Patents
Sitemap › H05 - Electric techniques not otherwise provided for › H05H - Plasma technique; Production of accelerated electrically- charged particles or of neutrons; Production or acceleration of neutral molecular or atomic beams › H05H 1 - Generating plasma; Handling plasma
Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
08/2003
08/26/2003US6611104 Coupling structure of waveguide and applicator, and its application to electrodeless lamp
08/26/2003US6610184 Magnet array in conjunction with rotating magnetron for plasma sputtering
08/21/2003WO2003069964A1 Microwave plasma source
08/21/2003WO2003068442A1 A plasma processing apparatus and method
08/21/2003US20030157378 Film forming method and substrate
08/21/2003US20030157000 Electorlytic cells; high voltage radio frequency
08/21/2003US20030155332 Portable apparatus and method for treating a workpiece
08/21/2003US20030155079 Plasma processing system with dynamic gas distribution control
08/21/2003CA2473837A1 Microwave plasma source
08/20/2003EP1336985A1 Sputtering cathode, and device and method for coating a substrate with a plurality of layers
08/20/2003EP1336328A1 Plasma powder welding torch
08/20/2003EP1336327A1 Configurable nozzle baffle apparatus and method
08/20/2003EP0871975B1 Power segmented electrode
08/20/2003CN1437759A 电极组件 The electrode assembly
08/20/2003CN1437433A Inductance coupling plasma processing apparatus
08/20/2003CN1118586C Electric arc type ion plating device
08/19/2003US6608446 Method and apparatus for radio frequency (RF) metrology
08/19/2003US6607987 Method for improving uniformity in batch processing of semiconductor wafers
08/19/2003US6607633 Plasma generating device and plasma processing apparatus comprising such a device
08/19/2003CA2205221C Plasma cvd method and apparatus
08/14/2003WO2003067642A1 Device for producing inductively coupled plasma and method thereof
08/14/2003WO2003066197A1 Method and apparatus for excluding dioxin and fly ash using high temperature plasma
08/14/2003US20030153186 Apparatus and method using a remote RF energized plasma for processing semiconductor wafers
08/14/2003US20030152184 Electromagnetic radiation-initiated plasma reactor
08/14/2003US20030151372 RF plasma processing method and RF plasma processing system
08/14/2003US20030151371 Plasma processing apparatus and method for confining an RF plasma under very high gas flow and RF power Density conditions
08/14/2003US20030150710 Plasma production device and method and RF driver circuit
08/14/2003US20030150561 Plasma processing apparatus
08/13/2003EP1335641A1 Plasma nozzle
08/13/2003EP1334646A2 A method and an apparatus for excitation of a plasma
08/13/2003EP1334507A1 An atmospheric pressure plasma assembly
08/13/2003CN2566580Y High power air plasma generator
08/13/2003CN1436359A Highly efficent compact capacitance coupled plasma reactor/generator and method
08/13/2003CN1118086C Plasma processing apparatus and method for chamber etching of same
08/13/2003CN1117890C Nozzle-injector for arc plasma deposition apparatus
08/12/2003US6605949 Quasi-hemispherical fabry-perot resonator and method of operating the same
08/12/2003US6604972 Image display apparatus manufacturing method
08/12/2003US6604672 Method and apparatus for solid bonding, a conductor bonding method, a packaging method, and a bonding agent and a method for manufacturing a bonding agent
08/07/2003WO2003065773A1 Method for producing plasma
08/07/2003WO2003064754A1 Method for hydrophilizing materials using hydrophilic polymeric materials with discrete charges
08/07/2003WO2003063914A2 Sterilization and decontamination system using a plasma discharge and a filter
08/07/2003WO2003028081A3 Method for etching structures in an etching body by means of a plasma
08/07/2003US20030148623 Plasma processing device
08/07/2003US20030148041 First partial device comprising a first waveguide for coupling in microwave energy, a first gas supply apparatus and a first apparatus for evacuating a coating chamber; a second partial device comprising a second waveguide for coupling in microwave
08/07/2003US20030146699 AC driven plasma device for flat lamps and method of manufacture
08/07/2003US20030146398 Method for generating extreme ultraviolet radiation based on a radiation-emitting plasma
08/07/2003US20030146083 Passive bipolar arc control system and method
08/07/2003US20030145952 Method and apparatus for producing uniform process rates
08/07/2003CA2462614A1 Sterilization and decontamination system using a plasma discharge and a filter
08/06/2003EP1332650A1 Atmospheric plasma method for treating sheet electricity conducting materials and device therefor
08/06/2003EP1332511A1 Device for treating gas with plasma
08/05/2003US6603247 Energy storage and recovery system
08/05/2003US6602384 Plasma processing apparatus
07/2003
07/31/2003WO2003062310A1 Method and apparatus for applying material to glass
07/31/2003WO2003062146A1 Plasma synthesis of hollow nanostructures
07/31/2003WO2003015481A3 Suspended gas distribution manifold for plasma chamber
07/31/2003WO2002097854A3 Plasma reactor
07/31/2003US20030141825 Close coupled match structure for RF drive electrode
07/31/2003US20030141822 Method and apparatus for determination and control of plasma state
07/31/2003US20030141286 Main arc ignition device and main arc ignition control method of plasma cutting machine
07/31/2003US20030141182 Dielectric barrier discharging plasma in electrolytic cell; upgrading hydrocarbons using light source
07/30/2003EP1330200A1 Plasma arc sur surgical device and method
07/30/2003CN1433251A Self-exciting gas ionizing energy generator and its application and product
07/29/2003US6600127 Portions of anode and cathode are vaporized and ablated
07/29/2003US6600084 Method of decomposing organic halide
07/29/2003US6599399 Semiconductors; activating electrons; using high density, low pressure plasma
07/24/2003US20030138573 Method and Apparatus for Applying Material to Glass
07/24/2003US20030137182 Method and apparatus for a plasma-hydraulic continuous excavation system
07/24/2003US20030136766 MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
07/24/2003US20030136661 Electrolytic cell; catalytic oxidation
07/24/2003US20030136519 Matching circuit and plasma processing apparatus
07/24/2003US20030136518 Device for surface modification and/or coating of objects of quite various designs on all sides and optionally even on undercut surface regions can be achieved at low cost for plant engineering process engineering and other expenses
07/23/2003EP1329277A1 Method for automatic detection of different burners for cutting
07/23/2003EP1216493B1 Power splitter for plasma device
07/23/2003EP0981936A4 Plasma focus high energy photon source
07/23/2003EP0840941B1 Method of and apparatus for controlling reactive impedances of a matching network connected between an rf source and an rf plasma processor
07/23/2003CN1432190A Enhanced resist strip in dielectric ethcher using downstream plasma
07/22/2003US6597117 Plasma coil
07/17/2003WO2003058672A1 Method of fabricating a coated process chamber component
07/17/2003WO2003057996A2 Method and apparatus for a plasma-hydraulic continuous excavation system
07/17/2003WO2002087291A8 Microwave power cell, chemical reactor, and power converter
07/17/2003US20030134051 Substrate has been coated so as to be conducting by means of gas placed in region of an electric discharge; process is especially suitable for treating band-shaped and continuously supplied substrates
07/17/2003US20030132204 Welding head, nozzle and method for powder plasma arc welding (PPAW)
07/17/2003US20030132195 Plasma processing method and apparatus using dynamic sensing of a plasma environment
07/17/2003US20030132100 In situ sterilization and decontamination system using a non-thermal plasma discharge
07/17/2003US20030131469 Method of manufacturing an electrode for a plasma reactor and an electrode
07/16/2003EP1326718A2 Method and apparatus for forming a coating
07/16/2003EP1015161A4 Plasma gun and methods for the use thereof
07/16/2003EP0968524A4 Atmospheric-pressure plasma jet
07/16/2003CN1430865A Extreme ultraviolet source based on colliding neutral beams
07/16/2003CN1430247A Match circuit and plasma processing device
07/16/2003CN1430237A AC drive type plasma display device for electro-optical plate and its manufacturing method
07/15/2003US6594335 X-ray phase-contrast medical micro-imaging methods
07/15/2003US6594334 Exposure method and exposure apparatus
07/15/2003US6593507 Method of decomposing organic halide
07/15/2003US6592710 Apparatus for controlling the voltage applied to an electrostatic shield used in a plasma generator
07/10/2003WO2003056618A1 Plasma treatment apparatus
07/10/2003WO2003056602A1 Portable apparatus and method for treating a workpiece
07/10/2003WO2003056601A2 Apparatus and method for treating a workpiece using plasma generated from microwave radiation
07/10/2003WO2003055795A1 Method and device for treating or reforming gaseous fuels
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