H05H 1 - Generating plasma; Handling plasma

Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
11/2002
11/21/2002	US20020172780 Generating a gaseous plasma within a spatially-localized region of space by electron cyclotron resonance, and exposing at least a portion of a surface of the tubular article to said plasma to treat surface
11/21/2002	US20020172779 Treating cavitated polymeric films with plasma at atmospheric pressure
11/21/2002	US20020172316 Divertor filtering element for a tokamak nuclear fusion reactor; divertor employing the filtering element; and tokamak nuclear fusion reactor employing the divertor
11/21/2002	US20020171411 Reflection coefficient phase detector
11/21/2002	US20020171367 Method and apparatus for providing flow-stabilized microdischarges in metal capillaries
11/21/2002	US20020170677 RF power process apparatus and methods
11/21/2002	US20020170495 Method for fabricating a thin film and apparatus for fabricating a thin film
11/20/2002	EP1258177A1 Three-phase plasma generator having adjustable electrodes
11/20/2002	EP1257376A1 Plasma arc reactor for the production of fine powders
11/20/2002	CN2521868Y Multiple micro-discharge cooperative intergrated discharging apparatus
11/20/2002	CN1380811A Composite probe for plasma diagnosis
11/20/2002	CN1380747A Pulse intelligent radio-frequency modulation controller
11/20/2002	CN1380730A 反射系数相位检测器 Reflection coefficient phase detector
11/20/2002	CN1380685A Plasma treatment device and plasma treatment method
11/19/2002	US6483077 Method and apparatus for initiating, directing and constricting electrical discharge arcs
11/19/2002	US6483070 Electrode component thermal bonding
11/19/2002	US6482531 Non-fouling, wettable coated devices
11/19/2002	US6482368 Non-thermal plasma reactor for lower power consumption
11/14/2002	WO2002091809A2 Method and device for generating an activated gas curtain for surface treatment
11/14/2002	WO2002091807A1 High flux, high energy photon source
11/14/2002	WO2002091521A2 Strain relief mechanism for a plasma arc torch
11/14/2002	WO2002089612A1 Method and apparatus for non-thermal pasteurization
11/14/2002	WO2002062112A3 Magnetic and electrostatic confinement of plasma in a field reversed configuration
11/14/2002	WO2001045134A9 Method and apparatus for producing uniform process rates
11/14/2002	US20020168814 Such as for dry etching, sputtering, plasma chemical vapor deposition, which utilize plasma excited with the use of a VHF or UHF-band high frequency power
11/14/2002	US20020168467 Plasma vacuum substrate treatment process and system
11/14/2002	US20020167277 Apparatus and methods for generating persistent ionization plasmas
11/14/2002	CA2446575A1 Method and apparatus for non-thermal pasteurization
11/14/2002	CA2446298A1 Strain relief mechanism for a plasma arc torch
11/13/2002	EP0776594B1 Apparatus for and method of forming uniform thin coatings on large substrates
11/13/2002	CN1379439A Plasma treatment
11/12/2002	US6479830 Low-sputter-yield coating for hardware near laser-produced plasma
11/12/2002	US6478234 Adjustable injector assembly for melted powder coating deposition
11/12/2002	US6477932 Explosive-triggered RF beam source
11/12/2002	CA2283410C Method and device for producing plasma
11/07/2002	WO2002089537A1 Production of nanocrystal beams
11/07/2002	WO2002089536A1 Method for plasma-catalytic conversion of fuels that can be used in an internal combustion engine or a gas turbine into a synthetic gas and the plasma-catalytic converter used for same
11/07/2002	WO2002088420A1 Method and apparatus for sequential plasma treatment
11/07/2002	WO2002088020A2 Microwave power cell, chemical reactor, and power converter
11/07/2002	US20020164845 Ion beam irradiation apparatus and method of igniting a plasma for the same
11/07/2002	US20020163398 Impedance matching device
11/07/2002	US20020163313 Pulse power system for extreme ultraviolet and x-ray sources
11/07/2002	US20020162826 Strain relief mechanism for a plasma arc torch
11/07/2002	US20020162629 Apparatus for manufacturing semiconductor device
11/07/2002	DE10143375C1 Pyrolysis device used for pyrolyzing chemical compounds comprises microwave generator coupled to hollow conductor forming vertical shaft, and fluid pipe through which fluid passes in fluid guiding direction
11/07/2002	CA2445492A1 Method for plasma catalytic conversion of fuels usable in an internal combustion engine or gas turbine into a synthetic gas and the plasma catalytic converter therefor
11/05/2002	US6477216 Compound plasma configuration, and method and apparatus for generating a compound plasma configuration
11/05/2002	US6476342 Method of surface preparation using plasma in air
11/05/2002	US6475918 Plasma treatment apparatus and plasma treatment method
11/05/2002	US6475814 Method for improved low pressure inductively coupled high density plasma reactor
11/05/2002	US6475356 Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma
11/05/2002	US6475335 RF plasma reactor with hybrid conductor and multi-radius dome ceiling
11/05/2002	US6475334 Dry etching device and dry etching method
11/05/2002	US6475215 Quantum energy surgical device and method
11/05/2002	US6474258 Apparatus and method for improving plasma distribution and performance in an inductively coupled plasma
11/05/2002	CA2279800C Electrode for plasma arc torch and method of making same
10/2002
10/31/2002	WO2002087295A1 Method and apparatus for fabricating printed circuit board using atmospheric pressure capillary discharge plasma shower
10/31/2002	WO2002087291A2 Microwave power cell, chemical reactor, and power converter
10/31/2002	WO2002086943A1 Apparatus and method for improving plasma distribution and performance in an inductively coupled plasma
10/31/2002	WO2002086937A1 Dipole ion source
10/31/2002	WO2002086932A1 Magnetic mirror plasma source
10/31/2002	WO2002086185A1 Penning discharge plasma source
10/31/2002	WO2002029848A3 Wafer area pressure control for plasma confinement
10/31/2002	US20020157793 Toroidal plasma source for plasma processing
10/31/2002	US20020157609 Vacuum arc vapor deposition apparatus and vacuum arc vapor deposition method
10/31/2002	US20020157608 Performance evaluation method for plasma processing apparatus
10/31/2002	US20020157559 Plasma torch incorporating a reactive ignition tube and igniter squib integrating such a torch
10/31/2002	CA2440287A1 Microwave power cell, chemical reactor, and power converter
10/30/2002	EP1253216A1 Method and apparatus for sequential plasma treatment
10/30/2002	EP1252647A1 Impedance adapted microwave energy coupling device
10/30/2002	EP1050200B1 Welding apparatus FOR CUTTING PROCESSES
10/29/2002	US6472822 Pulsed RF power delivery for plasma processing
10/29/2002	US6472632 Method and apparatus for direct electrothermal-physical conversion of ceramic into nanopowder
10/29/2002	US6472631 Strain relief mechanism for a plasma arc torch
10/29/2002	US6472062 Method for making a non-sticking diamond-like nanocomposite
10/29/2002	US6471822 Magnetically enhanced inductively coupled plasma reactor with magnetically confined plasma
10/29/2002	US6471821 Plasma reactor and method
10/25/2002	EP0968409A4 Soft x-ray microfluoroscope
10/24/2002	WO2002084699A1 Apparatus and method for controlling the voltage applied to an electrostatic shield used in a plasma generator
10/24/2002	WO2002084698A1 Inductively coupled plasma source with controllable power distribution
10/24/2002	US20020153241 For converting pollutants in a fluid stream to harmless by-products, wherein electrical discharge is homogeneously distributed within the device
10/24/2002	US20020153104 Plasma etching chamber and method for manufacturing photomask using the same
10/24/2002	DE10116502A1 Plasma stream production, comprises forming a gas supply channel using a moulding made of electrically insulating material, applying electrodes and applying a high voltage across them
10/24/2002	DE10116318A1 Discharge tube for producing electron multiplication and plasma, has mercury pool, thermocouple in chamber wall, dual plasma circuits, and anode/cathode traps in closed chamber
10/24/2002	DE10115241A1 Plasma torch for treating surfaces at atmospheric pressure includes a jet pump within torch to provide low pressure region
10/24/2002	DE10057205A1 Notch filter has hollow volume resonator coupled to waveguide with variable volume hollow chamber, stepper motor or servomotor with which volume of hollow chamber can be varied
10/23/2002	CN1375451A Nano-carbon preparing method, nano carbon and material containing same and preparing apparatus
10/22/2002	US6469448 Inductively coupled RF plasma source
10/22/2002	US6469310 Radiation source for extreme ultraviolet radiation, e.g. for use in lithographic projection apparatus
10/22/2002	US6468386 Gas delivery system
10/17/2002	WO2002082873A2 Controlled fusion in a field reversed configuration and direct energy conversion
10/17/2002	WO2002082872A1 Method and device for producing extreme ultraviolet radiation and soft x-radiation
10/17/2002	WO2002082871A1 Method and device for the generation of far ultraviolet or soft x-ray radiation
10/17/2002	WO2002082861A1 Rf power process apparatus and methods
10/17/2002	WO2002082499A2 Conductive collar surrounding semiconductor workpiece in plasma chamber
10/17/2002	WO2002082488A2 Dielectric barrier discharge fluid purification system
10/17/2002	WO2002081601A1 The new chemical species of a magnecule
10/17/2002	WO2002080989A1 Method and apparatus for sterilization of fluids using a continuous capillary discharge atmospheric pressure plasma shower
10/17/2002	WO2002028548A3 Method and apparatus for forming a coating
10/17/2002	WO2000007215A3 A method of allowing a stable power transmission into a plasma processing chamber

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