Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1997
10/16/1997WO1997038355A1 Systems and methods for deposition of dielectric films
10/16/1997WO1997033304A3 Applying encapsulating material to substrates
10/16/1997DE19705001A1 Unit cell of DRAM without capacitor
10/16/1997DE19651759A1 Low-leakage-current thin film prodn. with low-pressure chemical
10/16/1997DE19651108A1 Semiconductor component, e.g. IGBT, for high voltage inverter
10/16/1997DE19651106A1 Mfg. low-leaking current electrode for LPCVD titania film
10/16/1997DE19649409A1 Diamond film fine processing method
10/16/1997DE19648285A1 Flash memory with high programming and erasure efficiency
10/16/1997DE19637389C1 High packing density DRAM cell array production
10/16/1997DE19632845A1 Half-tone phase-shifting mask
10/16/1997DE19628041A1 Insulation layer arrangement for semiconductor component e.g. CMOS
10/16/1997DE19626039A1 Metal conductive line on semiconductor substrate formation method for integrated circuit
10/16/1997DE19626038A1 Semiconductor component composite structure formation method
10/16/1997DE19625883A1 Semiconductor capacitor for e.g. 1 Gbit DRAM
10/16/1997DE19622402C1 Substrate induction heating apparatus especially for CVD
10/16/1997DE19614501A1 Ceramic-metal substrate with differential thermal expansion compensation
10/16/1997DE19614111A1 Stripline conductive track arrangement for monolithic integrated circuit
10/16/1997DE19614011A1 Halbleiterbauelement mit einem geteilten Floating Gate Semiconductor component with a divided floating gate
10/16/1997DE19614010A1 Halbleiterbauelement mit einstellbarer, auf einem tunnelstromgesteuerten Lawinendurchbruch basierender Stromverstärkung A semiconductor device with adjustable, based on a tunneling current controlled avalanche breakdown current gain
10/16/1997CA2250817A1 Curing liquid resin encapsulants of microelectronics components with microwave energy
10/15/1997EP0801427A2 Field effect transistor, semiconductor storage device, method of manufacturing the same and method of driving semiconductor storage device
10/15/1997EP0801426A2 Improved trench MOS gate device and method of producing the same
10/15/1997EP0801425A1 Insulated gate semiconductor device and method of manufacturing the same
10/15/1997EP0801424A2 Semiconductor device and assembling method thereof
10/15/1997EP0801423A2 Hdmi decal and fine line flexible interconnect forming methods
10/15/1997EP0801422A2 Removing agent composition for a photoresist and process for producing a semiconductor integrated circuit
10/15/1997EP0801421A1 Method for growing hemispherical grain silicon
10/15/1997EP0801420A2 Method for production of a SOI substrate by hydrophobic washing and pasting and SOI substrate thereby produced
10/15/1997EP0801419A1 Process of making a thin semiconductor film comprising electronic devices
10/15/1997EP0801418A2 Method for forming a T-shaped gate electrode in a semi-conductor device, and the T-shaped gate electrode
10/15/1997EP0801416A1 Plasma processing chamber with epicyclic magnet source assembly
10/15/1997EP0801415A2 A magnetron for low pressure, full face erosion
10/15/1997EP0801414A2 Gas-controlled arc vapor deposition apparatus and process
10/15/1997EP0801413A1 Inductively coupled plasma reactor with faraday-sputter shield
10/15/1997EP0801156A2 Process for vapor phase epitaxy of compound semiconductor
10/15/1997EP0801148A1 Method and apparatus for forming amorphous silicon and polysilicon films with improved step coverage
10/15/1997EP0800896A2 Endpoint detection for chemical mechanical polishing using frequency or amplitude mode
10/15/1997EP0800890A1 Heat sink
10/15/1997EP0800754A1 Compliant interface for a semiconductor chip
10/15/1997EP0800753A1 Microelectronic bonding with lead motion
10/15/1997EP0800720A1 Substrate clamp for non-isolated integrated circuits
10/15/1997EP0800706A1 Forming polyimide coatings by screen printing
10/15/1997EP0800705A1 Manufacture of a semiconductor device with selectively deposited semiconductor zone
10/15/1997EP0800704A1 Method of manufacturing a semiconductor device
10/15/1997EP0800665A1 Low metal ions p-cresol oligomers and photosensitive compositions
10/15/1997EP0800664A1 Metal ion reduction in novolak resin using an ion exchange resin in a polar solvent and photoresists compositions therefrom
10/15/1997EP0800542A1 Isolation of novolak resin by low temperature sub-surface forced steam distillation
10/15/1997EP0800424A1 Ultra-low particle semiconductor cleaner
10/15/1997CN1162366A Manufacturing dual sided wire bonded integrated circuit chip packages using offset wire bonds and support block cavities
10/15/1997CN1162195A Element assembling device
10/15/1997CN1162193A Semiconductor device packaged by resin
10/15/1997CN1162192A Isolation method for use in semiconductor device
10/15/1997CN1162191A 电压和电流基准电路 Voltage and current reference circuits
10/15/1997CN1162189A Thin-film semiconductor and mfg. method thereof, semiconductor and mfg. method thereof
10/15/1997CN1162188A Mfg. method for semiconductor device
10/15/1997CN1162028A Single crystal drawing device
10/15/1997CN1162027A Single crystal drawing device
10/15/1997CN1161998A 抛光剂 Polishes
10/15/1997CN1036167C Epitaxial growth method for obtaining low surface segregated silicon/germanium-silicon heterogeneous structure
10/15/1997CA2202316A1 Electronic device assembly
10/14/1997US5678116 Method and apparatus for drying a substrate having a resist film with a miniaturized pattern
10/14/1997US5678031 Method of testing interconnections of an LSI on a simulator through the use of effective pulse widths
10/14/1997US5677922 Semiconductor laser with crystalline window layer
10/14/1997US5677916 Semiconductor integrated circuit and its application device
10/14/1997US5677887 Semiconductor memory device having a large storage capacity and a high speed operation
10/14/1997US5677880 Semiconductor memory having redundancy circuit
10/14/1997US5677877 Integrated circuit chips with multiplexed input/output pads and methods of operating same
10/14/1997US5677876 Flash EEPROM with impurity diffused layer in channel area and process of production of same
10/14/1997US5677871 Circuit structure for a memory matrix and corresponding manufacturing method
10/14/1997US5677867 Memory with isolatable expandable bit lines
10/14/1997US5677866 Semiconductor memory device
10/14/1997US5677825 Ferroelectric capacitor with reduced imprint
10/14/1997US5677824 Electrostatic chuck with mechanism for lifting up the peripheral of a substrate
10/14/1997US5677765 For measuring atomic scale vertical topographic dimensions
10/14/1997US5677756 Apparatus for exposing a semiconductor wafer to light including an illumination optical system comprising a glass substrate having light-permeable patterns
10/14/1997US5677754 Scanning exposure apparatus
10/14/1997US5677643 Potential detecting circuit which suppresses the adverse effects and eliminates dependency of detected potential on power supply potential
10/14/1997US5677635 Voltage and displacement measuring apparatus and probe
10/14/1997US5677575 Semiconductor package having semiconductor chip mounted on board in face-down relation
10/14/1997US5677574 Airbridge wiring structure for MMIC
10/14/1997US5677573 Field effect transistor
10/14/1997US5677565 Monocrystalline compound semiconductor wafer including non-monocrystalline peripheral region
10/14/1997US5677564 Shallow trench isolation in integrated circuits
10/14/1997US5677563 Gate stack structure of a field effect transistor
10/14/1997US5677559 Aluminum wires connecting to gate electrodes made of aluminum, tantalum or an alloy of aluminum; transistors; corrosion and electrical resistance
10/14/1997US5677557 Method for forming buried plug contacts on semiconductor integrated circuits
10/14/1997US5677554 FET having a dielectrically isolated gate connect
10/14/1997US5677553 Semiconductor device strucutre having a two-dimensional electron gas and contact thereto
10/14/1997US5677549 Semiconductor device having a plurality of crystalline thin film transistors
10/14/1997US5677548 Silicon-on-insulator structure and semiconductor pressure detecting device using the structure
10/14/1997US5677480 Method and system for assessing the operating condition of a pressure regulator in a corrosive gas distribution system
10/14/1997US5677249 Semiconductor apparatus and production method for the same
10/14/1997US5677248 Method of etching semiconductor wafers
10/14/1997US5677246 Method of manufacturing semiconductor devices
10/14/1997US5677244 Forming barrier layer on damascene structure, forming discontinuous copper film thereon, depositing aluminum film on copper islands and exposed portion of barrier layer
10/14/1997US5677243 Removing portion of insulating layer covering first conductive layer to form hole reaching first conductive layer, forming organic layer filling hole, removing portion of insulating layer and filler, forming conductive layer
10/14/1997US5677242 Process of fabricating semiconductor integrated circuit device having small geometry contact by using spacer on photoresist mask
10/14/1997US5677241 Integrated circuitry having a pair of adjacent conductive lines and method of forming
10/14/1997US5677240 Method for forming a semiconductor device
10/14/1997US5677239 Forming interconnect metal film on insulating layer on semiconductor substrate, forming insulating film thereon, etching, burying with second insulating film, lapping down to planarize, forming third insulating film
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