| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 03/06/2003 | US20030045012 Liquid crystal mixtue of polar compounds with positive dielectric anisotropy comprising fluorobenzene derivatives |
| 03/06/2003 | US20030042232 Torch head for plasma spraying |
| 03/06/2003 | US20030041972 Plasma processing apparatus |
| 03/06/2003 | US20030041970 Wafer processing machine |
| 03/06/2003 | US20030041805 Apparatus for improved low pressure inductively coupled high density plasma reactor |
| 03/05/2003 | EP1289003A1 Plasma processing apparatus |
| 03/05/2003 | EP1287898A2 Torch head for plasma spraying |
| 03/05/2003 | EP1286753A1 Compact plasma reactor |
| 03/04/2003 | US6528753 Method of coating an emissive element |
| 03/04/2003 | US6528751 Plasma reactor with overhead RF electrode tuned to the plasma |
| 03/04/2003 | US6528435 Plasma processing |
| 03/04/2003 | US6528129 Image receiving layer with void structure is subject to hydrophilic treatment |
| 03/04/2003 | US6527927 Vacuum treatment system |
| 03/04/2003 | US6527918 Method and apparatus for low voltage plasma doping using dual pulses |
| 03/04/2003 | US6527912 Stacked RF excitation coil for inductive plasma processor |
| 03/04/2003 | US6527911 Configurable plasma volume etch chamber |
| 03/04/2003 | US6527909 Plasma processing apparatus |
| 03/04/2003 | US6527908 Plasma process apparatus |
| 02/27/2003 | WO2003017738A1 Large-area plasma antenna(lapa) and plasma source for making uniform plasma |
| 02/27/2003 | WO2003017737A2 Cascade arc plasma and abrasion resistant coatings made therefrom |
| 02/27/2003 | WO2003017318A1 Plasma reactor with adjustable dual frequency voltage division |
| 02/27/2003 | WO2003016143A1 Method and device for sterilizing containers |
| 02/27/2003 | WO2002069364A3 Magnetic field for small closed-drift thruster |
| 02/27/2003 | US20030039748 Hydration; heat sterilization; forming silicate coatings |
| 02/27/2003 | US20030038688 Device and method for coupling two circuit components which have different impedances |
| 02/27/2003 | US20030038119 Strain relief mechanism for a plasma arc torch |
| 02/27/2003 | US20030038112 Optical monitoring and control system and method for plasma reactors |
| 02/27/2003 | US20030038025 Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma |
| 02/27/2003 | US20030037881 Adjustable dual frequency voltage dividing plasma reactor |
| 02/26/2003 | EP1285199A1 Apparatus for processing waste |
| 02/26/2003 | CN1102087C Processing apparatus and method of plasma for processing chip |
| 02/25/2003 | US6525481 Method of making a physically and chemically active environment by means of a plasma jet and the related plasma jet |
| 02/25/2003 | US6525292 Cartridge for a plasma torch and plasma torch fitted therewith |
| 02/25/2003 | US6524538 Method and apparatus for plasma treatment of gas |
| 02/25/2003 | US6524455 Sputtering apparatus using passive arc control system and method |
| 02/25/2003 | US6524432 Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density |
| 02/25/2003 | US6523493 Ring-shaped high-density plasma source and method |
| 02/25/2003 | US6523338 Plasma accelerator arrangement |
| 02/20/2003 | WO2003015481A2 Suspended gas distribution manifold for plasma chamber |
| 02/20/2003 | WO2003015122A1 Device for the coating of objects |
| 02/20/2003 | WO2003015120A1 Capacitive discharge plasma ion source |
| 02/20/2003 | WO2002041355A3 Plasma processing comprising three rotational motions of an article being processed |
| 02/20/2003 | US20030034333 Plasma arc torch and method for improved life of plasma arc torch consumable parts |
| 02/20/2003 | US20030033797 Description of methods to increase propellant throughput in a micro pulsed plasma thruster |
| 02/20/2003 | CA2456629A1 Capacitive discharge plasma ion source |
| 02/19/2003 | EP1284589A2 Method for plasma welding |
| 02/19/2003 | EP1284588A2 Method for plasma monitoring - or flame spraying method |
| 02/19/2003 | EP0992059B1 Toroidal low-field reactive gas source |
| 02/19/2003 | EP0826229B1 Electrode clamping assembly and method for assembly and use thereof |
| 02/19/2003 | CN1398248A Treatment of fluorocarbon feedstocks |
| 02/18/2003 | US6522150 Corona discharge apparatus |
| 02/18/2003 | US6522076 Process and switching arrangement for pulsing energy introduction into magnetron discharges |
| 02/18/2003 | US6521302 Method of reducing plasma-induced damage |
| 02/18/2003 | US6521081 Deposition shield for a plasma reactor |
| 02/16/2003 | CA2398328A1 Method for monitoring plasma or flame-spray processes |
| 02/14/2003 | CA2355220A1 Discharge device and plasma gas generating apparatus employing same |
| 02/13/2003 | WO2003013198A1 Antenna structure for inductively coupled plasma generator |
| 02/13/2003 | WO2003012821A2 Method and apparatus for producing uniform process rates |
| 02/13/2003 | WO2003011516A1 Laser-plasma hybrid welding method |
| 02/13/2003 | WO2002057506A3 Low contamination plasma chamber components and methods for making the same |
| 02/13/2003 | US20030031610 Electrode discharge, non-thermal plasma device (reactor) for the pre-treatment of combustion air |
| 02/13/2003 | US20030031609 Exhaust gas processing system |
| 02/13/2003 | US20030031285 Cryogenic layer of fusion fuel, fuel core and method for fuel core producing |
| 02/13/2003 | US20030030374 Dielectric barrier discharge plasma reactor cell |
| 02/13/2003 | US20030029716 Uses quarter wavelength antenna and electron cyclotron resonance magnets to enhance the plasma density to improve the qulaity |
| 02/13/2003 | US20030029566 Remote exposure of workpieces using a plasma |
| 02/12/2003 | EP1282908A2 Plasma processing method and apparatus |
| 02/12/2003 | CN1397151A Plasma processing system and method |
| 02/12/2003 | CN1101641C Microwave-plasma stepped sintering technology for ceramic materials |
| 02/11/2003 | US6518705 An antenna arrangement for generating an electric field inside a process chamber is provided. Generally, the antenna arrangement comprises a first loop disposed around an antenna axis. The first loop with a gap and the second turn is |
| 02/11/2003 | US6517913 Pumping etching exhaust gases from processing chamber to fluid conduit containing oxidizing agent; forming a plasma for conversion to less hazardous gaseous products and byproducts |
| 02/11/2003 | US6517912 Forming and shaping plasma crystal held in balance between gravitational and electrical forces; coating substrate |
| 02/11/2003 | US6517794 Treating flue gas in electrical gas discharge, passing treated gas over storage material (stores nitrogen oxides in form of nitrates), releasing, then treating storage material with reducing regenerative gas stream forming ammonia |
| 02/11/2003 | US6517670 Etching and cleaning apparatus |
| 02/11/2003 | US6516742 Apparatus for improved low pressure inductively coupled high density plasma reactor |
| 02/06/2003 | WO2003011005A1 Axial feedstock injector with single splitting arm |
| 02/06/2003 | WO2003010088A1 Production of hydrogen and carbon from natural gas or methane using barrier discharge non-thermal plasma |
| 02/06/2003 | US20030026920 Generating plasma in vacuum; controlling distribution |
| 02/06/2003 | US20030026917 Process chamber components having textured internal surfaces and method of manufacture |
| 02/06/2003 | US20030026877 Sterilization of liquids; generating plasma; killing microorganisms |
| 02/06/2003 | US20030024907 Pulsing intelligent RF modulation controller |
| 02/06/2003 | US20030024804 The soot particles flowing through the exhaust gas line are deposited by inertial forces onto electrodes of a reactor for producing dielectrically hindered gas discharges |
| 02/06/2003 | US20030024647 Plasma processing apparatus |
| 02/06/2003 | US20030024476 Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
| 02/06/2003 | CA2453889A1 Axial feedstock injector with single splitting arm |
| 02/05/2003 | EP1281296A1 Twin plasma torch apparatus |
| 02/05/2003 | CN1395814A Apparatus for fixing electrode in plasma polymerizing apparatus |
| 02/05/2003 | CN1395294A Ashing device and method, and method for mfg. semiconductor |
| 02/04/2003 | US6515252 Plasma torch cartridge and plasma torch equipped therewith |
| 02/04/2003 | US6514378 Method for improving uniformity and reducing etch rate variation of etching polysilicon |
| 02/04/2003 | US6514377 Apparatus for and method of processing an object to be processed |
| 02/04/2003 | US6513452 Adjusting DC bias voltage in plasma chamber |
| 02/04/2003 | CA2279229C Method and apparatus to produce large inductive plasma for plasma processing |
| 02/03/2003 | CA2396706A1 Dielectric barrier discharge plasma reactor cell |
| 01/30/2003 | WO2003009646A2 Microwave desorber for removing contaminants from resin |
| 01/30/2003 | WO2003008340A1 Method and apparatus for underwater decomposition of organic content of electrically conductive aqueous waste solutions |
| 01/30/2003 | WO2003008323A2 Lifting and supporting device |
| 01/30/2003 | WO2003008143A1 Riser(s) size reduction and/or metal quality improving in gravity casting of shaped products by moving electric arc |
| 01/30/2003 | WO2002054835A3 Addition of power at selected harmonics of plasma processor drive frequency |
| 01/30/2003 | WO2001001442A9 A plasma reaction chamber component having improved temperature uniformity |