Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
10/2000
10/26/2000CA2370991A1 Large area atmospheric-pressure plasma jet
10/25/2000EP1047289A2 RF plasma source for material processing
10/25/2000EP1047288A2 Plasma focus high energy photon source
10/25/2000EP0919317A4 Method for the plasmic arc-welding of metals
10/25/2000CN1271329A Electrically assisted partial oxidation of light hydrocarbon by oxygen
10/24/2000US6137231 Constricted glow discharge plasma source
10/24/2000US6137078 Nozzle for use in a torch head of a plasma torch apparatus
10/24/2000US6136722 Selectively etching silicon dioxide film through a window of masking film using a fluorocarbon-based etching gas and forming a fluorocarbon polymer film on the masking film
10/24/2000US6136712 Method and apparatus for improving accuracy of plasma etching process
10/24/2000US6136388 Substrate processing chamber with tunable impedance
10/24/2000US6136140 Plasma processing apparatus
10/24/2000US6136139 Plasma processing apparatus
10/24/2000US6135760 Method and apparatus for characterizing a combustion flame
10/24/2000CA2205529C Plasma furnace and a method of operating the same
10/19/2000WO2000062584A1 Plasma torch cartridge and plasma torch equipped therewith
10/19/2000WO2000062329A1 Method and apparatus for radio frequency isolation of liquid heat transfer medium supply and discharge lines
10/19/2000WO2000062328A1 Method and apparatus for stabilising a plasma
10/19/2000WO2000061384A1 Remote plasma generator
10/19/2000WO2000061284A1 Organic halogen compound decomposing device and operation control method therefor, and organic halogen compound decomposing method
10/19/2000DE19917510A1 Reactor for plasma-chemical induced reactions has a discharge chamber or producing a plasma and an injection chamber for introducing reactive atoms and molecules and/or surface-modified aerosols and particles
10/19/2000DE19916478A1 Procedure for evacuation of a container in which a plasma discharge it to be set up in a plasma reactor for sterilization of components has a multi-stage pumping process with vacuum pumps efficient over different pressures
10/18/2000EP1045624A2 Tapered electrode for plasma arc cutting torches
10/18/2000EP1044459A1 Plasma device including a powered non-magnetic metal member between a plasma ac excitation source and the plasma
10/18/2000EP1044458A1 Dual face shower head electrode for a magnetron plasma generating apparatus
10/18/2000EP1044113A1 Plasma discharge device and method with dynamic tuning
10/18/2000CN1270711A Electrical impedance matching system and method
10/18/2000CN1270640A Device and method for detecting and preventing arcing in RF plasma systems
10/17/2000US6133543 System and method for dual threshold sensing in a plasma ARC torch
10/17/2000US6133542 Process for coating or welding easily oxidized materials and plasma torch for carrying out this process
10/17/2000US6132653 Powders formed by pressurization and transport of solutions, heating, exposure to spray
10/12/2000WO2000060910A1 The method and the apparatus for plasma generation
10/12/2000WO2000000999A9 Elastomer bonded parts for plasma processes and method for manufacture and use thereof
10/12/2000WO1999056284A3 Method and apparatus for compressing a bose-einstein condensate of atoms
10/11/2000EP1043762A1 Polycrystalline silicon thin film forming method and thin film forming apparatus
10/11/2000EP1043419A1 A diamond film depositing apparatus and method thereof
10/11/2000EP1042783A1 Focus rings and methods therefor
10/11/2000EP1042782A1 Vacuum treatment system
10/11/2000EP1042532A1 Method for annealing an amorphous film using microwave energy
10/11/2000EP1042526A1 Magnetron sputtering source
10/11/2000CN1269734A Treatment of gaseous emissions
10/11/2000CN1269692A Plasma source
10/11/2000CN1057422C Microwave plasma torch
10/10/2000US6130399 Electrode for a plasma arc torch having an improved insert configuration
10/10/2000US6130397 Thermal plasma annealing system, and annealing process
10/10/2000US6129808 Low contamination high density plasma etch chambers and methods for making the same
10/05/2000WO2000059019A1 Plasma processing system
10/05/2000WO2000059018A1 Plasma processing system
10/05/2000WO2000058995A2 Apparatus for improving plasma distribution and performance in an inductively coupled plasma
10/05/2000WO2000058994A1 Method and apparatus for compensating non-uniform wafer processing in plasma processing
10/05/2000WO2000058993A1 Plasma processor with coil having variable rf coupling
10/05/2000WO2000058992A1 Plasma processing method and apparatus with control of rf bias
10/05/2000WO2000058989A1 Plasma gun and methods for the use thereof
10/05/2000WO2000057770A2 Imaging system with remote controlled camera
10/04/2000EP1041863A1 Plasma cell
10/04/2000EP1040506A1 Device for producing excited/ionized particles in a plasma
10/04/2000EP1040500A1 A plasma generating apparatus having an electrostatic shield
10/04/2000EP1039962A1 Plasma assisted gas processing with zirconia
10/03/2000US6127645 Tunable, self-powered arc plasma-melter electro conversion system for waste treatment and resource recovery
10/03/2000US6127271 Process for dry etching and vacuum treatment reactor
10/03/2000US6126858 Ternary gaseous mixture
10/03/2000US6126779 Plasma gas processing
10/03/2000US6126778 Beat frequency modulation for plasma generation
10/03/2000US6125859 Method for improved cleaning of substrate processing systems
10/03/2000US6125789 Increasing the sensitivity of an in-situ particle monitor
10/03/2000US6125788 Plasma reactor with enhanced plasma uniformity by gas addition, reduced chamber diameter and reduced RF wafer pedestal diameter
10/03/2000CA2083132C Plasma torch
09/2000
09/28/2000WO2000057675A2 Waveguide apparatus for an electromagnetic heating device
09/28/2000WO2000028794A9 Plasma arc torch tip providing a substantially columnar shield flow
09/28/2000DE19911263A1 Device for contactless liquid sample entering into blazing heated tube spectroscopic measurements; uses sample in liquid form as liquid jet or as aerosol freely flying into hot tube while pressure drop at nozzle generates liquid jet
09/27/2000EP1039502A2 Heat protection of sealing o-rings in a microwave plasma generating apparatus
09/27/2000EP1039479A1 Nuclear waste separator
09/27/2000EP1038306A1 Method and device for improving surfaces
09/27/2000EP1038046A1 Plasma reactor with a deposition shield
09/27/2000EP1038042A1 Apparatus and method for utilizing a plasma density gradient to produce a flow of particles
09/27/2000EP0870317B1 Apparatus for controlling matching network of a vacuum plasma processor and memory for same
09/26/2000US6123775 Reaction chamber component having improved temperature uniformity
09/26/2000CA2182247C Apparatus and method for treatment of substrate surface using plasma focused below orifice leading from chamber into substrate containing area
09/21/2000WO2000055884A1 Sterilization by a low energy electron beam
09/21/2000WO2000054899A1 A method for a repetitive ion beam processing with a by carbon containing ion beam
09/21/2000DE19911386A1 Nuclear fusion reaction comprises using a single exchange step of the driving pulse with the plasma of the nuclear fusion material
09/20/2000EP1036488A1 Method and device for producing extreme ultraviolet and soft x-rays from a gaseous discharge
09/20/2000EP1036308A2 Method and apparatus for characterizing a combustion flame
09/20/2000EP1036214A1 Mixed frequency cvd process and apparatus
09/20/2000EP0866885A4 Nanostructured feeds for thermal spray
09/20/2000EP0823192B1 Plasma torch for transmitted arcs
09/19/2000US6121571 Plasma generator ignition circuit
09/19/2000US6121570 Apparatus and method for supplying fluids to a plasma arc torch
09/19/2000US6121569 Plasma jet source using an inertial electrostatic confinement discharge plasma
09/13/2000EP1035757A1 Substrate electrode plasma generator and substance/material processing method
09/12/2000US6118218 Steady-state glow-discharge plasma at atmospheric pressure
09/08/2000WO2000052973A2 Plasma reactor having a helicon wave high density plasma source
09/08/2000WO2000051714A1 Plasma-assisted processing of gaseous media
09/06/2000EP1033908A2 Plasma discharge truing apparatus and fine-machining methods using the apparatus
09/06/2000EP1033797A2 Pulse power system
09/06/2000EP1033551A2 Electro-power impact cell for plasma blasting
09/06/2000EP1033068A1 Plasma processing apparatus having rotating magnets
09/06/2000EP1032944A1 Planar magnetron with moving magnet assembly
09/06/2000EP1032943A2 Method for producing plasma by microwave irradiation
09/06/2000EP0861576B1 Plasma stream generator with a closed-configuration arc
09/05/2000US6114811 Electromagnetic high-frequency apparatus with a transmission wall having antennas