Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
02/2000
02/22/2000US6027606 Center gas feed apparatus for a high density plasma reactor
02/17/2000WO2000008477A1 Quasi-hemispherical fabry-perot resonator and method for operating the same
02/17/2000WO2000008229A1 Esrf chamber cooling system and process
02/17/2000WO2000007688A1 Esrf coolant degassing process
02/17/2000DE19836158A1 Roughening up and activating metallic and conducting surfaces of workpieces with spark plasma has periodically igniting spark plasma formed in reactive gas
02/17/2000DE19834854A1 Quasi-hemisphärischer Fabry-Perot-Resonator und Verfahren zum Betreiben desselben Of the same quasi-hemispherical Fabry-Perot resonator and method of operating
02/16/2000EP0980197A2 Electrode for plasma ARC torchand method of making same
02/16/2000EP0980088A1 Toroidal filament for plasma generation
02/16/2000CN1049555C Torch device for chemical processes
02/16/2000CN1049554C Torch device for chemical processes
02/15/2000US6025034 Producing a nanostructure coating, structure, binders and spray coating
02/15/2000US6024844 Enhanced reactive DC sputtering system
02/15/2000US6024827 Plasma processing apparatus
02/10/2000WO2000007215A2 A method of allowing a stable power transmission into a plasma processing chamber
02/10/2000WO2000006289A1 Method and apparatus for cleaning harmful gas by irradiation with gas laser and electron beams
02/10/2000DE19835224A1 Plasma generator for production of directed plasma jet
02/09/2000EP0978138A1 Method and apparatus for ionized sputtering of materials
02/09/2000EP0977904A1 Plasma processing system utilizing combined anode/ion source
02/09/2000EP0912288B1 Process for coating or welding easily oxidised materials and plasma torch for carrying out this process
02/08/2000US6023329 Method and apparatus for determining parameters of a gas or plasma flow
02/08/2000US6022460 Enhanced inductively coupled plasma reactor
02/08/2000US6022446 Shallow magnetic fields for generating circulating electrons to enhance plasma processing
02/08/2000US6021737 Ion plating apparatus that prevents wasteful consumption of evaporation material
02/08/2000CA2192904C Method and apparatus for a contact start plasma cutting process
02/08/2000CA2144834C Method and apparatus for generating induced plasma
02/08/2000CA2022782C Electrode for plasma arc torch
02/03/2000WO2000005931A1 Electrode for a plasma arc torch having an improved insert configuration
02/02/2000EP0977470A2 Method and apparatus for generating induced plasma
02/02/2000EP0977243A2 Plasma etching apparatus using halogen type gas plasma
02/02/2000EP0976141A1 Methods and apparatus for controlling ion energy and plasma density in a plasma processing system
02/02/2000EP0975818A1 Method and device for pvd coating
02/02/2000EP0946414A4 Microwave plasma chemical synthesis of ultrafine powders
02/02/2000CN1243027A Method for purifying harmful gas by gas laser and electronic beam irradiation, and apparatus thereof
02/01/2000US6020794 Ratiometric autotuning algorithm for RF plasma generator
02/01/2000US6020686 Inductively and multi-capacitively coupled plasma reactor
02/01/2000US6020572 Electrode for plasma arc torch and method of making same
02/01/2000US6020571 Welding method and apparatus therefor
02/01/2000US6020570 Plasma processing apparatus
01/2000
01/27/2000WO2000004576A1 Method and apparatus for plasma processing
01/26/2000EP0975006A2 Plasma density measuring method, probe used for measuring plasma density and plasma density measuring apparatus
01/26/2000EP0975005A2 Method for controlling plasma-generating high frequency power, and plasma generating apparatus
01/26/2000EP0791226B1 Device for coating substrates using a vapour phase material in a reduced pressure or vacuum environment
01/26/2000EP0759215A4 Pulse power generating circuit with energy recovery
01/26/2000EP0722513B1 Treatment of surfaces by barrier discharge
01/26/2000EP0667921B1 Microwave apparatus for depositing thin films
01/26/2000CN1242594A Method for implanting negative hydrogen ion and implanting apparatus
01/25/2000US6018471 Methods and apparatus for treating waste
01/25/2000US6016765 Plasma processing apparatus
01/20/2000WO2000003566A1 Microwave discharge apparatus
01/20/2000WO2000003415A1 Rf matching network with distributed outputs
01/20/2000WO2000003414A1 Feedthrough overlap coil
01/20/2000WO2000002697A1 Plasma electrode with arc-starting grooves
01/19/2000EP0973362A1 Safety device for plasmatorch
01/19/2000EP0972431A2 Particle manipulation
01/19/2000CN2359855Y Plasma spraying strengthening device
01/13/2000WO2000001469A1 Electrode and reaction chamber for use in generation of non-thermal plasma
01/13/2000DE19856307C1 Apparatus for producing a free cold plasma jet
01/13/2000DE19825056C1 Circuit for supplying electrical energy to plasma can feed high power to unipolar or bipolar pulsed plasma with switching region in range 20 to 100 kHz with conventional IGBT switch
01/12/2000EP0971567A1 Plasma arc device
01/11/2000US6013984 Ion energy attenuation method by determining the required number of ion collisions
01/11/2000US6013893 Plasma burner with a fluid-cooled anode
01/11/2000US6013153 Directing gas from plasma-generating region toward surface of vulcanized rubber so that the gas impinges against the rubber surface for effecting surface treatment
01/11/2000CA2174317C Plasma torch
01/06/2000WO2000001206A1 Plasma accelerator arrangement
01/06/2000WO2000001003A1 Device and method for plasma processing
01/06/2000WO2000000999A1 Elastomer bonded parts for plasma processes and method for manufacture and use thereof
01/06/2000WO2000000998A2 Electrode for plasma processes and method for manufacture and use thereof
01/06/2000WO2000000993A1 Multiple coil antenna for inductively-coupled plasma generation systems
01/06/2000WO2000000992A2 Focus ring arrangement for substantially eliminating unconfined plasma in a plasma processing chamber
01/06/2000WO2000000741A1 Plasma vacuum pumping cell
01/06/2000WO2000000660A1 Nanosize particle coatings made by thermally spraying solution precursor feedstocks
01/06/2000WO1999040758A3 Remote exposure of workpieces using a one atmosphere uniform glow discharge plasma
01/05/2000EP0968524A1 Atmospheric-pressure plasma jet
01/05/2000EP0968500A1 Method and machine for producing energy by nuclear fusion reactions
01/05/2000EP0968409A2 Soft x-ray microfluoroscope
01/05/2000EP0792386A4 Method and apparatus for depositing a substance with temperature control
01/05/2000DE19829760A1 Device for application of microwaves to generate plasmas in vacuum environment with and without use of electron resonance
01/04/2000US6011238 Electrode for a plasma torch
01/04/2000US6010755 Method and apparatus for forming thin films using dual ECR plasma generators
12/1999
12/30/1999DE19828704A1 Plasma accelerator for space vehicles, increasing ion thruster motor efficiency
12/30/1999DE19828633A1 Liquid-cooled electric-arc welding or cutting torch, especially plasma or TIG torch
12/30/1999DE19826418A1 Electrical plasma production devices operable at ambient temperature, useful for flat screen visual display units and chemical synthesis reactors
12/29/1999WO1999067808A1 High sputter, etch resistant window for plasma processing chambers
12/29/1999EP0967844A1 Method for ECR plasma deposition of electron emitting carbon layers under the effect of an applied electric field
12/29/1999EP0967628A2 ECR ion source : 2,45GHz
12/28/1999US6008464 System for regulating and controlling plasma torch
12/28/1999US6007671 Having a vacuum chamber where part of an inside wall is silicon oxide; controlling the temperature of the silicon dioxide to prevent hydrogen atoms from deposit and recombining on the internal wall
12/28/1999US6006694 Plasma reactor with a deposition shield
12/23/1999WO1999066769A1 Plasma processor
12/23/1999WO1999066768A1 System for distributing power in a thruster
12/23/1999WO1999066533A1 Semiconductor process chamber electrode and method for making the same
12/23/1999WO1999066531A1 Plasma processing apparatus
12/22/1999EP0965253A1 Method and device for producing plasma
12/21/1999US6005349 Method for generating and maintaining a glow plasma discharge
12/21/1999US6005218 Process and circuit for the bipolar pulse-shaped feeding of energy into low-pressure plasmas
12/21/1999US6005217 Microwave plasma processing method for preventing the production of etch residue
12/16/1999WO1999065281A2 Arc plasma generator
12/16/1999WO1999065056A1 Chamber having improved process monitoring window
12/16/1999WO1999064644A1 Ion energy attenuation
12/15/1999EP0964425A2 Apparatus for processing a work piece with a uniformly neutralised ion beam