H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1997
12/16/1997	US5698071 Etching aftertreatment under vacuum
12/16/1997	US5698070 Supporting wafer on lower electrode close to upper electrode under reduced pressure, generating electric field between wafer and upper electrode while supplying process gas and simultaneously an auxilary gas to edges of wafer
12/16/1997	US5698069 Technique for detecting particles on a wafer support surface
12/16/1997	US5698063 Intermediate workpiece employing a mask for etching an aperture aligned with the crystal planes in the workpiece substrate
12/16/1997	US5698040 Providing semiconductor wafer in wafer carrier in tank, rotating wafer about central axis by pressurized cleaning solution received from nozzles
12/16/1997	US5698038 Method for wafer carrier cleaning
12/16/1997	US5698035 Corrosion/shock and electrical resistance; improve thermoconductivity; consists of atleast one of zrconium bromide and titanium bromide, boron nitride and aluminum nitride
12/16/1997	US5697777 Curing device
12/16/1997	US5697759 Method of orienting a specimen carrier holder in an automated specimen processing system
12/16/1997	US5697751 Wafer transfer apparatus and method
12/16/1997	US5697750 Controlled environment enclosure and mechanical interface
12/16/1997	US5697749 Wafer processing apparatus
12/16/1997	US5697748 Wafer tray and ceramic blade for semiconductor processing apparatus
12/16/1997	US5697427 Apparatus and method for cooling a substrate
12/16/1997	US5697149 Method of coating an electronic component
12/16/1997	US5697148 Flip underfill injection technique
12/16/1997	CA2079964C Apparatus and method for manufacturing optical module
12/16/1997	CA2046284C P-n-p diamond transistor
12/16/1997	CA2036911C Energization coil device, a method of making such a device and an electromagnetic micromotor fitted therewith
12/11/1997	WO1997047049A1 Series of layers and substrate-buffer system, and process for the production thereof
12/11/1997	WO1997047047A1 Short channel flash eeprom device having a double diffused source and method of manufacturing the same
12/11/1997	WO1997047046A1 Method for manufacturing thin film transistor, liquid crystal display and electronic device both produced by the method
12/11/1997	WO1997047045A1 Silicon carbide metal-insulator semiconductor field effect transistor
12/11/1997	WO1997047041A2 Programmable, non-volatile memory device, and method of manufacturing such a device
12/11/1997	WO1997047039A1 An integrated circuit which uses a recessed local conductor for producing staggered interconnect lines
12/11/1997	WO1997047038A1 An integrated circuit having horizontally and vertically offset interconnect lines
12/11/1997	WO1997047036A1 An integrated circuit which uses a damascene process for producing staggered interconnect lines
12/11/1997	WO1997047035A1 Mask generation technique for producing an integrated circuit with optimal interconnect layout for achieving global planarization
12/11/1997	WO1997047034A1 A multilevel interconnect structure of an integrated circuit formed by a single via etch and dual fill process
12/11/1997	WO1997047033A1 Method of high density plasma metal etching
12/11/1997	WO1997047032A1 Device for controlling treating station
12/11/1997	WO1997047031A1 Method for mounting semiconductor chip
12/11/1997	WO1997047030A1 Fluoride additive containing chemical mechanical polishing slurry and method for use of same
12/11/1997	WO1997047029A1 Semiconductor chip and method for manufacturing the same
12/11/1997	WO1997047028A1 High flown vacuum chamber including equipment modules such as plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support
12/11/1997	WO1997047022A1 Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support
12/11/1997	WO1997046915A1 Metal ion reduction of aminochromatic chromophores and their use in the synthesis of low metal bottom anti-reflective coatings for photoresists
12/11/1997	WO1997046842A1 Vertical heat treatment device
12/11/1997	WO1997046730A1 Temperature controlling method and apparatus for a plasma processing chamber
12/11/1997	WO1997046728A1 Process and device for production of metallic coatings on semiconductor structures
12/11/1997	DE19723083A1 Moving wire saw apparatus for cutting of silicon@, glass, and ceramic material
12/11/1997	DE19723078A1 Wire saw cut wafer cleaning method for semiconductor, magnetic or ceramic material
12/11/1997	DE19722423A1 Device for treating substrates in a fluid container with ultrasound
12/11/1997	DE19720708A1 High-speed monitor for study of pattern defect on semiconductor wafer
12/11/1997	DE19714470A1 Multichip interconnection for multichip module containing programmable logic component
12/11/1997	DE19705004A1 Semiconductor on insulator device e.g. transistor, for ASIC
12/11/1997	DE19703221A1 Capacitor for e.g. semiconductor memory
12/11/1997	DE19702346A1 MOSFET for ULSI
12/11/1997	DE19701935C1 Silicon capacitor production in silicon substrate
12/11/1997	DE19642942A1 Voltage pumping circuit for solid state devices
12/11/1997	DE19638617A1 Vertical type bipolar semiconductor component, e.g. transistor
12/10/1997	EP0812021A2 Dielectric thin film capacitor element and manufacturing method of the same
12/10/1997	EP0812019A1 Single gate nonvolatile memory cell and method for accessing the same
12/10/1997	EP0812018A1 CMOS-semiconductor device with field plates and self-aligned contact as well as method of manufacturing thereof
12/10/1997	EP0812017A1 Capacitance-forming method
12/10/1997	EP0812016A1 Integrated circuit air bridge structures and methods of fabricating same
12/10/1997	EP0812013A2 Multilayer coating for microelectronic devices
12/10/1997	EP0812012A1 Method for etching to produce metal film structures having tapered sidewalls
12/10/1997	EP0812011A2 Cleaning agent
12/10/1997	EP0812010A1 Semiconductor structure for MOS transisitor and method of manufacturing said structure
12/10/1997	EP0812009A2 Improvements in or relating to semiconductor processing
12/10/1997	EP0812008A2 Support jig for thin circular objects
12/10/1997	EP0812007A2 Planarization of insulating film in formation of semiconductor device
12/10/1997	EP0812006A1 Tool for bringing electrical connection contacts on a semiconductive element
12/10/1997	EP0812000A2 Dose modification proximity effect compensation (PEC) technique for electron beam lithography
12/10/1997	EP0811983A1 Flash memory cell, electronic device comprising such a cell, and relative fabrication method
12/10/1997	EP0811982A2 Non-volatile ferroelectric memory device for storing data bits restored upon power-on and intermittently refreshed
12/10/1997	EP0811981A2 Method of controlling non-volatile ferroelectric memory cell for inducing a large amount of electric charge representative of data bit
12/10/1997	EP0811977A2 Semiconductor memory device having sense amplifier drivers disposed on center portion of cell array block
12/10/1997	EP0811899A1 Supporting apparatus using magnetic power
12/10/1997	EP0811883A2 Exposure apparatus and device manufacturing method using the same
12/10/1997	EP0811882A1 Laser pattern generation apparatus
12/10/1997	EP0811869A1 Liquid crystal display device and process for production thereof
12/10/1997	EP0811865A2 Illumination system and exposure apparatus
12/10/1997	EP0811709A2 Method and apparatus for enhancing the efficiency of radiant energy sources used in rapid thermal processing of substrates by energy reflection
12/10/1997	EP0811707A1 Process and apparatus for making single crystals
12/10/1997	EP0811706A1 Conformable nickel coating and process for coating an article with a conformable nickel coating
12/10/1997	EP0811703A2 Apparatus for treatment of a substrate
12/10/1997	EP0811702A2 Method and apparatus for depositing a layer by CVD
12/10/1997	EP0811666A2 Fluoride additive containing chemical mechanical polishing slurry and method for use of same
12/10/1997	EP0811665A2 Chemical mechanical polishing slurry for metal layers and films
12/10/1997	EP0811468A2 Articulated arm transfer device
12/10/1997	EP0811249A1 Emitter ballast bypass for radio frequency power transistors
12/10/1997	EP0811248A1 Method of forming a dram bit line contact
12/10/1997	EP0811247A1 Semiconductor processing method of forming an electrically conductive contact plug
12/10/1997	EP0811246A1 Tunneling technology for reducing intra-conductive layer capacitance
12/10/1997	EP0811244A1 Chemical solutions for removing metal-compound contaminants from wafers after cmp and the method of wafer cleaning
12/10/1997	EP0811243A1 A PROCESS FOR IN-SITU DEPOSITION OF A Ti/TiN/Ti ALUMINUM UNDERLAYER
12/10/1997	EP0811242A1 Method of manufacturing a resurf semiconductor device, and a semiconductor device manufactured by such a method
12/10/1997	EP0811241A1 Method of manufacturing a semiconductor device with a pn junction provided through epitaxy
12/10/1997	EP0811181A1 Method and device for producing features on a photolithographic layer
12/10/1997	EP0811167A1 Manipulator for automatic test equipment test head
12/10/1997	EP0811083A1 Electroless deposition of metal films with spray processor
12/10/1997	EP0810910A1 Heat-sinking structures and electrical sockets for use therewith
12/10/1997	EP0645072A4 High performance horizontal diffusion furnace system.
12/10/1997	EP0641485A4 Membrane dielectric isolation ic fabrication.
12/10/1997	CN1167564A Method of positioning IC and IC handler using the same
12/10/1997	CN1167511A Epitaxial growth of silicon carbide and resulting silicon carbide structure
12/10/1997	CN1167424A Apparatus for assembling electronic components
12/10/1997	CN1167342A Silicon semiconductor diode chip of all tangent plane junction glass passivation and making method

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