| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 07/31/2002 | CN1361889A Electron density measurement and plasma process control system using a microwave oscillator locked to an open resonator containing the plasma |
| 07/31/2002 | CN1361867A Electron density measurement and control system using plasma-induced changes in the frequency of a microwave oscillator |
| 07/31/2002 | CN1361863A Electron density measurement and plasma process control system using changes in the resonant frequency of an open resonator containing the plasma |
| 07/30/2002 | US6426477 Plasma processing method and apparatus for eliminating damages in a plasma process of a substrate |
| 07/30/2002 | US6426302 Useful for continuously producing negative ions in high density and also negative ions can be made incident on the semiconductor substrate to be processed to conduct ashing, etching and cleaning of the substrate to remove impurities |
| 07/30/2002 | US6425953 Heating, injecting cleaning gas |
| 07/25/2002 | WO2002058441A1 Plasma device and plasma generating method |
| 07/25/2002 | WO2002058123A1 Plasma device and plasma generating method |
| 07/25/2002 | WO2002058121A1 Method and device for plasma cvd |
| 07/25/2002 | WO2002057506A2 Low contamination plasma chamber components and methods for making the same |
| 07/25/2002 | US20020096999 Inductively coupled RF plasma source |
| 07/25/2002 | US20020096998 Plasma generation apparatus and method |
| 07/25/2002 | US20020096259 Regenerative thermal oxidizer process and so2 scrubbing |
| 07/24/2002 | EP1225794A1 Matching device and plasma processing apparatus |
| 07/24/2002 | EP1225392A2 Combustor mixer having plasma generating nozzle |
| 07/24/2002 | EP1224846A2 Plasma torch and method for underwater cutting |
| 07/24/2002 | EP1224683A1 Method and apparatus for low voltage plasma doping using dual pulses |
| 07/24/2002 | EP1068633B1 Method and device for specifically manipulating and depositing particles |
| 07/24/2002 | EP0867105B1 Torch for inductively coupled plasma spectrometry |
| 07/24/2002 | CN1087991C Electrode for green compact for discharge surface treatment, method of producing same, method and apparatus for discharge surface treatment and green compact for discharge surface treatment |
| 07/23/2002 | US6424091 Plasma treatment apparatus and plasma treatment method performed by use of the same apparatus |
| 07/23/2002 | US6424082 Apparatus and method of improved consumable alignment in material processing apparatus |
| 07/23/2002 | US6423924 Method for treating the surface of a material or an object and implementing device |
| 07/23/2002 | US6423923 Monitoring and controlling separate plasma jets to achieve desired properties in a combined stream |
| 07/23/2002 | US6423922 Process of forming an electrode |
| 07/23/2002 | US6423278 Plasma dry scrubber |
| 07/23/2002 | US6423242 Etching silicon dioxide film formed on silicon nitride film on a substrate with a perlfuorobutene gas, high frequency electric field applied between first and second electrodes |
| 07/23/2002 | US6423177 Apparatus for performing plasma process on particles |
| 07/23/2002 | US6422825 Plasma vacuum pumping cell |
| 07/23/2002 | US6422745 System and method for determining combustion temperature using infrared emissions |
| 07/23/2002 | US6422172 Plasma processing apparatus and plasma processing method |
| 07/18/2002 | WO2002056338A2 Device for the plasma-mediated working of surfaces on planar substrates |
| 07/18/2002 | WO2002056333A1 Plasma processing apparatus |
| 07/18/2002 | WO2002035895A3 A method and an apparatus for excitation of a plasma |
| 07/18/2002 | US20020094691 Method for manufacturing semiconductor device |
| 07/18/2002 | US20020094063 Laser plasma EUV light source apparatus and target used therefor |
| 07/18/2002 | US20020093294 System and method for ignition and reignition of unstable electrical discharges |
| 07/18/2002 | US20020092834 Apparatus for coating a substrate with a plasma arc torch |
| 07/18/2002 | US20020092616 Apparatus for plasma treatment using capillary electrode discharge plasma shower |
| 07/18/2002 | US20020092473 Ion source |
| 07/18/2002 | US20020092302 Combustor mixer having plasma generating nozzle |
| 07/18/2002 | DE10153204A1 Ultraviolet radiation generation system for treating coating of fiber optic cable, has two reflectors within microwave chamber, that reflect ultraviolet radiation from plasma lamp, onto fiber optic cable |
| 07/17/2002 | CN1359531A Gas distribution apparatus for semiconductor processing |
| 07/17/2002 | CN1359471A Method and apparatus for minimizing semiconductor wafer arcing semiconductor wafer processing |
| 07/17/2002 | CN1359143A Plasma working equipment |
| 07/17/2002 | CN1358544A Radiation medical inplantation article and making method thereof |
| 07/17/2002 | CN1087672C Plasma system and method of operating same |
| 07/16/2002 | US6421421 Extreme ultraviolet based on colliding neutral beams |
| 07/16/2002 | US6420863 Method for monitoring alternating current discharge on a double electrode and apparatus |
| 07/16/2002 | US6420673 Powdered metal emissive elements |
| 07/16/2002 | US6420672 Method and apparatus for detecting an inadequate gas supply for a plasma cutter |
| 07/16/2002 | US6419995 Treating homogeneously at least a portion of the surface of the material in web form, which is moved over a pair of rolls, with an atmospheric plasma generated by an indirect plasmatron |
| 07/16/2002 | US6419752 Structuring device for processing a substrate |
| 07/16/2002 | US6419538 Marine propulsion system and method using an in-situ generated water plasma |
| 07/16/2002 | US6418874 Toroidal plasma source for plasma processing |
| 07/16/2002 | CA2089874C High velocity electric-arc spray apparatus and method of forming materials |
| 07/15/2002 | WO2002056649A1 Plasma generator |
| 07/11/2002 | WO2002054836A1 Method and device for accelerating ions in plasma hall current-type accelerators |
| 07/11/2002 | WO2002054835A2 Addition of power at selected harmonics of plasma processor drive frequency |
| 07/11/2002 | WO2002054444A1 Electrode for plasma processes and method for manufacture and use thereof |
| 07/11/2002 | WO2002053299A1 A method for the preparation of a substrate for immobilising chemical compounds and the substrate and the use thereof |
| 07/11/2002 | US20020088776 Plasma processing apparatus suitable for power supply of higher frequency |
| 07/11/2002 | US20020088400 Plasma processing apparatus including a plurality of plasma processing units having reduced variation |
| 07/11/2002 | CA2436253A1 A method for the preparation of a substrate for immobilising chemical compounds and the substrate and the use thereof |
| 07/10/2002 | EP1221175A1 Electric supply unit and a method for reducing sparking during sputtering |
| 07/10/2002 | CN2500068Y Z-pinch silk array load and auxiliary device |
| 07/10/2002 | CN1358058A 毛细管等离子发生器 Capillary plasma generator |
| 07/10/2002 | CN1357415A Ultraviolet lamp system and method |
| 07/10/2002 | CN1087204C Plasma arc torch |
| 07/10/2002 | CN1087203C Contact start plasma cutting apparatus |
| 07/09/2002 | US6418177 Fuel pellets for thermonuclear reactions |
| 07/09/2002 | US6417626 Immersed inductively—coupled plasma source |
| 07/09/2002 | US6417625 Apparatus and method for forming a high pressure plasma discharge column |
| 07/09/2002 | US6417499 Dielectric heating using inductive coupling |
| 07/09/2002 | US6417111 Plasma processing apparatus |
| 07/09/2002 | US6417079 Discharge electrode, high-frequency plasma generator, method of power feeding, and method of manufacturing semiconductor device |
| 07/04/2002 | WO2001076328A3 Plasma arc torch and method for longer life of plasma arc torch consumable parts |
| 07/04/2002 | US20020086546 Plasma processing system in which wafer is retained by electrostatic chuck, plasma processing method and method of manufacturing semiconductor device |
| 07/04/2002 | US20020086118 Plasma spraying coating material onto plasma exposed surface of component to form a coating having surface roughness characteristics that promote adhesion of polymer deposits |
| 07/04/2002 | US20020085661 Propulsion system for space vehicle |
| 07/04/2002 | US20020084181 Alternate steps of IMP and sputtering process to improve sidewall coverage |
| 07/03/2002 | EP1220584A1 Device for coating a substrate with a plasma torch |
| 07/03/2002 | EP1220583A1 Cooling screw tubes |
| 07/03/2002 | EP1220293A2 Tandem plasma mass filter |
| 07/03/2002 | EP1220281A2 Method of treatment with a microwave plasma |
| 07/03/2002 | EP1219340A1 Non-thermal plasma reactor for lower power consumption |
| 07/03/2002 | EP1218975A1 Gas laser |
| 07/03/2002 | EP1218916A1 Electron beam plasma formation for surface chemistry |
| 07/03/2002 | EP1218763A1 Electron density measurement and control system using plasma-induced changes in the frequency of a microwave oscillator |
| 07/03/2002 | EP1218306A1 Method for partially treating a water-repellent glass sheet and the partially treated glass sheet |
| 07/03/2002 | EP1068032B1 Container with material coating having barrier effect and method and apparatus for making same |
| 07/02/2002 | US6414438 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it |
| 07/02/2002 | US6413359 Plasma reactor with high selectivity and reduced damage |
| 07/02/2002 | US6413209 Imaging system with condensation control |
| 07/02/2002 | US6412438 Downstream sapphire elbow joint for remote plasma generator |
| 07/02/2002 | CA2268102C Plasma arc torch and method using contact starting system |
| 06/27/2002 | WO2002050335A1 Injector and method for prolonged introduction of reagents into plasma |
| 06/27/2002 | WO2002008787A3 Method and apparatus for the production of so called 'fractional hydrogen' and associated production of photon energy |
| 06/27/2002 | WO2001073814A3 Method and apparatus for controlling power delivered to a multiple segment electrode |
| 06/27/2002 | US20020080904 Magnetic and electrostatic confinement of plasma in a field reversed configuration |