Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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12/16/1998 | EP0884407A1 Method and apparatus for producing thin films using colliding currents of process gas and inert gas |
12/16/1998 | EP0884406A1 Furnace sidewall temperature control system |
12/16/1998 | EP0884401A1 Method and system for coating the inside of a processing chamber |
12/16/1998 | EP0884136A1 Polishing method and polishing apparatus using the same |
12/16/1998 | EP0883979A1 Method and device for receiving, orientating and assembling of components |
12/16/1998 | EP0883899A1 Process for determining the crystal orientation in a wafer |
12/16/1998 | EP0883892A1 Vacuum compatible linear motion device |
12/16/1998 | EP0883891A2 Method of operating a particle-optical apparatus |
12/16/1998 | EP0883699A1 Method and devices for the electrolytic formation of a deposit on an assembly of selected electrodes |
12/16/1998 | EP0883467A1 Substrate transport apparatus with double substrate holders |
12/16/1998 | EP0852897A4 Method for surface mounting a heatsink to a printed circuit board |
12/16/1998 | EP0817973B1 Interface apparatus for automatic test equipment |
12/16/1998 | EP0786150B1 Method for producing high efficiency light-emitting diodes |
12/16/1998 | EP0766908B1 Method and device for coating printed-circuit boards, in particular for the manufacture of multi-chip-modules |
12/16/1998 | EP0748520B1 Silicon carbide-based mis structure with high latch-up resistance |
12/16/1998 | EP0673545B1 Process and apparatus for etching semiconductor wafers |
12/16/1998 | EP0653103A4 Dose modulation and pixel deflection for raster scan lithography. |
12/16/1998 | EP0646288B1 Single polysilicon layer flash e?2 prom cell |
12/16/1998 | CN1202277A Silicide agglomeration fuse device |
12/16/1998 | CN1202275A Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors |
12/16/1998 | CN1202274A Wafer-cleaning solution and process for production thereof |
12/16/1998 | CN1202273A Improved interface between titanium and aluminum-alloy in metal stack for integrated circuit |
12/16/1998 | CN1202013A Read only memory structure and manufacture thereof |
12/16/1998 | CN1202012A Vertical transistor |
12/16/1998 | CN1202011A Ferroelectric memory |
12/16/1998 | CN1202009A Semiconductor device having lead terminals bent in J-shape |
12/16/1998 | CN1202008A Lead frame and method for manufacturing the same |
12/16/1998 | CN1202007A Film carrier type, integrated circuit device and method of making same and electronic device |
12/16/1998 | CN1202006A Semiconductor integrated circuit device and method for making the same |
12/16/1998 | CN1202005A Method for manufacturing semiconductor device |
12/16/1998 | CN1202004A Integrated circuit fabrication method |
12/16/1998 | CN1202003A Method for manufacturing semiconductor memory device for preventing bit line oxidation and semiconductor memory device |
12/16/1998 | CN1202002A Inspection pattern and method for semiconductor device |
12/16/1998 | CN1202001A Method for making MIS transistor |
12/16/1998 | CN1202000A Method and apparatus for treating semiconductor wafer |
12/16/1998 | CN1201999A Method of fabricating semiconductor device for preventing rising-up of siliside |
12/16/1998 | CN1201998A Group III-V compound semiconductor wafer |
12/16/1998 | CN1201985A High read speed multivalued read only memory device |
12/16/1998 | CN1201908A Circuit verification process for semiconductor devices |
12/16/1998 | CN1201897A Drying treatment method and apparatus using same |
12/16/1998 | CN1201870A Dual-walled exhaust tubing for vacuum pump |
12/16/1998 | CN1041254C Three dimension semiconductor device |
12/16/1998 | CN1041253C Probe-type test handler, IC test method using the same and IC components |
12/16/1998 | CN1041243C Top anti-reflective coating film and method for making patterns on substrate |
12/16/1998 | CA2240564A1 Positive photoresist composition |
12/15/1998 | US5850467 Image data inspecting method and apparatus providing for equal sizing of first and second image data to be compared |
12/15/1998 | US5850404 Fault block detecting system using abnormal current |
12/15/1998 | US5850364 Static semiconductor memory device with precharging circuits having similar configuration of memory cells |
12/15/1998 | US5850362 Semiconductor memory device employing an improved layout of sense amplifiers |
12/15/1998 | US5850360 High-voltage N-channel MOS transistor and associated manufacturing process |
12/15/1998 | US5850356 Simulation apparatus for optimizing sputtering apparatus and simulation method therefor |
12/15/1998 | US5850350 Apparatus for determining initial array of integrated circuit |
12/15/1998 | US5850300 Diffractive beam homogenizer having free-form fringes |
12/15/1998 | US5850291 Projection exposure apparatus and method for controlling a stage on the basis of a value corrected by ABBE error |
12/15/1998 | US5850288 Method for manufacturing a semiconductor device |
12/15/1998 | US5850279 Alignment method, projection exposure method, and projection exposure apparatus |
12/15/1998 | US5850155 BIMOS logic circuit directly controllable by a CMOS block formed on same IC chip |
12/15/1998 | US5850149 Evaluation method for semiconductor devices |
12/15/1998 | US5850148 Vertical probe card apparatus with macro-tension module having notched-shaped needle for self-balancing contact |
12/15/1998 | US5850102 Semiconductor device having a second insulating layer which includes carbon or fluorine at a density lower than a first insulating layer |
12/15/1998 | US5850101 Bipolar transistor with extended emitter |
12/15/1998 | US5850099 Thermally uniform transistor |
12/15/1998 | US5850098 Uncooled amorphous YBaCuO thin film infrared detector |
12/15/1998 | US5850096 Enhanced semiconductor integrated circuit device with a memory array and a peripheral circuit |
12/15/1998 | US5850094 Semiconductor device |
12/15/1998 | US5850092 Integrated circuit |
12/15/1998 | US5850091 Semiconductor memory device and method of reading a data therefrom |
12/15/1998 | US5850089 Modulated-structure of PZT/PT ferroelectric thin films for non-volatile random access memories |
12/15/1998 | US5850088 Teg for carrier lifetime evaluation |
12/15/1998 | US5850083 Charged particle beam lithograph apparatus |
12/15/1998 | US5850071 Substrate heating equipment for use in a semiconductor fabricating apparatus |
12/15/1998 | US5849809 Hydroxyalkylated high performance curable polymers |
12/15/1998 | US5849808 Organic solvent soluble photoresists which are developable in aqueous alkaline solutions |
12/15/1998 | US5849644 Semiconductor processing methods of chemical vapor depositing SiO2 on a substrate |
12/15/1998 | US5849643 Gate oxidation technique for deep sub quarter micron transistors |
12/15/1998 | US5849642 Method of fabricating specimen for exposing defects of a semiconductor device for observation and analysis |
12/15/1998 | US5849641 Methods and apparatus for etching a conductive layer to improve yield |
12/15/1998 | US5849640 In-situ SOG etchback and deposition for IMD process |
12/15/1998 | US5849639 Method for removing etching residues and contaminants |
12/15/1998 | US5849638 Deep trench with enhanced sidewall surface area |
12/15/1998 | US5849637 Integration of spin-on gap filling dielectric with W-plug without outgassing |
12/15/1998 | US5849636 Method for fabricating a semiconductor wafer |
12/15/1998 | US5849635 Semiconductor processing method of forming an insulating dielectric layer and a contact opening therein |
12/15/1998 | US5849634 Method of forming silicide film on silicon with oxygen concentration below 1018 /cm3 |
12/15/1998 | US5849633 Electrically conductive projections and semiconductor processing method of forming same |
12/15/1998 | US5849632 Method of passivating semiconductor wafers |
12/15/1998 | US5849631 Method of manufacturing semiconductor device |
12/15/1998 | US5849630 Process for forming ohmic contact for III-V semiconductor devices |
12/15/1998 | US5849629 Method of forming a low stress polycide conductors on a semiconductor chip |
12/15/1998 | US5849628 Method of producing rough polysilicon by the use of pulsed plasma chemical vapor deposition and products produced by same |
12/15/1998 | US5849627 Bonded wafer processing with oxidative bonding |
12/15/1998 | US5849626 Method for forming isolation region of semiconductor device |
12/15/1998 | US5849625 Planar field oxide isolation process for semiconductor integrated circuit devices using liquid phase deposition |
12/15/1998 | US5849624 Method of fabricating a bottom electrode with rounded corners for an integrated memory cell capacitor |
12/15/1998 | US5849622 Method of forming a source implant at a contact masking step of a process flow |
12/15/1998 | US5849621 Method and structure for isolating semiconductor devices after transistor formation |
12/15/1998 | US5849620 Method for producing a semiconductor device comprising an implantation step |
12/15/1998 | US5849619 Method for formation of capacitors |
12/15/1998 | US5849618 Method for fabricating capacitor of semiconductor device |
12/15/1998 | US5849617 Method for fabricating a nested capacitor |