing device using the same and double-sided polishing method
07/22/2009CN101489721A Polishing pad
07/22/2009CN101489720A 抛光垫 Polishing pad
07/22/2009CN100516159C 抛光组合物及抛光方法 Polishing composition and polishing method
07/22/2009CN100516157C Aqueous dispersion body for chemical mechanical grinding
07/22/2009CN100515685C 一种抛光垫及抛光方法 A polishing pad and polishing method
07/22/2009CN100515679C Method and apparatus for lapping magnetic head slider
07/21/2009US7563716 Polishing method
07/21/2009US7563294 Abrasive particles and methods of making and using the same
07/21/2009US7563157 Apparatus for conditioning chemical-mechanical polishing pads
07/16/2009WO2009089026A2 Composition and method for polishing nickel-phosphorous-coated aluminum hard disks
07/16/2009WO2009088945A1 Chemical-mechanical planarization pad
07/16/2009WO2009088832A1 Nanotopography control and optimization using feedback from warp data
07/16/2009WO2009088609A1 Detecting the presence of a workpiece relative to a carrier head
07/16/2009US20090181541 Polishing process of a semiconductor substrate
07/16/2009US20090181539 Polishing agent for semiconductor integrated circuit device, polishing method, and method for manufacturing semiconductor integrated circuit device
07/16/2009US20090179172 Polishing composition
07/15/2009EP2079106A2 Chemical mechanical polishing method and chemical mechanical polishing device
07/15/2009EP1910026B1 Self-contained conditioning abrasive article
07/15/2009CN101484979A Method and apparatus for chemical mechanical polishing of large size wafer with capability of polishing individual die
07/15/2009CN101484277A Wafer de-chucking
07/15/2009CN101484276A Polishing liquid for cmp and polishing method
07/15/2009CN101484274A System and method for polishing surface of tape-like metal base material
07/15/2009CN101480743A Electroprocessing profile control
07/15/2009CN100514581C Measuring alignment between a wafer chuck and polishing/plating receptacle
07/15/2009CN100513078C Real time polishing process monitoring
07/15/2009CN100513077C Planarization system and method using a carbonate containing fluid
07/15/2009CN100513076C Polishing apparatus and polishing method
07/15/2009CN100513075C Glass substrate for information recording medium and making method thereof
07/14/2009US7559823 Substrate processing apparatus and substrate processing method
07/09/2009WO2009086557A1 Chemical-mechanical planarization pad
07/09/2009WO2009085087A1 A cmp system and method using individually controlled temperature zones
07/09/2009US20090176373 Polishing agent for semiconductor integrated circuit device, polishing method, and method for manufacturing semiconductor integrated circuit device
07/09/2009US20090176372 Chemical mechanical polishing slurry and semiconductor device manufacturing method
07/09/2009US20090173910 Polishing composition
07/08/2009EP2076359A1 Stepped retaining ring
07/08/2009CN101479075A Abrasive articles, CMP monitoring system and method
07/08/2009CN101474773A Method for processing surface and edge of film coating epitaxial round silicon chip
07/08/2009CN101474772A Substrate holding device and polishing apparatus
07/08/2009CN101474771A Substrate holding apparatus and polishing apparatus
07/08/2009CN100511598C Method for machining a semiconductor wafer
07/08/2009CN100509289C Polishing head and polishing apparatus
07/08/2009CN100509288C Reflective resistant layer for polsihig pad window
07/08/2009CN100509287C Substrate holding device and polishing apparatus
07/02/2009WO2009081357A2 Pick and place tool grinding
07/02/2009US20090170410 Chemical-mechanical planarization pad
07/02/2009US20090170404 Apparatus and method for polishing media discs
07/02/2009US20090170323 Chemical mechanical polishing method and chemical mechanical polishing device
07/02/2009US20090170320 Cmp system and method using individually controlled temperature zones
07/02/2009DE112007002066T5 Polierkissen Polishing pad
07/02/2009DE102007063232A1 CMP-System und Verfahren unter Verwendung individuell gesteuerter Temperaturzonen CMP system and method of using individually controlled temperature zones
07/01/2009EP2075089A1 Polishing apparatus and polishing method
07/01/2009EP1350827B1 Abrasive, abrasive slurry, and method for manufacturing abrasive
07/01/2009CN101471288A Semiconductor device using CMP and manufacturing method thereof
07/01/2009CN101469253A Grinding composition
07/01/2009CN101469252A Polishing composition
07/01/2009CN100508132C Grooved polishing pad and method
07/01/2009CN100506490C Sandpaper for grinding supporting utensil membrane
07/01/2009CN100506485C Chemical mechanical grinding device and its control system and regulating method of grinding pad profile
07/01/2009CN100506484C Method for lapping and a lapping apparatus
06/2009
06/30/2009US7553768 Substrate and a method for polishing a substrate
06/30/2009US7553433 Producing large quantities of a high quality, dense aerosol for spray pyrolysis operations; multi-phase small particles for use in manufacturing electrically-conductive metallic films for electronic products; powder coatings for thick films
06/30/2009US7553214 Polishing article with integrated window stripe
06/25/2009WO2009078277A1 Abrasives
06/25/2009US20090163122 System and method for polishing surface of tape-like metallic base material
06/25/2009US20090163117 Method of producing glass substrate for perpendicular magnetic recording disk
06/25/2009US20090163114 Systems and Methods for Dynamic Slurry Blending and Control
06/25/2009US20090159845 Polishing slurry, method of treating surface of gaxin1-xasyp1-y crystal and gaxin1-xasyp1-y crystal substrate
06/24/2009EP2072185A1 Removable polishing pad for chemical mechanical polishing
06/24/2009CN201261164Y 研磨垫以及研磨装置 Polishing pad and polishing apparatus
06/24/2009CN100505172C Polishing composition and its stock solution, and polishing method using same
06/24/2009CN100505171C 抛光垫 Polishing pad
06/24/2009CN100503169C Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
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