Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1998
12/16/1998EP0884407A1 Method and apparatus for producing thin films using colliding currents of process gas and inert gas
12/16/1998EP0884406A1 Furnace sidewall temperature control system
12/16/1998EP0884401A1 Method and system for coating the inside of a processing chamber
12/16/1998EP0884136A1 Polishing method and polishing apparatus using the same
12/16/1998EP0883979A1 Method and device for receiving, orientating and assembling of components
12/16/1998EP0883899A1 Process for determining the crystal orientation in a wafer
12/16/1998EP0883892A1 Vacuum compatible linear motion device
12/16/1998EP0883891A2 Method of operating a particle-optical apparatus
12/16/1998EP0883699A1 Method and devices for the electrolytic formation of a deposit on an assembly of selected electrodes
12/16/1998EP0883467A1 Substrate transport apparatus with double substrate holders
12/16/1998EP0852897A4 Method for surface mounting a heatsink to a printed circuit board
12/16/1998EP0817973B1 Interface apparatus for automatic test equipment
12/16/1998EP0786150B1 Method for producing high efficiency light-emitting diodes
12/16/1998EP0766908B1 Method and device for coating printed-circuit boards, in particular for the manufacture of multi-chip-modules
12/16/1998EP0748520B1 Silicon carbide-based mis structure with high latch-up resistance
12/16/1998EP0673545B1 Process and apparatus for etching semiconductor wafers
12/16/1998EP0653103A4 Dose modulation and pixel deflection for raster scan lithography.
12/16/1998EP0646288B1 Single polysilicon layer flash e?2 prom cell
12/16/1998CN1202277A Silicide agglomeration fuse device
12/16/1998CN1202275A Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors
12/16/1998CN1202274A Wafer-cleaning solution and process for production thereof
12/16/1998CN1202273A Improved interface between titanium and aluminum-alloy in metal stack for integrated circuit
12/16/1998CN1202013A Read only memory structure and manufacture thereof
12/16/1998CN1202012A Vertical transistor
12/16/1998CN1202011A Ferroelectric memory
12/16/1998CN1202009A Semiconductor device having lead terminals bent in J-shape
12/16/1998CN1202008A Lead frame and method for manufacturing the same
12/16/1998CN1202007A Film carrier type, integrated circuit device and method of making same and electronic device
12/16/1998CN1202006A Semiconductor integrated circuit device and method for making the same
12/16/1998CN1202005A Method for manufacturing semiconductor device
12/16/1998CN1202004A Integrated circuit fabrication method
12/16/1998CN1202003A Method for manufacturing semiconductor memory device for preventing bit line oxidation and semiconductor memory device
12/16/1998CN1202002A Inspection pattern and method for semiconductor device
12/16/1998CN1202001A Method for making MIS transistor
12/16/1998CN1202000A Method and apparatus for treating semiconductor wafer
12/16/1998CN1201999A Method of fabricating semiconductor device for preventing rising-up of siliside
12/16/1998CN1201998A Group III-V compound semiconductor wafer
12/16/1998CN1201985A High read speed multivalued read only memory device
12/16/1998CN1201908A Circuit verification process for semiconductor devices
12/16/1998CN1201897A Drying treatment method and apparatus using same
12/16/1998CN1201870A Dual-walled exhaust tubing for vacuum pump
12/16/1998CN1041254C Three dimension semiconductor device
12/16/1998CN1041253C Probe-type test handler, IC test method using the same and IC components
12/16/1998CN1041243C Top anti-reflective coating film and method for making patterns on substrate
12/16/1998CA2240564A1 Positive photoresist composition
12/15/1998US5850467 Image data inspecting method and apparatus providing for equal sizing of first and second image data to be compared
12/15/1998US5850404 Fault block detecting system using abnormal current
12/15/1998US5850364 Static semiconductor memory device with precharging circuits having similar configuration of memory cells
12/15/1998US5850362 Semiconductor memory device employing an improved layout of sense amplifiers
12/15/1998US5850360 High-voltage N-channel MOS transistor and associated manufacturing process
12/15/1998US5850356 Simulation apparatus for optimizing sputtering apparatus and simulation method therefor
12/15/1998US5850350 Apparatus for determining initial array of integrated circuit
12/15/1998US5850300 Diffractive beam homogenizer having free-form fringes
12/15/1998US5850291 Projection exposure apparatus and method for controlling a stage on the basis of a value corrected by ABBE error
12/15/1998US5850288 Method for manufacturing a semiconductor device
12/15/1998US5850279 Alignment method, projection exposure method, and projection exposure apparatus
12/15/1998US5850155 BIMOS logic circuit directly controllable by a CMOS block formed on same IC chip
12/15/1998US5850149 Evaluation method for semiconductor devices
12/15/1998US5850148 Vertical probe card apparatus with macro-tension module having notched-shaped needle for self-balancing contact
12/15/1998US5850102 Semiconductor device having a second insulating layer which includes carbon or fluorine at a density lower than a first insulating layer
12/15/1998US5850101 Bipolar transistor with extended emitter
12/15/1998US5850099 Thermally uniform transistor
12/15/1998US5850098 Uncooled amorphous YBaCuO thin film infrared detector
12/15/1998US5850096 Enhanced semiconductor integrated circuit device with a memory array and a peripheral circuit
12/15/1998US5850094 Semiconductor device
12/15/1998US5850092 Integrated circuit
12/15/1998US5850091 Semiconductor memory device and method of reading a data therefrom
12/15/1998US5850089 Modulated-structure of PZT/PT ferroelectric thin films for non-volatile random access memories
12/15/1998US5850088 Teg for carrier lifetime evaluation
12/15/1998US5850083 Charged particle beam lithograph apparatus
12/15/1998US5850071 Substrate heating equipment for use in a semiconductor fabricating apparatus
12/15/1998US5849809 Hydroxyalkylated high performance curable polymers
12/15/1998US5849808 Organic solvent soluble photoresists which are developable in aqueous alkaline solutions
12/15/1998US5849644 Semiconductor processing methods of chemical vapor depositing SiO2 on a substrate
12/15/1998US5849643 Gate oxidation technique for deep sub quarter micron transistors
12/15/1998US5849642 Method of fabricating specimen for exposing defects of a semiconductor device for observation and analysis
12/15/1998US5849641 Methods and apparatus for etching a conductive layer to improve yield
12/15/1998US5849640 In-situ SOG etchback and deposition for IMD process
12/15/1998US5849639 Method for removing etching residues and contaminants
12/15/1998US5849638 Deep trench with enhanced sidewall surface area
12/15/1998US5849637 Integration of spin-on gap filling dielectric with W-plug without outgassing
12/15/1998US5849636 Method for fabricating a semiconductor wafer
12/15/1998US5849635 Semiconductor processing method of forming an insulating dielectric layer and a contact opening therein
12/15/1998US5849634 Method of forming silicide film on silicon with oxygen concentration below 1018 /cm3
12/15/1998US5849633 Electrically conductive projections and semiconductor processing method of forming same
12/15/1998US5849632 Method of passivating semiconductor wafers
12/15/1998US5849631 Method of manufacturing semiconductor device
12/15/1998US5849630 Process for forming ohmic contact for III-V semiconductor devices
12/15/1998US5849629 Method of forming a low stress polycide conductors on a semiconductor chip
12/15/1998US5849628 Method of producing rough polysilicon by the use of pulsed plasma chemical vapor deposition and products produced by same
12/15/1998US5849627 Bonded wafer processing with oxidative bonding
12/15/1998US5849626 Method for forming isolation region of semiconductor device
12/15/1998US5849625 Planar field oxide isolation process for semiconductor integrated circuit devices using liquid phase deposition
12/15/1998US5849624 Method of fabricating a bottom electrode with rounded corners for an integrated memory cell capacitor
12/15/1998US5849622 Method of forming a source implant at a contact masking step of a process flow
12/15/1998US5849621 Method and structure for isolating semiconductor devices after transistor formation
12/15/1998US5849620 Method for producing a semiconductor device comprising an implantation step
12/15/1998US5849619 Method for formation of capacitors
12/15/1998US5849618 Method for fabricating capacitor of semiconductor device
12/15/1998US5849617 Method for fabricating a nested capacitor