Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1997
11/04/1997US5684319 Self-aligned source and body contact structure for high performance DMOS transistors and method of fabricating same
11/04/1997US5684317 MOS transistor and method of manufacturing thereof
11/04/1997US5684316 Semiconductor memory device provided with capacitors formed above and below a cell transistor
11/04/1997US5684315 Semiconductor memory device including memory cells each having an information storage capacitor component formed over control electrode of cell selecting transistor
11/04/1997US5684311 Base cell for BiCMOS and CMOS gate arrays
11/04/1997US5684310 Multiple layer wide bandgap collector structure for bipolar transistors
11/04/1997US5684304 Structure for testing integrated circuits
11/04/1997US5683947 Method for producing a component according to the anodic bonding method and component
11/04/1997US5683946 Semiconductors
11/04/1997US5683945 Uniform trench fill recess by means of isotropic etching
11/04/1997US5683943 Process for etching a semiconductor lead frame
11/04/1997US5683942 Method for manufacturing bump leaded film carrier type semiconductor device
11/04/1997US5683941 Self-aligned polycide process that utilizes a planarized layer of material to expose polysilicon structures to a subsequently deposited metal layer that is reacted to form the metal silicide
11/04/1997US5683940 Method of depositing a reflow SiO2 film
11/04/1997US5683939 Diamond insulator devices and method of fabrication
11/04/1997US5683938 Method for filling contact holes with metal by two-step deposition
11/04/1997US5683937 Electrodes
11/04/1997US5683936 Reactive ion etched assisted gold post process
11/04/1997US5683935 Method of growing semiconductor crystal
11/04/1997US5683934 Enhanced mobility MOSFET device and method
11/04/1997US5683933 Method of fabricating a semiconductor device
11/04/1997US5683932 Method of fabricating a planarized trench and field oxide isolation structure
11/04/1997US5683931 Method of forming a capacitor over a semiconductor substrate
11/04/1997US5683930 SRAM cell employing substantially vertically elongated pull-up resistors and methods of making, and resistor constructions and methods of making
11/04/1997US5683929 Method of manufacturing a semiconductor device having a capacitor
11/04/1997US5683927 Method of forming CMOS integrated circuitry
11/04/1997US5683925 Manufacturing method for ROM array with minimal band-to-band tunneling
11/04/1997US5683924 Method of forming raised source/drain regions in a integrated circuit
11/04/1997US5683923 Semiconductor memory device capable of electrically erasing and writing information and a manufacturing method of the same
11/04/1997US5683922 Method of fabricating a self-aligned contact
11/04/1997US5683921 Semiconductor device and method of manufacturing the same
11/04/1997US5683920 Shallow junction
11/04/1997US5683919 Transistor and circuit incorporating same
11/04/1997US5683918 Method of making semiconductor-on-insulator device with closed-gate electrode
11/04/1997US5683917 Method of making a low noise semiconductor device comprising a screening measurement
11/04/1997US5683908 Method of fabricating trench isolation structure having tapered opening
11/04/1997US5683857 Method for forming resist pattern by irradiating a resist coating on a substrate, contacting the resist with organic solvent vapor and removing the irradiated portion
11/04/1997US5683851 Thymol or isothymol phenolic resin, naphthoquinonediazidesulfonate, low molecular weight phenolic polyhydroxide
11/04/1997US5683791 Copper wire
11/04/1997US5683790 Resonators, filters
11/04/1997US5683758 Apertures in substrates of barium titanate formed by beams of light and forming a coating on the substrate
11/04/1997US5683614 Sol-gel type synthesis of Bi2 (Sr,Ta2)O9 using an acetate based system
11/04/1997US5683596 Method for etching compound solid state material
11/04/1997US5683595 Fine pattern forming method and fine pattern device
11/04/1997US5683594 Method for making diaphragm-based sensors and apparatus constructed therewith
11/04/1997US5683591 Process for producing surface micromechanical structures
11/04/1997US5683561 Apparatus and method for high throughput sputtering
11/04/1997US5683558 Anode structure for magnetron sputtering systems
11/04/1997US5683548 Inductively coupled plasma reactor and process
11/04/1997US5683547 Etching with a focused energy beam
11/04/1997US5683546 Masking layers of air bridge patterns, generating isotropic defects in silicon substrates, ions and anisotropic etching
11/04/1997US5683539 Inductively coupled RF plasma reactor with floating coil antenna for reduced capacitive coupling
11/04/1997US5683538 Control of etch selectivity
11/04/1997US5683535 Method and apparatus of producing cavities in LTCC substrates
11/04/1997US5683529 Process of producing aluminum nitride multiple-layer circuit board
11/04/1997US5683518 Rapid thermal processing apparatus for processing semiconductor wafers
11/04/1997US5683517 Plasma reactor with programmable reactant gas distribution
11/04/1997US5683516 Single body injector and method for delivering gases to a surface
11/04/1997US5683515 Apparatus for manufacturing a semiconductor device having conductive then films
11/04/1997US5683513 Process and apparatus for manufacturing MOS device
11/04/1997US5683504 Growth of silicon single crystal
11/04/1997US5683173 Cooling chamber for a rapid thermal heating apparatus
11/04/1997US5683075 Trench isolation stress relief
11/04/1997US5683028 Silicon joint
11/04/1997US5683026 Pressure-bonding unit and pressure-bonding head unit
11/04/1997US5682913 Vapor rinse-vapor dry processing tool
11/04/1997US5682673 Method for forming encapsulated IC packages
11/04/1997CA2125465C Method of making integrated circuits
11/02/1997CA2204226A1 Improved low profile mounting of electronic components
11/01/1997CA2201686A1 Gas injector for plasma enhanced chemical vapor deposition
11/01/1997CA2198305A1 Integrated circuit bonding method and apparatus
10/1997
10/30/1997WO1997040651A1 Grid array assembly and method of making
10/30/1997WO1997040650A1 Method and apparatus for generating x-ray or euv radiation
10/30/1997WO1997040534A1 Reduction of trapping effects in charge transfer devices
10/30/1997WO1997040533A1 Insulating film for use in semiconductor device
10/30/1997WO1997040530A1 Solder bump apparatus, electronic component and method for forming a solder bump
10/30/1997WO1997040529A1 Process for producing a ceramic multilayer substrate
10/30/1997WO1997040528A1 Semiconductor device
10/30/1997WO1997040527A1 Process for producing a doped area in a semiconductor substrate
10/30/1997WO1997040526A1 An image reversal technique for forming small structures in integrated circuits
10/30/1997WO1997040525A1 Chemical-mechanical planarization apparatus and method
10/30/1997WO1997040524A1 Device for treating substrates in a fluid container
10/30/1997WO1997040523A1 Device and process for treating substrates in a fluid container
10/30/1997WO1997040522A1 Device and process for treating substrates in a fluid container
10/30/1997WO1997040500A1 Semiconductor memory
10/30/1997WO1997040444A1 Layout for a semiconductor memory device having redundant elements
10/30/1997WO1997040423A2 Cleaning and stripping of photoresist from surfaces of semiconductor wafers
10/30/1997WO1997039873A1 Improvement in injection molding apparatus
10/30/1997WO1997039870A1 Injection molding apparatus and method
10/30/1997WO1997039840A1 Device for treatment of substrates in a fluid container
10/30/1997DE19715911A1 Asymmetric resistance circuit for overload current disposal
10/30/1997DE19715194A1 Semiconductor device production for producing angular velocity sensors
10/30/1997DE19714690A1 Flüssigkristallanzeige und Herstellungsverfahren dafür Liquid crystal display and manufacturing method thereof
10/30/1997DE19714544A1 Dry-electrolyte capacitor mounting method for printed circuit board
10/30/1997DE19713807A1 Efficient semiconductor device production by CVD
10/30/1997DE19712796A1 Epitaxial silicon carbide wafer with conductivity correction
10/30/1997DE19711961A1 Electrode manufacturing method for semiconductor component, e.g. FET
10/30/1997DE19711729A1 Horizontal field effect transistor
10/30/1997DE19711326A1 IGBT circuit with current limiting circuit
10/30/1997DE19710731A1 Power semiconductor component, e.g. latch-up effect MOSFET or IGBT
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