Patents for B24B 37 - Lapping machines or devices; Accessories (20,836)
05/2009
05/14/2009CA2706285A1 Method and device for mechanically processing diamond
05/13/2009EP1448736B1 Boron-containing polishing system and method
05/13/2009CN201235498Y Lapping machine for two-side of wafer
05/13/2009CN101432854A Polishing liquid for CMP and method of polishing
05/13/2009CN101428398A 磨削装置 Grinding apparatus
05/13/2009CN101428383A Automotive drum type braking device grinding and renovating method
05/13/2009CN100487870C Cmp polishing system and abrasive solution
05/13/2009CN100486771C Loading and unloading system and method for grinding plates
05/13/2009CN100486770C Chemical mechanical polishing pad, manufacturing process thereof and chemical mechanical polishing method for semiconductor wafers
05/12/2009US7531108 Fine particle sizes; narrow particle size distribution; display devices and lighting elements; printed on explosives or ammunitions; currency; printed on confidential documentation
05/12/2009US7530877 Semiconductor processor systems, a system configured to provide a semiconductor workpiece process fluid
05/07/2009WO2009057258A1 Work polishing head, and polishing apparatus having the polishing head
05/07/2009US20090117829 Polishing slurry for metal, and polishing method
05/07/2009US20090117828 Polishing apparatus and substrate processing apparatus
05/06/2009EP2055429A2 Polishing apparatus
05/06/2009CN201231446Y Cleaning cushion for chemical and mechanical grinding
05/06/2009CN101426730A Method for producing oxide particle, slurry, polishing agent and method for polishing substrate
05/06/2009CN101426618A Manufacturing method of polishing pad
05/06/2009CN101423747A Abrasive, method of polishing wafer, and method of producing semiconductor device
05/06/2009CN101422882A Grinding mat and method
05/06/2009CN101422877A Grinding mat trimmer for chemical mechanical grinding
05/06/2009CN101422874A Polishing apparatus
05/06/2009CN100484718C Cushion layer for polishing pad
05/05/2009US7527723 Ion exchanger; surface smoothness; removal residues from workpiece
05/05/2009US7527722 Electrochemical mechanical planarization
05/05/2009US7527662 Resin structure and abrasive grains, wherein a critical surface tension of the resin is within a specified range; for chemical mechanical polishing; polishing efficiency, quality without any slurry
05/05/2009US7527546 Viscoelastic polisher and polishing method using the same
04/2009
04/30/2009WO2009054370A1 Cmp polishing liquid and method for polishing substrate using the same
04/30/2009WO2009054297A1 Method for polishing substrate
04/30/2009US20090111362 Polishing Apparatus
04/30/2009US20090111358 Polishing apparatus and polishing method
04/30/2009US20090108266 Friction Control in Apparatus Having Wide Bandgap Semiconductors
04/29/2009CN101417408A Synchronous belt drive four-position plane grinding device
04/29/2009CN101417407A Chemical mechanical grinding method
04/29/2009CN100482417C Lapping carrier for use in fabricating sliders
04/29/2009CN100482408C Attitude control device and precision machining apparatus comprising same
04/28/2009US7524801 Process for removing contaminant from a surface and composition useful therefor
04/28/2009US7524475 abrasive material for polishing silicon oxide layer or silicon nitride layer on silicon substrate; forming a shallow trench isolation; chemical mechanical polishing; obtained via a low-temperature calcination, pulverization, and a high-temperature calcination; high pore fraction and low strength
04/28/2009US7524410 Methods and apparatus for removing conductive material from a microelectronic substrate
04/28/2009US7524232 Workpiece centering apparatus and method of centering workpiece
04/23/2009WO2009051895A1 Method of forming a polyurea polyurethane elastomer containing chemical mechanical polishing pad
04/23/2009US20090104856 abrasion resistant; excellent in removal rate and in-plane uniformity; stable removal rate even when polishing a number of objects; irradiating sheet-shaped polymer molded article with an electron beam within an irradiation dose of 10 to 400 kGy; less processing time; 1,2-polybutadiene; cyclodextrin
04/23/2009US20090104852 Carrier, Method For Coating A Carrier, and Method For The Simultaneous Double-Side Material-Removing Machining Of Semiconductor Wafers
04/23/2009US20090104850 Polishing pad
04/23/2009US20090104847 Polishing monitoring method and polishing apparatus
04/23/2009US20090104778 Polishing Composition for CMP and device wafer producing method using the same
04/23/2009US20090103993 Method of Polishing a Tungsten Carbide Surface
04/23/2009US20090100764 Composition for removing photoresist layer and method for using it
04/23/2009DE102007050482A1 Workpiece finishing device, has processing spindle attached to frame, and electronic gradometer arranged at processing spindle for determining adjustment of spindle axis relative to vertical axis
04/23/2009DE102007049811A1 Läuferscheibe, Verfahren zur Beschichtung einer Läuferscheibe sowie Verfahren zur gleichzeitigen beidseitigen Material abtragenden Bearbeitung von Halbleiterscheiben Rotor disc, method for coating a rotor disc and method for simultaneous two-sided material-removing processing of semiconductor wafers
04/22/2009EP2051040A2 Polishing monitoring method and polishing apparatus
04/22/2009EP2049304A1 Chemical mechanical polishing pads comprising liquid organic material core encapsulated in polymer shell and methods for producing the same
04/22/2009CN101413780A Polishing monitoring method and polishing apparatus
04/22/2009CN101412202A Method for determining grinding time in chemico-mechanical polishing process
04/22/2009CN101412201A Carrier, method for coating a carrier, and method for the simultaneous double-side material-removing machining of semiconductor wafers
04/22/2009CN101412200A Nozzle arm for chemico-mechanical grinding and control device thereof
04/22/2009CN100481341C Carrier for double side polishing machine and double side polishing machine employing the same, and double side polishing method
04/22/2009CN100481210C Apparatus for grounding a magnetic recording head
04/22/2009CN100480929C System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system
04/22/2009CN100479995C Adhering stripping method and device for plate on clamp
04/22/2009CN100479992C Polishing seat with concave structure for improving mixed tail trace
04/21/2009US7520968 Conductive pad design modification for better wafer-pad contact
04/21/2009US7520955 Carrier head with a multilayer retaining ring for chemical mechanical polishing
04/21/2009US7520795 Grooved retaining ring
04/16/2009WO2009048099A1 Polishing tool structure, polishing surface layer and polishing method
04/16/2009WO2009017782A3 Ruthenium cmp compositions and methods
04/16/2009WO2008153782A3 Methods and apparatus for polishing a semiconductor wafer
04/16/2009WO2007060673A3 Incorporation of particulate additives into metal working surfaces
04/16/2009WO2006110224A3 Slurry composition and method for polishing organic polymer-based ophthalmic substrates
04/16/2009US20090098376 Double-Sided Adhesive Tape for Securing Polishing-Pad
04/16/2009US20090096446 Polishing monitoring method, polishing apparatus and monitoring apparatus
04/16/2009US20090094901 CMP Polishing Liquid and Polishing Method
04/16/2009DE102004058708B4 Polierkopf, Poliervorrichtung sowie Polierverfahren Polishing head, polishing apparatus and polishing method
04/15/2009EP2048208A2 Free radical-forming activator attached to solid and used to enhanced CMP formulations
04/15/2009EP2046531A2 System and method for processing high purity materials
04/15/2009EP1389152A4 Delivery system for magnetorheological fluid
04/15/2009CN101410956A Aqueous dispersion for chemical mechanical polishing, chemical mechanical polishing method, and kit for preparing aqueous dispersion for chemical mechanical polishing
04/15/2009CN101410955A Aqueous dispersion for chemical mechanical polishing, chemical mechanical polishing method, kit for chemical mechanical polishing, and kit for preparing aqueous dispersion for chemical mechanical poli
04/15/2009CN101407040A Face lapping mill with abrasive disk cooling mechanism
04/15/2009CN101407039A Sprayer capable of preventing abrasive on grinder table from aggregating and use method thereof
04/09/2009WO2009023663A3 Combinatorial processing including movement and rotation within a region
04/09/2009WO2009017652A3 Compositions and methods for chemical-mechanical polishing of phase change materials
04/09/2009US20090093202 Method for manufacturing polishing pad
04/09/2009US20090093201 Polishing pad
04/09/2009US20090093200 Polishing pad
04/09/2009US20090093193 Chemical mechanical polishing apparatus
04/09/2009US20090093118 Polishing composition
04/08/2009EP2045307A1 Polishing composition
04/08/2009EP2045038A1 Polishing Pad
04/08/2009CN201217175Y Miniature robot for self-determination grinding and casting operation of large-scale curve
04/08/2009CN101402187A Polishing pad
04/08/2009CN100475445C Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner
04/07/2009US7513820 Method and apparatus for producing micro-texture on a slider substrate using chemical and mechanical polishing techniques
04/07/2009US7513819 Polishing apparatus and method
04/07/2009US7513818 Polishing endpoint detection system and method using friction sensor
04/02/2009WO2009041697A1 Polishing composition
04/02/2009WO2009041422A1 Polishing pad
04/02/2009WO2009041277A1 Semiconductor wafer manufacturing method
04/02/2009WO2006115581A3 Composition and method for polishing a sapphire surface
04/02/2009WO2005059970A3 Controlling removal rate uniformity of an electropolishing process in integrated circuit fabrication
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