Patents
Sitemap › H05 - Electric techniques not otherwise provided for › H05H - Plasma technique; Production of accelerated electrically- charged particles or of neutrons; Production or acceleration of neutral molecular or atomic beams › H05H 1 - Generating plasma; Handling plasma
Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
05/2003
05/08/2003US20030085661 Plasma apparatus
05/08/2003US20030085656 Method and apparatus for stabilizing of the glow plasma discharges
05/08/2003US20030085206 Susceptor with built-in plasma generation electrode and manufacturing method therefor
05/08/2003US20030085000 Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamber
05/08/2003US20030084999 Apparatus and method for mitigating chamber resonances in plasma processing
05/08/2003DE10144094C1 Electrostatic state determination for checking electret filter, involves applying potential set such that sign of sensor current is same as sign of sensor current caused by absorption of ions, to amperometric probe
05/08/2003CA2449299A1 Device for plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator
05/07/2003EP1307896A2 Externally excited torroidal plasma source
05/07/2003EP1307607A1 Method and device for plasma treatment of moving metal substrates
05/07/2003EP0934684B1 Apparatus and method for improved assembly concentricity in a plasma arc torch
05/07/2003CN1416477A Plasma polymerization system and method for plasma polymerization
05/07/2003CN1416308A Medium in atmospheric pressure blocking off discharging plasma gun
05/07/2003CN1416307A Method for averaging plasma by using microwave electron cyclotron resonance
05/06/2003US6559601 Plasma vacuum pump
05/06/2003US6559460 Ultraviolet lamp system and methods
05/06/2003US6559408 Toroidal low-field reactive gas source
05/06/2003US6559407 Cathode assembly for an electric arc spray apparatus
05/06/2003US6558507 Plasma processing apparatus
05/02/2003EP1306893A1 Plasma processing apparatus
05/02/2003EP1305986A1 A method of improving the service life of a plasma torch electrode
05/02/2003EP1305813A1 Plasma focus light source with active and buffer gas control
05/02/2003EP1305604A1 Plasma source for spectrometry
05/02/2003EP1305453A1 Ring-shaped high-density plasma source and method
05/02/2003EP1305133A1 Method and device for hardening a metal component by plasma pulse technology
05/02/2003EP0807154B1 Tunable, self-powered integrated arc plasma-melter vitrification system for waste treatment and resource recovery
05/01/2003WO2003036700A1 Device and method for microwave plasma processing, and microwave power supply device
05/01/2003WO2003036681A2 Methods and apparatus for plasma doping by anode pulsing
05/01/2003WO2003036680A1 Merie plasma reactor with showerhead rf electrode tuned to the plasma with arcing suppression
05/01/2003WO2003036309A1 Method and apparatus for electron density measurement
05/01/2003WO2003036224A1 Method and apparatus for wall film monitoring
05/01/2003WO2002079815A3 Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source
05/01/2003WO2002041355B1 Plasma processing comprising three rotational motions of an article being processed
05/01/2003US20030080685 Microwave stripline applicators
05/01/2003US20030080097 Multi-coil induction plasma torch for solid state power supply
05/01/2003US20030079834 Shielding system for plasma chamber
05/01/2003US20030079757 Method of cleaning cvd device and cleaning device therefor
05/01/2003US20030079688 Methods and apparatus for plasma doping by anode pulsing
04/2003
04/29/2003US6554954 Conductive collar surrounding semiconductor workpiece in plasma chamber
04/29/2003US6554953 Thin film electrostatic shield for inductive plasma processing
04/29/2003US6553932 Reduction of plasma edge effect on plasma enhanced CVD processes
04/29/2003US6553853 Plasma probe and method for making same
04/24/2003WO2003034463A2 Tunable multi-zone gas injection system
04/24/2003WO2002037528A3 Magnetron with a rotating center magnet for a vault shaped sputtering target
04/24/2003US20030077398 Nanostructured feeds for thermal spray systems, method of manufacture, and coatings formed therefrom
04/24/2003US20030075522 Procedure and device for the production of a plasma
04/23/2003EP1304731A1 Method of cleaning cvd device and cleaning device therefor
04/23/2003EP1304021A1 Dc plasma generator for generation of a non-local, non-equilibrium plasma at high pressure
04/23/2003EP1303869A2 Heated substrate support assembly and method
04/23/2003EP1044113A4 Plasma discharge device and method with dynamic tuning
04/23/2003CN1413355A Method of manufacturing electrode for plasma reactor and such electrode
04/23/2003CN1411920A Negative pressure plasma device and cleaning method
04/23/2003CN1106670C Plasma generator
04/23/2003CN1106669C Driving source for vacuum treatment chamber
04/22/2003US6552297 RF matching network with distributed outputs
04/22/2003US6552295 Plasma furnace disposal of hazardous wastes
04/22/2003US6551447 Inductive plasma reactor
04/22/2003US6551445 Plasma processing system and method for manufacturing a semiconductor device by using the same
04/22/2003US6551444 Plasma processing apparatus and method of processing
04/17/2003WO2003032693A1 Multi-coil induction plasma torch for solid state power supply
04/17/2003WO2003032434A1 Plasma production device and method and rf driver circuit
04/17/2003WO2003031931A2 Method and apparatus to produce ions and nanodrops from taylor cones of volatile liquids at reduced pressures
04/17/2003WO2002076511A3 Plasma surface treatment method and device for carrying out said method
04/17/2003WO2002058449B1 Activated water apparatus and methods
04/17/2003WO2002056338A3 Device for the plasma-mediated working of surfaces on planar substrates
04/17/2003US20030073322 Ashing apparatus, ashing methods, and methods for manufacturing semiconductor devices
04/17/2003US20030072881 Seposition in an expanding thermal plasma system to coat large areas of a substrate; uniformity
04/17/2003US20030071035 Induction plasma reactor
04/17/2003US20030070913 A radio frequency driven plasma ionizer including a pair of spaced-apart and plasma- isolated electrodes, which are connected to a power source, the gas electrically discharges and creates a plasma of both positive and negative ions
04/17/2003US20030070912 A fluid with a part to be pyrolysed is guided through a pyrolysis cell which is acted upon by a standing electromagnetic waves
04/17/2003US20030070761 RF plasma reactor
04/17/2003US20030070759 Plasma processing method and apparatus
04/17/2003US20030070620 Tunable multi-zone gas injection system
04/17/2003DE10202424C1 Automatic identification of cutting nozzles integrated in a flame cutter comprises interrupting the gas feed to a cutting nozzle, determining the fall in pressure over time, and comparing the resulting data with stored cutting nozzle data
04/17/2003CA2463528A1 Plasma production device and method and rf driver circuit
04/17/2003CA2462854A1 Method and apparatus to produce ions and nanodrops from taylor cones of volatile liquids at reduced pressures
04/16/2003EP1302093A1 Improved dielectric heating using inductive coupling
04/16/2003EP1301938A2 A plasma reactor having a symmetric parallel conductor coil antenna
04/16/2003EP1144717A4 Enhanced plasma mode, method, and system for plasma immersion ion implantation
04/15/2003US6548817 Miniaturized cathodic arc plasma source
04/15/2003US6548381 Ion beam irradiation apparatus and method of igniting a plasma for the same
04/15/2003US6546938 Holding and rotating a chuck as pressure plasma jet rinses predetermined areas; another nozzle dries with nitrogen gas; integrated circuits; semiconductors
04/10/2003WO2003030294A1 Matching device and plasma processing apparatus
04/10/2003WO2003030241A1 Plasma processing apparatus
04/10/2003WO2003030207A1 Method and device for producing a plasma
04/10/2003US20030069576 Quantum energy surgical device and method
04/10/2003US20030068828 Novel method for chromatographic finger printing and standardization of single medicines and formulations
04/10/2003US20030068012 Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge
04/10/2003US20030067273 Plasma processor coil
04/10/2003US20030066969 Method and apparatus to produce ions and nanodrops from taylor cones of volatile liquids at reduced pressures
04/10/2003US20030066793 Molten salt collector for plasma separations
04/10/2003US20030066762 Amperometric probe
04/10/2003US20030066487 Plasma processing system and surface processing method
04/10/2003US20030066337 Damped paddle wheel for plasma chamber shock tube
04/09/2003EP1300878A1 Device and method for plasma processing, and slow-wave plate
04/09/2003EP1300877A1 Plasma processing device
04/09/2003EP1300875A1 Plasma processing device
04/09/2003EP1300057A2 Vacuum plasma processor apparatus and method
04/09/2003EP1300056A2 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it
04/08/2003US6545480 Method for carrying out the electrical breakdown of a gaseous dielectric in a highly non-uniform field
04/08/2003US6544895 Methods for use of pulsed voltage in a plasma reactor
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