H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1997
12/23/1997	US5700717 Method of reducing contact resistance for semiconductor manufacturing processes using tungsten plugs
12/23/1997	US5700716 Forming contact opening through insulating layer, forming titanium layer in bottom of contact opening, forming layer of polysilicon over titanium, annealing
12/23/1997	US5700715 Process for mounting a semiconductor device to a circuit substrate
12/23/1997	US5700714 Patterning aluminum nitride film to form diffusion mask with windows, diffusing impurity by annealing, etching with hydrofluoric acid
12/23/1997	US5700712 Method for manufacturing an insulating trench in an SOI substrate for smartpower technologies
12/23/1997	US5700711 Forming polycrystalline silicon structure, masking, doping, forming blanket dielectric layer, forming dummy conductor which protects silicon resistor
12/23/1997	US5700710 Process of fabricating capacitor having waved rough surface of accumulating electrode
12/23/1997	US5700709 Method for manufacturing a capacitor for a semiconductor device
12/23/1997	US5700708 Forming transistor on silicon substrate, forming silicon nitride, silicon oxide layers, contact openings, second polysilicon layer, electrodes, dielectric layer, third polysilicon layer, electrode
12/23/1997	US5700707 Method of manufacturing SRAM cell structure having a tunnel oxide capacitor
12/23/1997	US5700706 Self-aligned isolated polysilicon plugged contacts
12/23/1997	US5700705 Semiconductor integrated circuit device
12/23/1997	US5700703 Method of fabricating buried control elements in semiconductor devices
12/23/1997	US5700701 Method for reducing junction capacitance and increasing current gain in collector-up bipolar transistors
12/23/1997	US5700700 Transistor in a semiconductor device and method of making the same
12/23/1997	US5700699 Method for fabricating a polycrystal silicon thin film transistor
12/23/1997	US5700698 Method for screening non-volatile memory and programmable logic devices
12/23/1997	US5700697 Method for packaging an integrated circuit using a reconstructed package
12/23/1997	US5700628 Dry microlithography process
12/23/1997	US5700627 Device for the insolation of micrometric and/or submicrometric areas in a photosensitive layer and a method for the creation of patterns in such a layer
12/23/1997	US5700626 Preventing a generation of charge-up effect in exposure to electron beams and reducing detect errors
12/23/1997	US5700625 Negative-working photoresist composition
12/23/1997	US5700606 Prevents copying of unwanted patterns while maintaining high light contrast
12/23/1997	US5700605 Mask for light exposure and process for production of the same
12/23/1997	US5700604 For transferring images or patterns onto a radiation sensitive substrate, for printing integrated circuits, accuracy
12/23/1997	US5700603 Semiconductor device having X-ray lithographic mask and method for manufacturing the same
12/23/1997	US5700581 Solvent-free epoxy based adhesives for semiconductor chip attachment and process
12/23/1997	US5700580 Highly selective nitride spacer etch
12/23/1997	US5700526 Insulator deposition using focused ion beam
12/23/1997	US5700520 Increasing pressure within single substrate chemical vapor deposition chamber greatly increases rate of deposition
12/23/1997	US5700467 Reduced defect density
12/23/1997	US5700401 Liquid auto-level apparatus and method
12/23/1997	US5700383 Slurries and methods for chemical mechanical polish of aluminum and titanium aluminide
12/23/1997	US5700382 Method for fabricating a silicon semiconductor substrate having an integrated waveguide and an optical fiber coupled thereto
12/23/1997	US5700379 Method for drying micromechanical components
12/23/1997	US5700373 Method for sealing a filter
12/23/1997	US5700349 Forming offset insulating film on mid interconnection layer so patterns are the same, forming sidewall insulating film on lateral wall surface, forming etch stop layer over all, etching through hole, removing etch stop layer, filling hole
12/23/1997	US5700348 Forming hydrophilic thin film by oxygen plasma treatment on exposed silicon surface, polishing insulating film, removing abrasive grains adhering to surface by scrubbing
12/23/1997	US5700321 Method of feeding a dopant in a continuously charging method
12/23/1997	US5700297 Apparatus for providing consistent, non-jamming registration of notched semiconductor wafers
12/23/1997	US5700127 Substrate processing method and substrate processing apparatus
12/23/1997	US5700046 Wafer gripper
12/23/1997	US5700045 Universal QFP tray transfer method
12/23/1997	US5700001 Method of resin sealing an object with apparatus including a gas spring
12/23/1997	US5699951 Wire bonder and a bonding tool and bonding arm
12/23/1997	US5699916 Integrated circuit wafer container
12/23/1997	US5699613 Fine dimension stacked vias for a multiple layer circuit board structure
12/23/1997	US5699611 Method of hermetically self-sealing a flip chip
12/23/1997	US5699610 Process for connecting electronic devices
12/18/1997	WO1997048136A1 Semiconductor device having soi structure and method for manufacturing the device
12/18/1997	WO1997048135A1 Quantum well mos transistor and methods for making same
12/18/1997	WO1997048132A1 Method for forming co-planar conductor and insulator features using chemical mechanical planarization
12/18/1997	WO1997048131A1 Electronic component structure
12/18/1997	WO1997048130A1 Method for mounting an integrated circuit on a carrier and resulting carrier
12/18/1997	WO1997048129A1 Pull-up drying method and drying apparatus
12/18/1997	WO1997048128A1 Method of making a contact to a diamond
12/18/1997	WO1997048127A1 METHOD FOR ENGRAVING THE GATE IN MOS TECHNOLOGY USING A SiON BASED HARD MASK
12/18/1997	WO1997048126A1 Multi-level substrate processing apparatus
12/18/1997	WO1997048125A1 Device for simultaneous transport and change of orientation of at least one carrier for electronic components
12/18/1997	WO1997048124A1 Tool for applying electric connection contacts on semiconductor components
12/18/1997	WO1997048099A1 A device and method for multi-level charge/storage and reading out
12/18/1997	WO1997048061A1 Method and apparatus for optimization of standard cell libraries
12/18/1997	WO1997048032A2 Programmable metallization cell and method of making
12/18/1997	WO1997048021A1 Process for modulating interferometric lithography patterns to record selected discrete patterns in photoresist
12/18/1997	WO1997047783A1 Methodology and apparatus for in-situ doping of aluminum coatings
12/18/1997	WO1997047433A1 Methods and apparatus for the chemical mechanical planarization of electronic devices
12/18/1997	WO1997047406A1 Wafer scrubbing device
12/18/1997	WO1997043694A3 Method of producing a stencil mask
12/18/1997	DE19725150A1 Stepwise ion implantation to form semiconductor substrate junction
12/18/1997	DE19722441A1 Semiconductor component, e.g. IGBT, for control of motor or switching inverter
12/18/1997	DE19722113A1 Metallverdrahtung für Halbleiterbauelemente und Verfahren zum Bilden derselben Metal wiring for semiconductor devices and method of forming same
12/18/1997	DE19702862A1 Fault analysis using emission microscope for LSI semiconductor
12/18/1997	DE19654178A1 Verfahren zur Plasmaätzung bei der Herstellung eines Halbleiterbauelements A method of plasma etching in the manufacture of a semiconductor device
12/18/1997	DE19652395A1 Integrated circuit module
12/18/1997	DE19651549A1 Connecting frame or mask apparatus for integrated circuit housing
12/18/1997	DE19638500C1 IR absorbent fused glass covering for ceramic component
12/18/1997	DE19623663A1 Modular apparatus for manufacture of semiconductor and compatible component
12/18/1997	CA2229404A1 Method and apparatus for optimization of standard cell libraries
12/18/1997	CA2223488A1 Wafer scrubbing device
12/17/1997	EP0813290A2 Multi-stage voltage-boosting circuit with boosted back-gate bias
12/17/1997	EP0813255A1 Method of fabricating composite piezo-electric members and a mask used for the fabrication of the same
12/17/1997	EP0813251A2 Thin-film transistor and display device using the same
12/17/1997	EP0813249A1 Semiconductor device with an insulation double well and method of manufacturing the same
12/17/1997	EP0813248A2 Dielectrically isolated IC merged with surge protection circuit and method for manufacturing the same
12/17/1997	EP0813246A2 Semiconductor device comprising two semiconductor substrates
12/17/1997	EP0813245A2 Aluminum interconnections
12/17/1997	EP0813243A2 Material for a semiconductor device carrier substrate and method of producing the same
12/17/1997	EP0813242A2 DRAM cell with trench transistor
12/17/1997	EP0813241A1 Storage capacitor for DRAM memory cell and the process of fabricating the same
12/17/1997	EP0813240A1 Improvements in or relating to semiconductor devices
12/17/1997	EP0813239A1 Improvements in or relating to semiconductor devices
12/17/1997	EP0813238A2 Flip-Chip Semiconductor device with test structure and method of manufacturing the same
12/17/1997	EP0813237A1 Method for mounting an integrated circuit on a support and resulting support
12/17/1997	EP0813236A1 Method for encapsulating an integrated semi-conductor circuit
12/17/1997	EP0813235A2 Method for manufacturing multilayer wiring board and wiring pattern forming apparatus
12/17/1997	EP0813234A2 Method of manufacturing a MOSFET
12/17/1997	EP0813233A2 Method of etching dielectric layer using a plasma generated from a mixture of flourohydrocarbon gas, NH3-genrating gas, and carbon-oxygen containing gas
12/17/1997	EP0813232A2 Method of reducing the amount of carbon in an interface between an epitaxial film and a Si substrate
12/17/1997	EP0813231A1 Electron beam lithography
12/17/1997	EP0813230A2 Device for dry cleaning dust soiled objects for carrying and keeping semi-conductor wafers

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