| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 07/10/2003 | US20030129916 AC driven plasma display panel for electrical commercial boards and method of fabricating the same |
| 07/10/2003 | US20030127191 Plasma generation apparatus |
| 07/09/2003 | EP1325509A1 Method and device for treating surfaces using a glow discharge plasma |
| 07/09/2003 | CN1429398A Linear drive system for use in plasma processing system |
| 07/09/2003 | CN1428753A AC plasma device for panel light source and its making method |
| 07/09/2003 | CN1114102C Method and system for detecting nozzle and electrode wear |
| 07/09/2003 | CN1113807C Method and device for preparing Fullerenes |
| 07/08/2003 | US6590179 Plasma processing apparatus and method |
| 07/08/2003 | US6589407 Aluminum deposition shield |
| 07/08/2003 | CA2248250C Device for generating powerful microwave plasmas |
| 07/03/2003 | WO2003055287A2 Plasma reactor with overhead rf electrode tuned to the plasma with arcing suppression |
| 07/03/2003 | WO2003054941A1 Plasma treatment apparatus and control method thereof |
| 07/03/2003 | WO2003054912A1 Method and apparatus comprising a magnetic filter for plasma processing a workpiece |
| 07/03/2003 | WO2003054245A1 Device for producing pcvd coated glass tubes for the drawing of optical fibers |
| 07/03/2003 | WO2003032434B1 Plasma production device and method and rf driver circuit |
| 07/03/2003 | US20030124876 Apparatus and method for use in manufacturing a semiconductor device |
| 07/03/2003 | US20030124250 Device for producing PCVD coated glass tubes for the drawing of optical fibers |
| 07/03/2003 | US20030123992 Linear inductive plasma pump for process reactors |
| 07/03/2003 | US20030121474 Apparatus for fixing an electrode in plasma polymerizing apparatus |
| 07/02/2003 | EP1324644A2 Plasma arc cutting apparatus |
| 07/02/2003 | EP1324371A1 Plasma processing apparatus |
| 07/02/2003 | EP1323671A1 Process for the fabrication of at least one nanotube between two electrically conductive elements and device for carrying out this process |
| 07/02/2003 | EP1323339A1 Plasma torch, especially a plasma positive pole torch |
| 07/02/2003 | EP1323338A1 Electrode for glow-discharge atmospheric plasma treatment |
| 07/02/2003 | EP1323180A2 System, apparatus, and method for processing wafer using single frequency rf power in plasma processing chamber |
| 07/02/2003 | EP1323179A2 Wafer area pressure control for plasma confinement |
| 07/02/2003 | EP1323178A2 Gas distribution apparatus for semiconductor processing |
| 07/02/2003 | EP1322892A2 System and method for decongesting a waste converting apparatus |
| 07/02/2003 | EP1322891A1 System and method for removing blockages in a waste converting apparatus |
| 07/02/2003 | EP1322547A2 Method and apparatus for the production of so called "fractional hydrogen" and associated production of photon energy |
| 07/02/2003 | EP1322403A1 The plasma assisted catalytic treatment of gases |
| 07/02/2003 | EP1053563B1 Methods for reducing mask erosion during plasma etching |
| 07/01/2003 | US6586757 Plasma focus light source with active and buffer gas control |
| 07/01/2003 | US6586055 Method for depositing functionally gradient thin film |
| 07/01/2003 | US6585907 Method for manufacturing a shield for an inductively-couple plasma apparatus |
| 07/01/2003 | US6585891 Plasma mass separator using ponderomotive forces |
| 06/26/2003 | WO2003052807A1 Plasma processor |
| 06/26/2003 | WO2003052806A1 Plasma treatment apparatus and plasma generation method |
| 06/26/2003 | WO2003052432A2 Plasma analyser |
| 06/26/2003 | US20030118745 Low pressure plasma treatment; stoppers for wine bottles, containers, for improving the printability |
| 06/26/2003 | US20030118731 Bead blasting component to provide surface roughness, dipping component into solution of hydrofluoric acid, hydrochloric acid, and nitric acid, forming aluminum coating by thermal spraying |
| 06/26/2003 | US20030117080 Applied plasma duct system |
| 06/26/2003 | US20030116281 Atmospheric pressure plasma system |
| 06/26/2003 | US20030116089 Plasma implantation system and method with target movement |
| 06/26/2003 | DE20201801U1 Monitor, for electrical plasma unit, used for sterilizing gases and neutralizing odors, includes light emitting diode, to indicate adequate current flow |
| 06/25/2003 | EP1322144A2 Method of forming an electrode |
| 06/25/2003 | EP1321014A1 Device for producing a plasma, ionisation method, use of said method and production processes using said device |
| 06/25/2003 | EP1320867A2 Reducing deposition of process residues on a surface in a chamber |
| 06/25/2003 | CN1426671A High-frequency matching network |
| 06/25/2003 | CN1426597A Method for improving uniformity and reducing etch rate variation of etching polysilicon |
| 06/25/2003 | CN1426090A Inductive coupling type plasma device |
| 06/24/2003 | US6583572 Inductive plasma processor including current sensor for plasma excitation coil |
| 06/24/2003 | US6583378 Plasma machining electrode and plasma machining device |
| 06/24/2003 | US6583064 Low contamination high density plasma etch chambers and methods for making the same |
| 06/24/2003 | US6582778 Method of treatment with a microwave plasma |
| 06/24/2003 | US6582618 Method of determining etch endpoint using principal components analysis of optical emission spectra |
| 06/19/2003 | WO2003034463A3 Tunable multi-zone gas injection system |
| 06/19/2003 | US20030114600 Treatment of fluorocarbon feedstocks |
| 06/19/2003 | US20030113945 Disturbance-free, recipe-controlled plasma processing system and method |
| 06/19/2003 | US20030113481 Directly forming individual anti-reflection, active, and electrode layers without going through the intermediate steps. |
| 06/19/2003 | US20030113477 Non-fouling, wettable coated devices |
| 06/19/2003 | US20030111963 Inductively coupled plasma system |
| 06/19/2003 | US20030111445 Plasma source for spectrometry |
| 06/18/2003 | EP1320118A2 Reactor for simultaneously coating both sides of spectacle glasses |
| 06/18/2003 | CN1425187A Method and apparatus for ionized physical vapor deposition |
| 06/18/2003 | CN1424867A Ion beam radiation device and method for choking basis charge accumulation |
| 06/17/2003 | US6580051 Direct and efficient conversion of ceramic material |
| 06/17/2003 | US6579805 In situ chemical generator and method |
| 06/17/2003 | US6579573 Dispersing ceramics, cermets or metals in liquids using sound waves to form solutions having narrow particle size distributions, then injecting into flame sprayers to form uniform coatings |
| 06/17/2003 | US6579428 Arc evaporator, method for driving arc evaporator, and ion plating apparatus |
| 06/17/2003 | US6579426 Use of variable impedance to control coil sputter distribution |
| 06/17/2003 | US6579424 Method for the production of substrates, magnetron source and sputter-coating chamber |
| 06/17/2003 | US6578515 Film formation apparatus comprising movable gas introduction members |
| 06/17/2003 | CA2365955A1 Plasma analyser |
| 06/13/2003 | CA2414390A1 Volume-optimized reactor for simultaneously coating eyeglasses on both sides |
| 06/12/2003 | WO2003049499A2 Ultraviolet radiation generation with flame and electrical discharge |
| 06/12/2003 | WO2003049171A1 Exhaust ring mechanism, and plasma treatment device using the exhaust ring mechanism |
| 06/12/2003 | WO2003049142A1 Uniformity control for plasma doping systems |
| 06/12/2003 | WO2003049141A2 Device for applying an electromagnetic microwave to a plasma container |
| 06/12/2003 | WO2003049139A1 Electron source |
| 06/12/2003 | WO2002099840A3 Inductively-coupled plasma processing system |
| 06/12/2003 | WO2002079815B1 Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source |
| 06/12/2003 | US20030108683 Comprises ionized arc nozzle including consumable electrode (provides vaporizable precursor), nonconsumable electrode, and working/impingement gas which exothermically reacts to produce metal compound or ceramic clusters, then heating |
| 06/12/2003 | US20030108155 X-ray micro-target source |
| 06/12/2003 | US20030106788 Dielectric with slit; segmented electrode |
| 06/12/2003 | US20030106645 Vacuum plasma processor apparatus and method |
| 06/12/2003 | DE20201270U1 Device for sterilizing and deodorizing air in rooms tubes and channels uses non thermal plasma-chemical conversion |
| 06/12/2003 | DE10207835C1 Channel spark source for a stable electron beam e.g. an electron gun, has a conical sleeve in the hollow cathode with a gas feed and an adjusted pressure drop to give a large number of shots without loss of beam quality |
| 06/12/2003 | CA2468760A1 Electron source |
| 06/12/2003 | CA2457337A1 Ultraviolet radiation generation with flame and electrical discharge |
| 06/11/2003 | EP1318703A2 Plasma reaction apparatus |
| 06/11/2003 | EP1123567B1 Oversized microwave load for continuous high power and its use as calorimeter |
| 06/11/2003 | EP0965253B1 Method and device for producing plasma |
| 06/11/2003 | EP0962048B1 System for high power RF plasma processing |
| 06/11/2003 | EP0938395B1 Plasma torch |
| 06/11/2003 | CN1423916A High frequency plasma source |
| 06/11/2003 | CN1423828A Method and apparatus for controlling the volume of a plasma |
| 06/11/2003 | CN1423827A Method and apparatus for producing uniform process rates |
| 06/11/2003 | CN1423826A Temperature control system for plasma processing apparatus |
| 06/11/2003 | CN1423825A Plasma processing system with dynamic gas distribution control |