H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1997
11/19/1997	EP0807965A2 Method of manufacturing layered ferroelectric Bi containing film
11/19/1997	EP0807964A1 Device for treating planar elements with a plasma jet
11/19/1997	EP0807963A2 Method for processing lateral faces of electronic components
11/19/1997	EP0807962A1 Process for making selfaligned conductive contacts for electronic devices
11/19/1997	EP0807961A1 Vertical wafer boat
11/19/1997	EP0807960A1 Deposition ring anti-rotation apparatus
11/19/1997	EP0807954A1 Coils for generating a plasma and for sputtering
11/19/1997	EP0807953A1 Inductively coupled RF plasma reactor having an overhead solenoidal antenna
11/19/1997	EP0807952A2 Plasma reactor with heated source of a polymer-hardening precursor material
11/19/1997	EP0807951A2 Magnetic neutral line discharged plasma type surface cleaning apparatus
11/19/1997	EP0807936A2 Nonvolatile semiconductor memory device capable of supplying erasing voltage to a flash memory cell
11/19/1997	EP0807854A1 Exposure method and apparatus
11/19/1997	EP0807851A1 Phase shift mask, blank for phase shift mask, and method of manufacturing phase shift mask
11/19/1997	EP0807694A1 Deposition chamber and method for low dielectric constant film
11/19/1997	EP0807318A1 Process for producing a glass-coated article and article produced thereby
11/19/1997	EP0807317A2 Method for purging a multi-layer sacrificial etched silicon substrate
11/19/1997	EP0807315A1 Multi-phase dc plasma processing system
11/19/1997	EP0807258A1 Test device for flat electronic assemblies
11/19/1997	EP0807191A1 Method and device for protecting the susceptor during epitaxial growth by cvd
11/19/1997	EP0797830A4 Exit window for x-ray lithography beamline
11/19/1997	EP0719431B1 Scan test circuit using fast transmission gate switch
11/19/1997	EP0552382B1 A two layer structureresist and a process for producing it
11/19/1997	CN1165609A Coating for the structured production of conductors on the surface of electrically insulating substrates
11/19/1997	CN1165586A Varicap diode and method of manufacturing a varicap diode
11/19/1997	CN1165585A Silicon-on-insulator device with floating collector
11/19/1997	CN1165583A Laminate for forming ohmic electrode and ohmic electrode
11/19/1997	CN1165523A Milled carbon fiber reinforced polymer composition
11/19/1997	CN1165406A Photoelectric conversion apparatus and image reading apparatus
11/19/1997	CN1165402A Method for forming element isolating film of semiconductor device
11/19/1997	CN1165401A Testing apparatus for non-packaged semiconductor chip
11/19/1997	CN1165400A Semiconductor device and assembling method thereof
11/19/1997	CN1165399A Method for removing defects by ion implantation using medium temperature oxide layer
11/19/1997	CN1165398A Towered organisator and towered forming method
11/19/1997	CN1165381A High density storage structure
11/19/1997	CN1165380A Ferroelectric element and method of producing the same
11/19/1997	CN1165323A Automated non-visual method of locating periodically arranged sub-micron objects
11/18/1997	US5689614 Rapid thermal heating apparatus and control therefor
11/18/1997	US5689459 Low voltage one transistor flash EEPROM cell using Fowler-Nordheim programming and erase
11/18/1997	US5689456 Semiconductor non-volatile ferroelectric memory transistor accompanied with capacitor for increasing potential difference applied to ferroelectric layer
11/18/1997	US5689428 Integrated circuits, transistors, data processing systems, printed wiring boards, digital computers, smart power devices, and processes of manufacture
11/18/1997	US5689215 Method of and apparatus for controlling reactive impedances of a matching network connected between an RF source and an RF plasma processor
11/18/1997	US5689209 Low-side bidirectional battery disconnect switch
11/18/1997	US5689208 For a gate controlled mos power semiconductor device
11/18/1997	US5689197 BIMOS-type current switch apparatus
11/18/1997	US5689193 For inspecting electrical properties of an object
11/18/1997	US5689140 Method for forming studs and interconnects in a multi-layered semiconductor device
11/18/1997	US5689139 Enhanced electromigration lifetime of metal interconnection lines
11/18/1997	US5689138 Integrated microwave semiconductor device with active and passive components
11/18/1997	US5689136 Semiconductor device and fabrication method
11/18/1997	US5689132 Protective circuit for semiconductor integrated circuit
11/18/1997	US5689130 Vertical semiconductor device with ground surface providing a reduced ON resistance
11/18/1997	US5689128 High density trenched DMOS transistor
11/18/1997	US5689127 Vertical double-gate field effect transistor
11/18/1997	US5689126 Semiconductor memory device having stacked capacitor
11/18/1997	US5689122 InP/InGaAs monolithic integrated demultiplexer, photodetector, and heterojunction bipolar transistor
11/18/1997	US5689120 MOS field effect transistor in a dynamic random access memory device and method for fabricating the same
11/18/1997	US5688980 Organometallic lead precursor, in-situ synthesis thereof, lead-titanium based thin film using the same, and preparation method therefor
11/18/1997	US5688726 Method for fabricating capacitors of semiconductor device having cylindrical storage electrodes
11/18/1997	US5688725 Method of making a trench mosfet with heavily doped delta layer to provide low on-resistance
11/18/1997	US5688724 Method of providing a dielectric structure for semiconductor devices
11/18/1997	US5688723 Method of forming fine patterns
11/18/1997	US5688722 CMOS integrated circuit with reduced susceptibility to PMOS punchthrough
11/18/1997	US5688721 3D stack of IC chips having leads reached by vias through passivation covering access plane
11/18/1997	US5688720 Method of flattening the surface of a semiconductor device by polishing
11/18/1997	US5688719 Method for plasma hardening of patterned photoresist layers
11/18/1997	US5688718 Method of CVD TiN barrier layer integration
11/18/1997	US5688717 Construction that prevents the undercut of interconnect lines in plasma metal etch systems
11/18/1997	US5688716 Fan-out semiconductor chip assembly
11/18/1997	US5688715 Excimer laser dopant activation of backside illuminated CCD's
11/18/1997	US5688714 Method of fabricating a semiconductor device having a top layer and base layer joined by wafer bonding
11/18/1997	US5688713 Method of manufacturing a DRAM cell having a double-crown capacitor using polysilicon and nitride spacers
11/18/1997	US5688712 Process for producing a semiconductor device
11/18/1997	US5688710 Method of fabricating a twin - well CMOS device
11/18/1997	US5688706 Method for fabricating a MOSFET device, with local channel doping, self aligned to a selectively deposited tungsten gate
11/18/1997	US5688705 Method for reducing the spacing between the horizontally adjacent floating gates of a flash EPROM array
11/18/1997	US5688704 Integrated circuit fabrication
11/18/1997	US5688703 Method of manufacturing a gate structure for a metal semiconductor field effect transistor
11/18/1997	US5688702 Process of making a semiconductor device using a silicon-on-insulator substrate
11/18/1997	US5688701 Method of making semiconductor device having a plurality of impurity layers
11/18/1997	US5688700 Method of forming a field effect transistor
11/18/1997	US5688661 Semiconductors
11/18/1997	US5688634 Energy sensitive resist material and process for device fabrication using the resist material
11/18/1997	US5688628 Acid former, polymers, phenolic compound
11/18/1997	US5688565 Integrated circuits
11/18/1997	US5688550 Method of forming polysilicon having a desired surface roughness
11/18/1997	US5688450 Method of making an electronic package structure utilizing aluminum nitride/aluminum composite material
11/18/1997	US5688441 Used to connect wiring layers of ceramic multilayer substrate, metal and glass powders, vehicle, metal salt of organic acid, boron or silicon compound
11/18/1997	US5688411 Method of and apparatus for removing coating from edge of substrate
11/18/1997	US5688410 Oxygen, sulfur hexafluoride
11/18/1997	US5688408 Multilayer printed wiring board
11/18/1997	US5688366 Etching method, method of producing a semiconductor device, and etchant therefor
11/18/1997	US5688365 Method of making semiconductor device
11/18/1997	US5688364 Semiconductor wafers
11/18/1997	US5688358 R.F. plasma reactor with larger-than-wafer pedestal conductor
11/18/1997	US5688357 Automatic frequency tuning of an RF power source of an inductively coupled plasma reactor
11/18/1997	US5688354 Method for adhering masking film
11/18/1997	US5688326 Apparatus for coating elongated material with photoresist
11/18/1997	US5688321 Apparatus for producing a silicon single crystal by a float-zone method
11/18/1997	US5688319 Method for testing electrical properties of silicon single crystal
11/18/1997	US5688116 Heat treatment process

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