Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1997
10/22/1997CN1162834A Silicon-on-insulator substrate and method of fabricating the same
10/22/1997CN1036231C 半导体存储器件 A semiconductor memory device
10/22/1997CN1036227C A dynamic random access memory made by using silic on-on-insulator and a method for making the same
10/22/1997CA2202697A1 Vapor phase growth method and growth apparatus
10/21/1997US5680588 Method and system for optimizing illumination in an optical photolithography projection imaging system
10/21/1997US5680428 Process for holding an object
10/21/1997US5680406 Integrated semiconductor circuit having scan flip-flops at predetermined intervals and testing method thereof
10/21/1997US5680364 Integrated circuit memory device having equally spaced apart cell arrays
10/21/1997US5680355 Semiconductor storage apparatus
10/21/1997US5680349 Nonvolatile semiconductor memory device having row decoder supplying a negative potential to word lines during erase mode
10/21/1997US5680348 Power supply independent current source for FLASH EPROM erasure
10/21/1997US5680346 High-speed, non-volatile electrically programmable and erasable cell and method
10/21/1997US5680345 Nonvolatile memory cell with vertical gate overlap and zero birds beaks
10/21/1997US5680190 Liquid crystal display apparatus including the same transparent material in the TFT semiconductor layer and a sub-pixel electrode
10/21/1997US5680132 Semiconductor device
10/21/1997US5680057 Integrated circuit testing assembly and method
10/21/1997US5680056 Apparatus and method for testing circuit board
10/21/1997US5680039 Probe apparatus for use in both high and low frequency measurements
10/21/1997US5680013 Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces
10/21/1997US5679983 Semiconductors; packages; chips; titanium, zirconium, hafnium with low level of impurities
10/21/1997US5679981 Semiconductor device having planarized wiring
10/21/1997US5679980 Conductive exotic-nitride barrier layer for high-dielectric-constant material electrodes
10/21/1997US5679978 Semiconductor device having resin gate hole through substrate for resin encapsulation
10/21/1997US5679977 Semiconductor chip assemblies, methods of making same and components for same
10/21/1997US5679972 Semiconductor device
10/21/1997US5679971 Semiconductor integrated circuit
10/21/1997US5679970 Triple gate flash-type EEPROM memory and its production process
10/21/1997US5679969 Ferroelectric based capacitor for use in memory systems and method for fabricating the same
10/21/1997US5679968 Transistor having reduced hot carrier implantation
10/21/1997US5679967 Customizable three metal layer gate array devices
10/21/1997US5679962 Semiconductor device and a single electron device
10/21/1997US5679610 Method of planarizing a semiconductor workpiece surface
10/21/1997US5679609 Fabrication, testing and repair of multichip semiconductor structures having connect assemblies with fuses
10/21/1997US5679608 Using tri-layer resist structure comprising a first layer of dissolvable polymer, a second layer of a hard mask material and a third layer of a resist material; spin coating of benzocyclobutene prevent diffusion of low resistance metal
10/21/1997US5679607 Method of manufacturing a damage free buried contact using salicide technology
10/21/1997US5679606 Using in situ multi-step electron cyclotron resonance oxide deposition process
10/21/1997US5679605 Multilevel interconnect structure of an integrated circuit formed by a single via etch and dual fill process
10/21/1997US5679603 Including dopant impurities in a concentration that positions the fermi level of the compound semiconductor layer at the center twenty per cent of the band gap energy
10/21/1997US5679602 Method of forming MOSFET devices with heavily doped local channel stops
10/21/1997US5679601 LOCOS method using encapsulating polysilicon/silicon nitride spacer
10/21/1997US5679600 Double locos for submicron isolation
10/21/1997US5679599 Isolation using self-aligned trench formation and conventional LOCOS
10/21/1997US5679598 Method of making a CMOS dynamic random-access memory (DRAM)
10/21/1997US5679597 Method for manufacturing CCD image pickup device
10/21/1997US5679596 Spot deposited polysilicon for the fabrication of high capacitance, DRAM devices
10/21/1997US5679595 Self-registered capacitor bottom plate-local interconnect scheme for DRAM
10/21/1997US5679594 Method of fabricating a read only memory in MOS technology, and memory thus obtained
10/21/1997US5679593 Method of fabricating a high resistance integrated circuit resistor
10/21/1997US5679592 Process for formation of LDD MOSFET wing photoresist
10/21/1997US5679591 Method of making raised-bitline contactless trenched flash memory cell
10/21/1997US5679590 Method for manufacturing contact hole for a nonvolatile semiconductor device
10/21/1997US5679589 FET with gate spacer
10/21/1997US5679588 Method for fabricating P-wells and N-wells having optimized field and active regions
10/21/1997US5679587 Method of fabricating an integrated circuit with vertical bipolar power transistors and isolated lateral bipolar control transistors
10/21/1997US5679586 Composite mask process for semiconductor fabrication
10/21/1997US5679585 Method for forming metal silicide on a semiconductor surface with minimal effect on pre-existing implants
10/21/1997US5679502 Using polymethyl methacrylate as photoresist for proper exposure using synchotron device to provide x-ray beam having required photon energy
10/21/1997US5679500 Forming resist film by using a chemical amplification resist which generates an acid in response to laser light and which reacts with the acid
10/21/1997US5679499 Method for forming photo mask for use in fabricating semiconductor device
10/21/1997US5679498 Patterned development of photosensitive dielectric layer, sensitizing with catalyst, patterning photoresist to delineate conductors, forming conductors, repeating to add successive layers
10/21/1997US5679497 First acid generating agent having sensitivity only to an electron beam and second acid generating agent having a sensitivity to an optical beam; exposing to both beams to form a preferential pattern
10/21/1997US5679496 Containing sulfonium salt having tert-butoxycarbonylmethoxy group(s) as acid labile groups; sensitivity, resolution, etch and heat resistance
10/21/1997US5679495 Radiation sensitive resin composition
10/21/1997US5679483 Embedded phase shifting photomasks and method for manufacturing same
10/21/1997US5679476 Epitaxial wafer and method of fabricating thereof
10/21/1997US5679475 Semiconductor substrate and process for preparing the same
10/21/1997US5679405 Method for preventing substrate backside deposition during a chemical vapor deposition operation
10/21/1997US5679269 Diamond-like carbon for use in VLSI and ULSI interconnect systems
10/21/1997US5679234 Process of forming miniature pattern well controlled in thickness on semiconductor wafer through selective electroplating
10/21/1997US5679213 Forming metal film containing platinum and/or palladium, forming mask thereon, etching using mixture of argon and bromine-containing gas, removing bromide adhered to mask with organic solvent
10/21/1997US5679212 Etchant containing no loose abrasives and permitting selective etching of deformed layers
10/21/1997US5679211 Spin-on-glass etchback planarization process using an oxygen plasma to remove an etchback polymer residue
10/21/1997US5679204 Chemical reactor and gas supply pipes having aluminum alloy with magnesium, free of surface coatings; corrosion resistance, chemical resistance
10/21/1997US5679194 Fabrication of leads on semiconductor connection components
10/21/1997US5679171 Method of cleaning substrate
10/21/1997US5679169 Method for post chemical-mechanical planarization cleaning of semiconductor wafers
10/21/1997US5679168 Thermal processing apparatus and process
10/21/1997US5679165 Apparatus for manufacturing semiconductor device
10/21/1997US5679164 Molybdenum cylinder used to guide source gas; barrel within and spaced from cylinder; axially extending separation plate; flange
10/21/1997US5679153 Method for reducing micropipe formation in the epitaxial growth of silicon carbide and resulting silicon carbide structures
10/21/1997US5679152 Method of making a single crystals Ga*N article
10/21/1997US5679059 Method of polishing a surface of a workpiece
10/21/1997US5679055 Automated wafer lapping system
10/21/1997US5678989 Heat treatment method using a vertical processing tube
10/21/1997US5678980 Robot assembly
10/21/1997US5678744 Method for cutting a hard to cut wafer
10/21/1997US5678320 Semiconductor processing systems
10/21/1997US5678301 Method for forming an interconnect for testing unpackaged semiconductor dice
10/21/1997US5678287 Uses of uniaxially electrically conductive articles
10/16/1997WO1997038563A1 Structrure and method for supporting one or more electronic components
10/16/1997WO1997038448A1 Semiconductor component with adjustable current amplification based on avalanche breakdown controlled by tunnel current
10/16/1997WO1997038447A2 High-voltage lateral mosfet soi device having a semiconductor linkup region
10/16/1997WO1997038446A1 Semiconductor component with a split floating gate
10/16/1997WO1997038444A1 Semiconductor integrated circuit device
10/16/1997WO1997038442A1 Semiconductor trench isolation with improved planarization methodology
10/16/1997WO1997038441A1 Curing liquid resin encapsulants of microelectronics components with microwave energy
10/16/1997WO1997038440A1 Coupling system for the transfer of a confined planar object from a containment pod to an object processing unit
10/16/1997WO1997038439A1 Device for transporting planar objects and method for transferring said objects from the device to a processing machine
10/16/1997WO1997038438A1 Process and device for drying of substrates
10/16/1997WO1997038356A1 Photolithographic apparatus
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