| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 09/25/2002 | EP1244136A2 Material handling system and method for a multi-workpiece plasma treatment system |
| 09/25/2002 | EP1243277A1 Sterilization system employing a switching module adapted to pulsate the low frequency power applied to a plasma |
| 09/25/2002 | EP1243017A1 Linear drive system for use in a plasma processing system |
| 09/25/2002 | EP1243016A2 Method and apparatus for ionized physical vapor deposition |
| 09/25/2002 | EP1242810A1 Segmented electrode capillary discharge, non-thermal plasma apparatus and process for promoting chemical reactions |
| 09/25/2002 | EP1218916A4 Electron beam plasma formation for surface chemistry |
| 09/25/2002 | EP1156866B1 Plasma-assisted processing of gaseous media |
| 09/25/2002 | EP0975818B1 Method and device for pvd coating |
| 09/24/2002 | USRE37853 Fast quench reactor and method |
| 09/24/2002 | US6455808 Pulse power system |
| 09/24/2002 | US6455437 Method and apparatus for monitoring the process state of a semiconductor device fabrication process |
| 09/24/2002 | US6455014 Nonthermal plasma (electrons) or corona discharge; low power requireed so that batteries or portable power sources can be used |
| 09/24/2002 | US6454920 Magnetron sputtering source |
| 09/24/2002 | US6454898 Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners |
| 09/24/2002 | US6453660 Combustor mixer having plasma generating nozzle |
| 09/19/2002 | WO2002074023A2 Composite electrode for a plasma arc torch |
| 09/19/2002 | WO2002073676A1 Plasma treatment device |
| 09/19/2002 | WO2002073654A1 Plasma chamber support having dual electrodes |
| 09/19/2002 | WO2002072286A1 Combined plasma/liquid cleaning of substrates |
| 09/19/2002 | WO2002060828A3 Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces |
| 09/19/2002 | WO2001096028A9 Methods and apparatus for spray forming, atomization and heat transfer |
| 09/19/2002 | US20020132479 Adaptive plasma characterization system |
| 09/19/2002 | US20020132380 Graphic user interface, which is based on the html/xml page format, is implemented in the at least one display/operator control unit and/or the computing unit |
| 09/19/2002 | US20020131918 Edge-connected non-thermal plasma exhaust after-treatment device |
| 09/19/2002 | US20020131917 For treating NOx/nitrogen oxides bearing gas streams; efficiency, durability |
| 09/19/2002 | US20020131916 Non-thermal plasma reactor and method-structural conductor |
| 09/19/2002 | US20020130110 Impedance matching circuit for inductively coupled plasma source |
| 09/19/2002 | US20020130109 Inner torch |
| 09/19/2002 | US20020129904 Plasma treatment apparatus and method of producing semiconductor device using the apparatus |
| 09/19/2002 | CA2440254A1 Combined plasma/liquid cleaning of substrates |
| 09/18/2002 | EP1240660A1 Method of manufacturing an electrode for a plasma reactor and such electrode |
| 09/18/2002 | EP1088332B1 Focus ring arrangement for substantially eliminating unconfined plasma in a plasma processing chamber |
| 09/18/2002 | EP0830707B1 Plasma sputter etching system with reduced particle contamination |
| 09/18/2002 | CN1370325A Plasma reaction chamber component having improved temp uniformity |
| 09/18/2002 | CN1370038A Adaptive 2-hoop fibre array load and its preparing process |
| 09/18/2002 | CN1369902A Self-adption plasma attribute system |
| 09/17/2002 | US6452400 Method of measuring negative ion density of plasma and plasma processing method and apparatus for carrying out the same |
| 09/17/2002 | US6452130 Electrode with brazed separator and method of making same |
| 09/17/2002 | US6452129 Plasma torch preventing gas backflows into the torch |
| 09/17/2002 | US6451390 Plasma enhanced chemical vapor deposition; silicon dioxide film from tetraethyl silicate |
| 09/17/2002 | US6451175 Method and apparatus for carbon nanotube production |
| 09/17/2002 | US6451160 Plasma generation apparatus with a conductive connection member that electrically connects the power source to the electrode |
| 09/17/2002 | US6450116 Apparatus for exposing a substrate to plasma radicals |
| 09/17/2002 | US6449941 Hall effect electric propulsion system |
| 09/17/2002 | US6449871 Semiconductor process chamber having improved gas distributor |
| 09/12/2002 | WO2002071462A1 Plasma processor and plasma processing method |
| 09/12/2002 | WO2002071438A2 Capillary discharge plasma apparatus and method for surface treatment using the same |
| 09/12/2002 | US20020128538 Imaging system and components thereof |
| 09/12/2002 | US20020127853 Electrode for plasma processes and method for manufacture and use thereof |
| 09/12/2002 | US20020127351 Placing electrode opposite to second electrode containing a carbon material as a main component in atmosphere or air; applying voltage between electrodes to generate arc discharge; evaporating carbon mateial to generate soot; recovering |
| 09/12/2002 | US20020125226 Toroidal low-field reactive gas source |
| 09/12/2002 | US20020125225 Toroidal low-field reactive gas source |
| 09/12/2002 | US20020125224 Composite electrode for a plasma arc torch |
| 09/12/2002 | US20020125223 Radio frequency power source for generating an inductively coupled plasma |
| 09/12/2002 | US20020125220 Plasma torch provided with a ceramic protective cap |
| 09/12/2002 | US20020124959 Plasma monitoring method and semiconductor production apparatus |
| 09/12/2002 | US20020124867 Apparatus and method for surface cleaning using plasma |
| 09/11/2002 | EP1239511A1 RF plasma processor |
| 09/11/2002 | EP1238711A2 Internal burner |
| 09/11/2002 | EP1238407A1 Inductively coupled plasma process chamber with shield electrode interposed between antenna and dielectric window |
| 09/11/2002 | CN1090807C Device for processing workpiece using plasma |
| 09/10/2002 | US6448721 Cylindrical geometry hall thruster |
| 09/10/2002 | US6448565 Unit for a plasma atomizer device with plasma gas-supply means, sample atomizer means and sample injection means |
| 09/10/2002 | US6447850 Polycrystalline silicon thin film forming method |
| 09/10/2002 | US6447848 Nanosize particle coatings made by thermally spraying solution precursor feedstocks |
| 09/10/2002 | US6447719 Power system for sterilization systems employing low frequency plasma |
| 09/10/2002 | US6447637 Process chamber having a voltage distribution electrode |
| 09/10/2002 | US6447636 Plasma reactor with dynamic RF inductive and capacitive coupling control |
| 09/10/2002 | US6447376 Conductive grindstone; electrode rotator; pulsed voltage applied between; pressurized mist mixture of water and compressed air; generates uniform, high efficiency sparks |
| 09/10/2002 | US6446573 Plasma process device |
| 09/10/2002 | US6446572 Embedded plasma source for plasma density improvement |
| 09/06/2002 | WO2002069437A1 Reconfigurable electromagnetic waveguide |
| 09/06/2002 | WO2002069364A2 Magnetic field for small closed-drift thruster |
| 09/06/2002 | WO2002068872A1 Assembled cathode and plasma igniter with such cathode |
| 09/06/2002 | WO2002068144A2 Contact start plasma torch |
| 09/06/2002 | WO2002068114A1 Method for treatment of hazardous fluid organic waste materials |
| 09/06/2002 | WO2002031858A3 Gas distribution apparatus for semiconductor processing |
| 09/06/2002 | WO2002029322A3 System and method for decongesting a waste converting apparatus |
| 09/06/2002 | CA2439405A1 Contact start plasma torch |
| 09/05/2002 | US20020123200 Plasma processing apparatus |
| 09/05/2002 | US20020122897 Maintaining reduced pressure in a plasma-treating chamber for treatment with a plasma in which a substrate that is to be treated is contained, introducing treating gas and microwaves into chamber wherein a metallic antenna is disposed |
| 09/05/2002 | US20020122896 Capillary discharge plasma apparatus and method for surface treatment using the same |
| 09/05/2002 | US20020121344 Plasma generating device and plasma processing apparatus comprising such a adevice |
| 09/04/2002 | EP1237179A1 Local etching method |
| 09/04/2002 | EP1236497A2 Exhaust gas processing system |
| 09/04/2002 | EP1236381A1 Device for hybrid plasma processing |
| 09/04/2002 | EP1236380A1 Plasma nozzle |
| 09/04/2002 | EP1235660A2 Plasma arc torch |
| 09/04/2002 | EP1040506B1 Device for producing excited/ionized particles in a plasma |
| 09/03/2002 | US6445134 Inner/outer coaxial tube arrangement for a plasma pinch chamber |
| 09/03/2002 | US6444945 Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source |
| 09/03/2002 | US6444085 Plasma gases generators cells having semiconductors ceillings and side walls connected to power sources, supports and coils |
| 09/03/2002 | US6444084 Low density high frequency process for a parallel-plate electrode plasma reactor having an inductive antenna |
| 08/29/2002 | US20020117977 Discharge device and plasma gas generating apparatus employing same |
| 08/29/2002 | US20020117484 Contact start plasma arc torch and method of initiating a pilot arc |
| 08/29/2002 | US20020117483 Contact start plasma torch |
| 08/29/2002 | US20020117482 Dual mode plasma arc torch |
| 08/29/2002 | US20020117473 Capable of becoming rare earth hydroxide in reaction with water vapor; noncracking, nonswelling, nonchipping; disk drives |
| 08/29/2002 | US20020116915 Pulsed hall thruster system |
| 08/29/2002 | DE10065629C1 Vorrichtung zur Beschichtung eines Substrates mit einem Plasmabrenner An apparatus for coating a substrate with a plasma torch |