| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 09/11/2001 | US6287981 Electrode for generating a plasma and a plasma processing apparatus using the same |
| 09/11/2001 | US6287463 Collector cup |
| 09/11/2001 | US6287435 Method and apparatus for ionized physical vapor deposition |
| 09/11/2001 | US6286454 Plasma process device |
| 09/11/2001 | CA2229170C Laser plasma x-ray source, semiconductor lithography apparatus using the same and a method thereof |
| 09/08/2001 | CA2339674A1 Process for the surface activation of materials |
| 09/08/2001 | CA2339673A1 Method of surface treating or coating of materials |
| 09/07/2001 | WO2001065895A2 Electrically controlled plasma uniformity in a high density plasma source |
| 09/07/2001 | CA2353490A1 Method and apparatus for low energy electron enhanced etching of substrates in an ac or dc plasma environment |
| 09/06/2001 | US20010019237 Plasma processing apparatus |
| 09/06/2001 | US20010019042 Process and unit for. plasma-arc working with a gas mixture based on hydrogen, nitrogen and/or argon |
| 09/06/2001 | US20010019041 Process and unit for plasma-arc working with a gas having controlled O2 and N2 contents |
| 09/06/2001 | US20010019040 Discharge tube for a local etching apparatus and a local etching apparatus using the discharge tube |
| 09/06/2001 | US20010019016 For use in semiconductor fabrication; recessing the coil reduces deposition of material onto the coil, reducing particulate matter shed by the coil onto the workpiece |
| 09/06/2001 | US20010018951 Plasma processing apparatus and plasma processing method |
| 09/06/2001 | DE10008485A1 High frequency plasma source with support for field coil, gas distribution and plasma jet extraction, has additional high frequency matching network |
| 09/06/2001 | DE10007532A1 Releasing energy using controlled nuclear fusion involves use of plasma chamber having plasma which operates with specific energy |
| 09/05/2001 | EP1130948A1 Inner-electrode plasma processing apparatus and method of plasma processing |
| 09/05/2001 | EP1130634A1 Semiconductor device, method for forming silicon oxide film, and apparatus for forming silicon oxide film |
| 09/05/2001 | EP1130624A2 Coil and coil support for generating a plasma |
| 09/05/2001 | EP1129478A1 Method and apparatus for improving accuracy of plasma etching process |
| 09/05/2001 | EP1129466A1 Device and method for generating a local plasma by micro-structure electrode discharges with microwaves |
| 09/05/2001 | EP1129362A1 Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing |
| 09/05/2001 | CN1311707A ESRF coolant degassing process |
| 09/05/2001 | CN1070400C Nozzle assembly |
| 09/04/2001 | US6284668 Plasma polishing method |
| 09/04/2001 | US6284110 Method and apparatus for radio frequency isolation of liquid heat transfer medium supply and discharge lines |
| 09/04/2001 | US6284106 Method of producing flat panels |
| 08/30/2001 | WO2001063982A1 High-frequency matching network |
| 08/30/2001 | WO2001063981A1 High frequency plasma source |
| 08/30/2001 | WO2001063980A2 Direct current plasma arc torch with increasing volt-ampere characteristic |
| 08/30/2001 | WO2000039837A8 Perforated plasma confinement ring in plasma reactors |
| 08/30/2001 | US20010017524 Plasma processing system |
| 08/28/2001 | US6281622 Closed electron drift plasma thruster adapted to high thermal loads |
| 08/28/2001 | US6281469 Capacitively coupled RF-plasma reactor |
| 08/28/2001 | US6281123 Generating a plasma adjacent the layer from a component gas, the component gas consisting essentially of n2 and/or ar; and utilizing the plasma to remove the carbon from the layer. |
| 08/28/2001 | US6280563 Plasma device including a powered non-magnetic metal member between a plasma AC excitation source and the plasma |
| 08/28/2001 | US6279504 Plasma CVD system |
| 08/23/2001 | WO2001062053A2 Active control of electron temperature in an electrostatically shielded radio frequency plasma source |
| 08/23/2001 | WO2001061367A1 Device and method for measuring an electric field inside a plasma |
| 08/23/2001 | WO2001061161A1 Method and device for carrying out the plasma-induced reduction of the soot emission of diesel engines |
| 08/23/2001 | US20010016166 Plasma vacuum pumping cell |
| 08/22/2001 | EP1126751A1 Method and apparatus for plasma arc working using O2 and N2 amounts |
| 08/22/2001 | EP1126750A1 Method and apparatus used to plasma arc work with a gas mixture ofhydrogen, nitrogen and/or argon |
| 08/22/2001 | EP1016489A4 Arc-plasma method for welding metals |
| 08/22/2001 | EP0819314B1 Method and device for controlling the energy of at least one charged species bombarding a body immersed in a plasma |
| 08/21/2001 | US6278241 Four-nozzle plasma generator for forming an activated jet |
| 08/21/2001 | US6277449 Method for sequentially depositing a three-dimensional network |
| 08/21/2001 | US6277448 Plasma flame |
| 08/18/2001 | CA2335922A1 Plasma arc process and work facility with hydrogen, nitrogen or argon-based gas mixture |
| 08/18/2001 | CA2334931A1 Process and unit for plasma-arc working with a gas having controlled o2 and n2 contents |
| 08/16/2001 | WO2001060132A1 Plasma arc torch and method for cutting a workpiece |
| 08/16/2001 | WO2001059809A1 An atmospheric pressure plasma system |
| 08/16/2001 | WO2001059804A2 Device and method for coupling two circuit components which have different impedances |
| 08/16/2001 | WO2001058840A2 Treatment of fluorocarbon feedstocks |
| 08/16/2001 | WO2001058625A1 Plasma arc reactor for the production of fine powders |
| 08/16/2001 | US20010014540 Inserting poultry litter into extruder, pushing through constrictions under pressure, grinding, heating through friction and pressure for predetermined time, forcing through tube having predetermined diameter, pelletizing |
| 08/16/2001 | US20010014003 Integrated power modules for plasma processing systems |
| 08/16/2001 | EP1123642A1 Plasma accelerator arrangement |
| 08/16/2001 | EP1123641A1 Gas-filled particle accelerator with a pulsed plasma source |
| 08/16/2001 | EP1123567A1 Oversized microwave load of high power direct current and use as calorimeter |
| 08/16/2001 | DE19963904A1 Plasmabrenner und Verfahren zur Erzeugung eines Plasmastrahls Plasma torch and method for generating a plasma beam |
| 08/16/2001 | DE10004824A1 Production of substrates coated with a layer consisting of two different heavy elements comprises magnetron sputtering a target made of a compound of the two elements |
| 08/16/2001 | CA2399581A1 Plasma arc reactor for the production of fine powders |
| 08/14/2001 | US6274058 Remote plasma cleaning method for processing chambers |
| 08/14/2001 | US6273023 Plasma processing apparatus capable of reliably, electrostatically attracting and holding and thus fixing semiconductor wafer |
| 08/14/2001 | US6273022 Distributed inductively-coupled plasma source |
| 08/09/2001 | WO2001058223A1 Plasma processing system and method |
| 08/09/2001 | WO1999054694A9 Method and apparatus for monitoring plasma processing operations |
| 08/09/2001 | US20010011701 Grid for the absorption of X-rays |
| 08/09/2001 | US20010011525 Microwave plasma processing system |
| 08/08/2001 | EP1122762A2 Power delivery system |
| 08/08/2001 | EP1121714A1 Method of plasma etching dielectric materials |
| 08/08/2001 | EP1121706A1 Integrated power modules for plasma processing systems |
| 08/07/2001 | US6271529 Ion implantation with charge neutralization |
| 08/07/2001 | US6271497 Plasma torch head and method for making the same |
| 08/07/2001 | US6270687 RF plasma method |
| 08/07/2001 | US6270622 Method and apparatus for improving accuracy of plasma etching process |
| 08/07/2001 | US6270618 Plasma processing apparatus |
| 08/07/2001 | US6270617 RF plasma reactor with hybrid conductor and multi-radius dome ceiling |
| 08/02/2001 | US20010010257 Gas injection system for plasma processing |
| 08/01/2001 | EP1120024A1 Slotted waveguide structure for generating plasma discharges |
| 08/01/2001 | CN1306384A Surface plasma source for atmospheric discharge |
| 07/31/2001 | US6268700 Vacuum plasma processor having coil with intermediate portion coupling lower magnetic flux density to plasma than center and peripheral portions of the coil |
| 07/31/2001 | US6268583 Plasma torch of high cooling performance and components therefor |
| 07/26/2001 | WO2001054164A1 Impedance adapted microwave energy coupling device |
| 07/26/2001 | WO2001053434A1 Methods and apparatus for treating waste |
| 07/26/2001 | US20010009225 Method and device for pvd coating |
| 07/26/2001 | US20010009176 Method and apparatus for solid bonding, a conductor bonding method, a packaging method, and a bonding agent and a method for manufacturing a bonding agent |
| 07/26/2001 | DE10001936A1 Microwave internal plasma-coating apparatus for bottles, has microwave coupling system at one end, opposite coaxial waveguide including gas supply tube |
| 07/25/2001 | EP1118095A1 Vacuum treatment chamber and method for treating surfaces |
| 07/25/2001 | EP1118094A1 Method and apparatus for producing a uniform density plasma above a substrate |
| 07/25/2001 | EP1027281B1 A plasma ozone generator |
| 07/25/2001 | EP1010184A4 Spherical inertial electrostatic confinement device as a tunable x-ray source |
| 07/25/2001 | EP0938396A4 Plasma jet source using an inertial electrostatic confinement discharge plasma |
| 07/25/2001 | EP0868835B1 Method and device for characterising an ionised medium using an electromagnetic radiation source having an ultrashort duration |
| 07/25/2001 | EP0855133B1 Method and device for providing plasma |
| 07/24/2001 | US6265831 Plasma processing method and apparatus with control of rf bias |
| 07/24/2001 | US6265690 Plasma processing device for surfaces |
| 07/24/2001 | US6265689 Method of underwater cladding using a powder-fan plasma torch |