Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1997
12/04/1997WO1997045861A1 Device for gripping and holding a substrate
12/04/1997WO1997045860A1 Device for treating substrates in a fluid container
12/04/1997WO1997045857A1 Apparatus for plasma jet treatment of substrates
12/04/1997WO1997045856A1 Method for treating articles with a plasma jet
12/04/1997WO1997045827A1 Crystallization processing of semiconductor film regions on a substrate, and devices made therewith
12/04/1997WO1997045772A1 Photolithography mask using serifs and method thereof
12/04/1997WO1997045748A1 Method for testing electronic components
12/04/1997WO1997045499A1 Pressure-sensitive adhesive having excellent heat resistance and heat conductivity, adhesive sheets, and method of securing electronic component to heat-radiating member therewith
12/04/1997WO1997045233A1 Robot handling apparatus
12/04/1997WO1997036318A3 A method for producing a semiconductor device having a semiconductor layer of sic and such a device
12/04/1997DE3913219C3 Integrierte Halbleiterschaltung mit mehreren Schaltungen, die logischen Tests unterworfen werden A semiconductor integrated circuit with multiple circuits, the logical tests are subjected to
12/04/1997DE19700109A1 On silicon-on-insulator (SOI) substrate formed semiconductor component
12/04/1997DE19653177A1 Detecting faults in gate insulated semiconductor component
12/04/1997DE19633016A1 Rinsing and drying equipment for silicon discs etc. substrates
12/04/1997DE19621858A1 Schichtenfolge sowie Substrat-Puffer-System und Verfahren zur Herstellung derselben Layer sequence substrate and buffer system and process for producing same
12/04/1997DE19621855A1 Verfahren und Vorrichtung zur Herstellung von Metallisierungen auf Halbleiterkörpern Method and apparatus for the production of metallizations on semi-conductor bodies
12/04/1997DE19621487A1 Method for manufacturing T-shaped gate electrodes
12/04/1997DE19619486A1 Vertical stepping transport system
12/04/1997CA2256763A1 Conductors for integrated circuits
12/04/1997CA2255961A1 Electronic component, in particular a component using acoustical surface acoustic waves
12/03/1997EP0810816A1 Balanced source for plasma system
12/03/1997EP0810726A1 Elastic surface wave functional device and electronic circuit using the element
12/03/1997EP0810708A2 Semiconductor device having individual power supply lines shared between function blocks for discharging surge without propagation of noise
12/03/1997EP0810674A2 Light emitting device, wafer for light emitting device, and method of preparing the same
12/03/1997EP0810673A1 Semiconductor device with compensation implantation and method of manufacture
12/03/1997EP0810670A1 Vertical bipolar power transistor with an integrated sensing resistor
12/03/1997EP0810669A1 Thin film transistor element array
12/03/1997EP0810668A1 Silicon on insulator master slice semiconductor integrated circuit
12/03/1997EP0810667A2 Triple well flash memory cell and fabrication process
12/03/1997EP0810666A1 Non-volatile semiconductor memory cell and method for production thereof
12/03/1997EP0810665A1 Compact ROM memory matrix
12/03/1997EP0810664A2 DRAM cell and method of its manufacture
12/03/1997EP0810663A1 Layout structure of capacitive element(s) and interconnections in a semiconductor
12/03/1997EP0810662A1 An integrated device in an "emitter switching" configuration and with a cellular structure
12/03/1997EP0810659A2 Semiconductor packaging apparatus and method
12/03/1997EP0810658A2 Semiconductor device comprising a via-hole
12/03/1997EP0810654A1 Ball grid array package with substrate having no through holes or via interconnections
12/03/1997EP0810653A1 DRAM and method of fabricating a DRAM with increased capacity
12/03/1997EP0810652A2 Semiconductor device and manufacture method of same
12/03/1997EP0810651A2 Fabrication process for a connection between multilayer wirings in a semiconductor device
12/03/1997EP0810650A2 Uniform trench fill recess by means of isotropic etching
12/03/1997EP0810649A2 Method for coupling substrates and structure
12/03/1997EP0810648A2 Improvements in or relating to semiconductor devices
12/03/1997EP0810647A2 Process for forming a self-aligned raised source/drain MOS device and device therefrom
12/03/1997EP0810646A2 Method of fabricating very high gain heterojunction bipolar transistors
12/03/1997EP0810645A2 Method of fabricating double photoresist layer self-aligned heterojunction bipolar transistor
12/03/1997EP0810644A2 Method of febricating high-frequency GaAs substrate-based Schottky barrier diodes
12/03/1997EP0810643A2 Method for cleaning a porous surface of a semiconductor substrate
12/03/1997EP0810642A2 Process for etching a semiconductor substrat and etching apparatus
12/03/1997EP0810641A2 Process for etching defective zones on the circumference of semiconductor substrate and etching apparatus
12/03/1997EP0810640A1 Thin film semiconductor device, method for manufacturing thin film semiconductor device, liquid crystal display, method for manufacturing liquid crystal display, electronic apparatus, method for manufacturing electronic apparatus, and method for depositing thin film
12/03/1997EP0810639A2 Laser crystallisation of an amorphous silicon film for a TFT
12/03/1997EP0810638A2 Buffered substrate for semiconductor devices
12/03/1997EP0810637A2 Method of producing a conductive pattern on a substrate using planarization and etching steps
12/03/1997EP0810636A2 Piezoelectric wafer gripping system for robot blades
12/03/1997EP0810635A1 Method and apparatus for mounting a semiconductor wafer on a polishing block by applying radiant heat
12/03/1997EP0810634A2 Substrate treating system and substrate treating method
12/03/1997EP0810633A2 Coating film forming method and apparatus
12/03/1997EP0810632A2 Method and apparatus for transferring wafers in a wafer processing facility
12/03/1997EP0810630A2 Low volume gas distribution assembly for a chemical downstream etch tool
12/03/1997EP0810624A1 Method and apparatus for ion formation in an ion implanter
12/03/1997EP0810503A1 An integrated circuit with a device having a predetermined reverse conduction threshold and a thermal compensation device with Vbe multipliers
12/03/1997EP0810478A2 A coater having a controllable pressurized process chamber for semiconductor processing
12/03/1997EP0810477A2 Photoactive systems for high resolution photolithography
12/03/1997EP0810307A2 Method of forming a compound semiconductor film
12/03/1997EP0810305A1 An apparatus for pulling silicon single crystal
12/03/1997EP0810300A1 Process for producing an aluminium film
12/03/1997EP0810293A1 Gold alloy wire and method for making a bump
12/03/1997EP0810066A2 Automated wafer lapping system
12/03/1997EP0809866A1 Magnetoresistive structure with alloy layer
12/03/1997EP0809865A1 SEMICONDUCTOR FIELD EFFECT DEVICE COMPRISING A SiGe LAYER
12/03/1997EP0809864A1 Lateral thin-film soi devices with linearly-grated field oxide and linear doping profile
12/03/1997EP0809863A1 Hot carrier transistors and their manufacture
12/03/1997EP0809861A1 Method of manufacturing a semiconductor device for surface mounting suitable for comparatively high voltages, and such a semiconductor device
12/03/1997EP0809860A1 Layered structure with a silicide layer, and process for producing such a layered structure
12/03/1997EP0809846A1 Nonvolatile magnetoresistive memory with fully closed-flux operation
12/03/1997EP0809814A1 Arbitrarily wide lens array with an image field to span the width of a substrate
12/03/1997EP0809798A2 Method and apparatus for predicting process characteristics of polyurethane pads
12/03/1997EP0809596A1 Method and apparatus for transporting lead frame, and in-line system using them
12/03/1997EP0745015A4 Multi-wavelength laser optic system for probe station and laser cutting
12/03/1997EP0719183A4 Hybrid pulsed valve for thin film coating and method
12/03/1997EP0507885B1 A low frequency inductive rf plasma reactor
12/03/1997EP0503076B1 Photopolymerizable composition and photopolymerizable element
12/03/1997CN1166864A Method of forming diamond-like carbon film (DLC), DLC film formed thereby, use of the same, field emitter array and field emitter cathodes
12/03/1997CN1166805A Chemical mechanical polishing slurry for metal layers
12/03/1997CN1166798A Non-aminic photoresist adhesion promoters for microelectronic applications
12/03/1997CN1166694A Solid-state antenna switch and field-effect transistor
12/03/1997CN1166693A Cleaning methods of porous surface and semiconductor surface
12/03/1997CN1166540A Method and apparatus for producing silicon carbide by chemical vapour-deposition
12/03/1997CN1166535A 密封装置 Sealing device
12/02/1997US5694364 Semiconductor integrated circuit device having a test mode for reliability evaluation
12/02/1997US5694359 Flash memory device
12/02/1997US5694357 Nonvolatile semiconductor memory device for storing multi-value data
12/02/1997US5694355 Memory cell and wordline driver for embedded DRAM in ASIC process
12/02/1997US5694354 Static random access memory device having a single bit line configuration
12/02/1997US5694353 Non-volatile ferroelectric memory device equipped with reference voltage generator for exactly regulating reference voltage to the mid point between two logic level and method of reading out data bit therefrom
12/02/1997US5694352 Semiconductor memory device having layout area of periphery of output pad reduced
12/02/1997US5694241 Catadioptric reduction projection optical system and exposure apparatus employing the same
12/02/1997US5694219 Device recognizing method and apparatus for surface mounting device mounter
12/02/1997US5694207 Etch rate monitoring by optical emission spectroscopy
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