| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 05/03/2001 | DE19950083A1 Ferroelectric plasma reactor stabilization device uses ferroelectric barrier inserted between field electrodes and ferroelectric ceramic pellets |
| 05/03/2001 | DE19948229C1 Hochfrequenz-Ionenquelle An rf ion source |
| 05/03/2001 | CA2388335A1 Vacuum circuit for a device for treating a receptacle with low pressure plasma |
| 05/02/2001 | EP1096837A2 Plasma treatment apparatus and plasma generation method using the apparatus |
| 05/02/2001 | EP1096554A1 Plasma processing apparatus |
| 05/02/2001 | EP1096036A1 Heavy gas plasma sputtering |
| 05/02/2001 | EP1095401A1 Method for anisotropic plasma etching of semiconductors |
| 05/02/2001 | EP1095395A1 Rf matching network with distributed outputs |
| 05/02/2001 | EP1095394A1 Feedthrough overlap coil |
| 05/02/2001 | EP1095217A1 Plasma vacuum pumping cell |
| 05/02/2001 | CN1293717A Plasma processing system and method |
| 05/02/2001 | CN1293533A Equipment and method for generating long-arc plasma jet |
| 05/01/2001 | US6225746 Plasma processing system |
| 05/01/2001 | US6225743 Method for the production of plasma |
| 05/01/2001 | US6225593 Medical apparatus for generating an ionised gas plasma flame |
| 05/01/2001 | US6224836 Device for exciting a gas by a surface wave plasma and gas treatment apparatus incorporating such a device |
| 05/01/2001 | CA2230520C Drag cup for plasma arc torch |
| 04/25/2001 | EP1094691A1 Method for plasma generation by means of capacitive uniform discharges, and device for implementing same |
| 04/25/2001 | EP1094494A1 Method for plasma generation by means of a capacitive multipolar-barrier discharge, and device for implementing same |
| 04/25/2001 | EP1094493A2 Use of modulated inductive power and bias power to reduce overhang and improve bottom coverage |
| 04/25/2001 | EP1094130A2 Method and apparatus for plasma processing of surfaces |
| 04/25/2001 | EP1093847A1 Organic halogen compound decomposing device and operation control method therefor, and organic halogen compound decomposing method |
| 04/24/2001 | US6222718 Integrated power modules for plasma processing systems |
| 04/24/2001 | US6222321 Plasma generator pulsed direct current supply in a bridge configuration |
| 04/24/2001 | US6222154 Plasma cutting method and device with the use of a plasma torch |
| 04/24/2001 | US6221782 Adjusting DC bias voltage in plasma chamber |
| 04/24/2001 | US6221197 Method and apparatus for solid bonding, a conductor bonding method, a packaging method, and a bonding agent and a method for manufacturing a bonding agent |
| 04/24/2001 | US6220204 Film deposition method for forming copper film |
| 04/24/2001 | CA2207235C Large-scale, low pressure plasma-ion deposition of diamondlike carbon films |
| 04/19/2001 | WO2001028300A1 Matching device and plasma processing apparatus |
| 04/19/2001 | WO2001028299A1 An electrode for a plasma torch |
| 04/19/2001 | WO2001027970A1 Electric supply unit and a method for reducing sparking during sputtering |
| 04/19/2001 | WO2001027965A1 Electrostatic fluid accelerator |
| 04/19/2001 | DE19949394A1 Elektrische Versorgungseinheit und Verfahren zur Reduktion der Funkenbildung beim Sputtern Electric power supply unit and method for reducing spark formation in sputtering |
| 04/19/2001 | DE19947258A1 Production of a heat insulating layer containing zirconium oxide on a component, e.g. turbine blade involves using plasma flash evaporation of a liquid aerosol to form the layer |
| 04/18/2001 | EP1093154A2 Magnetron with cooling system for substrate processing system |
| 04/18/2001 | EP1092229A1 Multiple coil antenna for inductively-coupled plasma generation systems |
| 04/18/2001 | EP1092228A2 Electrode for plasma processes and method for manufacture and use thereof |
| 04/17/2001 | US6217703 Plasma processing apparatus |
| 04/12/2001 | WO2000057770A3 Imaging system with remote controlled camera |
| 04/12/2001 | DE19945413A1 Cooling arrangement for X-ray radiator on rotatable gantry for computer tomograph |
| 04/12/2001 | DE19943953A1 Vorrichtung und Verfahren zur Erzeugung eines lokalen Plasmas durch Mikrostrukturelektrodenentladungen mit Mikrowellen Apparatus and method for generating a local plasma by microwave discharge electrodes microstructure |
| 04/11/2001 | EP1090409A1 High sputter and etch resistant window for plasma processing chambers |
| 04/11/2001 | EP1090407A1 Semiconductor process chamber electrode and method for making the same |
| 04/11/2001 | EP1090159A1 Deposition of coatings using an atmospheric pressure plasma jet |
| 04/11/2001 | EP0832310A4 Electrically tunable coatings |
| 04/10/2001 | US6215678 Arc plasma-joule heated melter system for waste treatment and resource recovery |
| 04/10/2001 | US6215091 Plasma torch |
| 04/10/2001 | US6215090 Plasma arc torch |
| 04/10/2001 | US6215089 Plasma welding torch |
| 04/10/2001 | US6214161 Method and apparatus for anisotropic etching of substrates |
| 04/10/2001 | US6213049 Nozzle-injector for arc plasma deposition apparatus |
| 04/05/2001 | WO2001024221A1 Voltage control sensor and control interface for radio frequency power regulation in a plasma reactor |
| 04/05/2001 | WO2001024220A2 Uniform gas distribution in large area plasma treatment device |
| 04/05/2001 | WO2001024216A2 Pretreated gas distribution plate |
| 04/05/2001 | US20010000104 Perforated plasma confinement ring in plasma reactors |
| 04/04/2001 | EP1089319A1 Uniform gas distribution in large area plasma treatment device |
| 04/04/2001 | EP1088469A1 System for distributing power in a thruster |
| 04/04/2001 | EP1088332A2 Focus ring arrangement for substantially eliminating unconfined plasma in a plasma processing chamber |
| 04/04/2001 | EP1088329A1 Method and apparatus for stabilising a plasma |
| 04/04/2001 | EP0848658A4 Chemical vapor deposition and powder formation using thermal spray with near supercritical and supercritical fluid solutions |
| 04/04/2001 | CN1290399A Device for producing excited/ionized particles in plasma |
| 04/04/2001 | CN1290308A Plasma reactor with a deposition shield |
| 04/03/2001 | US6211622 Plasma processing equipment |
| 04/03/2001 | US6211621 Energy transfer microwave plasma source |
| 04/03/2001 | US6211617 Acousto ionic radio antenna |
| 04/03/2001 | US6210642 Apparatus for cleaning harmful gas by irradiation with electron beams |
| 04/03/2001 | US6210539 For generating plasma to sputter deposit layer of material in fabrication of semiconductor devices |
| 04/03/2001 | US6209482 Large area microwave plasma apparatus with adaptable applicator |
| 03/29/2001 | WO2001022478A1 Semiconductor processing equipment having radiant heated ceramic liner |
| 03/29/2001 | WO2001022471A1 Semiconductor processing equipment having tiled ceramic liner |
| 03/29/2001 | WO2001022470A1 Ion beam vacuum sputtering apparatus and method |
| 03/29/2001 | WO2001022465A1 Plasma source of linear ion beam |
| 03/29/2001 | WO2001006268A8 Electron density measurement and control system using plasma-induced changes in the frequency of a microwave oscillator |
| 03/28/2001 | EP1087421A2 Method and apparatus for providing a stable plasma |
| 03/28/2001 | EP1086481A1 Chamber having improved process monitoring window |
| 03/28/2001 | EP0923789A4 Plasma generation and plasma processing of materials |
| 03/28/2001 | CN2425475Y High-pressure microwave plasma excitation device |
| 03/27/2001 | US6207924 Inductive plasma torch with a reagent injector |
| 03/27/2001 | US6207923 Plasma arc torch tip providing a substantially columnar shield flow |
| 03/27/2001 | US6207029 Apparatus for vapor deposition and evaporator |
| 03/27/2001 | US6207026 Cooling system coupled to process chamber comprising cooling cavity, rotating member disposed therein having upper and lower surfaces with two or more magnet pieces disposed between surfaces, motor coupled to rotating member, deflection member |
| 03/27/2001 | US6207007 Plasma processing system |
| 03/27/2001 | US6205948 Modulator for plasma-immersion ion implantation |
| 03/22/2001 | WO2001020953A1 Method and apparatus for producing bulk quantities of nano-sized materials by electrothermal gun synthesis |
| 03/22/2001 | WO2001020710A1 Power splitter for plasma device |
| 03/22/2001 | WO2001020640A1 Device and method for generating a local plasma by micro-structure electrode discharges with microwaves |
| 03/22/2001 | WO2001019745A1 Method for partially treating a water-repellent glass sheet and the partially treated glass sheet |
| 03/22/2001 | WO2000001206A8 Plasma accelerator arrangement |
| 03/22/2001 | CA2382107A1 Method and apparatus for producing bulk quantities of nano-sized materials by electrothermal gun synthesis |
| 03/20/2001 | US6204607 Plasma source with multiple magnetic flux sources each having a ferromagnetic core |
| 03/20/2001 | US6204606 Slotted waveguide structure for generating plasma discharges |
| 03/20/2001 | US6204605 Electrodeless discharge at atmospheric pressure |
| 03/20/2001 | US6204603 Coaxial resonator microwave plasma generator |
| 03/20/2001 | US6204508 Toroidal filament for plasma generation |
| 03/20/2001 | US6203862 Processing systems with dual ion sources |
| 03/20/2001 | US6203637 Use of a cleaning process, a cleaning process, a connection process and a workpiece pair |
| 03/20/2001 | US6202939 Sequential feedback injector for thermal spray torches |
| 03/15/2001 | WO2001019144A1 Inner-electrode plasma processing apparatus and method of plasma processing |
| 03/15/2001 | WO2001018948A1 Apparatus and method for propulsion |