H05H 1 - Generating plasma; Handling plasma

Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
10/1999
10/21/1999	WO1999053733A1 Plasma apparatus for ion energy control
10/21/1999	WO1999053534A1 Process system
10/21/1999	WO1999053533A1 Apparatus for gas processing
10/21/1999	WO1999053120A1 Reduced impedance chamber
10/21/1999	WO1999040758A9 Remote exposure of workpieces using a one atmosphere uniform glow discharge plasma
10/21/1999	DE19816377A1 Generating discharges between two or more electrodes for e.g. a gas laser
10/20/1999	CN1232601A Plasma etching reactor and method for use it in new appeared film
10/19/1999	US5968612 Method for the preparation of silicon compound thin film
10/19/1999	US5968378 Fuel plasma vortex combustion system
10/19/1999	CA2127245C Method for making a sealed passage in a refractory composite part, and application to the production of a refractory composite structure cooled by fluid circulation
10/14/1999	WO1999052333A1 Plasma processing device for surfaces
10/14/1999	WO1999052332A1 Plasma torch with a microwave transmitter
10/14/1999	WO1999052125A1 Method and device for specifically manipulating and depositing particles
10/14/1999	DE19814812A1 Plasmabrenner mit einem Mikrowellensender Plasma torch with a microwave transmitter
10/14/1999	CA2327093A1 Plasma torch with a microwave transmitter
10/12/1999	US5965040 Plasma arc torch
10/12/1999	US5965039 Plasma torch
10/12/1999	US5965034 High frequency plasma process wherein the plasma is executed by an inductive structure in which the phase and anti-phase portion of the capacitive currents between the inductive structure and the plasma are balanced
10/07/1999	WO1999051068A1 Device for applying an action on the earth's ionosphere
10/07/1999	WO1999050886A1 Contamination controlling method and plasma processing chamber
10/07/1999	WO1999050885A1 Parallel-antenna transformer-coupled plasma generation systems
10/07/1999	WO1999050884A1 Use of variable impedance having rotating core to control coil sputter distribution
10/07/1999	WO1999050883A1 Method and apparatus for improving processing and reducing charge damage in an inductively coupled plasma reactor
10/07/1999	WO1999050475A1 A high temperature ceramic heater assembly with rf capability
10/07/1999	WO1999050471A1 Method and apparatus for deposition of biaxially textured coatings
10/07/1999	WO1999049991A1 Container with material coating having barrier effect and method and apparatus for making same
10/07/1999	WO1999035893A3 Paraelectric gas flow accelerator
10/07/1999	DE19814871A1 Verfahren und Vorrichtung zur gezielten Teilchenmanipulierung und -deposition Method and device for particle manipulation and targeted -deposition
10/07/1999	DE19801427C1 Arrangement for generating ions by generating a plasma esp. for coating substrates
10/06/1999	EP0946414A1 Microwave plasma chemical synthesis of ultrafine powders
10/05/1999	US5962138 Plasma deposited substrate structure
10/05/1999	US5961916 Method of manufacturing a passage tube for passing plasma producing gas
10/05/1999	US5961855 Low voltage electrical based parts-in-place (PIP) system for contact start torch
10/05/1999	US5961773 Plasma processing apparatus and plasma processing method using the same
10/05/1999	US5961772 Atmospheric-pressure plasma jet
10/05/1999	US5961361 Method for manufacturing electrode plate for plasma processing device
10/05/1999	CA2182342C Method for radiofrequency wave etching
10/05/1999	CA2154431C Induction plasma gun
09/1999
09/30/1999	DE19812558A1 Producing linearly-expanded ECR plasma
09/29/1999	EP0729805B1 Plasma torch
09/29/1999	CN2341343Y Intellectual ultra-vacuum hot cathode lonizing controller
09/28/1999	US5960026 Organic waste disposal system
09/28/1999	US5959409 Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method protecting such heated metal surfaces
09/28/1999	US5958157 Aiming plasma gas flow toward an array of magnetic field generators which deflect plasma toward target, i.e., transmission lines, without damage to plasma source
09/28/1999	US5958141 Dry etching device
09/28/1999	US5958105 Process for preparing metallic beryllium pebbles
09/23/1999	WO1999048132A1 An apparatus and method for generating plasma
09/23/1999	WO1999048131A1 Sputtering apparatus with a coil having overlapping ends
09/23/1999	WO1999048130A1 Distributed inductively-coupled plasma source
09/23/1999	WO1999047242A1 Method and device for cleaning combustion exhaust gas using a plasma
09/22/1999	EP0721514B1 Magnetically enhanced multiple capacitive plasma generation apparatus and related method
09/21/1999	US5955153 Invention can be used in the analysis of antibodies which are deposited on surfaces which have been coated with thin films of silver.
09/16/1999	WO1999046964A1 Method for treating the surface of a material or an object and implementing device
09/15/1999	EP0941640A1 Plasma arc torch and method using contact starting system
09/15/1999	EP0772957B1 Electrode for a plasma arc torch
09/15/1999	CN1228247A Electromagnetic wave generating composite
09/14/1999	US5952060 Comprising interior surface of processing chamber having dimond-like carbon coating; extends durability of processing systems; prevents accumulation of residues; does not generate particulates and seals in impurities
09/14/1999	US5951888 Plasma electrode with arc-starting grooves
09/14/1999	US5951879 Forming a polysilicon layer on a silicon dioxide layer formed on a silicon substrate, masking, etching, wherein said etching step comprises using a mixed gas of an etching gas and an oxygen gas
09/14/1999	US5951771 Plasma jet system
09/10/1999	WO1999045544A1 Holography fusion reactor bin for semiconductor laser array tunable oscillation hologram jointly using semiconductor laser array turnable oscillation hologram bin and gravitational wave, method for gravitational wave holography and apparatus therefor
09/08/1999	EP0941018A2 Plasma arc torch
09/08/1999	EP0940839A2 Etching or coating devices
09/08/1999	EP0939972A1 Plasma etch reactor and method
09/08/1999	CN2336952Y Roller type plasma surface treatment machine
09/08/1999	CN1228196A Plasma etch reactor and method
09/07/1999	US5949193 Plasma device with resonator circuit providing spark discharge and magnetic field
09/07/1999	US5948283 Method and apparatus for enhancing outcome uniformity of direct-plasma processes
09/07/1999	US5948168 Distributed microwave plasma reactor for semiconductor processing
09/07/1999	US5948141 Purification of a noble gas using glow discharges
09/07/1999	US5947421 Electrostatic propulsion systems and methods
09/02/1999	WO1999044399A1 Apparatus for the investigation of surface chemistry
09/02/1999	WO1999044220A1 Cooling system with antifreeze for cooling magnetron for process chamber of processing system
09/02/1999	WO1999044219A1 Low pressure inductively coupled high density plasma reactor
09/01/1999	EP0938741A1 Vacuum plasma processor having coil whth intermediate portion coupling lower magnetic flux density to plasma than center and peripheral portions of the coil
09/01/1999	EP0938740A1 Particle controlling method and plasma processing chamber
09/01/1999	EP0938596A1 Apparatus for reducing polymer deposition on substrate support
09/01/1999	EP0938396A1 Plasma jet source using an inertial electrostatic confinement discharge plasma
09/01/1999	EP0938395A1 Plasma torch
08/1999
08/31/1999	US5945781 For ionization and acceleration
08/31/1999	US5945177 Plasma vapor deposition using pulsed microwave power at or above threshold value at which plasma having reduced microwave permeability is ignited, for halogen lamps, thermal, optical and mechanical properties
08/31/1999	US5944902 Plasma source for HDP-CVD chamber
08/31/1999	US5944901 Indirect plasmatron
08/26/1999	WO1999043018A1 Rf powered plasma enhanced chemical vapor deposition reactor and methods of effecting plasma enhanced chemical vapor deposition
08/26/1999	WO1999043017A1 Rf powered plasma enhanced chemical vapor deposition reactor and methods
08/26/1999	WO1999034399B1 Plasma device including a powered non-magnetic metal member between a plasma ac excitation source and the plasma
08/25/1999	EP0801882B1 Alignment device and method for a plasma arc torch system
08/25/1999	CN1226740A Plasma processing apparatus
08/24/1999	US5942855 Monolithic miniaturized inductively coupled plasma source
08/24/1999	US5942854 Electron-beam excited plasma generator with side orifices in the discharge chamber
08/24/1999	US5942075 Plasma processing apparatus
08/24/1999	US5942039 Self-cleaning focus ring
08/19/1999	WO1999041766A1 Reactor for chemical vapor deposition of titanium
08/18/1999	EP0935633A1 Acrylate coating methods
08/18/1999	CN1226339A Magnetron
08/18/1999	CN1226003A System and method for detecting nozzle and electrode wear
08/17/1999	US5939151 Melting aluminum; moving into ignited gaseous plume of argon and nitrogen; nitriding
08/17/1999	US5939029 Separates and segregates radionuclides from non-radioactive elements according to respective inertia
08/17/1999	US5938950 Plasma torch with improved gas-tightness
08/17/1999	US5938949 Plasma arc torch

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