Patents for B24B 37 - Lapping machines or devices; Accessories (20,836)
07/2010
07/22/2010US20100184359 Method for fabricating semiconductor device
07/22/2010US20100180513 Method for improving mechanical properties of polymer particles and its applications
07/22/2010DE102009056864A1 Method for treating surface of bearing of motor vehicle, involves arranging abrasive elements between contact surface of tool and surface of component, and selecting material on basis of value for surface energy
07/21/2010EP1124912B1 A chemical mechanical polishing slurry system having an activator solution
07/21/2010CN1810911B Cerium family raw grinding material and preparing process thereof, cerium family grinding material and preparing process thereof
07/21/2010CN101508094B Bevel gear driven four-position plane grinding device
07/20/2010US7757383 System for lapping a head having an electrical lapping guide (ELG) on a wafer
07/20/2010US7757363 Support system for semiconductor wafers
07/15/2010WO2010081084A2 Polishing pads for chemical mechanical planarization and/or other polishing methods
07/15/2010US20100178765 Metal Polishing Slurry and Method of Polishing a Film to be Polished
07/14/2010CN201526381U Internal combustion engine cylinder pore structure and processing tool
07/14/2010CN201524951U Polishing table temperature control device for chemical mechanical polishing equipment
07/14/2010CN1701136B Low-force electrochemical mechanical processing method and apparatus
07/14/2010CN101778701A 抛光垫 Polishing pad
07/14/2010CN101778697A Retaining ring with shaped profile
07/14/2010CN101774146A Miniature non-spherical element grinding and polishing device
07/14/2010CN101318309B CMP systems and methods utilizing amine-contained polymer
07/13/2010US7754118 polishing layer comprising polymeric matrix, liquid non-water soluble microelements embedded in hydrophilic polymeric matrix, and pores defined by embedded liquid non-water soluble microelements on its surface; polishing operation can be performed at high precision.
07/13/2010US7753974 Polishing composition for semiconductor wafer, method for production thereof and polishing method
07/13/2010US7753761 Wafer polishing apparatus and wafer polishing method
07/08/2010WO2010078312A1 Coated carrier for lapping and methods of making and using
07/08/2010DE102009046750A1 Elektrochemisches Einebnungssystem mit verbesserter Elektrolytströmung Electrochemical Einebnungssystem with improved electrolyte flow
07/07/2010EP2204261A2 High-rate groove pattern
07/07/2010EP1724819B1 Polishing agent and polishing method
07/07/2010CN201519904U Chip stripping device
07/07/2010CN101767315A Method for prolonging service life of chemical mechanical polishing dresser
07/07/2010CN101767311A Machine tool
07/06/2010US7751911 Failure alarm device and failure alarm method
07/06/2010US7749599 Cushioning material for a polishing pad
07/01/2010WO2010074168A1 Polishing pad and method for producing same
07/01/2010WO2010074002A1 Polishing liquid composition for magnetic-disk substrate
07/01/2010WO2010072289A1 Device for grinding both sides of flat workpieces
07/01/2010US20100167627 Precision Machining Apparatus and Precision Machining Method
07/01/2010US20100167547 Polishing liquid
07/01/2010US20100163787 Polishing composition
07/01/2010US20100163786 Polishing composition for semiconductor wafer
07/01/2010US20100163784 Polishing Composition for Planarizing Metal Layer
07/01/2010US20100163426 Electrochemical planarization system comprising enhanced electrolyte flow
07/01/2010US20100162631 Process for manufacturing polishing pad
07/01/2010DE102008053610A1 Verfahren zum beidseitigen Polieren einer Halbleiterscheibe A method for double-sided polishing of a semiconductor wafer
06/2010
06/30/2010EP2202031A2 High-rate polishing method
06/30/2010CN201516579U 精密研磨工具 Precision grinding tools
06/30/2010CN101765647A Compositions and methods for chemical-mechanical polishing of phase change materials
06/30/2010CN101763869A Stamper substrate and process for producing the same
06/30/2010CN101758446A High-rate polishing method
06/29/2010US7744444 Centerless feed-through super-finishing device having a lapping system containing a freely-disposed abrasive
06/24/2010US20100160170 Method for polishing tape-shaped substrate for oxide superconductor, oxide superconductor, and base material for oxide superconductor
06/24/2010US20100159810 High-rate polishing method
06/24/2010US20100159804 Method of observing pattern evolution using variance and fourier transform spectra of friction forces in cmp
06/24/2010DE102008063228A1 Vorrichtung zur beidseitigen schleifenden Bearbeitung flacher Werkstücke Apparatus for two-sided abrasive machining flat workpieces
06/24/2010DE102008063227A1 Verfahren zum Bearbeiten von Werkstücken in einer Doppelseitenbearbeitungsmaschine sowie Doppelseitenbearbeitungsmaschine Method for processing workpieces in a double-page and double-page processing machine processing machine
06/23/2010EP2199015A2 Method for processing workpieces in a double sided processing machine and double sided processing machine
06/23/2010EP1494835B1 Lapping carrier for use in fabricating sliders
06/23/2010CN1941310B Method of fabricating self-aligned contact pad using chemical mechanical polishing process
06/23/2010CN101745870A Plunger ball grinder
06/23/2010CN101745865A Substrate polishing apparatus and method of polishing substrate using the same
06/23/2010CN101745852A Glass substrate for magnetic disk and method for producing the same
06/23/2010CN101379598B 化学机械研磨垫 Chemical mechanical polishing pad
06/23/2010CN101310929B Polishing pad, method for manufacturing same and polishing system and method
06/23/2010CN101148025B Method for polishing a semiconductor wafer and semiconductor wafer polished by the method
06/22/2010US7740521 Polishing head, polishing apparatus and polishing method for semiconductor wafer
06/17/2010WO2010067844A1 Polishing solution for cmp and polishing method using the polishing solution
06/17/2010WO2010067732A1 Grinding device, grinding method, and method of manufacturing glass sheet
06/17/2010WO2009060574A8 Spacer manufacturing method for spindle stock
06/17/2010US20100152875 Estimation apparatus and estimation method
06/17/2010US20100151771 Polishing apparatus and polishing method
06/17/2010US20100151684 Slurry composition for primary chemical mechanical polishing and chemical mechanical polishing method
06/16/2010CN1929955B Insulated pad conditioner and method of using same
06/16/2010CN1766028B 抛光组合物 The polishing composition
06/16/2010CN1760240B 抛光垫 Polishing pad
06/16/2010CN1746253B Polishing composition and polishing method using the same
06/16/2010CN1735481B Method for finishing wafer surface
06/16/2010CN1693411B Polishing composition and polishing method
06/16/2010CN101743624A Polishing composition
06/16/2010CN101740450A Substrate supporting unit, and apparatus and method for polishing substrate using the same
06/16/2010CN101733701A Chemical mechanical polishing equipment
06/16/2010CN101733557A Improved silicon slice laser cutting reduction process
06/16/2010CN101376232B Chemical mechanical polishing method capable of enhancing polishing performance
06/16/2010CN101104791B Cerium based polishing material and raw materials therefor
06/10/2010WO2010063647A1 Abrasive disc
06/10/2010US20100144255 Retaining ring and articles for carrier head
06/10/2010US20100144249 Polishing apparatus
06/10/2010US20100144245 Methods and apparatus for chemical-mechanical polishing utilizing low suspended solids polishing compositions
06/09/2010EP2194570A1 Materials for polishing liquid for metal, polishing liquid for metal, mehtod for preparation thereof and polishing method using the same
06/09/2010EP2194568A1 Semiconductor wafer manufacturing method
06/09/2010EP2193010A1 Polishing pad
06/09/2010EP2193008A1 System and method for producing damping polyurethane cmp pads
06/09/2010EP2193007A1 Optimized cmp conditioner design for next generation oxide/metal cmp
06/09/2010CN201500928U Clamp pressure fine-adjustment device for surface lapping machine
06/09/2010CN1816251B Method of forming periphery of substrate
06/09/2010CN101728259A Method for cutting semi-conducting material composite rod into a plurality of wafers
06/09/2010CN101722475A CMP pad dressers with hybridized abrasive surface and related methods
06/09/2010CN101722470A Method for manufacturing large-size ultra-thin laser crystal
06/09/2010CN101722469A Chemical mechanical polish process control for improvement in within-wafer thickness uniformity
06/09/2010CN101722468A Chemical mechanical polishing method, grinding fluid nozzle and chemical mechanical polishing device
06/09/2010CN101722462A Method for polishing both sides of a semiconductor wafer
06/09/2010CN101722447A Device for the double-sided processing of flat workpieces and method for the simultaneous double-sided material removal processing of a plurality of semiconductor wafers
06/09/2010CN101396804B Deburring method and device of steps inner-holes
06/08/2010US7732101 polishing the surfaces of substrates using abrasive grains comprising silica sol and applying pressure to suppress surface projections; phase shifting masks used for producing semiconductors
06/08/2010US7731568 Polishing pad and semiconductor device manufacturing method
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