H05H 1 - Generating plasma; Handling plasma

Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
10/2002
10/17/2002	US20020150695 Method of forming a thin film
10/17/2002	US20020148816 Method and apparatus for fabricating printed circuit board using atmospheric pressure capillary discharge plasma shower
10/17/2002	US20020148812 Method and apparatus for performing plasma process on particles
10/17/2002	US20020148733 Wiring layer is formed through the degenerated layer including the amide group formed on the resin substrate surface and various layers including a metallic oxide layer
10/17/2002	US20020148725 Magnetron for a vault shaped sputtering target having two opposed sidewall magnets
10/17/2002	US20020148562 Plasma reaction apparatus and plasma reaction method
10/17/2002	US20020148561 Plasma processing apparatus and method of processing
10/17/2002	US20020148560 Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces
10/17/2002	DE19933762C2 Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen Pulsed magnetic opening of electron cyclotron resonance Jonen sources for generating short, strong current pulses of highly charged ions or electrons
10/17/2002	DE10139677A1 Verfahren und Vorrichtung zum Erzeugen von extrem ultravioletter Strahlung und weicher Röntgenstrahlung Method and device for generating extreme ultraviolet radiation and soft x-rays
10/16/2002	EP1249265A1 Air cleaner including a cold-plasma electrostatic catalytic device
10/16/2002	EP1249033A1 Electrode assembly
10/16/2002	EP1249032A1 Plasma doping system comprising a hollow cathode
10/16/2002	EP1248827A1 Methods and apparatus for treating waste
10/16/2002	EP1153207B1 Reactor for plasma assisted gas processing
10/16/2002	CN2516562Y Source power amplifier of micro-plasma metal surface reinforced treatment device
10/16/2002	CN1092717C Constraining apparatus for constraining discharge in interaction space
10/15/2002	US6465964 Plasma treatment apparatus and plasma generation method using the apparatus
10/15/2002	US6465793 Arc initiation in cathodic arc plasma sources
10/15/2002	US6465057 Rf power and a dc power and the dc power is applied to an electrode carrying the deposition target object; carbon nitride layer formed at the surface portion of the carbon film
10/15/2002	US6465052 Mass-producing coatings for sensor, membrane, and electrodes; twin-wire arc nozzle to heat and partially vaporize two wires of a metal for a stream of nanometer-sized vapor clusters, a gas exothermically reacts therewith
10/15/2002	US6465051 Cleaning a plasma reactor by creating a vacuum in the chamber while introducing an etchant gas and applying rf energy to a ceiling electrode in the chamber while not necessarily applying rf energy to the coil antenna
10/15/2002	US6464891 Method for repetitive ion beam processing with a carbon containing ion beam
10/15/2002	US6464843 Silicon carbide (sic) as a consumable chamber surface material which reduces metal and/or particle contamination; plasma etching an oxide layer on a semiconductor wafer
10/15/2002	US6463875 Multiple coil antenna for inductively-coupled plasma generation systems
10/10/2002	WO2002080632A1 Device and control method for micro wave plasma processing
10/10/2002	WO2002080254A1 Microwave plasma process device, plasma ignition method, plasma forming method, and plasma process method
10/10/2002	WO2002080253A1 Device and method for plasma processing, and slow-wave plate
10/10/2002	WO2002080252A1 Plasma processing device
10/10/2002	WO2002080251A1 Plasma processing device
10/10/2002	WO2002080250A1 Plasma processing device
10/10/2002	WO2002080248A1 Plasma processing device
10/10/2002	WO2002080220A1 Inductive plasma processor including current sensor for plasma excitation coil
10/10/2002	WO2002080219A1 Stacked rf excitation coil for inductive plasma processor
10/10/2002	WO2002079815A2 Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source
10/10/2002	WO2002078838A1 Non-thermal plasma reactor substrate design-e-shape with low loss electrode pattern
10/10/2002	US20020144983 Pulsing intelligent rf modulation controller
10/10/2002	US20020144982 Cathode assembly for an electric arc spray apparatus
10/10/2002	US20020144980 Plasma processing system
10/10/2002	US20020144785 Method and apparatus for micro-jet enabled, low-energy ion generation and transport in plasma processing
10/10/2002	US20020144781 Local etching method
10/09/2002	EP1248501A2 Cathode assembly for an electric arc spray apparatus
10/09/2002	EP1248500A2 Welding torch
10/09/2002	EP1248499A1 Method and apparatus for production of extreme ultraviolet radiation
10/09/2002	EP1248361A2 Device to measure relection coefficient
10/09/2002	EP1248353A2 Pulsing intelligent rf modulation controller
10/09/2002	EP1247287A1 Liner for semiconductor etching chamber
10/09/2002	CN1373899A Techniques for improving etch rate uniformity
10/08/2002	US6462300 Monitoring and controlling separate plasma jets to achieve desired properties in a combined stream
10/08/2002	US6461972 Integrated circuit fabrication dual plasma process with separate introduction of different gases into gas flow
10/03/2002	WO2002078407A2 Neutral particle beam processing apparatus
10/03/2002	WO2002078073A1 Method of cleaning cvd device and cleaning device therefor
10/03/2002	WO2002078072A1 Plasma processor and plasma processing method
10/03/2002	WO2002078044A2 Method of processing a surface of a workpiece
10/03/2002	WO2002078043A2 Beam processing apparatus
10/03/2002	WO2002078042A2 Neutral particle beam processing apparatus
10/03/2002	WO2002078041A2 Neutral particle beam processing apparatus
10/03/2002	WO2002078040A2 Neutral particle beam processing apparatus
10/03/2002	WO2002076583A2 Device and method for purifying exhaust gas
10/03/2002	WO2002076511A2 Plasma surface treatment method and device for carrying out said method
10/03/2002	WO2002058449A3 Activated water apparatus and methods
10/03/2002	US20020142615 Etching apparatus and etching method
10/03/2002	US20020141537 Laser plasma generation method and system
10/03/2002	US20020141536 EUV, XUV, and X-ray wavelength sources created from laser plasma produced from liquid metal solutions, and nano-size particles in solutions
10/03/2002	US20020140359 Stacked RF excitation coil for inductive plasma processor
10/03/2002	US20020139788 Electrode diffusion bonding
10/03/2002	US20020139782 Torch for powder plasma buildup welding
10/03/2002	US20020139665 Plasma etch reactor and method
10/03/2002	US20020139659 Method and apparatus for sterilization of fluids using a continuous capillary discharge atmospheric pressure plasma shower
10/03/2002	US20020139478 Under high pressure, in the presence of a polymer of hydroxyacrylic acid or acid salt or lactone and of potassium hydroxide, sodium hydroxide, or alkali metal or alkaline-earth metal carbonate
10/02/2002	EP1246224A2 Plasma processing methods and apparatus
10/02/2002	EP1245696A2 Plasma resistant member
10/02/2002	EP1245694A1 Vacuum arc vapor deposition apparatus and vacuum arc vapor deposition method
10/02/2002	EP1090409B1 High sputter and etch resistant window for plasma processing chambers
10/02/2002	DE10201992A1 Device for plasma-mediated working of surfaces of planar substrates using HF/VHF low pressure discharge lamps comprises a flat electrode connected to a frequency generator in a chamber containing an electrically insulated tunnel
10/02/2002	DE10114115A1 Structure for generating plasma in a treatment area fed with microwaves from outside feeds in microwaves through an opening in a protective screen effective for microwaves and partly surrounding the treatment area
10/02/2002	DE10112494A1 Verfahren zum Plasmaschweißen A method for plasma welding
10/02/2002	CN1372528A Plasma transformer for the transformation of fossil fuels into hydrogen-rich gas
10/01/2002	US6459205 Propulsion device and method of generating shock waves
10/01/2002	US6459067 Pulsing intelligent RF modulation controller
10/01/2002	US6458321 Sterilization system employing low frequency plasma
10/01/2002	US6458252 High target utilization magnetic arrangement for a truncated conical sputtering target
10/01/2002	US6458239 Plasma processing apparatus
10/01/2002	US6457778 Electro-power impact cell for plasma blasting
10/01/2002	CA2263697C Nuclear waste separator
09/2002
09/26/2002	WO2002076158A1 Method for plasma welding
09/26/2002	WO2002075332A1 Impedance monitoring system and method
09/26/2002	WO2002058452A3 Device for plasma chemical treatment of water in a medium of electric non-self-maintained glow discharge
09/26/2002	WO2001024216A3 Pretreated gas distribution plate
09/26/2002	US20020137352 Selectively delignifying lignocellulosic materials and bleaching of pulp and dyes using a combination of an oxidative enzyme and a metal complex
09/26/2002	US20020136909 Fluid injector for and method of prolonged delivery and distribution of reagents into plasma
09/26/2002	US20020135283 Nozzle for plasma arc torch
09/26/2002	US20020134767 Plasma torch comprising electrodes separated by an air gap and igniter incorporating same
09/26/2002	US20020134766 Transfer-type plasma heating anode
09/26/2002	US20020134708 Helically symmetric plasma mass filter
09/26/2002	US20020134666 Selectively activating said individually energizable electrodes to effect variable corona volumes for treating exhaust stream
09/26/2002	US20020134508 Matching unit and plasma processing system
09/26/2002	US20020134403 Holding and rotating a chuck as pressure plasma jet rinses predetermined areas; another nozzle dries with nitrogen gas; integrated circuits; semiconductors
09/26/2002	US20020134310 Material handling system and method for a multi-workpiece plasma treatment system
09/26/2002	DE10111565A1 Innenbrenner Internal burner

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