| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 03/14/2002 | WO2001075932A3 An enhanced resist strip in a dielectric etcher using downstream plasma |
| 03/14/2002 | WO2001045135A3 Plasma reactor cooled ceiling with an array of thermally isolated plasma heated mini-gas distribution plates |
| 03/14/2002 | US20020031658 Nanosize particle coatings made by thermally spraying solution precursor feedstocks |
| 03/14/2002 | US20020030038 System for precision control of the position of an atmospheric plasma |
| 03/14/2002 | US20020029960 Sputtering apparatus and film manufacturing method |
| 03/14/2002 | US20020029853 Methods for running a high density plasma etcher to achieve reduced transistor device damage |
| 03/14/2002 | US20020029851 Plasma processing method and apparatus using dynamic sensing of a plasma environment |
| 03/14/2002 | US20020029850 System for the plasma treatment of large area substrates |
| 03/13/2002 | EP1187250A2 Microwave device |
| 03/13/2002 | EP1187187A1 Plasma processing apparatus |
| 03/13/2002 | EP1187172A2 Sputtering apparatus and film manufacturing method |
| 03/13/2002 | EP1186353A2 Treatment of gas cylinders |
| 03/13/2002 | EP1186211A1 Plasma torch comprising electrodes separated by an air gap and igniter incorporating same |
| 03/13/2002 | EP1185833A1 Plasma torch incorporating a reactive priming fuse and igniter tube integrating such a torch |
| 03/13/2002 | EP1185826A1 Emission control system |
| 03/12/2002 | US6356097 Capacitive probe for in situ measurement of wafer DC bias voltage |
| 03/12/2002 | US6356025 Shielded rf antenna |
| 03/12/2002 | US6355908 Method and apparatus for focusing a laser |
| 03/12/2002 | US6355573 Plasma processing method and apparatus |
| 03/12/2002 | US6355312 Methods and apparatus for subjecting a rod-like or thread-like material to a plasma treatment |
| 03/12/2002 | US6354903 Method of manufacture of a plasma reactor with curved shape for treating auto emissions |
| 03/12/2002 | US6354733 System and method for determining combustion temperature using infrared emissions |
| 03/12/2002 | US6354240 Plasma etch reactor having a plurality of magnets |
| 03/07/2002 | WO2002019781A1 Electromagnetic radiation generation using a laser produced plasma |
| 03/07/2002 | WO2002019380A1 Plasma processing |
| 03/07/2002 | WO2000075393A3 Carbon plasma pulsed source |
| 03/07/2002 | US20020028567 Film formation method and film formation apparatus |
| 03/07/2002 | DE10129965A1 Verfahren und Einrichtung zum Schweißen Method and apparatus for welding |
| 03/07/2002 | DE10041276A1 Joining process comprises forming an electric arc between a metal electrode to be melted and a workpiece to be joined, and surrounding the arc with a plasma arc and a protective gas |
| 03/07/2002 | DE10041065A1 Device for exciting and generating ionized gas or plasma using high frequency resonance to trigger or excite ionization, comprises resonant circuit for generating trigger or excitation voltage in capacitor |
| 03/07/2002 | DE10021071C1 Verfahren zur Entfernung von Stickoxiden aus einem Sauerstoff enthaltenden Rauchgasstrom A process for removing nitrogen oxides from a flue gas stream containing oxygen |
| 03/06/2002 | EP1183709A1 Linearly extended device for large-surface microwave treatment and for large surface plasma production |
| 03/06/2002 | EP1183447A1 Dielectric barrier gas reactors with non-axial flow |
| 03/06/2002 | EP1101122B1 Quasi-hemispherical fabry-perot resonator and method for operating the same |
| 03/06/2002 | EP0631711B1 System for characterizing ac properties of a processing plasma |
| 03/05/2002 | US6353206 Plasma system with a balanced source |
| 03/05/2002 | US6353201 Discharge electrode, RF plasma generation apparatus using the same, and power supply method |
| 03/05/2002 | US6352627 Method and device for PVD coating |
| 03/05/2002 | US6352050 Remote plasma mixer |
| 03/05/2002 | US6352049 Plasma assisted processing chamber with separate control of species density |
| 03/05/2002 | CA2270164C Apparatus and method for improved assembly concentricity in a plasma arc torch |
| 02/28/2002 | WO2001078188B1 Reconfigurable plasma electromagnetic waveguide |
| 02/28/2002 | US20020025388 Apparatus includes a chamber, a wafer support, antennae, a control module for controlling the antennae and responsive to associated detectors, which are located in or adjacent the wafer |
| 02/28/2002 | US20020025387 Process for the surface activation of materials |
| 02/28/2002 | US20020023718 RF matching unit |
| 02/28/2002 | US20020023589 Plasma generating apparatus |
| 02/28/2002 | DE10037053A1 Verfahren und Vorrichtung zum Plasmaimpulsverfestigen eines metallischen Bauteils Method and apparatus for pulsed plasma solidifying a metallic component |
| 02/27/2002 | EP1182912A1 Liquid sprays as the target for a laser-plasma extreme ultraviolet light source |
| 02/27/2002 | EP1182686A2 Method of hot switching a plasma tuner |
| 02/27/2002 | EP0835518B1 Low inductance large area coil for an inductively coupled plasma source |
| 02/26/2002 | US6351075 Plasma processing apparatus having rotating magnets |
| 02/26/2002 | US6350961 Method and device for improving surfaces |
| 02/26/2002 | US6350960 Parts-in-place safety reset circuit and method for contact start plasma-arc torch |
| 02/26/2002 | US6350701 Etching system |
| 02/26/2002 | US6350353 Apparatus comprising processing chamber, substrate support member disposed in the processing chamber having first power source coupled thereto, target disposed in the processing chamber, second power source, electromagnetic field source |
| 02/26/2002 | US6350347 Plasma processing apparatus |
| 02/26/2002 | US6350317 Linear drive system for use in a plasma processing system |
| 02/21/2002 | WO2002015650A2 Externally excited torroidal plasma source |
| 02/21/2002 | WO2002015649A2 Close coupled match structure for rf drive electrode |
| 02/21/2002 | WO2002015222A2 Use of pulsed voltage in a plasma reactor |
| 02/21/2002 | WO2001038035A3 Plasma torch and method for underwater cutting |
| 02/21/2002 | US20020021952 Substrate processing apparatus |
| 02/21/2002 | US20020021430 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 02/21/2002 | US20020020691 Methods and apparatus for plasma processing |
| 02/21/2002 | US20020020499 Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor |
| 02/21/2002 | US20020020498 Plasma processing apparatus and plasma processing method |
| 02/21/2002 | US20020020497 Plasma processing apparatus and plasma processing method |
| 02/21/2002 | US20020020494 Plasma processing system and method |
| 02/21/2002 | US20020020357 Apparatus and process for forming a deposited film |
| 02/19/2002 | US6348158 Electron beam is injected into a plasma to a control an electron energy distribution; semiconductor etching |
| 02/19/2002 | US6347602 Plasma processing apparatus |
| 02/19/2002 | CA2246970C System and method for detecting nozzle and electrode wear |
| 02/19/2002 | CA2088995C Plasma cycling sterilizing process |
| 02/19/2002 | CA2023410C Device for generating x-radiation with a plasma source |
| 02/14/2002 | WO2002013584A1 Monitoring and controlling separate plasma jets to achieve desired properties in a combined stream |
| 02/14/2002 | WO2002013583A1 Apparatus and method of improved consumable alignment in material processing apparatus |
| 02/14/2002 | WO2002013250A1 Radial antenna and plasma device using it |
| 02/14/2002 | WO2002013249A1 Radial antenna and plasma processing apparatus comprising the same |
| 02/14/2002 | WO2002013222A1 Improved apparatus and method for forming a high pressure plasma discharge column |
| 02/14/2002 | WO2002012591A1 Method and device for plasma treatment of moving metal substrates |
| 02/14/2002 | WO2001062053A3 Active control of electron temperature in an electrostatically shielded radio frequency plasma source |
| 02/14/2002 | WO2001058840A3 Treatment of fluorocarbon feedstocks |
| 02/14/2002 | US20020018025 Power supply antenna and power supply method |
| 02/14/2002 | US20020017508 Monitoring and controlling separate plasma jets to achieve desired properties in a combined stream |
| 02/14/2002 | DE10127035A1 Cleaning and odor neutralizing of air in rooms involves non-thermal, plasma-chemical conversion or passive boundary layer discharge using device made up of levels or cylindrical layers |
| 02/14/2002 | CA2423138A1 Method and device for plasma treatment of moving metal substrates |
| 02/13/2002 | EP1179854A1 Heterojunction compound semiconductor device |
| 02/13/2002 | EP0868836A4 Fluorine assisted stripping and residue removal in sapphire downstream plasma asher |
| 02/12/2002 | US6346915 Plasma processing method and apparatus |
| 02/12/2002 | US6346685 Plasma arc torch |
| 02/12/2002 | US6346428 Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing |
| 02/12/2002 | CA2221624C Microwave-driven plasma spraying apparatus and method for spraying |
| 02/07/2002 | WO2002010475A1 Ring-shaped high-density plasma source and method |
| 02/07/2002 | WO2002009905A1 Method and device for hardening a metal component by plasma pulse technology |
| 02/07/2002 | WO2001088220A8 System for precision control of the position of an atmospheric plasma jet |
| 02/07/2002 | WO2001082329A3 Highly efficient compact capacitance coupled plasma reactor/generator and method |
| 02/07/2002 | WO2001065895A3 Electrically controlled plasma uniformity in a high density plasma source |
| 02/07/2002 | WO2001045134A3 Method and apparatus for producing uniform process rates |
| 02/07/2002 | US20020015802 Method and apparatus for forming deposited film |
| 02/07/2002 | US20020015797 Chemical vapor deposition and powder formation using thermal spray with near supercritical and supercritical fluid solutions |