Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1998
12/24/1998DE19723387A1 Hydrogen ion beam etching process
12/23/1998WO1998058412A1 Silicon carbide static induction transistor structures
12/23/1998WO1998058409A1 Process for mounting semiconductor chip, process for manufacturing chip-on-chip structure, and process for manufacturing chip-on-board structure
12/23/1998WO1998058408A1 Soi substrate and process for preparing the same, and semiconductor device and process for preparing the same
12/23/1998WO1998058406A1 High aspect ratio gapfill by using hdp
12/23/1998WO1998058405A1 Deposition of dopant impurities and pulsed energy drive-in
12/23/1998WO1998058404A2 A substrate for high frequency integrated circuits
12/23/1998WO1998058403A1 Method and apparatus for chip placement
12/23/1998WO1998058402A1 Apparatus and method for automated cassette handling
12/23/1998WO1998058401A1 Tray storing and feeding apparatus
12/23/1998WO1998058400A2 Liquid etch endpoint detection and process metrology
12/23/1998WO1998058387A1 Xy table
12/23/1998WO1998058099A1 Method for producing coated workpieces, uses and installation for the method
12/23/1998WO1998058096A1 Liquid delivery system, heater apparatus for liquid delivery system, and vaporizer
12/23/1998WO1998057881A1 Overhead conveying device and overhead conveying vehicle
12/23/1998WO1998057872A1 Disk container
12/23/1998WO1998057774A1 Method and device for repairing defective soldered joints
12/23/1998WO1998057757A1 High efficiency photoresist coating
12/23/1998WO1998044330A3 Optical inspection module and method for detecting particles and defects on substrates in integrated process tools
12/23/1998WO1998043307A3 Soldering globule assembly device for bga components
12/23/1998WO1998043299A3 Sic semiconductor array with enhanced channel mobility
12/23/1998WO1998043186A3 Circuit simulation
12/23/1998EP0886381A1 Output logic setting circuit in semiconductor integrated circuit.
12/23/1998EP0886380A2 Zero current draw circuit for use during a bonding option
12/23/1998EP0886321A1 Threshold voltage adjusting method for a MIS device and charge detecting device
12/23/1998EP0886319A2 Method for making a thin film transistor
12/23/1998EP0886317A2 Dielectric device, Dielectric memory and method of fabricating the same
12/23/1998EP0886316A1 Protection of a logic device well comprising an integrated power MOS transistor
12/23/1998EP0886312A2 Ceramics joint structure and method of producing the same
12/23/1998EP0886311A1 Method for manufacturing semiconductor components
12/23/1998EP0886310A2 Methods for metal etching with reduced sidewall build up during integrated circuit manufacturing
12/23/1998EP0886309A1 Dry oxidation for LOCOS isolation process using an anti-oxidation mask having a layered pad oxide and a silicon nitride stack and semiconductor device employing the same
12/23/1998EP0886308A2 Plasma nitridation of a silicon oxide film
12/23/1998EP0886306A1 Low temperature adhesion bonding method for composite substrates
12/23/1998EP0886305A2 Method and apparatus for handling disc substrates, e.g. silicon wafers
12/23/1998EP0886304A2 Gripper for disc substrates
12/23/1998EP0886303A2 Apparatus for measuring pedestal temperature in a semiconductor wafer processing system
12/23/1998EP0886302A2 Reactor with a protective device for handling wafers
12/23/1998EP0886301A2 Cleaning and drying method and apparatus for objects to be processed
12/23/1998EP0886300A2 Apparatus and method of separating sample and substrate fabrication method
12/23/1998EP0886299A2 Sheet removing apparatus and method
12/23/1998EP0886298A2 Method and apparatus of removing a sample adsorbed by static electricity from the sample stage
12/23/1998EP0886279A2 Address decoder, simiconductor memory and semiconductor device
12/23/1998EP0886184A2 Vacuum assisted debris removal system
12/23/1998EP0886182A1 Positive photoresist composition
12/23/1998EP0886181A2 Micro structure and its manufacture method
12/23/1998EP0886152A1 Delocalisation of stitch errors in the writing of gratings
12/23/1998EP0885981A2 Process and apparatus for treating substrates by means of ions produced by low voltage arc discharge
12/23/1998EP0885858A2 Recrystallized silicon carbide sintered material and manufacturing method thereof
12/23/1998EP0885691A2 Polishing apparatus
12/23/1998EP0885683A1 Method and device for bonding solder balls to a substrate.
12/23/1998EP0885483A1 Push-pull power amplifier
12/23/1998EP0885460A1 Trenched dmos transistor with lightly doped tub
12/23/1998EP0885458A1 Method for making electrical connections
12/23/1998EP0885457A2 Method for making a circuit structure having a flip-mounted matrix of devices
12/23/1998EP0885455A1 Device for generating powerful microwave plasmas
12/23/1998EP0885409A2 Thermal treatment process of positive photoresist composition
12/23/1998EP0885407A1 Bottom antireflective coatings through refractive index modification by anomalous dispersion
12/23/1998EP0885406A1 Light-absorbing antireflective layers with improved performance due to refractive index optimization
12/23/1998EP0885405A1 Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
12/23/1998EP0885380A1 Real time/off line applications testing system
12/23/1998EP0885315A1 Misted precursor deposition apparatus and method with improved mist and mist flow
12/23/1998EP0826152A4 Method and apparatus for testing semiconductor dice
12/23/1998EP0763146B1 LOW TEMPERATURE PLASMA-ENHANCED FORMATION OF TiN FILMS
12/23/1998EP0696242B1 Articulated arm transfer device
12/23/1998EP0639293B1 Device for indexing magazine compartments and wafer-shaped objects in the compartments
12/23/1998EP0557079B1 Discretionary lithography for integrated circuits
12/23/1998CN1202982A Semiconductor storage device and process for manufacturing the same
12/23/1998CN1202981A Method for producing very small structural widths on a semiconductor substrate
12/23/1998CN1202980A Method in the manufacturing of a semiconductor device
12/23/1998CN1202972A Method of producing a digital signal processor
12/23/1998CN1202929A Apparatus and methods for active programmable matrix devices
12/23/1998CN1202866A Aligner for a substrate carrier
12/23/1998CN1202794A Circuit board with primary and secondary through holes
12/23/1998CN1202739A Semiconductor device
12/23/1998CN1202738A Structure of read-only memory and its producing method
12/23/1998CN1202737A 半导体器件 Semiconductor devices
12/23/1998CN1202736A SOI/bulk hybrid substrate and method of forming the same
12/23/1998CN1202734A Circuit for electrostatic discharge (ESD) protection
12/23/1998CN1202733A Protecting circuit for semiconductor circuit
12/23/1998CN1202732A Semiconductor device having wiring detour around step
12/23/1998CN1202729A Semiconductor device and method of manufacturing the same
12/23/1998CN1202728A Semiconductor device and method of manufacturing semiconductor device
12/23/1998CN1202727A Method of manufacturing semiconductor device
12/23/1998CN1202726A Method for producing semiconductor device
12/23/1998CN1202725A Lamp annealing device and lamp annealing method
12/23/1998CN1202724A Semiconductor cleaning apparatus
12/23/1998CN1202723A Method for manufacturing semiconductor device having metal silicide film
12/23/1998CN1202682A Liquid crystal panel subbstrate, liquid crystal panel and electronic apparatus using the same
12/23/1998CN1202405A Electrodeposition of low temperature, high conductivity, powder materials for electrically conductive paste formulations
12/23/1998CN1041366C Method for manufacturing photoelectric transducer
12/23/1998CN1041365C Method for producing raractor diode
12/23/1998CA2294306A1 Soi substrate and process for preparing the same, and semiconductor device and process for preparing the same
12/23/1998CA2294290A1 A substrate for high frequency integrated circuits
12/22/1998USRE36006 Metal selective polymer removal
12/22/1998US5852577 Electrically erasable and programmable read-only memory having a small unit for program and erase
12/22/1998US5852575 Apparatus and method for reading multi-level data stored in a semiconductor memory
12/22/1998US5852572 Small-sized static random access memory cell
12/22/1998US5852570 Semiconductor memory using select transistors coupled to sub-bitlines from different blocks
12/22/1998US5852518 Projection optical unit and projection exposure apparatus comprising the same
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