Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1998
12/09/1998EP0883030A2 Lithography information control system
12/09/1998EP0883029A1 Exposure apparatus
12/09/1998EP0882976A1 Multiple angle spectroscopic analyzer
12/09/1998EP0882813A1 High-purity copper sputtering targets and thin films
12/09/1998EP0882812A1 Method of manufacturing member for thin-film formation apparatus and the member for the apparatus
12/09/1998EP0882689A2 Aluminum nitride based composite body, electronic functional material, electrostatic chuck and method of producing aluminum nitride based composition body
12/09/1998EP0882550A2 Polisher with a vibration detection system
12/09/1998EP0882308A2 Optimizing the power connection between chip and circuit board for a power switch
12/09/1998EP0882289A1 Lateral magneto-electronic device exploiting a quasi-two-dimensional electron gas
12/09/1998EP0868543A4 Improved polishing slurries and methods for their use
12/09/1998EP0733283B1 A protected switch
12/09/1998EP0721665B1 Semiconductor component with high breakdown voltage
12/09/1998EP0650608B1 Positive-acting radiation-sensitive mixture and recording material produced therewith
12/09/1998EP0606355B1 Method and compositions for diffusion patterning
12/09/1998EP0597124B1 Method of fabricating a semiconductor nonvolatile storage device
12/09/1998EP0568015B1 Dynamic random access memory device with intermediate voltage generator interrupting power supply in test operation
12/09/1998CN1201264A Semiconductor device and mfg. method therefor
12/09/1998CN1201263A Semiconductor device and mfg. method therefor
12/09/1998CN1201262A Passive element circuit
12/09/1998CN1201261A Hybrid analog-to-digital integrated circuit and mfg. method therefor
12/09/1998CN1201260A Grid unit of turn-off SCR for hard exciting grating
12/09/1998CN1201259A 半导体器件 Semiconductor devices
12/09/1998CN1201258A Semiconductor device without leakage current in relative state and mfg. method therefor
12/09/1998CN1201256A Composite material for semiconductor radiator and producing method therefor
12/09/1998CN1201253A Semiconductor integrated-circuit device
12/09/1998CN1201252A Capacitor and production technology thereof
12/09/1998CN1201251A Method for producing semiconductor device
12/09/1998CN1201250A Method for producing semiconductor device having capacitor
12/09/1998CN1201240A Non-volatile semiconductor storage
12/09/1998CN1201165A Electronic beam exposure method using moving platform
12/09/1998CN1201149A Semiconductor integrated circuit device having exact self-diagnosis function
12/09/1998CN1201083A Chip sawing machine
12/09/1998CN1201081A Method for preparing gallium nitride crystal
12/09/1998CN1041150C Large ceramic article and method of mfg. Same
12/09/1998CN1041149C Known good die array and mfg. method thereof
12/09/1998CN1041148C Method and apparatus for mfg. of semiconductor device
12/09/1998CN1041119C SOI integrated circuit chip material containing diamond film and making technology
12/08/1998US5848315 Development monitoring apparatus and method adopting the same
12/08/1998US5848120 X-ray mask blank, X-ray mask and pattern transfer method
12/08/1998US5848119 Illumination system and exposure apparatus having the same
12/08/1998US5848080 Short pulsewidth high pulse repetition frequency laser
12/08/1998US5847996 Eeprom with split gate source side injection
12/08/1998US5847988 ROM storage cell and method of fabrication
12/08/1998US5847986 In an integrated circuit
12/08/1998US5847974 Measuring method and apparatus for measuring system having measurement error changeable with time
12/08/1998US5847973 Oxidation simulation method
12/08/1998US5847959 Method and apparatus for run-time correction of proximity effects in pattern generation
12/08/1998US5847929 Attaching heat sinks directly to flip chips and ceramic chip carriers
12/08/1998US5847918 Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors
12/08/1998US5847813 Mask holder for microlithography exposure
12/08/1998US5847782 Method for packaging a liquid crystal panel and a liquid crystal panel package
12/08/1998US5847757 Method of driving solid-state image sensing device
12/08/1998US5847746 Projection exposure apparatus including a condenser optical system for imaging a secondary light source at positions different in an optical axis direction with respect to two crossing planes
12/08/1998US5847634 Article comprising an inductive element with a magnetic thin film
12/08/1998US5847597 Potential detecting circuit for determining whether a detected potential has reached a prescribed level, and a semiconductor integrated circuit including the same
12/08/1998US5847596 Internal voltage generator
12/08/1998US5847571 Membrane probing of circuits
12/08/1998US5847529 Robot protection system
12/08/1998US5847488 Apparatus having drive device using electromechanical transducer
12/08/1998US5847468 Alignment mark for use in making semiconductor devices
12/08/1998US5847466 Semiconductor device and manufacturing method for the same
12/08/1998US5847465 Contacts for semiconductor devices
12/08/1998US5847464 Method for forming controlled voids in interlevel dielectric
12/08/1998US5847463 Local interconnect comprising titanium nitride barrier layer
12/08/1998US5847462 Integrated circuit having conductors of enhanced cross-sectional area with etch stop barrier layer
12/08/1998US5847461 Integrated circuit structure having contact openings and vias filled by self-extrusion of overlying metal layer
12/08/1998US5847460 Submicron contacts and vias in an integrated circuit
12/08/1998US5847459 Multi-level wiring using refractory metal
12/08/1998US5847458 Semiconductor package and device having heads coupled with insulating material
12/08/1998US5847456 Semiconductor device
12/08/1998US5847454 Electrically isolated released microstructures
12/08/1998US5847449 Semiconductor device
12/08/1998US5847448 Method and device for interconnecting integrated circuits in three dimensions
12/08/1998US5847444 Semiconductor device with reduced aspect ratio contact hole
12/08/1998US5847443 Porous dielectric material with improved pore surface properties for electronics applications
12/08/1998US5847440 Bipolar transistor, semiconductor device having bipolar transistors
12/08/1998US5847439 Integrated circuit having a void between adjacent conductive lines
12/08/1998US5847438 Semiconductor device
12/08/1998US5847434 Semiconductor integrated circuit device and process for manufacturing the same
12/08/1998US5847433 Integrated switching circuit with CMOS circuit and method for producing isolated active regions of a CMOS circuit
12/08/1998US5847432 Semiconductor device and production method therefor
12/08/1998US5847431 Reduced capacitance transistor with electro-static discharge protection structure
12/08/1998US5847430 Input protection circuit for semiconductor device
12/08/1998US5847428 Integrated circuit gate conductor which uses layered spacers to produce a graded junction
12/08/1998US5847427 Non-volatile semiconductor memory device utilizing an oxidation suppressing substance to prevent the formation of bird's breaks
12/08/1998US5847426 Contactless flash EPROM using poly silicon isolation
12/08/1998US5847425 Dense vertical programmable read only memory cell structures and processes for making them
12/08/1998US5847424 Capacitor of semiconductor memory device and manufacturing method thereof
12/08/1998US5847423 Semiconductor device having a thin film capacitor and a resistance measuring element
12/08/1998US5847421 Logic cell having efficient optical proximity effect correction
12/08/1998US5847420 Semiconductor integrated circuit having three wiring layers
12/08/1998US5847417 Semiconductor device and method of manufacturing same
12/08/1998US5847415 Photosemiconductor device
12/08/1998US5847413 Differential amplifier circuit and analog buffer
12/08/1998US5847412 Semiconductor device and a method for manufacturing the same
12/08/1998US5847411 Semiconductor device having a channel region including a vacancy-introduced polysilicon layer
12/08/1998US5847409 Semiconductor device with superlattice-structured graded buffer layer and fabrication method thereof
12/08/1998US5847406 For sending data from a database to a computer output device
12/08/1998US5847402 Charged particle beam pattern transfer apparatus and method
12/08/1998US5847399 Deflection system
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