Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1998
12/22/1998US5851733 Photolithographic pattern generation
12/22/1998US5851730 Substrates coated with an antihalation layer that contains a resin binder comprising anthracene units
12/22/1998US5851728 Three-component chemical amplified photoresist composition
12/22/1998US5851727 Photosensitive polymers and photoresist compositions containing the same
12/22/1998US5851708 Method for fabricating phase shifting mask and a phase shifting mask
12/22/1998US5851707 Microlithography projection-exposure masks, and methods and apparatus employing same
12/22/1998US5851706 Phase shift masks including chromium oxide and alumina phase shifter patterns, and methods of manufacturing and using the same
12/22/1998US5851705 Method for manufacturing a self-aligned type out-rigger phase shift mask
12/22/1998US5851703 Photomask and pattern forming method employing the same
12/22/1998US5851702 Method for producing a photomask
12/22/1998US5851664 Semiconductor wafer processing adhesives and tapes
12/22/1998US5851641 Electrostatic chucking device
12/22/1998US5851616 Adhesive tape for electronic parts and liquid adhesive
12/22/1998US5851603 Method for making a plasma-enhanced chemical vapor deposited SiO2 Si3 N4 multilayer passivation layer for semiconductor applications
12/22/1998US5851602 Deposition of high quality conformal silicon oxide thin films for the manufacture of thin film transistors
12/22/1998US5851600 Plasma process method and apparatus
12/22/1998US5851581 Semiconductor device fabrication method for preventing tungsten from removing
12/22/1998US5851440 Semiconductor device and liquid crystal display apparatus using the same
12/22/1998US5851413 Gas delivery systems for particle beam processing
12/22/1998US5851367 Differential copper deposition on integrated circuit surfaces and method for same
12/22/1998US5851364 Method for forming aluminum contacts
12/22/1998US5851344 Ultrasonic wave assisted contact hole filling
12/22/1998US5851319 Method and apparatus for selectively annealing heterostructures using microwaves
12/22/1998US5851303 Method for removing metal surface contaminants from silicon
12/22/1998US5851302 Method for dry etching sidewall polymer
12/22/1998US5851299 Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions
12/22/1998US5851298 Susceptor structure for mounting processing object thereon
12/22/1998US5851296 Vacuum processing apparatus and method
12/22/1998US5851294 Gas injection system for semiconductor processing
12/22/1998US5851140 Semiconductor wafer polishing apparatus with a flexible carrier plate
12/22/1998US5851136 Apparatus for chemical mechanical polishing
12/22/1998US5851102 Device and method for positioning a notched wafer
12/22/1998US5851041 Wafer holder with spindle assembly and wafer holder actuator
12/22/1998US5850921 Container for storage disk
12/22/1998US5850841 Cleaning apparatus of semiconductor device
12/22/1998US5850683 For mounting a component on a printed circuit board
12/22/1998CA2154600C Mask protective device
12/22/1998CA2126479C Symmetrical multi-layer metal logic array with continuous substrate taps and extension portions for increased gate density
12/22/1998CA2097472C Method for the manufacture of large single crystals
12/20/1998CA2238072A1 Method and device for bonding solder balls to a substrate
12/19/1998CA2241125A1 Vacuum assisted debris removal system
12/17/1998WO1998057423A1 Method and system for locally annealing a microstructure formed on a substrate and device formed thereby
12/17/1998WO1998057418A1 Cover layer for a substrate support chuck and method of fabricating same
12/17/1998WO1998057380A1 Annealing of a crystalline perovskite ferroelectric cell and cells exhibiting improved barrier properties
12/17/1998WO1998057379A1 Lateral diffused mos transistor with trench source contact
12/17/1998WO1998057378A1 Latch-up free power mos-bipolar transistor
12/17/1998WO1998057377A1 A semiconductor device with a junction termination and a method for production thereof
12/17/1998WO1998057372A1 LATERALLY CRYSTALLIZED TFTs AND METHODS FOR MAKING LATERALLY CRYSTALLIZED TFTs
12/17/1998WO1998057371A1 Method and apparatus for improved retention of a semiconductor wafer within a semiconductor wafer processing system
12/17/1998WO1998057370A1 Flip-chip member, sheetlike sealing material, semiconductor device, and process for manufacturing the same
12/17/1998WO1998057368A1 Nitrogen liner beneath transistor source/drain regions to retard dopant diffusion
12/17/1998WO1998057367A1 Hyperfrequency transistor with quasi-aligned structure and method for making same
12/17/1998WO1998057366A1 Methods and compositions for post-etch layer stack treatment in semiconductor fabrication
12/17/1998WO1998057365A1 Treating substrates by producing and controlling a cryogenic aerosol
12/17/1998WO1998057361A1 Substrate for device manufacturing, process for manufacturing the substrate, and method of exposure using the substrate
12/17/1998WO1998057359A1 Method and apparatus for wafer detection
12/17/1998WO1998057358A1 Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool
12/17/1998WO1998057146A1 Method of evaluating semiconductor layer, method of manufacturing semiconductor device, and storage medium
12/17/1998WO1998056726A1 Methods for treating semiconductor wafers
12/17/1998WO1998056676A1 Cover-carrying thin sheet storage container
12/17/1998WO1998056542A1 Substrate transport drive system
12/17/1998WO1998056526A1 Sheet metal member, method of manufacturing same, and heat radiation plate
12/17/1998WO1998042008A3 Wafer pod loader and mass transfer system
12/17/1998WO1998035344A3 A nonvolatile memory structure
12/17/1998WO1998022541A3 Method for coating substrates
12/17/1998DE19826319A1 Optical arrangement for measuring profiles of wafers
12/17/1998DE19825753A1 Semiconductor module with first buried layer in substrate
12/17/1998DE19825745A1 Silicon single crystal Czochralski growth process
12/17/1998DE19821092A1 CMOS transistor production process
12/17/1998DE19816404A1 Deformable blank fastener for integrated circuit
12/17/1998DE19806804A1 Semiconductor image sensor production
12/17/1998DE19801558A1 Semiconductor wafer processing by film formation
12/17/1998DE19750896A1 Semiconductor module with first conductive layer
12/17/1998DE19748041A1 Device for measuring and regulating temperature of semiconducting plate
12/17/1998DE19724595A1 Structured metal layer production especially on MOS structure
12/17/1998CA2290370A1 Annealing of a crystalline perovskite ferroelectric cell and cells exhibiting improved barrier properties
12/17/1998CA2238625A1 Delocalisation of stitch errors in the writing of gratings
12/16/1998EP0884936A1 Method for manufacturing electronic circuit device
12/16/1998EP0884785A2 Trench capacitor dram cell with vertical transistor
12/16/1998EP0884784A1 Integrated CMOS circuit device and process for manufacturing therefor
12/16/1998EP0884780A2 Semiconductor device with an improved lead-chip adhesion structure and lead frame to be used therefor
12/16/1998EP0884779A2 Structure of bonding an inner lead to an electrode in a semiconductor device
12/16/1998EP0884778A2 Semiconductor chip and method of manufacturing the same
12/16/1998EP0884777A2 Method for manufacturing semiconductor memory device
12/16/1998EP0884776A2 Isolation structure for DRAM cell with trench capacitor
12/16/1998EP0884774A2 Method for manufacturing a semiconductor device with an isolation trench
12/16/1998EP0884773A2 Method of making an MIS transistor
12/16/1998EP0884772A2 Process for etching silicon wafers
12/16/1998EP0884771A2 Group III-V compound semiconductor wafer
12/16/1998EP0884770A1 Method of depositing a polycristalline material layer on a silicon substrate
12/16/1998EP0884769A1 Heat-treating boat for semiconductor wafer
12/16/1998EP0884768A2 Fine structure and fabricating method thereof
12/16/1998EP0884767A2 Method of epitaxy of gallium nitride on silicon substrates
12/16/1998EP0884766A2 Method of die bonding electronic component and die bonding apparatus therefor
12/16/1998EP0884765A2 Semiconductor process system, its control method, computer readable memory, and device manufacturing method
12/16/1998EP0884764A2 Cleaning and drying apparatus for objects to be processed
12/16/1998EP0884761A1 Sputtering apparatus with a rotating magnet array
12/16/1998EP0884760A2 Electron-beam excited plasma generator
12/16/1998EP0884680A1 ROM testing circuit
12/16/1998EP0884648A1 Radiation-sensitive resin composition
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