Patents
Sitemap › H05 - Electric techniques not otherwise provided for › H05H - Plasma technique; Production of accelerated electrically- charged particles or of neutrons; Production or acceleration of neutral molecular or atomic beams › H05H 1 - Generating plasma; Handling plasma
Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
12/1999
12/15/1999EP0830708B1 Plasma processing system with reduced particle contamination
12/15/1999EP0792571B1 Method and device for measuring ion flow in a plasma
12/15/1999CN1238792A Acrylate coating methods
12/14/1999US6002744 Method and apparatus for generating X-ray or EUV radiation
12/14/1999US6002096 Plasma torch with a single electrode producing a transferred arc
12/14/1999US6001224 Enhanced reactive DC sputtering system
12/14/1999CA2048470C Plasma processing apparatus having an electrode enclosing the space between cathode and anode
12/09/1999WO1999063586A1 Plasma processing apparatus
12/09/1999WO1999048130A9 Distributed inductively-coupled plasma source
12/09/1999DE19825555A1 Lichtbogen-Plasmagenerator Arc plasma generator
12/09/1999DE19825125A1 Vorrichtung zur Erzeugung von Plasma A device for generating plasma
12/08/1999EP0963141A2 Device for plasma generation
12/08/1999EP0963140A2 Method and device for generating plasma
12/08/1999EP0962277A1 Plasma welding torch
12/08/1999EP0962048A1 Series powered, parallel output radio frequency generator
12/07/1999US5998933 RF plasma inductor with closed ferrite core
12/07/1999US5998932 Focus ring arrangement for substantially eliminating unconfined plasma in a plasma processing chamber
12/07/1999US5998757 Plasma torch system with height adjustment
12/07/1999US5997962 Subjecting a target object, such as a semiconductor wafer or an lcd substrate, to a plasma process, such as an etching process or the like.
12/07/1999US5997956 Combustion chemical vapor deposition (?ccvd?), a recently invented cvd technique, allows for open atmosphere deposition of thin films.
12/07/1999US5997757 Method of forming connection hole
12/07/1999US5997687 Plasma processing apparatus
12/02/1999WO1999062308A1 Apparatus for coupling power into a body of gas
12/02/1999WO1999062307A1 Device for generating a magnetic field inside a chamber
12/02/1999WO1999062306A1 Method for modulating a magnetic field configuration
12/02/1999WO1999062099A1 Gas distributor for a semiconductor process chamber
12/02/1999WO1999054908A8 Crystalline gas distributor for semiconductor plasma etch chamber
12/02/1999DE19904948A1 Pressure stagings system for an electron beam welding unit
12/02/1999DE19824077A1 Vorrichtung zur Erzeugung von Plasma A device for generating plasma
12/02/1999DE19821244A1 Direct optical diagnosis of atmospheric and near atmospheric pressure plasmas in micro-plasma cell for e.g. gas analysis
12/02/1999CA2332860A1 Apparatus for coupling power into a body of gas
12/01/1999EP0961528A2 Device for plasma generation
12/01/1999EP0961527A1 Welding torch
12/01/1999EP0842307A4 System for the plasma treatment of large area substrates
12/01/1999CN1237264A Spherical inertial electrostatic confinement device as turnable X-ray source
11/1999
11/30/1999US5995235 Bandpass photon detector
11/30/1999US5994663 Plasma arc torch and method using blow forward contact starting system
11/30/1999US5993761 Conversion of hydrocarbons assisted by gliding electric arcs in the presence of water vapor and/or carbon dioxide
11/30/1999US5993678 Device and method for processing a plasma to alter the surface of a substrate
11/30/1999US5993598 Magnetron
11/30/1999US5993594 Silicon nitride liner, focus ring and/or gas distribution plate, the member having an exposed surface adjacent the substrate holder being effective to minimize particle contamination during processing of substrates.
11/30/1999US5992354 Combustion of nanopartitioned fuel
11/30/1999CA2196411C Electron beam stop analyzer
11/25/1999DE19919384A1 Verfahren zum Trockenätzen und Vakuumbehandlungsreaktor A method for dry etching and vacuum treatment reactor
11/24/1999EP0872164B1 Device for the production of plasmas by microwaves
11/24/1999EP0797688B1 Method for deposition of diamondlike carbon films
11/23/1999US5991360 Laser plasma x-ray source, semiconductor lithography apparatus using the same and a method thereof
11/23/1999US5990443 Plasma torch pilot arc circuit
11/23/1999US5988104 Plasma treatment system
11/23/1999CA2129064C Dimensionally stable subsonic plasma arc spray gun with long wearing electrodes
11/18/1999WO1999059385A1 The method of making a physically and chemically active environment by means of a plasma jet and the related plasma jet
11/18/1999WO1999059384A1 Processing system with dual ion sources
11/18/1999WO1999058282A1 Electrode of green compact for discharge surface treatment, method of producing the same, method of discharge surface treatment, apparatus therefor, and method of recycling electrode of green compact for discharge surface treatment
11/17/1999CN1235569A Plasma jet source using internal electrostatic confinement discharge plasma
11/17/1999CN1235274A Plasma torch with adjustable injector and gas analyser using such torch
11/16/1999US5986747 Apparatus and method for endpoint detection in non-ionizing gaseous reactor environments
11/16/1999US5985750 Selectively etching aluminum wires, reforming surface of oxide film beneath wires, forming an organic ingterlayer film
11/16/1999CA2009128C Transverse flow laser spray nozzle
11/11/1999WO1999057947A1 Method and device for high frequency treatment of products, related materials and uses
11/11/1999WO1999057177A1 Plasma surface treatment of silicone hydrogel contact lenses
11/11/1999WO1999056521A2 Method and apparatus for the production of neutrons and other particles
11/11/1999WO1999035893A9 Paraelectric gas flow accelerator
11/11/1999WO1999034396A3 Installation with an electron-cyclotron resonance ion source for doping stents with radioactive and non-radioactive atoms
11/11/1999DE19819909A1 Plasma sterilization assembly with inner electrode linked to a high-voltage generator
11/11/1999CA2331365A1 Method and device for high frequency treatment of products, related materials and uses
11/11/1999CA2328897A1 Plasma surface treatment of silicone hydrogel contact lenses
11/10/1999EP0954875A1 Modulator for plasma-immersion ion implantation
11/09/1999US5982099 Method of and apparatus for igniting a plasma in an r.f. plasma processor
11/09/1999US5981955 Isotope separation using a high field source and improved collectors
11/09/1999US5981899 Capacitively coupled RF-plasma reactor
11/09/1999US5981839 Methods and compositions for regulated transcription and expression of heterologous genes
11/09/1999US5980999 Method of manufacturing thin film and method for performing precise working by radical control and apparatus for carrying out such methods
11/09/1999US5980688 Plasma reactors and method of cleaning a plasma reactor
11/04/1999WO1999056507A1 A nozzle for a plasma arc torch with an exit orifice having an inlet radius and an extended length to diameter ratio
11/04/1999WO1999056309A1 Protective member for inner surface of chamber and plasma processing apparatus
11/04/1999WO1999056284A2 Method and apparatus for compressing a bose-einstein condensate of atoms
11/04/1999CA2328621A1 Method and apparatus for compressing a bose-einstein condensate of atoms
11/03/1999EP0953428A1 Plasma process for reducing friction within the lumen of polymeric tubing
11/03/1999EP0953204A1 Capacitively coupled rf-plasma reactor
11/03/1999EP0952957A1 Method and devices for producing hydrogen by plasma reformer
11/03/1999EP0734463B1 Gas diffuser plate assembly and rf electrode
11/02/1999US5977715 Handheld atmospheric pressure glow discharge plasma source
11/02/1999US5977510 Nozzle for a plasma arc torch with an exit orifice having an inlet radius and an extended length to diameter ratio
11/02/1999US5976636 Magnetic apparatus for arc ion plating
11/02/1999US5976310 Plasma etch system
11/02/1999US5976308 High density plasma CVD and etching reactor
11/02/1999US5976257 Apparatus for continuously forming a large area deposited film by means of microwave plasma CVD process
11/02/1999US5975014 Coaxial resonant multi-port microwave applicator for an ECR plasma source
11/02/1999CA2117331C A torch device for chemical processes having three axially movable electrodes
10/1999
10/28/1999WO1999054909A1 Smaller diameter coil to enhance uniformity of metal film formed by inductively coupled plasma deposition
10/28/1999WO1999054908A1 Crystalline gas distributor for semiconductor plasma etch chamber
10/28/1999WO1999054694A1 Method and apparatus for monitoring plasma processing operations
10/28/1999WO1999038365A8 Torch for cutting processes
10/27/1999EP0951961A1 Plasma pilot arc control
10/27/1999CN1233147A Ratiometric autotuning algorithm for RF plasma generator
10/26/1999US5973904 Particle charging apparatus and method of charging particles
10/26/1999US5973447 Gridless ion source for the vacuum processing of materials
10/26/1999US5973289 Microwave-driven plasma spraying apparatus and method for spraying
10/26/1999US5970908 Apparatus and improved polymerization gun for coating objects by vacuum deposit
10/21/1999WO1999053734A1 Torch and method for electric arc welding and cutting
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