| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 07/04/2000 | US6084199 Plasma arc torch with vented flow nozzle retainer |
| 07/04/2000 | US6084198 Plasma gun and methods for the use thereof |
| 07/04/2000 | US6084197 Powder-fan plasma torch |
| 07/04/2000 | US6083568 Reducing organic material to form carbides for semiconductor wafers by injection of gas into reactors to form plasma : |
| 07/04/2000 | US6083341 Method for making coatings of uniform thickness |
| 07/04/2000 | US6082374 Fluorine assisted stripping and residue removal in sapphire downstream plasma asher |
| 07/04/2000 | US6082293 Plasma source |
| 06/29/2000 | WO2000038485A1 Wear part for arc welding torch produced in alloyed copper |
| 06/29/2000 | WO1999056521A3 Method and apparatus for the production of neutrons and other particles |
| 06/29/2000 | DE19962163A1 Centrifugal fusion tablet injector for nuclear fusion unit, comprises fuel supply system, vacuum tank with exhaust pipe, extruder, rotor and tablet splitting unit |
| 06/29/2000 | DE19900128A1 Düse sowie Düsenanordnung für einen Brennerkopf eines Plasmaspritzgeräts Nozzle and nozzle assembly for a burner head of a plasma spray device |
| 06/29/2000 | DE19849894C1 Gepulste Plasmaquelle für einen gasgefüllten Teilchenbeschleuniger Pulsed plasma source for a gas-filled particle accelerator |
| 06/28/2000 | EP1014761A1 Duct piece for gas treatment device and device comprising such a duct piece |
| 06/28/2000 | EP1013155A1 Plasma torch for plasma spraying equipment and pertaining anode |
| 06/28/2000 | EP1012863A1 Glow plasma discharge device |
| 06/28/2000 | EP1012113A1 Electrically assisted partial oxidation of light hydrocarbons by oxygen |
| 06/28/2000 | CN1258131A Method and device for generating instantaneous high-energy current |
| 06/27/2000 | US6080955 Plasma producer with a holder |
| 06/27/2000 | US6080292 Monitoring apparatus for plasma process |
| 06/27/2000 | US6080271 Plasma source for generating inductively coupled, plate-shaped plasma, having magnetically permeable core |
| 06/27/2000 | US6080270 Compact microwave downstream plasma system |
| 06/27/2000 | US6079426 Method and apparatus for determining the endpoint in a plasma cleaning process |
| 06/27/2000 | US6079357 Plasma processing apparatus |
| 06/27/2000 | US6079356 Reactor optimized for chemical vapor deposition of titanium |
| 06/22/2000 | WO2000036638A1 Methods for running a high density plasma etcher to achieve reduced transistor device damage |
| 06/21/2000 | EP1010184A1 Spherical inertial electrostatic confinement device as a tunable x-ray source |
| 06/21/2000 | CN1053603C Plasma arc utilizing apparatus |
| 06/20/2000 | US6077787 Method for radiofrequency wave etching |
| 06/20/2000 | US6077759 Method of producing semiconductor device |
| 06/20/2000 | US6077402 Method and apparatus for generating a plasma to sputter deposit a layer of material in the fabrication of semiconductor devices |
| 06/20/2000 | US6077388 System and method for plasma etch on a spherical shaped device |
| 06/20/2000 | US6077384 Plasma reactor having an inductive antenna coupling power through a parallel plate electrode |
| 06/20/2000 | US6076483 Plasma processing apparatus using a partition panel |
| 06/15/2000 | WO2000035256A1 Device for producing a free cold plasma jet |
| 06/15/2000 | WO2000034979A1 Hollow cathode array for plasma generation |
| 06/15/2000 | DE19855655A1 Plasma treatment unit for wafers employs polyimide screws with raised heads avoiding sharp contours to reduce charge concentrations, minimize erosion and increase screw life |
| 06/15/2000 | DE19855654A1 Wafer clamping ring used for plasma treatment chamber in IC manufacturing has erosion-resistant tips |
| 06/15/2000 | CA2348653A1 Hollow cathode array for plasma generation |
| 06/13/2000 | US6074519 Plasma etching apparatus having a sealing member coupling an upper electrode to an etching chamber |
| 06/13/2000 | US6074516 High sputter, etch resistant window for plasma processing chambers |
| 06/13/2000 | US6074514 High selectivity etch using an external plasma discharge |
| 06/13/2000 | US6074512 Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners |
| 06/13/2000 | US6073578 RF induction plasma source generating apparatus |
| 06/13/2000 | US6073577 Electrode for plasma processes and method for manufacture and use thereof |
| 06/08/2000 | WO2000032839A1 Enhanced plasma mode, method, and system for plasma immersion ion implantation |
| 06/07/2000 | EP1006761A1 Plasma processor |
| 06/07/2000 | EP1006760A2 Water-injection nozzle assembly with insulated front end |
| 06/07/2000 | EP1006557A2 Apparatus for generating and utilizing magnetically neutral line discharge type plasma |
| 06/07/2000 | CN1255554A Deposited film forming system and method thereof |
| 06/07/2000 | CN1053230C Microwave enhanced CVD system and method under magnetic field |
| 06/07/2000 | CN1053229C Microwave enhanced CVD system and method under magnetic field |
| 06/06/2000 | US6072147 Plasma processing system |
| 06/06/2000 | US6071372 RF plasma etch reactor with internal inductive coil antenna and electrically conductive chamber walls |
| 06/06/2000 | US6071114 Method and apparatus for characterizing a combustion flame |
| 06/02/2000 | WO2000032017A1 Plasma generator |
| 05/31/2000 | EP1004136A1 Plasma processing apparatus |
| 05/30/2000 | US6069339 Dual flow nozzle shield for plasma-arc torch |
| 05/30/2000 | US6069092 Etching silicon dioxide surface within heated chemical reactor using fluorohydrocarbon plasma generated by applying a radio frequency power to the lower electrode supporting the substrate |
| 05/25/2000 | WO2000030148A1 Integrated power modules for plasma processing systems |
| 05/25/2000 | DE19930925A1 Plasma generator has annular or tubular cathode mounted coaxially wrt. anode and open on both sides of its annular or tubular body; axial opening of cathode is adjustable |
| 05/24/2000 | EP1002888A2 Method and apparatus for high frequency plasma treatment of a substrate |
| 05/24/2000 | CN1254250A Plasma processing device and plasma processing method using said device |
| 05/24/2000 | CN1052759C Fast quench reactor and method |
| 05/23/2000 | US6066827 Electrode with emissive element having conductive portions |
| 05/23/2000 | US6066826 Apparatus for plasma treatment of moving webs |
| 05/23/2000 | US6066825 Methods and apparatus for low NOx emissions during the production of electricity from waste treatment systems |
| 05/23/2000 | CA2034459C Low frequency radio frequency plasma spray deposition |
| 05/18/2000 | WO2000028795A1 System and method for dual threshold sensing in a plasma arc torch |
| 05/18/2000 | WO2000028794A1 Plasma arc torch tip providing a substantially columnar shield flow |
| 05/17/2000 | EP1001449A1 Deposited film forming system and process |
| 05/17/2000 | EP1001448A2 Thin film DC plasma processing system |
| 05/17/2000 | EP1000528A1 Blow forward contact start plasma arc torch with distributed nozzle support |
| 05/17/2000 | EP1000527A1 Method for generating energy by controlled plasma-induced nuclear fusion and device for the implementation of said method |
| 05/16/2000 | US6063236 Vacuum processing system and method of removing film deposited on inner face of vacuum vessel in the vacuum processing system |
| 05/16/2000 | US6063233 Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna |
| 05/16/2000 | US6062163 Plasma initiating assembly |
| 05/11/2000 | WO2000027170A1 Gas-filled particle accelerator with a pulsed plasma source |
| 05/11/2000 | WO2000000992A3 Focus ring arrangement for substantially eliminating unconfined plasma in a plasma processing chamber |
| 05/11/2000 | DE19851628A1 Strip line arrangement for microwave-induced plasma sources for analytical atom spectrometry has gas lines integrated into dielectric substrate or basic metallization |
| 05/11/2000 | DE19847848C1 Vorrichtung und Erzeugung angeregter/ionisierter Teilchen in einem Plasma Device and generating excited / ionized particles in a plasma |
| 05/09/2000 | US6061006 Apparatus for sensing RF current delivered to a plasma with two inductive loops |
| 05/09/2000 | US6060837 Method of and apparatus for minimizing plasma instability in an rf processor |
| 05/09/2000 | US6060836 Plasma generating apparatus and ion source using the same |
| 05/09/2000 | US6060680 Method of forming an oxide ceramic electrode in a transferred plasma arc reactor |
| 05/09/2000 | US6059922 Plasma processing apparatus and a plasma processing method |
| 05/04/2000 | WO2000025557A1 Microwave plasma generating apparatus, method for decomposing or ganic halide, and system for decomposing organic halide |
| 05/04/2000 | WO2000025384A1 Oversized microwave load of high power direct current and use as calorimeter |
| 05/04/2000 | WO2000025354A1 Polycrystalline silicon thin film forming method and thin film forming apparatus |
| 05/04/2000 | WO2000025344A1 Method for monitoring alternating current discharge on a double electrode |
| 05/04/2000 | DE19848636A1 Verfahren zur Überwachung einer Wechselspannungs-Entladung an einer Doppelelektrode A method for monitoring an AC voltage discharge on a double electrode |
| 05/04/2000 | DE19847774A1 Verfahren zur Plasmabehandlung von stab- oder fadenförmigem Material A process for plasma treatment of rod- or thread-shaped material |
| 05/03/2000 | EP0998174A1 Apparatus and method for supplying fluids to a plasma arc torch |
| 05/03/2000 | EP0997926A2 Plasma treatment apparatus and method |
| 05/02/2000 | US6057645 Plasma discharge device with dynamic tuning by a movable microwave trap |
| 05/02/2000 | US6057524 Plasma arc utilizing apparatus |
| 05/02/2000 | US6056848 Thin film electrostatic shield for inductive plasma processing |
| 05/02/2000 | CA2029508C Plasma torch |
| 04/27/2000 | WO2000024235A1 Method for measuring negative ions in plasma, and plasma treating method and apparatus |
| 04/27/2000 | WO2000024046A1 Plasma etching method |
| 04/27/2000 | WO2000024031A1 Device for producing excited/ionized particles in a plasma |